EP2748845A4 - Wafer structure for electronic integrated circuit manufacturing - Google Patents
Wafer structure for electronic integrated circuit manufacturingInfo
- Publication number
- EP2748845A4 EP2748845A4 EP12825755.7A EP12825755A EP2748845A4 EP 2748845 A4 EP2748845 A4 EP 2748845A4 EP 12825755 A EP12825755 A EP 12825755A EP 2748845 A4 EP2748845 A4 EP 2748845A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- integrated circuit
- circuit manufacturing
- wafer structure
- electronic integrated
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/32—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66136—PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/868—PIN diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Recrystallisation Techniques (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/218,292 US9378956B2 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
US13/218,352 US20130049178A1 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
US13/218,335 US9312133B2 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
US13/218,308 US9396947B2 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
US13/218,345 US20130049175A1 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
US13/218,273 US9378955B2 (en) | 2011-08-25 | 2011-08-25 | Wafer structure for electronic integrated circuit manufacturing |
PCT/US2012/052302 WO2013028988A1 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2748845A1 EP2748845A1 (en) | 2014-07-02 |
EP2748845A4 true EP2748845A4 (en) | 2015-07-08 |
Family
ID=47746901
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12854047.3A Withdrawn EP2748849A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12825109.7A Withdrawn EP2748844A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12826508.9A Withdrawn EP2748848A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12825755.7A Withdrawn EP2748845A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12825811.8A Withdrawn EP2748846A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12826159.1A Withdrawn EP2748847A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12854047.3A Withdrawn EP2748849A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12825109.7A Withdrawn EP2748844A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12826508.9A Withdrawn EP2748848A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12825811.8A Withdrawn EP2748846A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
EP12826159.1A Withdrawn EP2748847A4 (en) | 2011-08-25 | 2012-08-24 | Wafer structure for electronic integrated circuit manufacturing |
Country Status (2)
Country | Link |
---|---|
EP (6) | EP2748849A4 (en) |
WO (6) | WO2013028976A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2996152B1 (en) * | 2014-09-15 | 2017-03-15 | ABB Schweiz AG | High frequency power diode and method for manufacturing the same |
DE102017002935A1 (en) * | 2017-03-24 | 2018-09-27 | 3-5 Power Electronics GmbH | III-V semiconductor diode |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4240844A (en) * | 1978-12-22 | 1980-12-23 | Westinghouse Electric Corp. | Reducing the switching time of semiconductor devices by neutron irradiation |
DE3435464A1 (en) * | 1984-09-27 | 1986-04-10 | Robert Bosch Gmbh, 7000 Stuttgart | Rectifier diode |
WO1992009099A1 (en) * | 1990-11-14 | 1992-05-29 | Robert Bosch Gmbh | Method of manufacturing semiconductor elements, in particular diodes |
US20110042576A1 (en) * | 2009-08-20 | 2011-02-24 | Icemos Technology Ltd. | Direct wafer-bonded through-hole photodiode |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2579979B2 (en) * | 1987-02-26 | 1997-02-12 | 株式会社東芝 | Method for manufacturing semiconductor device |
JPH07107935B2 (en) * | 1988-02-04 | 1995-11-15 | 株式会社東芝 | Semiconductor device |
US5017508A (en) * | 1989-06-29 | 1991-05-21 | Ixys Corporation | Method of annealing fully-fabricated, radiation damaged semiconductor devices |
US5648288A (en) * | 1992-03-20 | 1997-07-15 | Siliconix Incorporated | Threshold adjustment in field effect semiconductor devices |
JPH07263721A (en) * | 1994-03-25 | 1995-10-13 | Nippondenso Co Ltd | Semiconductor device and manufacture thereof |
US5541122A (en) * | 1995-04-03 | 1996-07-30 | Motorola Inc. | Method of fabricating an insulated-gate bipolar transistor |
US6054369A (en) * | 1997-06-30 | 2000-04-25 | Intersil Corporation | Lifetime control for semiconductor devices |
US6027956A (en) * | 1998-02-05 | 2000-02-22 | Integration Associates, Inc. | Process for producing planar dielectrically isolated high speed pin photodiode |
US6274892B1 (en) * | 1998-03-09 | 2001-08-14 | Intersil Americas Inc. | Devices formable by low temperature direct bonding |
US6346460B1 (en) * | 1999-03-30 | 2002-02-12 | Seh-America | Low cost silicon substrate with impurity gettering and latch up protection and method of manufacture |
