EP2666340B1 - Coplanar dielectric barrier discharge source for a surface treatment under atmospheric pressure - Google Patents

Coplanar dielectric barrier discharge source for a surface treatment under atmospheric pressure Download PDF

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Publication number
EP2666340B1
EP2666340B1 EP11852212.7A EP11852212A EP2666340B1 EP 2666340 B1 EP2666340 B1 EP 2666340B1 EP 11852212 A EP11852212 A EP 11852212A EP 2666340 B1 EP2666340 B1 EP 2666340B1
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Prior art keywords
discharge source
grooves
coplanar
electrodes
range
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EP11852212.7A
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German (de)
French (fr)
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EP2666340A2 (en
Inventor
Wolfgang Viöl
Dennis Hoffmeister
Roland Damm
Stephan Wieneke
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Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen
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Hochschule fuer Angewandte Wissenschaft und Kunst Hildesheim Holzminden Gottingen
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

Definitions

  • the invention relates to a coplanar dielectric discharge source having two elongated electrodes which have a common dielectric shield and which are parallel to each other and parallel to a free surface of the shield.
  • a discharge source typically provides a plasma due to an electrical discharge through a gas.
  • the gas discharge is dielectrically impeded.
  • Such a dielectric barrier often allows the gas discharge to be ignited and maintained at atmospheric pressure in a working gas or air.
  • other reactive species are generated by a gas discharge, which are not necessarily to be described as plasma. Therefore, it is deliberately not restricted to a plasma source.
  • two electrodes are not diametrically opposed by gas volume, but both electrodes are under the same surface of a dielectric.
  • an object with a surface to be treated which is brought into the vicinity of the surface of the dielectric in front of the electrodes, does not act as a counterelectrode.
  • a surface opposite the free surface of the dielectric is much less bombarded with ions than one with a surface of a surface acting as a counter electrode of the gas discharge to a plasma or generally to be treated with reactive species from a gas discharge.
  • a coplanar dielectric discharge source therefore lends itself to surface treatment under atmospheric pressure even from sensitive surfaces, such as those of biological material, including human skin.
  • the treatment of biological materials by means of a dielectric discharge source at atmospheric pressure is z. B. from the DE 103 24 926 B3 basically known.
  • a dielectric discharge source having two elongate electrodes which are parallel to each other and each disposed within a hollow fiber of dielectric material is known.
  • the two electrodes function as an electrode or counter electrode for a dielectrically impeded gas discharge which forms over the dielectric of the hollow fibers.
  • a microchannel plasma device in which plasma-driving electrodes are embedded in a flat body of oxide parallel to each other. Parallel to the electrodes and between them, microchannels are introduced into a surface of the molding. The two adjacent to a microchannel electrodes, which are isolated from the channel by the oxide, each individually be driven to generate plasma in the channel.
  • a planar electrode is provided in the oxide shaped body, and a counter electrode faces the parallel microchannels in the one surface of the molded body, and in turn opposite the channels, which are electrically insulated.
  • a large-area radiator which generates ultraviolet radiation by means of a dielectric discharge.
  • mutually parallel electrodes are provided with grooves in their respective dielectric shield.
  • the grooves may be triangular or circular in cross section and have no sharp corners or edges.
  • the axes of the grooves are perpendicular to the conductive elements of the electrodes and perpendicular to one of a plurality of electrodes arranged parallel to each other formed electrode array.
  • the grooves in the dielectric shields of the individual electrodes are thus opposite each other.
  • the dielectrically impeded discharge takes place between the electrodes.
  • the invention has for its object to provide a dielectric Koplanarentladungsario that is particularly well suited for forming a mobile hand-held device for surface treatments at atmospheric pressure, in particular low-stimulus planar treatments of biological material, but also simple Lacktechnischsvornessen of electrically poorly conductive substrates such. As plastics to perform.
  • the object of the invention is achieved by a coplanar dielectric discharge source having the features of independent claim 1.
  • the claims 2 to 10 relate to preferred embodiments of the new coplanar discharge source.
  • Claim 11 is directed to a specific use of the new coplanar discharge source.
  • the shield has grooves in the free surface transverse to the electrodes.
  • the course of the grooves transversely to the electrodes means that the grooves are not aligned parallel to the grooves and extend as short a path as possible from one electrode to the other electrode.
  • the grooves can also run diagonally to the electrodes; which is not preferred.
  • the grooves or grooves result in a modulation of the electric field across the free surface which facilitates the ignition of the gas discharge over the entire area of the free surface provided with the grooves.
  • the gas discharge and thus the resulting plasma or other reactive species are distributed evenly over the free surface of the dielectric and thus allow a uniform large-area treatment.
  • the grooves prevent in the case of placing the free surface of the dielectric on a surface to be treated a full-surface investment of the free surface on the surface.
  • the grooves still form channels with a defined free cross section, in which the gas discharge can continue to take place.
