EP3007900A4 - Low-particle gas enclosure systems and methods - Google Patents
Low-particle gas enclosure systems and methods Download PDFInfo
- Publication number
- EP3007900A4 EP3007900A4 EP14810543.0A EP14810543A EP3007900A4 EP 3007900 A4 EP3007900 A4 EP 3007900A4 EP 14810543 A EP14810543 A EP 14810543A EP 3007900 A4 EP3007900 A4 EP 3007900A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- methods
- low
- gas enclosure
- particle gas
- enclosure systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/12—Guards, shields or dust excluders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17503—Ink cartridges
- B41J2/17506—Refilling of the cartridge
- B41J2/17509—Whilst mounted in the printer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/02—Framework
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/12—Guards, shields or dust excluders
- B41J29/13—Cases or covers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/377—Cooling or ventilating arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/15—Deposition of organic active material using liquid deposition, e.g. spin coating characterised by the solvent used
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/811—Controlling the atmosphere during processing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Ink Jet (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361833398P | 2013-06-10 | 2013-06-10 | |
US201361911934P | 2013-12-04 | 2013-12-04 | |
US201461925578P | 2014-01-09 | 2014-01-09 | |
US14/205,340 US9604245B2 (en) | 2008-06-13 | 2014-03-11 | Gas enclosure systems and methods utilizing an auxiliary enclosure |
US201461983417P | 2014-04-23 | 2014-04-23 | |
PCT/US2014/037722 WO2014200642A1 (en) | 2013-06-10 | 2014-05-12 | Low-particle gas enclosure systems and methods |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3007900A1 EP3007900A1 (en) | 2016-04-20 |
EP3007900A4 true EP3007900A4 (en) | 2017-05-10 |
Family
ID=52022653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14810543.0A Withdrawn EP3007900A4 (en) | 2013-06-10 | 2014-05-12 | Low-particle gas enclosure systems and methods |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3007900A4 (en) |
JP (5) | JP6378327B2 (en) |
KR (6) | KR20230065385A (en) |
CN (3) | CN108162606B (en) |
WO (1) | WO2014200642A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9505245B2 (en) | 2014-06-17 | 2016-11-29 | Kateeva, Inc. | Printing system assemblies and methods |
GB201510464D0 (en) * | 2015-06-15 | 2015-07-29 | Videojet Technologies Inc | Printer |
KR101857056B1 (en) * | 2016-10-31 | 2018-05-11 | 세메스 주식회사 | Apparatus for transferring using the integrated circuit device fabricating |
CN107908245B (en) * | 2017-11-15 | 2020-08-21 | 常州信息职业技术学院 | Computer case convenient to move |
CN109445038B (en) * | 2018-10-30 | 2023-10-03 | 广东硕泰智能装备有限公司 | Optical fiber head assembly production line |
KR102067697B1 (en) * | 2019-06-18 | 2020-01-17 | (주)고려기연 | Large sized oled enclosure box |
US11679602B2 (en) | 2019-07-10 | 2023-06-20 | Kateeva, Inc. | Substrate positioning for deposition machine |
CN111167667A (en) * | 2020-02-28 | 2020-05-19 | 张家港市欧微自动化研发有限公司 | Coating method based on coating machine |
CN111572182A (en) * | 2020-05-20 | 2020-08-25 | 安徽阜南县向发工艺品有限公司 | Surface printing device for wood floor processing and working method thereof |
US11780242B2 (en) | 2020-10-27 | 2023-10-10 | Kateeva, Inc. | Substrate positioning for deposition machine |
CN114453284A (en) * | 2020-11-10 | 2022-05-10 | 西安奕斯伟硅片技术有限公司 | Silicon wafer sorting machine |
KR102694798B1 (en) | 2021-11-25 | 2024-08-13 | (주)유니젯 | Inkjet Print Equipment |
Citations (5)
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US20040086631A1 (en) * | 2002-10-25 | 2004-05-06 | Yu-Kai Han | Ink jet printing device and method |
US20100201749A1 (en) * | 2008-06-13 | 2010-08-12 | Kateeva, Inc. | Method And Apparatus for Load-Locked Printing |
US20130004656A1 (en) * | 2011-07-01 | 2013-01-03 | Kateeva, Inc. | Apparatus and method to separate carrier liquid vapor from ink |
