EP2801107A4 - Wafer grading and sorting for photovoltaic cell manufacture - Google Patents

Wafer grading and sorting for photovoltaic cell manufacture

Info

Publication number
EP2801107A4
EP2801107A4 EP12848635.4A EP12848635A EP2801107A4 EP 2801107 A4 EP2801107 A4 EP 2801107A4 EP 12848635 A EP12848635 A EP 12848635A EP 2801107 A4 EP2801107 A4 EP 2801107A4
Authority
EP
European Patent Office
Prior art keywords
sorting
photovoltaic cell
cell manufacture
grading
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12848635.4A
Other languages
German (de)
French (fr)
Other versions
EP2801107A1 (en
Inventor
Thorsten Trupke
Roger Kroeze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BT Imaging Pty Ltd
Original Assignee
BT Imaging Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AU2011904618A external-priority patent/AU2011904618A0/en
Application filed by BT Imaging Pty Ltd filed Critical BT Imaging Pty Ltd
Publication of EP2801107A1 publication Critical patent/EP2801107A1/en
Publication of EP2801107A4 publication Critical patent/EP2801107A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H01L31/182Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/342Sorting according to other particular properties according to optical properties, e.g. colour
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6489Photoluminescence of semiconductors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • H02S50/15Testing of PV devices, e.g. of PV modules or single PV cells using optical means, e.g. using electroluminescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/546Polycrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
EP12848635.4A 2011-11-07 2012-11-07 Wafer grading and sorting for photovoltaic cell manufacture Withdrawn EP2801107A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2011904618A AU2011904618A0 (en) 2011-11-07 Wafer sorting and grading for photovoltaic cell manufacture
PCT/AU2012/001358 WO2013067573A1 (en) 2011-11-07 2012-11-07 Wafer grading and sorting for photovoltaic cell manufacture

Publications (2)

Publication Number Publication Date
EP2801107A1 EP2801107A1 (en) 2014-11-12
EP2801107A4 true EP2801107A4 (en) 2015-12-16

Family

ID=48288363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12848635.4A Withdrawn EP2801107A4 (en) 2011-11-07 2012-11-07 Wafer grading and sorting for photovoltaic cell manufacture

Country Status (3)

Country Link
EP (1) EP2801107A4 (en)
CN (1) CN104025276A (en)
WO (1) WO2013067573A1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103871939B (en) * 2014-04-01 2017-07-14 海迪科(苏州)光电科技有限公司 Method for separating for producing sapphire pattern substrate
US10018565B2 (en) * 2015-05-04 2018-07-10 Semilab Semiconductor Physics Laboratory Co., Ltd. Micro photoluminescence imaging with optical filtering
JP6599727B2 (en) 2015-10-26 2019-10-30 株式会社Screenホールディングス Time-series data processing method, time-series data processing program, and time-series data processing apparatus
CN105499153A (en) * 2015-12-03 2016-04-20 中银(宁波)电池有限公司 Detecting method of battery detecting device
CN105425135A (en) * 2015-12-25 2016-03-23 江苏盎华光伏工程技术研究中心有限公司 Polysilicon material intelligent detection and classified transport device and method
CN107481950A (en) * 2017-07-28 2017-12-15 苏州阿特斯阳光电力科技有限公司 A kind of quality stepping method and device based on PL detections
CN107537783B (en) * 2017-08-31 2019-08-09 深圳市烨新达实业有限公司 A kind of liquid crystal display detector
CN107768282A (en) * 2017-09-19 2018-03-06 合肥流明新能源科技有限公司 A kind of cell piece method for separating for Crystalline Silicon PV Module
CN110293073A (en) * 2018-03-21 2019-10-01 英稳达科技股份有限公司 The intelligent classification system and method for solar battery sheet
CN108787480A (en) * 2018-06-19 2018-11-13 枣庄亿新电子科技有限公司 A kind of lithium battery sorting unit
CN108807234A (en) * 2018-06-22 2018-11-13 安徽舟港新能源科技有限公司 A kind of silicon materials quick sorting method based on silicon materials tester
CN110455811B (en) * 2019-08-27 2022-04-01 通威太阳能(合肥)有限公司 Device capable of detecting back surface field defects of battery piece and debugging method thereof
CN110544643B (en) * 2019-09-11 2022-06-28 东方日升(常州)新能源有限公司 Method for nondestructive and rapid judgment of burn-through depth of metal slurry
CN112676175A (en) * 2020-12-04 2021-04-20 苏州天准科技股份有限公司 Intelligent silicon wafer sorting machine
DE102020133701A1 (en) 2020-12-16 2022-06-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Method and device for assessing the quality of a solar cell
CN113781487B (en) * 2021-11-15 2022-12-30 浙江大学杭州国际科创中心 Method and system for generating SiC wafer surface recombination velocity image and storage medium
CN114062371B (en) * 2021-11-15 2024-07-12 浙江大学杭州国际科创中心 Silicon carbide wafer life image generation method, system and storage medium
CN116773548B (en) * 2023-08-21 2023-11-07 泓浒(苏州)半导体科技有限公司 Wafer surface defect detection method and system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021799A1 (en) * 2009-05-18 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for the spatially resolved determination of the series resistance of a semiconductor structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6286685B1 (en) * 1999-03-15 2001-09-11 Seh America, Inc. System and method for wafer thickness sorting
US6731384B2 (en) * 2000-10-10 2004-05-04 Hitachi, Ltd. Apparatus for detecting foreign particle and defect and the same method
GB0216622D0 (en) * 2002-07-17 2002-08-28 Aoti Operating Co Inc Detection method and apparatus
US7089132B2 (en) * 2004-05-28 2006-08-08 International Business Machines Corporation Method and system for providing quality control on wafers running on a manufacturing line
US8532949B2 (en) * 2004-10-12 2013-09-10 Kla-Tencor Technologies Corp. Computer-implemented methods and systems for classifying defects on a specimen
KR20100075875A (en) * 2007-08-30 2010-07-05 비티 이미징 피티와이 리미티드 Photovoltaic cell manufacturing
EP2272101A4 (en) * 2008-03-31 2012-06-27 Bt Imaging Pty Ltd Wafer imaging and processing method and apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021799A1 (en) * 2009-05-18 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for the spatially resolved determination of the series resistance of a semiconductor structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013067573A1 *

Also Published As

Publication number Publication date
WO2013067573A1 (en) 2013-05-16
EP2801107A1 (en) 2014-11-12
CN104025276A (en) 2014-09-03

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