DE60141096D1 (en) * | 2000-04-11 | 2010-03-11 | Boeing Co | Processing system with majority decision |
US7518218B2 (en) * | 2005-03-03 | 2009-04-14 | Aeroflex Colorado Springs, Inc. | Total ionizing dose suppression transistor architecture |
EP1949425A4 (en) * | 2005-10-14 | 2010-08-18 | Silicon Space Technology Corp | Radiation hardened isolation structures and fabrication methods |
DE102005061263B4 (en) * | 2005-12-20 | 2007-10-11 | Infineon Technologies Austria Ag | Semiconductor wafer substrate for power semiconductor devices and method of making the same |
US7566951B2 (en) * | 2006-04-21 | 2009-07-28 | Memc Electronic Materials, Inc. | Silicon structures with improved resistance to radiation events |
JP5320679B2 (en) * | 2007-02-28 | 2013-10-23 | 富士電機株式会社 | Semiconductor device and manufacturing method thereof |
US8791547B2 (en) * | 2008-01-21 | 2014-07-29 | Infineon Technologies Ag | Avalanche diode having an enhanced defect concentration level and method of making the same |
KR20090106828A (en) * | 2008-04-07 | 2009-10-12 | 삼성전자주식회사 | Wafer bonding method and bonded wafer structure using the same |
US8288798B2 (en) * | 2010-02-10 | 2012-10-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Step doping in extensions of III-V family semiconductor devices |
-
2012
- 2012-08-24 WO PCT/US2012/052280 patent/WO2013028976A1/en unknown
- 2012-08-24 WO PCT/US2012/052302 patent/WO2013028988A1/en unknown
- 2012-08-24 EP EP12854047.3A patent/EP2748849A4/en not_active Withdrawn
- 2012-08-24 EP EP12825109.7A patent/EP2748844A4/en not_active Withdrawn
- 2012-08-24 EP EP12826508.9A patent/EP2748848A4/en not_active Withdrawn
- 2012-08-24 EP EP12825755.7A patent/EP2748845A4/en not_active Withdrawn
- 2012-08-24 WO PCT/US2012/052269 patent/WO2013028973A1/en unknown
- 2012-08-24 EP EP12825811.8A patent/EP2748846A4/en not_active Withdrawn
- 2012-08-24 WO PCT/US2012/052293 patent/WO2013028983A1/en unknown
- 2012-08-24 EP EP12826159.1A patent/EP2748847A4/en not_active Withdrawn
- 2012-08-24 WO PCT/US2012/052264 patent/WO2013081694A2/en unknown
- 2012-08-24 WO PCT/US2012/052299 patent/WO2013028986A1/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4240844A (en) * | 1978-12-22 | 1980-12-23 | Westinghouse Electric Corp. | Reducing the switching time of semiconductor devices by neutron irradiation |
DE3435464A1 (en) * | 1984-09-27 | 1986-04-10 | Robert Bosch Gmbh, 7000 Stuttgart | Rectifier diode |
WO1992009099A1 (en) * | 1990-11-14 | 1992-05-29 | Robert Bosch Gmbh | Method of manufacturing semiconductor elements, in particular diodes |
US20110042576A1 (en) * | 2009-08-20 | 2011-02-24 | Icemos Technology Ltd. | Direct wafer-bonded through-hole photodiode |
Non-Patent Citations (4)
Title |
---|
A. OCHOA ET AL: "Latch-Up Control in CMOS Integrated Circuits", IEEE TRANSACTIONS ON NUCLEAR SCIENCE, vol. 26, no. 6, 1 December 1979 (1979-12-01), pages 5065 - 5068, XP055191893, ISSN: 0018-9499, DOI: 10.1109/TNS.1979.4330274 * |
DUBUC J P ET AL: "Technological parameter and experimental set-up influences on latch-up triggering level in bulk CMOS device", RADIATION AND ITS EFFECTS ON COMPONENTS AND SYSTEMS, 1993.,RADECS 93., SECOND EUROPEAN CONFERENCE ON ST. MALO, FRANCE 13-16 SEPT. 1993, NEW YORK, NY, USA,IEEE, 13 September 1993 (1993-09-13), pages 425 - 432, XP010120707, ISBN: 978-0-7803-1793-2 * |
SCHUHMACHER H ET AL: "Quasi-monoenergetic neutron beams with energies from 25 to 70 MeV", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS, AND ASSOCIATED EQUIPMENT, ELSEVIER BV * NORTH-HOLLAND, NL, vol. 421, no. 1-2, 21 January 1999 (1999-01-21), pages 284 - 295, XP004153421, ISSN: 0168-9002, DOI: 10.1016/S0168-9002(98)01267-4 * |
See also references of WO2013028988A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2748844A1 (en) | 2014-07-02 |
EP2748847A1 (en) | 2014-07-02 |
WO2013028973A1 (en) | 2013-02-28 |
EP2748846A4 (en) | 2015-11-11 |
WO2013028983A1 (en) | 2013-02-28 |
EP2748844A4 (en) | 2015-11-04 |
WO2013028976A1 (en) | 2013-02-28 |
EP2748849A2 (en) | 2014-07-02 |
EP2748847A4 (en) | 2016-06-01 |
EP2748849A4 (en) | 2015-12-16 |
EP2748846A1 (en) | 2014-07-02 |
EP2748848A4 (en) | 2015-06-10 |
WO2013028986A1 (en) | 2013-02-28 |
WO2013081694A3 (en) | 2013-10-24 |
EP2748845A1 (en) | 2014-07-02 |
WO2013081694A2 (en) | 2013-06-06 |
WO2013028988A1 (en) | 2013-02-28 |
EP2748848A1 (en) | 2014-07-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20140324 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
RA4 | Supplementary search report drawn up and despatched (corrected) |
Effective date: 20150609 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/263 20060101ALI20150602BHEP Ipc: H01L 27/092 20060101ALI20150602BHEP Ipc: H01L 21/8238 20060101AFI20150602BHEP Ipc: H01L 29/868 20060101ALI20150602BHEP Ipc: H01L 29/32 20060101ALI20150602BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20180301 |