EP2879836A4 - GRINDING ELEMENTS WITH SHAPED FEATURES, GRINDING PRODUCTS MANUFACTURED THEREFROM AND MANUFACTURING METHOD THEREFOR - Google Patents
GRINDING ELEMENTS WITH SHAPED FEATURES, GRINDING PRODUCTS MANUFACTURED THEREFROM AND MANUFACTURING METHOD THEREFORInfo
- Publication number
- EP2879836A4 EP2879836A4 EP13826255.5A EP13826255A EP2879836A4 EP 2879836 A4 EP2879836 A4 EP 2879836A4 EP 13826255 A EP13826255 A EP 13826255A EP 2879836 A4 EP2879836 A4 EP 2879836A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- grinding
- manufacturing
- method therefor
- products manufactured
- shaped features
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
- B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678665P | 2012-08-02 | 2012-08-02 | |
| PCT/US2013/052828 WO2014022462A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP2879836A1 EP2879836A1 (en) | 2015-06-10 |
| EP2879836A4 true EP2879836A4 (en) | 2016-05-25 |
| EP2879836B1 EP2879836B1 (en) | 2019-11-13 |
Family
ID=50028490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP13826255.5A Active EP2879836B1 (en) | 2012-08-02 | 2013-07-31 | Abrasive element with precisely shaped features, abrasive article fabricated therefrom and method of making thereof |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150224625A1 (en) |
| EP (1) | EP2879836B1 (en) |
| JP (2) | JP2015530265A (en) |
| KR (1) | KR20150039795A (en) |
| CN (2) | CN104684686A (en) |
| SG (1) | SG11201500713PA (en) |
| TW (1) | TWI660816B (en) |
| WO (1) | WO2014022462A1 (en) |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL2658680T3 (en) | 2010-12-31 | 2021-05-31 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles |
| WO2013003831A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN103702800B (en) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | Abrasive articles comprising silicon nitride abrasive grains |
| JP5802336B2 (en) | 2011-09-26 | 2015-10-28 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | Abrasive product comprising abrasive particle material, abrasive cloth paper using the abrasive particle material, and forming method |
| CN109054745A (en) | 2011-12-30 | 2018-12-21 | 圣戈本陶瓷及塑料股份有限公司 | Shape abrasive grain and forming method thereof |
| CN104114327B (en) | 2011-12-30 | 2018-06-05 | 圣戈本陶瓷及塑料股份有限公司 | Composite molding abrasive grains and forming method thereof |
| CA3056658C (en) | 2012-01-10 | 2023-07-04 | Doruk O. Yener | Abrasive particles having complex shapes and methods of forming same |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| CN110013795A (en) | 2012-05-23 | 2019-07-16 | 圣戈本陶瓷及塑料股份有限公司 | Shaped abrasive particles and method of forming the same |
| BR112014032152B1 (en) | 2012-06-29 | 2022-09-20 | Saint-Gobain Ceramics & Plastics, Inc | ABRASIVE PARTICLES HAVING PARTICULAR FORMATS AND ABRASIVE ARTICLES |
| US9956664B2 (en) | 2012-08-02 | 2018-05-01 | 3M Innovative Properties Company | Abrasive element precursor with precisely shaped features and methods of making thereof |
| WO2014022465A1 (en) | 2012-08-02 | 2014-02-06 | 3M Innovative Properties Company | Abrasive articles with precisely shaped features and method of making thereof |
| US9440332B2 (en) | 2012-10-15 | 2016-09-13 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| WO2014106173A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| CN105050770B (en) * | 2013-03-12 | 2018-08-17 | 3M创新有限公司 | Bonded abrasive article |
| WO2014161001A1 (en) | 2013-03-29 | 2014-10-02 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| TW201502263A (en) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | Abrasive article including shaped abrasive particles |
| CA3114978A1 (en) | 2013-09-30 | 2015-04-02 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| EP3089851B1 (en) | 2013-12-31 | 2019-02-06 | Saint-Gobain Abrasives, Inc. | Abrasive article including shaped abrasive particles |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| US9803119B2 (en) | 2014-04-14 | 2017-10-31 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10557067B2 (en) | 2014-04-14 | 2020-02-11 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| EP3277459B1 (en) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (en) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | Fixed abrasive article and method of forming same |
