EP2863063A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP2863063A3
EP2863063A3 EP14188325.6A EP14188325A EP2863063A3 EP 2863063 A3 EP2863063 A3 EP 2863063A3 EP 14188325 A EP14188325 A EP 14188325A EP 2863063 A3 EP2863063 A3 EP 2863063A3
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
pump
disks
active structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14188325.6A
Other languages
English (en)
French (fr)
Other versions
EP2863063B1 (de
EP2863063A2 (de
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19201021.3A priority Critical patent/EP3608545B1/de
Publication of EP2863063A2 publication Critical patent/EP2863063A2/de
Publication of EP2863063A3 publication Critical patent/EP2863063A3/de
Application granted granted Critical
Publication of EP2863063B1 publication Critical patent/EP2863063B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit einem Stator mit mehreren in Richtung einer Rotationsachse aufeinanderfolgenden Statorscheiben, die jeweils eine pumpaktive Struktur aufweisen, und mit einem relativ zu dem Stator um die Rotationsachse drehbar gelagerten Rotor, der eine Rotorwelle und mehrere auf der Rotorwelle angeordnete, in axialer Richtung aufeinanderfolgende und zwischen den Statorscheiben angeordnete Rotorscheiben umfasst, die jeweils eine pumpaktive Struktur aufweisen, wobei zumindest eine Rotorscheibe einen zwischen der Rotorscheibe und dem Stator ausgebildeten radialen Dichtspalt begrenzt, und wobei zumindest ein statorseitiger Dichtabschnitt vorgesehen ist, der den Dicht-spalt in axialer Richtung entgegen der Förderrichtung betrachtet zumindest teilweise abdeckt und bezogen auf die Förderrichtung vor und/oder neben der pumpaktiven Struktur der in Förderrichtung auf die Rotorscheibe folgenden Statorscheibe angeordnet ist.
EP14188325.6A 2013-10-15 2014-10-09 Vakuumpumpe Active EP2863063B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19201021.3A EP3608545B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310220879 DE102013220879A1 (de) 2013-10-15 2013-10-15 Vakuumpumpe

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP19201021.3A Division-Into EP3608545B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe
EP19201021.3A Division EP3608545B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2863063A2 EP2863063A2 (de) 2015-04-22
EP2863063A3 true EP2863063A3 (de) 2015-08-26
EP2863063B1 EP2863063B1 (de) 2019-12-11

Family

ID=51687900

Family Applications (2)

Application Number Title Priority Date Filing Date
EP19201021.3A Active EP3608545B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe
EP14188325.6A Active EP2863063B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP19201021.3A Active EP3608545B1 (de) 2013-10-15 2014-10-09 Vakuumpumpe

Country Status (2)

Country Link
EP (2) EP3608545B1 (de)
DE (1) DE102013220879A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP7134053B2 (ja) * 2018-10-05 2022-09-09 ミネベアミツミ株式会社 軸流ファン
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPH0444496U (de) * 1990-08-16 1992-04-15
EP0773367A1 (de) * 1995-11-10 1997-05-14 VARIAN S.p.A. Turbomolekularpumpe
EP0967395A2 (de) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolekularpumpe
DE10203648A1 (de) * 2001-02-10 2002-12-12 Pfeiffer Vacuum Gmbh Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP2019208A1 (de) * 2006-05-19 2009-01-28 Edwards Japan Limited Vakuumpumpe
DE202010011790U1 (de) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6185599A (ja) * 1984-10-03 1986-05-01 Ulvac Corp タ−ボ分子ポンプ
JPS62203995A (ja) * 1986-03-04 1987-09-08 Anelva Corp 真空装置
JPS6314893U (de) * 1986-07-11 1988-01-30
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPH0444496U (de) * 1990-08-16 1992-04-15
EP0773367A1 (de) * 1995-11-10 1997-05-14 VARIAN S.p.A. Turbomolekularpumpe
EP0967395A2 (de) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolekularpumpe
DE10203648A1 (de) * 2001-02-10 2002-12-12 Pfeiffer Vacuum Gmbh Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP2019208A1 (de) * 2006-05-19 2009-01-28 Edwards Japan Limited Vakuumpumpe
DE202010011790U1 (de) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpen

Also Published As

Publication number Publication date
DE102013220879A1 (de) 2015-04-16
EP2863063B1 (de) 2019-12-11
EP3608545B1 (de) 2021-02-17
EP3608545A1 (de) 2020-02-12
EP2863063A2 (de) 2015-04-22

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