  • the grooves extend in the free surface of the dielectric in the new coplanar discharge source with respect to their length at least from one of the electrodes to the other electrode. It is preferred if the grooves extend across the full width of the shielding transversely to the main direction of extension of the electrodes.
  • the grooves run parallel to one another and thus in the projection onto the free surface perpendicular to the electrodes. This implies that the grooves have a straight course.
  • a lateral spacing of the grooves is typically 0.5 to 2 times the width of the grooves. It is preferred if the lateral spacing of the grooves is the same size as the width of the grooves. In absolute terms, the width of the grooves is in a typical range of 0.2 to 3 mm, preferably a width of 0.8 to 1.2 mm, ie about 1 mm.
  • the depth of the grooves is typically in a range of 0.2 to 2 mm. Preferably, the depth is 0.3 to 0.7 mm, d. H. about 0.5 mm.
  • the grooves generally have a rectangular free cross section; but also a slightly trapezoidal free cross-section is possible. Less preferred is a triangular or semicircular free cross section of the grooves.
  • the electrodes in the new coplanar discharge source in turn, preferably run in a straight line at a distance of 2 to 20 mm from each other and also to the free surface of the dielectric. Particularly preferably, these two distances 8 to 12 mm, d. H. about 1 cm.
  • the electrodes are regularly each longer than their lateral distance, preferably by a multiple.
  • the prerequisites for generating a defined dielectrically impeded discharge over the free surface are particularly good in the case of the new coplanar discharge source. They therefore make it possible to operate an AC voltage source for applying the AC voltage required for the gas discharge between the two electrodes also from batteries or other accumulators.
  • the new coplanar discharge source can have a pulsed AC voltage source which applies a bipolar AC voltage of high-frequency pulse packets in the form of decaying sinusoidal oscillations between the electrodes.
  • the natural frequency of these sinusoidal oscillations may be in a typical range of 10 kHz to 200 kHz, for example about 40 kHz, while a repetition frequency of the pulse packets is in a typical range of 200 Hz to 10 kHz and can also be varied within this range to be optimal Conditions provided by the applied bipolar alternating high voltage for each desired treatment of a surface at atmospheric pressure.
  • the amplitude of the alternating high voltage is typically in the kilovolt range. It is about 35 kV at the beginning of the pulse packets.
  • An AC voltage source with the electrical parameters defined above can easily be part of a battery-powered or accumulator-operated hand-held device, so that the new coplanar discharge source can be used simply and mobile.
  • Preferred uses of the novel coplanar discharge source are the treatment of biological material, particularly human skin, and the paint pretreatment of surfaces of poorly electrically conductive materials, in particular Plastics, such as plastic bumpers and plastic housings, especially of motor vehicles, in preparation for repainting.
  • the new coplanar discharge source 10 incorporated in the Fig. 1 and 2 has two elongate and at a fixed distance parallel to each other arranged electrodes 1.
  • the electrodes 1 are embedded in a solid body 11 of a dielectric 2, which forms a dielectric shield 12 of the electrodes.
  • a free surface 13 of the shield 12 which faces an object 4 with a surface 14 to be treated, 1 grooves 5 are provided transversely to the course of the electrodes.
  • the grooves 5 extend over the entire width of the shield 12 parallel to each other. Their width is about the same as their lateral distance and is in each case about 1 mm.
  • the depth of the grooves 5 is at a rectangular free cross section of the grooves 5 is about 0.5 mm. D.
  • the width and the depth of the grooves 5 is in Fig. 2 not reproduced to scale. This also applies to the distance of the electrodes 1 from each other and to the surface 13, which is in each case about 1 cm.
  • the grooves 5 deform the electric field across the free surface 13 upon application of a voltage between the electrodes 1 to an AC voltage source 15 (only in FIG Fig. 1 shown). This deformation of the electric field leads to a lighter ignition of the gas discharge in the region of the grooves 5 and prevents extinction of the gas discharge even when the coplanar discharge source 10 is placed with the free surface 13 on the surface 14 of the object 4 to be treated.
  • an electrical discharge is also formed, which is hindered by the dielectric 2, but primarily in the regions between the regions of the surface 13 in front of both electrodes and the directly opposite regions of the surface 14 of the object 4.
  • the AC voltage source applies a pulsed alternating high voltage between the two electrodes 1.
  • the maximum amplitude of this alternating high voltage is 35 kV.
  • the alternating high voltage consists of pulse clocks whose repetition frequency can be varied between 200 Hz and 10 kHz.
  • the waveform of the individual pulse packets is a decaying sine wave with a natural frequency of about 40 kHz.
  • the new coplanar discharge source is particularly suitable for low-irritation treatment of biological material, such as human skin, because on the surface to be treated in principle no relevant current flows and no relevant ion bombardment takes place. Rather, a sliding discharge 3 occurs which, starting from the grooves 5, extends over the entire free surface 14 of the dielectric shield 12 in front of Electrodes 1 spreads.
  • the new coplanar discharge source is in a paint pretreatment of surfaces of poorly electrically conductive materials, such as plastics.
  • the coplanar discharge source can be used to treat plastic bumpers or plastic rear-view mirror housings or other plastic parts of motor vehicles before repainting.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Description