| CA3118262C (en) | 2015-06-11 | 2023-09-19 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CN118372187A (en) | 2016-05-10 | 2024-07-23 | 圣戈本陶瓷及塑料股份有限公司 | Abrasive particles and methods of forming the same |
| KR102422875B1 (en) | 2016-05-10 | 2022-07-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | Abrasive particles and methods of forming same |
| TWI621502B (en) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | PARTICULATE MATERIALS AND METHODS OF FORMATION THEREOF |
| WO2019012388A1 (en) * | 2017-07-11 | 2019-01-17 | 3M Innovative Properties Company | Abrasive articles including conformable coatings and polishing system therefrom |
| US12043785B2 (en) * | 2017-07-11 | 2024-07-23 | 3M Innovative Properties Company | Abrasive articles including conformable coatings and polishing system therefrom |
| EP3924146A4 (en) | 2019-02-13 | 2022-11-09 | 3M Innovative Properties Company | ABRASIVE MEMBERS HAVING PRECISE SHAPE FEATURES, ABRASIVE ARTICLES MANUFACTURED THEREOF, AND METHODS OF MAKING THEM |
| WO2021133888A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| CN114867582B (en) | 2019-12-27 | 2024-10-18 | 圣戈本陶瓷及塑料股份有限公司 | Abrasive article and method of forming the same |
| CN114846112A (en) | 2019-12-27 | 2022-08-02 | 圣戈本陶瓷及塑料股份有限公司 | Abrasive article and method of forming the same |
| TWI738304B (en) * | 2020-04-23 | 2021-09-01 | 台灣積體電路製造股份有限公司 | Method of manufacturing semiconductor wafer and cleaning scrubber |
| CN111546247B (en) * | 2020-04-30 | 2022-03-25 | 郑州力弘超硬材料有限公司 | Diamond grinding tool low-temperature ceramic bonding agent for optical fiber contact pin and preparation method thereof |
| KR102733915B1 (en) * | 2020-09-07 | 2024-11-25 | 엔지케이 인슐레이터 엘티디 | Refractory |
| WO2023060457A1 (en) * | 2021-10-13 | 2023-04-20 | 大连理工大学 | Flexible lattice bonding device for disc-type planar component and adaptive clamping method |
| AU2022426850B2 (en) | 2021-12-30 | 2025-09-18 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| EP4457054A1 (en) | 2021-12-30 | 2024-11-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| TWI856689B (en) * | 2023-06-07 | 2024-09-21 | 吉而特科技股份有限公司 | Recycle grinding device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2488276A (en) * | 1943-12-28 | 1949-11-15 | Norton Co | Grinding wheel |
| GB1296589A (en) * | 1969-11-14 | 1972-11-15 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3966855A (en) * | 1974-02-22 | 1976-06-29 | The United States Of America As Represented By The Secretary Of The Air Force | Method of fabricating silicon carbide articles |
| JPS61230871A (en) * | 1985-04-05 | 1986-10-15 | Noritake Co Ltd | Grinder element using flexible resin |
| KR910002578B1 (en) * | 1988-01-19 | 1991-04-27 | 닙폰 가이시 카부시키카이샤 | Method for producing a high density sintered body of silicon carbide |
| DE4243864C2 (en) * | 1991-12-24 | 1996-04-18 | Schunk Ingenieurkeramik Gmbh | Process for the production of moldings from silicon carbide |
| US5366523A (en) * | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
| US5453312A (en) * | 1993-10-29 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| JPH10138120A (en) * | 1996-10-31 | 1998-05-26 | Kyocera Corp | Dressing jig |
| US5840221A (en) * | 1996-12-02 | 1998-11-24 | Saint-Gobain/Norton Industrial Ceramics Corporation | Process for making silicon carbide reinforced silicon carbide composite |
| CN1060424C (en) * | 1997-08-26 | 2001-01-10 | 汪宁 | Polishing disc for chemcal-mechanical polishing and making method |
| US6214078B1 (en) * | 1997-11-25 | 2001-04-10 | Ferro Corporation | High temperature ceramic filter |
| US20050260930A1 (en) * | 1999-06-15 | 2005-11-24 | Yuji Okuda | Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer |
| US6364749B1 (en) * | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| US6439986B1 (en) * | 1999-10-12 | 2002-08-27 | Hunatech Co., Ltd. | Conditioner for polishing pad and method for manufacturing the same |
| JP2001121418A (en) * | 1999-10-29 | 2001-05-08 | Noritake Diamond Ind Co Ltd | Electrodeposition dresser for polishing |
| US6451077B1 (en) * | 2000-02-02 | 2002-09-17 | 3M Innovative Properties Company | Fused abrasive particles, abrasive articles, and methods of making and using the same |
| US7384438B1 (en) * | 2000-07-19 | 2008-06-10 | 3M Innovative Properties Company | Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same |
| MXPA03003063A (en) * | 2000-10-16 | 2004-02-12 | 3M Innovative Properties Co | Method of making ceramic aggregate particles. |
| JP2004291165A (en) * | 2003-03-27 | 2004-10-21 | Mitsubishi Materials Corp | Soft material processing tool |
| CN100356516C (en) * | 2004-05-05 | 2007-12-19 | 智胜科技股份有限公司 | Single-layer polishing pad and manufacturing method thereof |
| JP4661098B2 (en) * | 2004-06-18 | 2011-03-30 | 三菱マテリアル株式会社 | Cutting tool for soft material processing |
| US7309672B2 (en) * | 2005-07-05 | 2007-12-18 | Ceradyne, Inc. | Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
| JP4624293B2 (en) * | 2006-03-31 | 2011-02-02 | 株式会社ノリタケスーパーアブレーシブ | CMP pad conditioner |
| US7410413B2 (en) * | 2006-04-27 | 2008-08-12 | 3M Innovative Properties Company | Structured abrasive article and method of making and using the same |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US20080287047A1 (en) * | 2007-05-18 | 2008-11-20 | Sang Fang Chemical Industry Co., Ltd. | Polishing pad, use thereof and method for making the same |
| US8080073B2 (en) * | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
| JP2010125567A (en) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Cmp pad conditioner |
| JP2010125586A (en) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | Conditioner for semiconductor polishing cloth and method of manufacturing the same |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| EP2411181A1 (en) * | 2009-03-24 | 2012-02-01 | Saint-Gobain Abrasives, Inc. | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
| MY155563A (en) * | 2009-06-02 | 2015-10-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| KR101091030B1 (en) * | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | Method for producing pad conditioner having reduced friction |
| US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| US20130065490A1 (en) * | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
-
2013
- 2013-07-31 JP JP2015525532A patent/JP2015530265A/en active Pending
- 2013-07-31 US US14/418,453 patent/US20150224625A1/en not_active Abandoned
- 2013-07-31 SG SG11201500713PA patent/SG11201500713PA/en unknown
- 2013-07-31 WO PCT/US2013/052828 patent/WO2014022462A1/en not_active Ceased
- 2013-07-31 CN CN201380040394.7A patent/CN104684686A/en active Pending
- 2013-07-31 EP EP13826255.5A patent/EP2879836B1/en active Active
- 2013-07-31 CN CN202211322368.0A patent/CN115625629A/en active Pending
- 2013-07-31 KR KR20157004858A patent/KR20150039795A/en not_active Ceased
- 2013-08-01 TW TW102127669A patent/TWI660816B/en active
-
2018
- 2018-11-09 JP JP2018211596A patent/JP2019063989A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2488276A (en) * | 1943-12-28 | 1949-11-15 | Norton Co | Grinding wheel |
| GB1296589A (en) * | 1969-11-14 | 1972-11-15 |
Non-Patent Citations (1)
| Title |
|---|
| See also references of WO2014022462A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2879836A1 (en) | 2015-06-10 |
| TWI660816B (en) | 2019-06-01 |
| KR20150039795A (en) | 2015-04-13 |
| JP2019063989A (en) | 2019-04-25 |
| WO2014022462A1 (en) | 2014-02-06 |
| US20150224625A1 (en) | 2015-08-13 |
| EP2879836B1 (en) | 2019-11-13 |
| JP2015530265A (en) | 2015-10-15 |
| SG11201500713PA (en) | 2015-02-27 |
| TW201410391A (en) | 2014-03-16 |
| CN104684686A (en) | 2015-06-03 |
| CN115625629A (en) | 2023-01-20 |
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