EP2995894B1 - Vertikal laufofen - Google Patents
Vertikal laufofen Download PDFInfo
- Publication number
- EP2995894B1 EP2995894B1 EP15002295.2A EP15002295A EP2995894B1 EP 2995894 B1 EP2995894 B1 EP 2995894B1 EP 15002295 A EP15002295 A EP 15002295A EP 2995894 B1 EP2995894 B1 EP 2995894B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- containers
- drawers
- thermal
- chamber
- stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/02—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated of multiple-chamber type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/12—Arrangement of devices for charging
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0068—Containers
Definitions
- the present invention relates to a furnace for carrying out the thermal treatment of various types of multiple materials, in a wide pressure range, from high vacuum to supra atmospheric pressure. More specifically, the present invention relates to a vertical continuous furnace, in which the parts to be treated are inserted and extracted sequentially from the furnace without interrupting furnace operation and without altering the working pressure of said thermal treatments.
- Vacuum furnaces and partial pressure for the great majority of cases, are furnaces of the type denominated "batch", here batches of workpieces are loaded and unloaded to the furnace after the interruption of the thermal treatment process and the switching off of the same furnace.
- the size and geometry determine a strong dissipation of energy.
- the thermal and pressure insulation of the pre-chambers and of the sealing valves between a chamber and the other, the presence conveyor belts, and several chambers in cascade for complex treatments, are critical factors to the energy efficiency of the process and weigh heavily on the cost of the system and of the thermal treatment. Furnaces such as those mentioned, do not allow to obtain locally differentiated vacuum and temperature levels, without introducing bulky communicating chambers via gate valves.
- T.A.V. S.P.A.-TECNOLOGIE ALTO VUOTO has set itself the problem of building a compact continuous oven, energy-efficient, with minimal heat and vacuum loss. It also set itself the aim of achieving thermal and vacuum zones differentiated and adjacent, so as to limit the sequential thermal treatments to a limited area.
- This concept has led to conceive the first vertical continuous furnace, having a handling and a geometry enabling the implementation of complex thermal treatments in a single compact chamber with multiple thermal zones, without the use of doors or gate valves between a thermal zone and the other or the presence of more thermal chambers in cascade and local areas at a differential vacuum system level. Furthermore, said concept has led to minimizing heat dissipation and loss of vacuum and to the elimination of the conveyor belts.
- Furnaces of vertical type are already present in the state of the art, such as that described by the patent JP2013024486 "Vertical type vacuum furnace for thermal treatment on metallic semi-finished product", but are not designed to work in continuous operation, that is, with the ability to upload and download the furnace continuously without interrupting the pressure treatment process and temperature of the workpieces loaded and unloaded according to a continuous cycle.
- a multi-chamber furnace comprising a plurality of vertically arranged treatment chambers is disclosed in US-A 2014/193 762 .
- This invention relates to a continuous furnace for thermal treatment as defined by the claims 1-10 on file.
- Said continuous furnace consists of:
- a first advantage of the furnace object of the invention compared to the state of the art in horizontal continuous furnaces, is related to its geometry, since the combination of said vertically symmetric cylindrical bell with said cooling duct in horizontal symmetry minimizes and maximizes thermal dissipation according to the stages of the cycle.
- the furnace bell is in vertical symmetry, and usually the objects to be treated are placed on a base with a dimension greater than the height, a geometry of the vertical cylinder is allowed to a section next to the square. It is well known that this symmetry minimizes the surface volume ratio, at an equal volume with respect to the cylindrical structure with a rectangular longitudinal section, typical of the state of the art continuous vacuum furnaces, and therefore minimizes heat loss.
- a second advantage of the present invention is the combination of adjoining chambers with alternated cylindrical symmetry and vertical symmetry. This structure decreases greatly the overall dimensions and isolates the gate valves and the movements of the adjacent chambers. Indeed, since the heat transfer occurs by radiation, the alternation of cylindrical chambers with an horizontal axis with cylindrical chambers with a vertical axis, the view factor decreases between a chamber and the adjacent one and consequently isolates them thermally.
- a third advantage of the present invention, still linked to its geometry, is the thrust based compact handling, which allows to avoid the employment of bulky and complex conveyor belts for the objects to be treated.
- the chambers pairwise adjacent and with orthogonal symmetry, allow the use of said pistons and thrust jacks which move the objects to be treated in queue separating them at the same time from the next input and output, allowing an easy handling and easy maintenance.
- a continuous furnace which alternates cylindrical chambers with differentiated geometry does not exist.