TECHNISCHES GEBIET DER ERFINDUNGTECHNICAL FIELD OF THE INVENTION

Die Erfindung bezieht sich auf eine dielektrische Koplanarentladungsquelle mit zwei gestreckten Elektroden, die eine gemeinsame Abschirmung aus Dielektrikum aufweisen und die parallel zueinander und parallel zu einer freien Oberfläche der Abschirmung verlaufen.The invention relates to a coplanar dielectric discharge source having two elongated electrodes which have a common dielectric shield and which are parallel to each other and parallel to a free surface of the shield.

STAND DER TECHNIKSTATE OF THE ART

Eine Entladungsquelle, so wie dieser Begriff hier verwendet wird, stellt typischerweise ein Plasma aufgrund einer elektrischen Entladung durch ein Gas bereit. Bei einer dielektrischen Entladungsquelle ist die Gasentladung dielektrisch behindert. Eine derartige dielektrische Behinderung erlaubt es häufig, die Gasentladung bei Atmosphärendruck in einem Arbeitsgas oder Luft zu zünden und aufrecht zu erhalten. Neben dem Plasma, worunter hier ausschließlich ein physikalisches Plasma zu verstehen ist, werden durch eine Gasentladung auch andere reaktive Spezies erzeugt, die nicht zwingend als Plasma zu bezeichnen sind. Deshalb wird hier bewusst nicht einschränkend von einer Plasmaquelle gesprochen.A discharge source, as that term is used herein, typically provides a plasma due to an electrical discharge through a gas. In a dielectric discharge source, the gas discharge is dielectrically impeded. Such a dielectric barrier often allows the gas discharge to be ignited and maintained at atmospheric pressure in a working gas or air. In addition to the plasma, which is to be understood here exclusively as a physical plasma, other reactive species are generated by a gas discharge, which are not necessarily to be described as plasma. Therefore, it is deliberately not restricted to a plasma source.

