CN108807234A - A kind of silicon materials quick sorting method based on silicon materials tester - Google Patents
A kind of silicon materials quick sorting method based on silicon materials tester Download PDFInfo
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- CN108807234A CN108807234A CN201810648920.2A CN201810648920A CN108807234A CN 108807234 A CN108807234 A CN 108807234A CN 201810648920 A CN201810648920 A CN 201810648920A CN 108807234 A CN108807234 A CN 108807234A
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- silicon materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a kind of silicon materials quick sorting methods based on silicon materials tester, including：Silicon materials are sent to detection zone；The type and resistivity of the silicon materials in detection zone are detected, the type includes p-type, N-type；The resistivity of silicon materials in detection zone is compared with resistivity threshold value, is p-type or N-type according to the type of the silicon materials in comparison result and detection zone, the silicon materials of detection zone is sent to default outlet.In this way, the type and resistivity of silicon materials are obtained simultaneously, and according to the requirement of default model and resistivity, silicon materials are transported to different outlets and carry out difference sorting, improve the sorting efficiency of silicon materials, simultaneously, the automation for improving sorting, avoids error caused by human error.
Description
Technical field
The present invention relates to silicon materials detection technique field more particularly to a kind of silicon materials based on silicon materials tester are quick
Method for sorting.
Background technology
Pure silicon is more like insulator, rather than conductor does not have when it is applied in external action (such as applied voltage)
It has the ability to change its conduction state.So must be toward the other elements of doping inside silicon, present most important two elements
It is ----boron and phosphorus P.When silicon chip is impregnated in boron or phosphorus, its electric conductivity just significantly changes.Phosphorus is added to silicon wafer
In after, the silicon for mixing phosphorus impurities is known as N-type silicon, and after boron is added in silicon wafer, the silicon for mixing phosphorus impurities is known as P-type silicon.
Currently, it is N-type silicon or P-type silicon to distinguish silicon materials, it is by manually being examined successively to silicon materials using detector
It surveys, but this mode efficiency is too low, artificial reading data are susceptible to error, for semi-conducting material factory, silicon manufacturer and section
Position etc. is ground, a kind of quick method for separating suitable for silicon materials is needed, quickly to be sorted as requested to silicon materials.
Invention content
Technical problems based on background technology, it is fast that the present invention proposes a kind of silicon materials based on silicon materials tester
Fast method for sorting；
A kind of silicon materials quick sorting method based on silicon materials tester proposed by the present invention, including：
S1, silicon materials are sent to detection zone；
S2, detection detection zone in silicon materials type and resistivity, the type includes p-type, N-type；
S3, the resistivity of the silicon materials in detection zone is compared with resistivity threshold value, according to comparison result and inspection
The type for surveying the silicon materials in region is p-type or N-type, and the silicon materials of detection zone are sent to default outlet.
Preferably, step S3 is specifically included：
When silicon materials are p-type and resistivity is less than resistivity threshold value, silicon materials are sent to first outlet；
When silicon materials are p-type and resistivity is not less than resistivity threshold value, silicon materials are sent to second outlet；
When silicon materials are N-type and resistivity is less than resistivity threshold value, silicon materials are sent to third outlet；
When silicon materials are N-type and resistivity is not less than resistivity threshold value, silicon materials are sent to the 4th outlet.
Preferably, in step S3, the resistivity threshold value can be edited by user.
Preferably, in step S2, during the type and resistivity for detecting the silicon materials in detection zone, further include：
Relative humidity in detection zone is kept within a preset range.
Preferably, in step S2, during the type and resistivity for detecting the silicon materials in detection zone, further include：
Detection zone is electromagnetically shielded.
Silicon materials are sent to detection zone by the present invention, detect the type and resistivity of the silicon materials in detection zone, institute
It includes p-type, N-type to state type, and the resistivity of the silicon materials in detection zone is compared with resistivity threshold value, is tied according to comparing
The type of silicon materials in fruit and detection zone is p-type or N-type, and the silicon materials of detection zone are sent to default outlet, in this way,
The type and resistivity of silicon materials are obtained simultaneously, and according to the requirement of default model and resistivity, silicon materials are transported to difference
Outlet carries out difference sorting, improves the sorting efficiency of silicon materials, meanwhile, the automation of sorting is improved, human error is avoided to cause
Error.
Description of the drawings
Fig. 1 is a kind of flow signal of silicon materials quick sorting method based on silicon materials tester proposed by the present invention
Figure.
Specific implementation mode
Referring to Fig.1, a kind of silicon materials quick sorting method based on silicon materials tester proposed by the present invention, including：
Silicon materials are sent to detection zone by step S1.
In concrete scheme, silicon materials can be sent to detection zone by conveyer belt, the detection zone includes detection
Specific station in storehouse, building, on production line etc..
Step S2 detects the type and resistivity of the silicon materials in detection zone, and the type includes p-type, N-type, is being examined
During survey, relative humidity in detection zone is kept within a preset range, and detection zone is electromagnetically shielded.
In concrete scheme, the type and resistivity of silicon materials can be detected by P/N model testers, due to relatively wet
Degree, electromagnetic interference can generate interference to the detection of type and resistivity to silicon materials, in the type and resistivity of silicon materials
In detection process, relative humidity in detection zone is kept within a preset range, and detection zone is electromagnetically shielded, avoided
Since relative humidity, electromagnetic interference cause the detection of the type and resistivity of silicon materials error occur.