- the adjacent thermal zones for the thermal treatments are separated longitudinally by knife gate valves and insulation panels, with a great expenditure of complexity and surface, with a resulting lower heat dissipation and vacuum seal.
- a fourth advantage of the present invention is that the thermal zones for the heat treatments are all concentrated in the vertically symmetric cylindrical bell, in a compact manner, these using one or more resistors distributed in height.
- the insulation between a thermal zone and the adjacent one is obtained with an innovative positioning system for the workpieces to be treated that brings said containers or drawers to occupy the space between two adjacent thermal zones so as to constitute a thermal breaking element between them.
- the heat transfer occurs by radiation and the presence of said containers or drawers decreases the view factor between adjacent heating zones.
- the thermal chamber remains compact, minimizing dispersion and thus maximizing the efficiency of the heat treatment.
- the vertical movement within said cylindrical bell is used both to move said containers with the wokpieces to be treated, and to create a seal between the containers and said pumping system for the creation of a local vacuum inside.
- said pumping system for the creation of local vacuum draws the gas inside, in order to allow a thermal treatment with a differentiated pressure with respect to that present in the bell.
- This provides for heat treatments of extreme accuracy with a differential between partial pressure in the bell and the finely regulated local pressure of the workpieces to be treated.
- Said compact vertical geometry also provides for a minimization of pressure loss and a fast transfer of workpieces from a thermal zone to the adjacent one.
- Figure 1 shows an implementation form of a conventional continuous furnace, which implements a sintering thermal treatment.
- the bell (2) has a longitudinal cylindrical shape.
- the load (1) to be treated is moved through said conventional vacuum furnace via a conveyor belt system (3).
- said conventional vacuum furnace has two closing hatches (6) and a sequence of chambers for the thermal treatment.
- Said sequence consists of a load heating chamber (7), in which the load in the air is put in a vacuum after the closing of the knife gate valve (4).
- a heat chamber follows for a subsequent heat treatment, which in the implementation form of Figure 1 takes place in a "debinder" chamber (8), isolated in pressure by a further knife gate valve (4), by a sintering chamber (9).
- the overall heat treatment is carried out in sequence as a combination of the treatments of said chambers (8) and (9) isolated in pressure and thermally from each other.
- thermal chambers (8) and (9) are followed by an additional thermal chamber (10) for an aging thermal treatment, isolated by a further knife gate valve (4).
- the load (1) is cooled in the cooling chamber (11), by means of the cooling fan (5).
- the concept of the continuous furnace reported in figure 1 is a furnace with a predominant longitudinal dimension, in which the load (1) undergoes suitable thermal treatments in sequence, simultaneously in successive loads on a continuous production line.
- said conventional furnace is greatly lengthened, with the need for numerous knife gate valves (4) for the isolation in pressure between one stage and the next, and with the need of thermally insulating a chamber from the adjacent one.
- Figure 2 shows a front section of an implementation form of the vertical continuous furnace object of the invention.
- Said bell (2) has a cylindrical shape with a section close the square. It allows to minimize heat loss, as the surface / volume ratio is minimized.
- Said square shaped cylindrical shape is allowed by the vertical symmetry of the furnace object of the invention and an innovative system of multiple thermal zones close together, that exploits the loads to be treated in the queue for the thermal isolation of a thermal zone from the adjacent one.
- said containers (30) containing the objects to be treated are loaded by means of the conveyor (20) in said loading chamber (121) delimited by said first knife gate valve (41).
- the loading chamber (121) is closed and brought to a vacuum via a pump (142) and on the related suction pipe (152).
- the knife gate valve is opened (41) and the workpiece is pushed by the first piston (131) in the vicinity of said heating chamber (22) through the cylindrical duct in horizontal symmetry (181).
- the heating chamber (22) is, for this implementation, at a partial pressure of 150 mbar of nitrogen, injected through the duct (26), part of the system of valves and pipes for the insertion of partial pressure gas. Said partial pressure is ensured by the maintaining pump (143), which together with the pump (142) and relative suction pipes, form the pumping system for the creation of the vacuum.
- the containers (30) are thus pushed, by means of the second piston (132), with a thrust direction orthogonal to the first, in the heating chamber (22) located inside said vertically symmetric cylindrical bell (2).
- the containers (30) are then raised by two electro-mechanical jacks (134) in the thermal chamber (22).
- Said electro-mechanical jacks (134) are two, because in case one of them fails the load would still be supported by the second. They pass through the ball valves which are closed in case of maintenance.
- the containers (30) are then stopped in correspondence of three graphite resistors (23), supplied by the transformer (24) via the conductors (19).
