EP2801107A4 - Classification et tri de plaquette pour la fabrication de cellules photovoltaïques - Google Patents

Classification et tri de plaquette pour la fabrication de cellules photovoltaïques

Info

Publication number
EP2801107A4
EP2801107A4 EP12848635.4A EP12848635A EP2801107A4 EP 2801107 A4 EP2801107 A4 EP 2801107A4 EP 12848635 A EP12848635 A EP 12848635A EP 2801107 A4 EP2801107 A4 EP 2801107A4
Authority
EP
European Patent Office
Prior art keywords
sorting
photovoltaic cell
cell manufacture
grading
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12848635.4A
Other languages
German (de)
English (en)
Other versions
EP2801107A1 (fr
Inventor
Thorsten Trupke
Roger Kroeze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BT Imaging Pty Ltd
Original Assignee
BT Imaging Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AU2011904618A external-priority patent/AU2011904618A0/en
Application filed by BT Imaging Pty Ltd filed Critical BT Imaging Pty Ltd
Publication of EP2801107A1 publication Critical patent/EP2801107A1/fr
Publication of EP2801107A4 publication Critical patent/EP2801107A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
    • H02S50/15—Testing of PV devices, e.g. of PV modules or single PV cells using optical means, e.g. using electroluminescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
EP12848635.4A 2011-11-07 2012-11-07 Classification et tri de plaquette pour la fabrication de cellules photovoltaïques Withdrawn EP2801107A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2011904618A AU2011904618A0 (en) 2011-11-07 Wafer sorting and grading for photovoltaic cell manufacture
PCT/AU2012/001358 WO2013067573A1 (fr) 2011-11-07 2012-11-07 Classification et tri de plaquette pour la fabrication de cellules photovoltaïques

Publications (2)

Publication Number Publication Date
EP2801107A1 EP2801107A1 (fr) 2014-11-12
EP2801107A4 true EP2801107A4 (fr) 2015-12-16

Family

ID=48288363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12848635.4A Withdrawn EP2801107A4 (fr) 2011-11-07 2012-11-07 Classification et tri de plaquette pour la fabrication de cellules photovoltaïques

Country Status (3)

Country Link
EP (1) EP2801107A4 (fr)
CN (1) CN104025276A (fr)
WO (1) WO2013067573A1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103871939B (zh) * 2014-04-01 2017-07-14 海迪科（苏州）光电科技有限公司 用于生产蓝宝石图形衬底的分选方法
US10018565B2 (en) * 2015-05-04 2018-07-10 Semilab Semiconductor Physics Laboratory Co., Ltd. Micro photoluminescence imaging with optical filtering
JP6599727B2 (ja) 2015-10-26 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス 時系列データ処理方法、時系列データ処理プログラム、および、時系列データ処理装置
CN105499153A (zh) * 2015-12-03 2016-04-20 中银（宁波）电池有限公司 一种电池检测装置的检测方法
CN105425135A (zh) * 2015-12-25 2016-03-23 江苏盎华光伏工程技术研究中心有限公司 一种多晶硅料智能检测和分类运输装置及方法
CN107481950A (zh) * 2017-07-28 2017-12-15 苏州阿特斯阳光电力科技有限公司 一种基于pl检测的品质分档方法及装置
CN107537783B (zh) * 2017-08-31 2019-08-09 深圳市烨新达实业有限公司 一种液晶屏检测仪
CN107768282A (zh) * 2017-09-19 2018-03-06 合肥流明新能源科技有限公司 一种用于晶体硅光伏组件的电池片分选方法
CN110293073A (zh) * 2018-03-21 2019-10-01 英稳达科技股份有限公司 太阳能电池片的智能分类系统及方法
CN108787480A (zh) * 2018-06-19 2018-11-13 枣庄亿新电子科技有限公司 一种锂电池分选装置
CN108807234A (zh) * 2018-06-22 2018-11-13 安徽舟港新能源科技有限公司 一种基于硅材料测试仪的硅材料快速分拣方法
CN110455811B (zh) * 2019-08-27 2022-04-01 通威太阳能（合肥）有限公司 一种能够检测电池片背场缺陷的设备及其调试方法
CN110544643B (zh) * 2019-09-11 2022-06-28 东方日升（常州）新能源有限公司 无损伤快速判断金属浆料烧穿深度的方法
CN112676175A (zh) * 2020-12-04 2021-04-20 苏州天准科技股份有限公司 硅片智能分选机
DE102020133701A1 (de) 2020-12-16 2022-06-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren und Vorrichtung zur Qualitätsbewertung einer Solarzelle
CN113781487B (zh) * 2021-11-15 2022-12-30 浙江大学杭州国际科创中心 碳化硅晶圆表面复合速率图像生成方法、系统及存储介质
CN114062371B (zh) * 2021-11-15 2024-07-12 浙江大学杭州国际科创中心 碳化硅晶圆体寿命图像生成方法、系统及存储介质
CN116773548B (zh) * 2023-08-21 2023-11-07 泓浒(苏州)半导体科技有限公司 一种晶圆表面缺陷检测方法及系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021799A1 (de) * 2009-05-18 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur ortsaufgelösten Bestimmung des Serienwiderstandes einer Halbleiterstruktur

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6286685B1 (en) * 1999-03-15 2001-09-11 Seh America, Inc. System and method for wafer thickness sorting
US6731384B2 (en) * 2000-10-10 2004-05-04 Hitachi, Ltd. Apparatus for detecting foreign particle and defect and the same method
GB0216622D0 (en) * 2002-07-17 2002-08-28 Aoti Operating Co Inc Detection method and apparatus
US7089132B2 (en) * 2004-05-28 2006-08-08 International Business Machines Corporation Method and system for providing quality control on wafers running on a manufacturing line
WO2006044426A2 (fr) * 2004-10-12 2006-04-27 Kla-Tencor Technologies Corp. Procedes et systemes informatiques de classification des defauts deceles sur un specimen
KR20100075875A (ko) * 2007-08-30 2010-07-05 비티 이미징 피티와이 리미티드 광발전 전지 제조
CN104022056B (zh) * 2008-03-31 2017-04-12 Bt成像股份有限公司 用于晶片成像及处理的方法和设备

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021799A1 (de) * 2009-05-18 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur ortsaufgelösten Bestimmung des Serienwiderstandes einer Halbleiterstruktur

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013067573A1 *

Also Published As

Publication number Publication date
EP2801107A1 (fr) 2014-11-12
CN104025276A (zh) 2014-09-03
WO2013067573A1 (fr) 2013-05-16

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Effective date: 20151116

RIC1 Information provided on ipc code assigned before grant

Ipc: B07C 5/34 20060101ALI20151110BHEP

Ipc: H01L 31/18 20060101ALI20151110BHEP

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Ipc: H02S 50/10 20140101ALI20151110BHEP

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