The resistivity of silicon materials in detection zone is compared, according to comparison result by step S3 with resistivity threshold value
And the type of the silicon materials in detection zone is p-type or N-type, and the silicon materials of detection zone are sent to default outlet, it is specific to wrap
It includes：When silicon materials are p-type and resistivity is less than resistivity threshold value, silicon materials are sent to first outlet；It is p-type in silicon materials
And resistivity be not less than resistivity threshold value when, silicon materials are sent to second outlet；In silicon materials be N-type and resistivity is less than electricity
When resistance rate threshold value, silicon materials are sent to third outlet；It, will when silicon materials are N-type and resistivity is not less than resistivity threshold value
Silicon materials are sent to the 4th outlet, wherein the resistivity threshold value can be edited by user.
In concrete scheme, the silicon materials in detection zone are transmitted according to the resistivity of silicon materials and the type of material
Difference outlet, in this way, P-type silicon material and N-type silicon materials are distinguished, while the silicon materials and not to meeting resistivity requirement
The silicon materials for meeting resistivity requirement distinguish, and improve the sorting efficiency of silicon materials.
Silicon materials are sent to detection zone by present embodiment, detect the type and resistance of the silicon materials in detection zone
Rate, the type include p-type, N-type, and the resistivity of the silicon materials in detection zone is compared with resistivity threshold value, according to
The type of silicon materials in comparison result and detection zone is p-type or N-type, and the silicon materials of detection zone are sent to pre- set out
Mouthful, in this way, the type and resistivity of silicon materials are obtained simultaneously, and according to the requirement of default model and resistivity, silicon materials are defeated
It is sent to different outlets and carries out difference sorting, improve the sorting efficiency of silicon materials, meanwhile, the automation of sorting is improved, is avoided artificial
Error caused by error.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (5)
1. a kind of silicon materials quick sorting method based on silicon materials tester, which is characterized in that including：
S1, silicon materials are sent to detection zone；
S2, detection detection zone in silicon materials type and resistivity, the type includes p-type, N-type；
S3, the resistivity of the silicon materials in detection zone is compared with resistivity threshold value, according to comparison result and detection zone
The type of silicon materials in domain is p-type or N-type, and the silicon materials of detection zone are sent to default outlet.
2. the silicon materials quick sorting method according to claim 1 based on silicon materials tester, which is characterized in that step
S3 is specifically included：
When silicon materials are p-type and resistivity is less than resistivity threshold value, silicon materials are sent to first outlet；
When silicon materials are p-type and resistivity is not less than resistivity threshold value, silicon materials are sent to second outlet；
When silicon materials are N-type and resistivity is less than resistivity threshold value, silicon materials are sent to third outlet；
When silicon materials are N-type and resistivity is not less than resistivity threshold value, silicon materials are sent to the 4th outlet.
3. the silicon materials quick sorting method according to claim 1 based on silicon materials tester, which is characterized in that step
In S3, the resistivity threshold value can be edited by user.
4. the silicon materials quick sorting method according to claim 1 based on silicon materials tester, which is characterized in that step
In S2, during the type and resistivity for detecting the silicon materials in detection zone, further include：By relative humidity in detection zone
It keeps within a preset range.
5. the silicon materials quick sorting method according to claim 1 based on silicon materials tester, which is characterized in that step
In S2, during the type and resistivity for detecting the silicon materials in detection zone, further include：Electromagnetic screen is carried out to detection zone
It covers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810648920.2A CN108807234A (en) | 2018-06-22 | 2018-06-22 | A kind of silicon materials quick sorting method based on silicon materials tester |
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| CN201810648920.2A CN108807234A (en) | 2018-06-22 | 2018-06-22 | A kind of silicon materials quick sorting method based on silicon materials tester |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201096867Y (en) * | 2007-08-15 | 2008-08-06 | 新疆新能源股份有限公司 | Multi-function tester for measuring semiconductor silicon material P/N and resistance rate |
| CN101968511A (en) * | 2010-09-27 | 2011-02-09 | 成都理工大学 | Small electrode experiment device for measuring resistivity of mineral and solid insulating material |
| WO2013067573A1 (en) * | 2011-11-07 | 2013-05-16 | Bt Imaging Pty Ltd | Wafer grading and sorting for photovoltaic cell manufacture |
| CN104635054A (en) * | 2015-02-11 | 2015-05-20 | 华北电力大学 | Closed-type temperature control solid medium electrical resistivity measurement device |
| CN105425135A (en) * | 2015-12-25 | 2016-03-23 | 江苏盎华光伏工程技术研究中心有限公司 | Polysilicon material intelligent detection and classified transport device and method |
| CN108172661A (en) * | 2017-12-26 | 2018-06-15 | 温州市赛拉弗能源有限公司 | Solar cell production process |
-
2018
- 2018-06-22 CN CN201810648920.2A patent/CN108807234A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201096867Y (en) * | 2007-08-15 | 2008-08-06 | 新疆新能源股份有限公司 | Multi-function tester for measuring semiconductor silicon material P/N and resistance rate |
| CN101968511A (en) * | 2010-09-27 | 2011-02-09 | 成都理工大学 | Small electrode experiment device for measuring resistivity of mineral and solid insulating material |
| WO2013067573A1 (en) * | 2011-11-07 | 2013-05-16 | Bt Imaging Pty Ltd | Wafer grading and sorting for photovoltaic cell manufacture |
| CN104635054A (en) * | 2015-02-11 | 2015-05-20 | 华北电力大学 | Closed-type temperature control solid medium electrical resistivity measurement device |
| CN105425135A (en) * | 2015-12-25 | 2016-03-23 | 江苏盎华光伏工程技术研究中心有限公司 | Polysilicon material intelligent detection and classified transport device and method |
| CN108172661A (en) * | 2017-12-26 | 2018-06-15 | 温州市赛拉弗能源有限公司 | Solar cell production process |
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Application publication date: 20181113 |
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