Bei dielektrischen Koplanarentladungsquellen liegen sich zwei Elektroden nicht diametral über ein Gasvolumen gegenüber, sondern beide Elektroden liegen unter derselben Oberfläche eines Dielektrikums. Insbesondere wirkt dabei ein Objekt mit einer zu behandelnden Oberfläche, das in die Nähe der Oberfläche des Dielektrikums vor den Elektroden gebracht wird, nicht als Gegenelektrode. Dies führt dazu, dass eine der freien Oberfläche des Dielektrikums gegenüberliegende Oberfläche sehr viel weniger stark mit Ionen bombardiert wird als eine mit einem Plasma oder allgemein mit reaktiven Spezies aus einer Gasentladung zu behandelnde Oberfläche eines als Gegenelektrode der Gasentladung wirkenden Objekts.In coplanar dielectric discharge sources, two electrodes are not diametrically opposed by gas volume, but both electrodes are under the same surface of a dielectric. In particular, an object with a surface to be treated, which is brought into the vicinity of the surface of the dielectric in front of the electrodes, does not act as a counterelectrode. As a result, a surface opposite the free surface of the dielectric is much less bombarded with ions than one with a surface of a surface acting as a counter electrode of the gas discharge to a plasma or generally to be treated with reactive species from a gas discharge.

Eine dielektrische Koplanarentladungsquelle bietet sich daher zur Oberflächenbehandlung unter Atmosphärendruck auch von empfindlichen Oberflächen, wie beispielsweise solchen von biologischem Material, einschließlich menschlicher Haut, an. Die Behandlung von biologischen Materialien mit Hilfe einer dielektrischen Entladungsquelle bei Atmosphärendruck ist z. B. aus der DE 103 24 926 B3 grundsätzlich bekannt.A coplanar dielectric discharge source therefore lends itself to surface treatment under atmospheric pressure even from sensitive surfaces, such as those of biological material, including human skin. The treatment of biological materials by means of a dielectric discharge source at atmospheric pressure is z. B. from the DE 103 24 926 B3 basically known.

Aus Shahid Rauf und Mark J. Kushner: Dynamics of a coplanar-electrode plasma display panel cell. I. Basic operation, Journal of Applied Physics, Vol. 85, No. 7, S. 3460-3469 ist eine dielektrische Koplanarentladungsquelle mit zwei gestreckten Elektroden, die eine gemeinsame Abschirmung aus Dielektrikum aufweisen und die parallel zueinander und parallel zu einer freien Oberfläche der freien Abschirmung verlaufen, als Teil eines Leuchtdisplays bekannt, in dem in einem Xenonplasma auftretende UV-Strahlung durch Phosphor in sichtbares Licht umgewandelt wird. Für eine Oberflächenbehandlung insbesondere von biologischen Materialien ist diese dielektrische Koplanarentladungsquelle weder vorgesehen, noch geeignet.Out Shahid Rauf and Mark J. Kushner: Dynamics of a coplanar-electrode plasma display panel cell. I. Basic operation, Journal of Applied Physics, Vol. 7, pp. 3460-3469 is a dielectric coplanar discharge source having two elongate electrodes, which have a common dielectric barrier and which are parallel to each other and parallel to a free shield free surface, as part of a light-emitting display, in which UV radiation occurring in a xenon plasma is converted by phosphorous into visible light Light is converted. For a surface treatment, in particular of biological materials, this coplanar dielectric discharge source is neither intended nor suitable.

Aus der DE 10 2007 030 915 A1 ist eine dielektrische Entladungsquelle mit zwei gestreckten Elektroden bekannt, die parallel zueinander verlaufen und jeweils innerhalb einer Hohlfaser aus dielektrischem Material angeordnet sind. Bei Anlegen einer entsprechenden Spannung fungieren die beiden Elektroden als Elektrode bzw. Gegenelektrode für eine sich über dem Dielektrikum der Hohlfasern ausbildende dielektrisch behinderte Gasentladung.From the DE 10 2007 030 915 A1 For example, a dielectric discharge source having two elongate electrodes which are parallel to each other and each disposed within a hollow fiber of dielectric material is known. When a corresponding voltage is applied, the two electrodes function as an electrode or counter electrode for a dielectrically impeded gas discharge which forms over the dielectric of the hollow fibers.