- the graphite resistors (23) are the thermal chamber heating elements (22) and are positioned, in the present implementation, in three thermal zones transverse to the thermal chamber (22).
- the containers (30) pass through the three heating zones and land in contact with said pumping system for the creation of the vacuum locally, made by the pump (141) and the related suction pipe (151). There a local vacuum is produced in the containers (30) in order to achieve a thermal treatment in vacuum conditions differentiated compared to the 150 mbar of the thermal chamber (22).
- the containers (30) at the end of the thermal treatment are then pushed into the cooling duct with longitudinal cylindrical symmetry, the front circular cross-section of which is visible, via the third thrust piston (133).
- FIG 3 a front section of the vertical continuous furnace object of the present invention for a better understanding of the geometry.
- the containers (30) follow the path of the dotted arrow and stop in correspondence with the graphite resistors (23), stacked one above the other.
- said loading chamber (121), said discharge chamber (122), said input duct (181), said horizontally symmetrical cylindrical cooling duct (182), the first thermal insulation panel (161), the second thermal insulation panel (162) are better highlighted.
- the containers (30) are pushed up to the discharge chamber (122) by means of said thrust handling system which comprises the first piston (131), the second piston (132), the two jacks (134) and the third piston (133).
- Figure 4 shows a top view of the continuous furnace object of the invention, according to a preferred implementation form; In this you can see the path followed by the containers (30) from the loading chamber (121) through the input duct (181), closed from the first knife gate valve (41), up to the thermal chamber (22), driven by the pistons (131), (132) and (133). Furthermore it is easier to see the conformation of the graphite resistors (23) and the horizontally symmetrical cylindrical cooling duct (182), whose lengthened shape favours the dissipation and therefore the cooling phase of said containers (30). It ends with the discharge chamber (122), from which it is separated by the knife gate valve (42) and is thermally isolated from the thermal chamber (22) from said second thermal insulation panel (162).
- the fourth piston (135) with a direction orthogonal to the axis of the duct (182) serves to extract the single container (30) heading the row of containers (30).
- the gate valves (41) and (42) are geometrically thermally insulated from the resistors (23), the irradiation of which they do not perceive, since they are placed along axes orthogonal to the direction of the cooling duct axis (182).
- FIG. 5 shows a diagram of said thermal chamber (22), according to a first implementation form;
- this implementation form it is made of graphite and the containers (30) are placed inside the graphite drawers (31).
- This configuration has the advantage of being able to use simple containers (30), without the need of reinforcement to support the pressure of the stack of three containers (30) shown in Figure 5 , since the load-bearing function is entrusted to the drawers (31).
- the piston (131) inserts the drawers (31) in sequence over the two electro mechanical jack system (134), which reposition them vertically in the heating chamber (22) in correspondence of the resistors (23) where thermal treatment is carried out.
- the drawers (31) are stacked in sequence, as the continuous treatment process advances.
- the last drawer (31) on top of the stack is moved to the cooling duct (182), while the remaining drawers (31) move vertically one position.
- the four central drawers (31) are stacked one above the other and therefore the first of the four drawers must have sufficient mechanical strength to support the weight of the three upper drawers (31).
- the first and last tray (31) are rested on graphite guides (27) supported by a four piston system (13), which are moved away in presence of a vertical movement of the drawers (31).
- the implementation of figure 5 has three resistors (23), with a drawer (31) which is interposed between a resistor (23) and the adjacent one, thus making a shielding system to thermally isolate the areas in which the heat treatment takes place.
- Figure 6 shows a diagram of said thermal chamber (22), according to a second implementation form;
- the four pistons (13) are replaced by said four gravitational graphite shelves (32), resting on said shelves (28) bound to the thermal chamber (22).
- the shelves (32) are raised, when the drawers (31) are driven vertically up until the graphite backrest (33), to which, in this implementation, they are bound by means of a graphite cloth (34). Once driven by the drawer (31), they fall back into the original position due to the force of gravity.
- the advantages of the shelves (32) with respect to said pistons (13), are a minor mechanical complexity, the fact that they cost less, that they do not require an external control and the fact that they do not disperse heat to the outside.
- a top view is given of said shelves (32), in order to better show the geometry of the movement.
- Figure 7 shows a third implementation form of said thermal chamber (22); In it there are eight gravitational shelves (32) supporting each of said containers (30), this time without the related drawers (31). Said containers (30) must be suitably reinforced and shaped to support the vertical displacement mechanical stresses.