US20130040061A1 (en) * | 2011-08-09 | 2013-02-14 | Kateeva, Inc. | Face-down printing apparatus and method |
EP2973676A2 (en) * | 2013-03-13 | 2016-01-20 | Kateeva, Inc. | Gas enclosure systems and methods utilizing an auxiliary enclosure |
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US4226897A (en) * | 1977-12-05 | 1980-10-07 | Plasma Physics Corporation | Method of forming semiconducting materials and barriers |
JPS57135184A (en) * | 1981-02-17 | 1982-08-20 | Nippon Telegr & Teleph Corp <Ntt> | Printer |
JP3162313B2 (en) * | 1997-01-20 | 2001-04-25 | 工業技術院長 | Thin film manufacturing method and thin film manufacturing apparatus |
JP3460500B2 (en) * | 1997-03-14 | 2003-10-27 | 株式会社荏原製作所 | Gas cleaning apparatus, method for cleaning closed space using the same, and closed space |
JP2002093878A (en) * | 2000-09-12 | 2002-03-29 | Hitachi Kokusai Electric Inc | Semiconductor manufacturing apparatus |
JP2002359180A (en) * | 2001-06-01 | 2002-12-13 | Toshiba Corp | Gas circulation system |
FR2827682B1 (en) * | 2001-07-20 | 2004-04-02 | Gemplus Card Int | PRESSURE REGULATION BY TRANSFER OF A CALIBRATED GAS VOLUME |
JP3868280B2 (en) * | 2001-12-04 | 2007-01-17 | 株式会社美和製作所 | Organic electroluminescence device manufacturing equipment |
JP4066661B2 (en) * | 2002-01-23 | 2008-03-26 | セイコーエプソン株式会社 | Organic EL device manufacturing apparatus and droplet discharge apparatus |
JP3925257B2 (en) * | 2002-03-15 | 2007-06-06 | セイコーエプソン株式会社 | Connection line penetrating structure in airtight chamber, discharge device including the same, liquid crystal display device manufacturing method, organic EL device manufacturing method, electron emission device manufacturing method, PDP device manufacturing method, electrophoretic display device manufacturing Method, color filter manufacturing method, organic EL manufacturing method, spacer forming method, metal wiring forming method, lens forming method, resist forming method, and light diffuser forming method |
JP3979135B2 (en) * | 2002-03-20 | 2007-09-19 | セイコーエプソン株式会社 | Chamber device, electro-optical device and organic EL device including the same |
JP4225076B2 (en) | 2003-02-19 | 2009-02-18 | セイコーエプソン株式会社 | Droplet discharge device |
JP2004361493A (en) * | 2003-06-02 | 2004-12-24 | Seiko Epson Corp | Method and device for manufacturing color filter substrate, method and device for manufacturing electroluminescence substrate, method for manufacturing electrooptical device and method for manufacturing electronic equipment |
TWI225008B (en) * | 2003-12-31 | 2004-12-11 | Ritdisplay Corp | Ink-jet printing apparatus |
JP2005254038A (en) * | 2004-03-09 | 2005-09-22 | Neomax Co Ltd | Linear motor driving stage, manufacturing apparatus for functional thin film using it and z-axis linear motor |
JP4805555B2 (en) * | 2004-07-12 | 2011-11-02 | 株式会社東芝 | Coating apparatus and coating method |
US7556334B2 (en) * | 2004-11-04 | 2009-07-07 | Applied Materials, Inc. | Methods and apparatus for aligning print heads |
WO2006052919A1 (en) * | 2004-11-08 | 2006-05-18 | New Way Machine Components, Inc. | Non-contact porous air bearing and glass flattening device |
JP2009112889A (en) * | 2007-11-02 | 2009-05-28 | Nakan Corp | Liquid material applicator, liquid material application method and substrate using this method |
JP2010134315A (en) * | 2008-12-08 | 2010-06-17 | Seiko Epson Corp | Liquid discharge apparatus |
US20100188457A1 (en) * | 2009-01-05 | 2010-07-29 | Madigan Connor F | Method and apparatus for controlling the temperature of an electrically-heated discharge nozzle |
US20120056923A1 (en) * | 2009-01-05 | 2012-03-08 | Kateeva, Inc. | Control systems and methods for thermal-jet printing |
CN201446232U (en) * | 2009-07-10 | 2010-05-05 | 西北工业大学 | Inert atmosphere control device for enclosed circulating purification |
US8967772B2 (en) * | 2009-10-22 | 2015-03-03 | Memjet Technology Ltd. | Inkjet printhead having low-loss contact for thermal actuators |
JP5062339B2 (en) * | 2010-05-12 | 2012-10-31 | パナソニック株式会社 | Inkjet device |
US8414688B1 (en) * | 2011-06-15 | 2013-04-09 | Kla-Tencor Corporation | Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping |
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-
2014
- 2014-05-12 CN CN201810257998.1A patent/CN108162606B/en active Active
- 2014-05-12 JP JP2016519508A patent/JP6378327B2/en active Active
- 2014-05-12 CN CN201911241814.3A patent/CN110816072B/en active Active
- 2014-05-12 WO PCT/US2014/037722 patent/WO2014200642A1/en active Application Filing
- 2014-05-12 KR KR1020237015024A patent/KR20230065385A/en not_active Application Discontinuation
- 2014-05-12 CN CN201480045349.5A patent/CN105431294B/en active Active
- 2014-05-12 KR KR1020167000033A patent/KR101946694B1/en active IP Right Grant
- 2014-05-12 KR KR1020207027237A patent/KR102342098B1/en active IP Right Grant
- 2014-05-12 KR KR1020197003113A patent/KR20190014589A/en active Search and Examination
- 2014-05-12 EP EP14810543.0A patent/EP3007900A4/en not_active Withdrawn
- 2014-05-12 KR KR1020217041315A patent/KR20210156864A/en active Application Filing
- 2014-05-12 KR KR1020207013077A patent/KR102161419B1/en active IP Right Grant
-
2018
- 2018-07-26 JP JP2018140175A patent/JP6871203B2/en active Active
-
2020
- 2020-03-26 JP JP2020056162A patent/JP6986770B2/en active Active
-
2021
- 2021-11-22 JP JP2021189072A patent/JP7351543B2/en active Active
-
2023
- 2023-07-14 JP JP2023115599A patent/JP2023138525A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040086631A1 (en) * | 2002-10-25 | 2004-05-06 | Yu-Kai Han | Ink jet printing device and method |
US20100201749A1 (en) * | 2008-06-13 | 2010-08-12 | Kateeva, Inc. | Method And Apparatus for Load-Locked Printing |
US20130004656A1 (en) * | 2011-07-01 | 2013-01-03 | Kateeva, Inc. | Apparatus and method to separate carrier liquid vapor from ink |
US20130040061A1 (en) * | 2011-08-09 | 2013-02-14 | Kateeva, Inc. | Face-down printing apparatus and method |
EP2973676A2 (en) * | 2013-03-13 | 2016-01-20 | Kateeva, Inc. | Gas enclosure systems and methods utilizing an auxiliary enclosure |
Also Published As
Publication number | Publication date |
---|---|
KR20210156864A (en) | 2021-12-27 |
EP3007900A1 (en) | 2016-04-20 |
CN108162606A (en) | 2018-06-15 |
KR101946694B1 (en) | 2019-02-11 |
JP2016529649A (en) | 2016-09-23 |
KR102161419B1 (en) | 2020-09-29 |
KR20200053634A (en) | 2020-05-18 |
KR102342098B1 (en) | 2021-12-21 |
CN110816072B (en) | 2021-09-03 |
KR20200111834A (en) | 2020-09-29 |
JP6986770B2 (en) | 2021-12-22 |
JP2018206777A (en) | 2018-12-27 |
JP6378327B2 (en) | 2018-08-22 |
CN105431294A (en) | 2016-03-23 |
CN110816072A (en) | 2020-02-21 |
JP6871203B2 (en) | 2021-05-12 |
JP2020123574A (en) | 2020-08-13 |
CN108162606B (en) | 2020-03-31 |
JP2023138525A (en) | 2023-10-02 |
WO2014200642A1 (en) | 2014-12-18 |
KR20230065385A (en) | 2023-05-11 |
JP2022058335A (en) | 2022-04-12 |
JP7351543B2 (en) | 2023-09-27 |
KR20190014589A (en) | 2019-02-12 |
KR20160019485A (en) | 2016-02-19 |
CN105431294B (en) | 2018-04-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 20160111 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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AX | Request for extension of the european patent |
Extension state: BA ME |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: VRONSKY, ELIYAHU Inventor name: STEPANOV, ALEXEY Inventor name: MAUCK, JUSTIN Inventor name: ALDERSON, SHANDON Inventor name: KO, ALEXANDER SOU-KANG |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20170412 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: B05D 3/06 20060101ALI20170406BHEP Ipc: H01L 51/00 20060101ALI20170406BHEP Ipc: B41J 29/12 20060101ALI20170406BHEP Ipc: B41J 29/13 20060101ALI20170406BHEP Ipc: B41J 29/377 20060101ALI20170406BHEP Ipc: B41J 2/01 20060101AFI20170406BHEP Ipc: F24F 3/16 20060101ALI20170406BHEP Ipc: H01L 51/56 20060101ALI20170406BHEP |
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17Q | First examination report despatched |
Effective date: 20190520 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
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18W | Application withdrawn |
Effective date: 20190729 |