EP2863063A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2863063A3
EP2863063A3 EP14188325.6A EP14188325A EP2863063A3 EP 2863063 A3 EP2863063 A3 EP 2863063A3 EP 14188325 A EP14188325 A EP 14188325A EP 2863063 A3 EP2863063 A3 EP 2863063A3
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
pump
disks
active structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14188325.6A
Other languages
German (de)
French (fr)
Other versions
EP2863063B1 (en
EP2863063A2 (en
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19201021.3A priority Critical patent/EP3608545B1/en
Publication of EP2863063A2 publication Critical patent/EP2863063A2/en
Publication of EP2863063A3 publication Critical patent/EP2863063A3/en
Application granted granted Critical
Publication of EP2863063B1 publication Critical patent/EP2863063B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit einem Stator mit mehreren in Richtung einer Rotationsachse aufeinanderfolgenden Statorscheiben, die jeweils eine pumpaktive Struktur aufweisen, und mit einem relativ zu dem Stator um die Rotationsachse drehbar gelagerten Rotor, der eine Rotorwelle und mehrere auf der Rotorwelle angeordnete, in axialer Richtung aufeinanderfolgende und zwischen den Statorscheiben angeordnete Rotorscheiben umfasst, die jeweils eine pumpaktive Struktur aufweisen, wobei zumindest eine Rotorscheibe einen zwischen der Rotorscheibe und dem Stator ausgebildeten radialen Dichtspalt begrenzt, und wobei zumindest ein statorseitiger Dichtabschnitt vorgesehen ist, der den Dicht-spalt in axialer Richtung entgegen der Förderrichtung betrachtet zumindest teilweise abdeckt und bezogen auf die Förderrichtung vor und/oder neben der pumpaktiven Struktur der in Förderrichtung auf die Rotorscheibe folgenden Statorscheibe angeordnet ist.

Figure imgaf001
The invention relates to a vacuum pump with a stator having a plurality of stator disks successive in the direction of a rotation axis, each having a pump-active structure, and having a rotatably mounted relative to the stator about the axis of rotation rotor having a rotor shaft and a plurality of arranged on the rotor shaft in the axial Direction of successive and arranged between the stator disks rotor disks, each having a pump-active structure, wherein at least one rotor disc defines a formed between the rotor disk and the stator radial sealing gap, and wherein at least one stator-side sealing portion is provided, which the sealing gap in the axial direction At least partially covered and viewed in relation to the conveying direction before and / or next to the pump-active structure of the following in the conveying direction to the rotor disk stator disc is arranged.
Figure imgaf001
EP14188325.6A 2013-10-15 2014-10-09 Vacuum pump Active EP2863063B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19201021.3A EP3608545B1 (en) 2013-10-15 2014-10-09 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310220879 DE102013220879A1 (en) 2013-10-15 2013-10-15 vacuum pump

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP19201021.3A Division EP3608545B1 (en) 2013-10-15 2014-10-09 Vacuum pump
EP19201021.3A Division-Into EP3608545B1 (en) 2013-10-15 2014-10-09 Vacuum pump

Publications (3)

Publication Number Publication Date
EP2863063A2 EP2863063A2 (en) 2015-04-22
EP2863063A3 true EP2863063A3 (en) 2015-08-26
EP2863063B1 EP2863063B1 (en) 2019-12-11

Family

ID=51687900

Family Applications (2)

Application Number Title Priority Date Filing Date
EP19201021.3A Active EP3608545B1 (en) 2013-10-15 2014-10-09 Vacuum pump
EP14188325.6A Active EP2863063B1 (en) 2013-10-15 2014-10-09 Vacuum pump

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP19201021.3A Active EP3608545B1 (en) 2013-10-15 2014-10-09 Vacuum pump

Country Status (2)

Country Link
EP (2) EP3608545B1 (en)
DE (1) DE102013220879A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP7134053B2 (en) * 2018-10-05 2022-09-09 ミネベアミツミ株式会社 axial fan
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPH0444496U (en) * 1990-08-16 1992-04-15
EP0773367A1 (en) * 1995-11-10 1997-05-14 VARIAN S.p.A. Turbo-molecular pump
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
DE10203648A1 (en) * 2001-02-10 2002-12-12 Pfeiffer Vacuum Gmbh Rotor and stator plates for turbo-molecular pump with almost total optical imperviousness in radial direction, to prevent radial flows
EP2019208A1 (en) * 2006-05-19 2009-01-28 Edwards Japan Limited Vacuum pump
DE202010011790U1 (en) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pumps

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6185599A (en) * 1984-10-03 1986-05-01 Ulvac Corp Turbo-molecular pump
JPS62203995A (en) * 1986-03-04 1987-09-08 Anelva Corp Vacuum device
JPS6314893U (en) * 1986-07-11 1988-01-30
DE3722164C2 (en) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolecular pump
IT1241177B (en) * 1990-02-16 1993-12-29 Varian Spa STATOR FOR TURBOMOLECULAR PUMP.
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0687691U (en) * 1993-05-28 1994-12-22 セイコー精機株式会社 Turbo molecular pump
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPH0444496U (en) * 1990-08-16 1992-04-15
EP0773367A1 (en) * 1995-11-10 1997-05-14 VARIAN S.p.A. Turbo-molecular pump
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
DE10203648A1 (en) * 2001-02-10 2002-12-12 Pfeiffer Vacuum Gmbh Rotor and stator plates for turbo-molecular pump with almost total optical imperviousness in radial direction, to prevent radial flows
EP2019208A1 (en) * 2006-05-19 2009-01-28 Edwards Japan Limited Vacuum pump
DE202010011790U1 (en) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pumps

Also Published As

Publication number Publication date
EP3608545A1 (en) 2020-02-12
EP3608545B1 (en) 2021-02-17
EP2863063B1 (en) 2019-12-11
EP2863063A2 (en) 2015-04-22
DE102013220879A1 (en) 2015-04-16

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