- the advantage of the implementation of figure 7 is that the containers (30) are not in thermal contact one with the other, this ensures a higher thermal insulation between the thermal treatments in correspondence of the resistors (23). This implementation is supported by the presence of the gravitational shelves (32), which not having the complexity and cost of the pistons (13), can be placed in large quantities in the thermal chamber.
- Figure 8 shows, related to the thermal chamber (22) said pumping system for the creation of the vacuum locally in the containers (30), comprised of the pump (141) and the related suction pipe (151).
- This innovative system allowed by the vertical symmetry of the bell (2), uses the vertical movement to create a pressure seal between the pumping system and the containers (30).
- the container (30) on top of the stack is brought into contact with the suction pipe (151) and the pump (141).
- Aspirating the gas contained in the containers (30) a level of vacuum is created within differentiated with respect to the medium vacuum level present in the thermal chamber (22).
- Figure 9 shows an implementation for said pump system for the creation of the vacuum locally in the containers (30), comprised of the pump (141) and the related suction pipe (151) according to a first implementation form.
- Said objects to be treated (1) are placed inside the containers (30), having the shape and mechanical strength such as to support an external pressure much higher than the internal pressure.
- the suction pipe (151) of the pump (14) is inserted in the sealed hole (301) set at the centre of said container. Therefore the thermal treatment, in the stage in which the container (30) is on top of the stack, is made in a local vacuum condition for the parts therein contained.
- Figure 10 shows a second implementation of said pump system for the creation of the vacuum locally in the containers (30), comprised of the pump (141) and the related suction pipe (151).
- the local vacuum inside the container (30) is created by means of the extractor hood (152) that is positioned outside said container (30).
- the advantage of the implementation shown in Figure 10 is the fact that the container (30) does not have to withstand external pressures higher than the internal pressure and therefore requires significantly lower mechanical strength properties, compared to the container (30) in figure 9 and thus can cost less.
Claims (10)
- Durchlaufofen für Wärmebehandlungen, beinhaltend eine Eingabekammer (121), ein zylindrisches Gehäuse (2) mit vertikaler Achse, eine Zufuhrröhre (181), die die Eingabekammer (121) mit dem zylindrischen Gehäuse (2) verbindet, eine Ausgabekammer (122), eine Kühlleitung (182), die das zylindrische Gehäuse (2) mit der Ausgabekammer (122) verbindet, eine im zylindrischen Gehäuse (2) befindliche Heizkammer (22), in welche kontinuierlich Werkstücke eingebracht werden (1) und wo eine Wärmebehandlung erfolgt, ohne dass das Druckniveau besagter Heizkammer (22) unterbrochen wird und zwar dank der Schieberventile (41) und (42) sowie der Verwendung der Eingabekammer (121) und der Ausgabekammer (122) als Ausgleichskammern, einen Satz Behälter (30), in welche besagte Werkstücke (1) einzubringen sind, einen Satz Schubkästen (31), in welche besagte Behälter (30) einzubringen sind, ein System (134) für die vertikale, stapelweise Positionierung besagter Schubkästen (31) oder Behälter (30) in besagter Heizkammer (22), einen oder mehrere Widerstände (23), die der Höhe nach entlang der Innenwand der Heizkammer (22) verteilt sind und die Wärmezonen begrenzen, ein Pumpsystem, um besagte Heizkammer (22) in einen Hochvakuumzustand zu versetzen, ein System aus Ventilen und Leitungen für die Zuführung von partialem Inertgasdruck mit den Atmosphärendruck unter- oder überschreitenden Werten, ein Pumpsystem für den Aufbau von lokalem Vakuum in besagten Behältern (30), ein Schubsystem zur Bewegung und Sortierung besagter Behälter (30) oder Schubkästen (31);
- Ofen nach Anspruch 1, gekennzeichnet durch eine zylindrische Zufuhrröhre (181) mit horizontaler Achse;
- Ofen nach Anspruch 1, gekennzeichnet durch eine zylindrische Kühlleitung (182) mit horizontaler Achse;