Z. B. aus der EP 1 534 099 A1 ist es bekannt, ein elektrisch schlecht leitende Oberfläche mit Hilfe einer dielektrisch behinderten Entladung unter Atmosphärendruck für eine Lackierung vorzubehandeln. Nach der EP 1 534 099 A1 ist diese Oberfläche diejenige eines Finger- oder Zehennagels.For example, from the EP 1 534 099 A1 It is known to pretreat an electrically poorly conductive surface by means of a dielectrically impeded discharge under atmospheric pressure for painting. After EP 1 534 099 A1 this surface is that of a finger or toe nail.

Aus der WO 2009/140509 A1 ist eine Mikrokanalplasmavorrichtung bekannt, bei der in einen flachen Körper aus einem Oxid parallel zueinander verlaufenden, dass plasmatreibende Elektroden eingebettet sind. Parallel zu den Elektroden und jeweils zwischen Ihnen, sind Mikrokanäle in eine Oberfläche des Formkörpers eingebracht. Die beiden an einen Mikrokanal angrenzenden Elektroden, die gegenüber dem Kanal durch das Oxid isoliert sind, können jeweils einzeln zur Erzeugung von Plasma in dem Kanal angesteuert werden. In einer alternativen Ausführungsform der Mikrokanalplasmavorrichtung ist in dem Formkörper aus Oxid eine flächige Elektrode vorgesehen, und eine Gegenelektrode liegt den parallelen Mikrokanälen in der einen Oberfläche des Formköpers gegenüber und dabei ihrerseits gegenüber den Kanälen, die elektrisch isoliert.From the WO 2009/140509 A1 For example, a microchannel plasma device is known in which plasma-driving electrodes are embedded in a flat body of oxide parallel to each other. Parallel to the electrodes and between them, microchannels are introduced into a surface of the molding. The two adjacent to a microchannel electrodes, which are isolated from the channel by the oxide, each individually be driven to generate plasma in the channel. In an alternative embodiment of the microchannel plasma apparatus, a planar electrode is provided in the oxide shaped body, and a counter electrode faces the parallel microchannels in the one surface of the molded body, and in turn opposite the channels, which are electrically insulated.

Aus der WO 02/23960 A1 ist eine dielektrische Koplanarentladungsquelle mit den Merkmalen des Oberbegriffs des unabhängigen Patentanspruchs 1 bekannt.From the WO 02/23960 A1 a coplanar dielectric discharge source having the features of the preamble of independent claim 1 is known.

Aus der WO 99/41767 A1 ist ein großflächiger Strahler bekannt, der ultraviolette Strahlung durch eine dielektrische Entladung erzeugt. Um die Orte von erzeugten Plasmamikrofilamenten in dem Strahler zu verteilen, sind parallel zueinander angeordnete Elektroden mit Rillen in ihrer jeweiligen dielektrischen Abschirmung versehen. Die Rillen können von dreieckigem Querschnitt oder rundem Querschnitt sein und haben keine scharfen Ecken oder Kanten. Die Achsen der Rillen verlaufen senkrecht zu den leitfähigen Elementen der Elektroden und senkrecht zu einem aus einer Mehrzahl von parallel zueinander angeordneten Elektroden ausgebildeten Elektrodenarray. Die Rillen in den dielektrischen Abschirmungen der einzelnen Elektroden liegen so einander gegenüber. Bei dem bekannten Strahler erfolgt die dielektrisch behinderte Entladung zwischen den Elektroden.From the WO 99/41767 A1 For example, a large-area radiator is known which generates ultraviolet radiation by means of a dielectric discharge. In order to distribute the locations of generated plasma microfilaments in the radiator, mutually parallel electrodes are provided with grooves in their respective dielectric shield. The grooves may be triangular or circular in cross section and have no sharp corners or edges. The axes of the grooves are perpendicular to the conductive elements of the electrodes and perpendicular to one of a plurality of electrodes arranged parallel to each other formed electrode array. The grooves in the dielectric shields of the individual electrodes are thus opposite each other. In the known radiator, the dielectrically impeded discharge takes place between the electrodes.

