EP2801107A4 - Waferklassifizierung und -sortierung zur herstellung photovoltaischer zellen - Google Patents
Waferklassifizierung und -sortierung zur herstellung photovoltaischer zellenInfo
- Publication number
- EP2801107A4 EP2801107A4 EP12848635.4A EP12848635A EP2801107A4 EP 2801107 A4 EP2801107 A4 EP 2801107A4 EP 12848635 A EP12848635 A EP 12848635A EP 2801107 A4 EP2801107 A4 EP 2801107A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- sorting
- photovoltaic cell
- cell manufacture
- grading
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
- H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
- H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
- H02S50/15—Testing of PV devices, e.g. of PV modules or single PV cells using optical means, e.g. using electroluminescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2011904618A AU2011904618A0 (en) | 2011-11-07 | Wafer sorting and grading for photovoltaic cell manufacture | |
PCT/AU2012/001358 WO2013067573A1 (en) | 2011-11-07 | 2012-11-07 | Wafer grading and sorting for photovoltaic cell manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2801107A1 EP2801107A1 (de) | 2014-11-12 |
EP2801107A4 true EP2801107A4 (de) | 2015-12-16 |
Family
ID=48288363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12848635.4A Withdrawn EP2801107A4 (de) | 2011-11-07 | 2012-11-07 | Waferklassifizierung und -sortierung zur herstellung photovoltaischer zellen |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2801107A4 (de) |
CN (1) | CN104025276A (de) |
WO (1) | WO2013067573A1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103871939B (zh) * | 2014-04-01 | 2017-07-14 | 海迪科(苏州)光电科技有限公司 | 用于生产蓝宝石图形衬底的分选方法 |
US10018565B2 (en) * | 2015-05-04 | 2018-07-10 | Semilab Semiconductor Physics Laboratory Co., Ltd. | Micro photoluminescence imaging with optical filtering |
JP6599727B2 (ja) | 2015-10-26 | 2019-10-30 | 株式会社Screenホールディングス | 時系列データ処理方法、時系列データ処理プログラム、および、時系列データ処理装置 |
CN105499153A (zh) * | 2015-12-03 | 2016-04-20 | 中银(宁波)电池有限公司 | 一种电池检测装置的检测方法 |
CN105425135A (zh) * | 2015-12-25 | 2016-03-23 | 江苏盎华光伏工程技术研究中心有限公司 | 一种多晶硅料智能检测和分类运输装置及方法 |
CN107481950A (zh) * | 2017-07-28 | 2017-12-15 | 苏州阿特斯阳光电力科技有限公司 | 一种基于pl检测的品质分档方法及装置 |
CN107537783B (zh) * | 2017-08-31 | 2019-08-09 | 深圳市烨新达实业有限公司 | 一种液晶屏检测仪 |
CN107768282A (zh) * | 2017-09-19 | 2018-03-06 | 合肥流明新能源科技有限公司 | 一种用于晶体硅光伏组件的电池片分选方法 |
CN110293073A (zh) * | 2018-03-21 | 2019-10-01 | 英稳达科技股份有限公司 | 太阳能电池片的智能分类系统及方法 |
CN108787480A (zh) * | 2018-06-19 | 2018-11-13 | 枣庄亿新电子科技有限公司 | 一种锂电池分选装置 |
CN108807234A (zh) * | 2018-06-22 | 2018-11-13 | 安徽舟港新能源科技有限公司 | 一种基于硅材料测试仪的硅材料快速分拣方法 |
CN110455811B (zh) * | 2019-08-27 | 2022-04-01 | 通威太阳能(合肥)有限公司 | 一种能够检测电池片背场缺陷的设备及其调试方法 |
CN110544643B (zh) * | 2019-09-11 | 2022-06-28 | 东方日升(常州)新能源有限公司 | 无损伤快速判断金属浆料烧穿深度的方法 |
CN112676175A (zh) * | 2020-12-04 | 2021-04-20 | 苏州天准科技股份有限公司 | 硅片智能分选机 |
DE102020133701A1 (de) | 2020-12-16 | 2022-06-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Verfahren und Vorrichtung zur Qualitätsbewertung einer Solarzelle |
CN113781487B (zh) * | 2021-11-15 | 2022-12-30 | 浙江大学杭州国际科创中心 | 碳化硅晶圆表面复合速率图像生成方法、系统及存储介质 |
CN114062371B (zh) * | 2021-11-15 | 2024-07-12 | 浙江大学杭州国际科创中心 | 碳化硅晶圆体寿命图像生成方法、系统及存储介质 |
CN116773548B (zh) * | 2023-08-21 | 2023-11-07 | 泓浒(苏州)半导体科技有限公司 | 一种晶圆表面缺陷检测方法及系统 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009021799A1 (de) * | 2009-05-18 | 2010-11-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur ortsaufgelösten Bestimmung des Serienwiderstandes einer Halbleiterstruktur |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6286685B1 (en) * | 1999-03-15 | 2001-09-11 | Seh America, Inc. | System and method for wafer thickness sorting |
US6731384B2 (en) * | 2000-10-10 | 2004-05-04 | Hitachi, Ltd. | Apparatus for detecting foreign particle and defect and the same method |
GB0216622D0 (en) * | 2002-07-17 | 2002-08-28 | Aoti Operating Co Inc | Detection method and apparatus |
US7089132B2 (en) * | 2004-05-28 | 2006-08-08 | International Business Machines Corporation | Method and system for providing quality control on wafers running on a manufacturing line |
WO2006044426A2 (en) * | 2004-10-12 | 2006-04-27 | Kla-Tencor Technologies Corp. | Computer-implemented methods and systems for classifying defects on a specimen |
KR20100075875A (ko) * | 2007-08-30 | 2010-07-05 | 비티 이미징 피티와이 리미티드 | 광발전 전지 제조 |
CN104022056B (zh) * | 2008-03-31 | 2017-04-12 | Bt成像股份有限公司 | 用于晶片成像及处理的方法和设备 |
-
2012
- 2012-11-07 CN CN201280065768.6A patent/CN104025276A/zh active Pending
- 2012-11-07 WO PCT/AU2012/001358 patent/WO2013067573A1/en active Application Filing
- 2012-11-07 EP EP12848635.4A patent/EP2801107A4/de not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009021799A1 (de) * | 2009-05-18 | 2010-11-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur ortsaufgelösten Bestimmung des Serienwiderstandes einer Halbleiterstruktur |
Non-Patent Citations (1)
Title |
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See also references of WO2013067573A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2801107A1 (de) | 2014-11-12 |
CN104025276A (zh) | 2014-09-03 |
WO2013067573A1 (en) | 2013-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20140925 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
RA4 | Supplementary search report drawn up and despatched (corrected) |
Effective date: 20151116 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: B07C 5/34 20060101ALI20151110BHEP Ipc: H01L 31/18 20060101ALI20151110BHEP Ipc: G01N 21/63 20060101ALI20151110BHEP Ipc: H02S 50/10 20140101ALI20151110BHEP Ipc: G01N 21/95 20060101ALI20151110BHEP Ipc: G01N 21/64 20060101ALI20151110BHEP Ipc: H01L 21/66 20060101AFI20151110BHEP Ipc: B07C 5/342 20060101ALI20151110BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20160601 |