- Ofen nach Anspruch 1, gekennzeichnet durch das Vorhandensein von einem oder mehreren Schubkästen (31) oder Behältern (30) zwischen einer der besagten Wärmezonen und der benachbarten Wärmezone, als System zur vertikalen, stapelweisen Positionierung besagter Schubkästen (31) oder Behälter (30);
- Ofen nach Anspruch 1, gekennzeichnet durch das Vorhandensein eines Systems aus vier Kolben (13), auf weichen, unten am Stapel der in besagter Heizkammer (22) vorhandenen, besagten Schubkästen (31) oder Behälter (30) beginnend, der zweite und der letzte ruhen, als System zur vertikalen, stapelweisen Positionierung besagter Schubkästen (31) oder Behälter (30);
- Ofen nach Anspruch 1, gekennzeichnet durch das Vorhandensein eines Systems aus vier Schwerkraftablagen (32), auf weichen, unten am Stapel der in besagter Heizkammer (22) vorhandenen, besagten Schubkästen (31) oder Behälter (30) beginnend, der zweite und der letzte ruhen, als System zur vertikalen, stapelweisen Positionierung besagter Schubkästen (31) oder Behälter (30);
- Ofen nach Anspruch 1, gekennzeichnet durch das Vorhandensein eines Systems aus mehr als einer Schwerkraftablage (32), auf welcher alle besagten Schubkästen (31) oder Behälter (30) ruhen, als System zur vertikalen, stapelweisen Positionierung besagter Schubkästen (31) oder Behälter (30);
- Ofen nach den Ansprüchen 6 und 7, gekennzeichnet durch Graphit-Schwerkraftablagen (32), die über ein Graphit-Blech (34) mit einem Graphit-Rückenteil (33) verbunden sind;
- Ofen nach Anspruch 1, gekennzeichnet durch eine an eine Pumpe (141) angeschlossene Saugleitung (151), die in eine abgedichtete Öffnung (301) an besagtem Behälter (30) oben auf besagtem vertikalem Stapel eingebracht ist, als Pumpsystem für den Aufbau von lokalem Vakuum in besagten Behältern (30);
- Ofen nach Anspruch 1, gekennzeichnet durch eine Saughaube (152), welche besagten Behälter (30) oben auf besagtem vertikalem Stapel umfasst, als Pumpsystem für den Aufbau von lokalem Vakuum in besagten Behältern (30);
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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ITBG20140034 | 2014-08-07 |
Publications (2)
Publication Number | Publication Date |
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EP2995894A1 EP2995894A1 (de) | 2016-03-16 |
EP2995894B1 true EP2995894B1 (de) | 2018-07-18 |
Family
ID=51753279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP15002295.2A Not-in-force EP2995894B1 (de) | 2014-08-07 | 2015-08-01 | Vertikal laufofen |
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EP (1) | EP2995894B1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102017121830A1 (de) * | 2017-09-20 | 2019-03-21 | Ebner Industrieofenbau Gmbh | Portable Trägervorrichtung für eine Ofencharge und Handhabungssystem für die Trägervorrichtung |
DE102020129759A1 (de) * | 2020-11-11 | 2022-05-12 | Martin Schweikhart | Verfahren zu einem Betrieb einer Vakuumanlage sowie Vakuumanlage |
US11971216B1 (en) * | 2021-12-23 | 2024-04-30 | Rolls-Royce High Temperature Composites, Inc. | Retort with loading window |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4118016A (en) | 1976-10-12 | 1978-10-03 | C.I. Hayes Inc. | Continuous heat treating vacuum furnace |
JPS6047505B2 (ja) | 1980-12-23 | 1985-10-22 | 日本酸素株式会社 | 連続真空加熱炉 |
JPS57137417A (en) | 1981-02-17 | 1982-08-25 | Michio Sugiyama | Semicontinuous vacuum heat treatment furnace and operating method |
US6227848B1 (en) * | 1994-06-07 | 2001-05-08 | Imai Seisakusho Co., Ltd. | Vertical continuous oven |
JP4753294B2 (ja) * | 2005-11-04 | 2011-08-24 | 株式会社不二越 | 小形真空浸炭炉 |
DE102006020781B3 (de) * | 2006-05-03 | 2007-11-22 | Benteler Automobiltechnik Gmbh | Ofen |
ITRM20080316A1 (it) * | 2008-06-13 | 2009-12-14 | Luis Maria Antonello | "impianto e processo per la produzione di silicio policristallino per uso fotovoltaico" |
CA2705650A1 (en) * | 2010-05-27 | 2011-11-27 | Pyromaitre Inc. | Heat treatment furnace |
JP5496963B2 (ja) | 2011-07-22 | 2014-05-21 | Ipsen株式会社 | 金属半製品の熱処理のための縦型真空炉 |
JP6106501B2 (ja) * | 2013-04-12 | 2017-04-05 | 東京エレクトロン株式会社 | 収納容器内の雰囲気管理方法 |
-
2015
- 2015-08-01 EP EP15002295.2A patent/EP2995894B1/de not_active Not-in-force
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