AUFGABE DER ERFINDUNGOBJECT OF THE INVENTION

Der Erfindung liegt die Aufgabe zugrunde, eine dielektrische Koplanarentladungsquelle aufzuzeigen, die besonders gut zur Ausbildung eines mobilen Handgeräts für Oberflächenbehandlungen bei Atmosphärendruck geeignet ist, um insbesondere reizarme flächige Behandlungen von biologischem Material, aber auch einfache Lackierungsvorbehandlungen von elektrisch schlecht leitenden Substraten, wie z. B. Kunststoffen, durchführen zu können.The invention has for its object to provide a dielectric Koplanarentladungsquelle that is particularly well suited for forming a mobile hand-held device for surface treatments at atmospheric pressure, in particular low-stimulus planar treatments of biological material, but also simple Lackierungsvorbehandlungen of electrically poorly conductive substrates such. As plastics to perform.

LÖSUNGSOLUTION

Die Aufgabe der Erfindung wird durch eine dielektrische Koplanarentladungsquelle mit den Merkmalen des unabhängigen Anspruchs 1 gelöst. Die Patentansprüche 2 bis 10 betreffen bevorzugte Ausführungsformen der neuen Koplanarentladungsquelle. Der Patentanspruch 11 ist auf eine spezielle Verwendungen der neuen Koplanarentladungsquelle gerichtet.The object of the invention is achieved by a coplanar dielectric discharge source having the features of independent claim 1. The claims 2 to 10 relate to preferred embodiments of the new coplanar discharge source. Claim 11 is directed to a specific use of the new coplanar discharge source.

BESCHREIBUNG DER ERFINDUNGDESCRIPTION OF THE INVENTION

Bei der neuen dielektrischen Koplanarentladungsquelle mit zwei gestreckten Elektroden, die eine gemeinsame Abschirmung aus Dielektrikum aufweisen und die parallel zueinander und parallel zu einer freien Oberfläche der Abschirmung verlaufen, weist die Abschirmung quer zu den Elektroden verlaufende Rillen in der freien Oberfläche auf. Dabei bedeutet der Verlauf der Rillen quer zu den Elektroden, dass die Rillen nicht parallel zu den Rillen ausgerichtet sind und sich auf möglichst kurzem Wege von vor der einen Elektrode bis vor die andere Elektrode erstrecken. Die Rillen können dabei auch diagonal zu den Elektroden verlaufen; was jedoch nicht bevorzugt ist. Die Rillen oder Nuten führen zu einer Modulation des elektrischen Feldes über der freien Oberfläche, die das Zünden der Gasentladung erleichtert, und zwar über den gesamten Bereich der mit den Rillen versehenen freien Oberfläche. D h., die Gasentladung und damit das hieraus resultierende Plasma oder andere reaktive Spezies verteilen sich gleichmäßig über die freie Oberfläche des Dielektrikums und erlauben damit eine gleichmäßige großflächige Behandlung. Zudem verhindern die Rillen im Falle eines Aufsetzens der freien Oberfläche des Dielektrikums auf eine zu behandelnde Oberfläche eine vollflächige Anlage der freien Oberfläche an der Oberfläche. Die Rillen bilden auch dann noch Kanäle mit definiertem freien Querschnitt aus, in denen die Gasentladung weiterhin stattfinden kann. Mit den erfindungsgemäßen Rillen wird der Betrieb einer dielektrischen Koplanarentladungsquelle sehr stark vereinfacht. Der dafür mit dem Einbringen der Rillen in die freie Oberfläche des Dielektrikums zu betreibende Aufwand ist nur gering.In the novel coplanar dielectric discharge source having two elongated electrodes which have a common dielectric barrier and which are parallel to each other and parallel to a free surface of the shield, the shield has grooves in the free surface transverse to the electrodes. The course of the grooves transversely to the electrodes means that the grooves are not aligned parallel to the grooves and extend as short a path as possible from one electrode to the other electrode. The grooves can also run diagonally to the electrodes; which is not preferred. The grooves or grooves result in a modulation of the electric field across the free surface which facilitates the ignition of the gas discharge over the entire area of the free surface provided with the grooves. That is, the gas discharge and thus the resulting plasma or other reactive species are distributed evenly over the free surface of the dielectric and thus allow a uniform large-area treatment. In addition, the grooves prevent in the case of placing the free surface of the dielectric on a surface to be treated a full-surface investment of the free surface on the surface. The grooves still form channels with a defined free cross section, in which the gas discharge can continue to take place. With the grooves according to the invention, the operation of a coplanar dielectric discharge source is greatly simplified. The effort to be made with the introduction of the grooves in the free surface of the dielectric is only small.

Die Rillen erstrecken sich in der freien Oberfläche des Dielektrikums bei der neuen Koplanarentladungsquelle bezogen auf Ihre Länge zumindest von vor der einen Elektrode bis vor die andere Elektrode. Bevorzugt ist es, wenn sich die Rillen über die volle Breite der Abschirmung quer zu der Haupterstreckungsrichtung der Elektroden erstrecken.The grooves extend in the free surface of the dielectric in the new coplanar discharge source with respect to their length at least from one of the electrodes to the other electrode. It is preferred if the grooves extend across the full width of the shielding transversely to the main direction of extension of the electrodes.

Weiterhin ist es bevorzugt, wenn die Rillen parallel zueinander und damit in der Projektion auf die freie Oberfläche senkrecht zu den Elektroden verlaufen. Dies schließt ein, dass die Rillen einen geradlinigen Verlauf aufweisen.Furthermore, it is preferred if the grooves run parallel to one another and thus in the projection onto the free surface perpendicular to the electrodes. This implies that the grooves have a straight course.

Ein seitlicher Abstand der Rillen ist typischerweise 0,5 bis 2-mal so groß wie eine Breite der Rillen. Bevorzugt ist es, wenn der seitliche Abstand der Rillen genauso groß ist wie die Breite der Rillen. Absolut liegt die Breite der Rillen in einem typischen Bereich von 0,2 bis 3 mm, bevorzugt ist eine Breite von 0,8 bis 1,2 mm, d. h. etwa 1 mm.A lateral spacing of the grooves is typically 0.5 to 2 times the width of the grooves. It is preferred if the lateral spacing of the grooves is the same size as the width of the grooves. In absolute terms, the width of the grooves is in a typical range of 0.2 to 3 mm, preferably a width of 0.8 to 1.2 mm, ie about 1 mm.

Die Tiefe der Rillen liegt typischerweise in einem Bereich von 0,2 bis 2 mm. Vorzugsweise beträgt die Tiefe 0,3 bis 0,7 mm, d. h. etwa 0,5 mm. Die Rillen weisen dabei in aller Regel einen rechteckigen freien Querschnitt auf; aber auch ein leicht trapezförmiger freier Querschnitt ist möglich. Weniger bevorzugt ist ein dreieckiger oder halbkreisförmiger freier Querschnitt der Rillen.The depth of the grooves is typically in a range of 0.2 to 2 mm. Preferably, the depth is 0.3 to 0.7 mm, d. H. about 0.5 mm. The grooves generally have a rectangular free cross section; but also a slightly trapezoidal free cross-section is possible. Less preferred is a triangular or semicircular free cross section of the grooves.

Die Elektroden verlaufen bei der neuen Koplanarentladungsquelle ihrerseits vorzugsweise geradlinig in einem Abstand von 2 bis 20 mm untereinander und auch zu der freien Oberfläche des Dielektrikums. Besonders bevorzugt betragen diese beiden Abstände 8 bis 12 mm, d. h. etwa 1 cm. Die Elektroden sind dabei regelmäßig jeweils länger als ihr seitlicher Abstand, vorzugsweise um ein Vielfaches.The electrodes in the new coplanar discharge source, in turn, preferably run in a straight line at a distance of 2 to 20 mm from each other and also to the free surface of the dielectric. Particularly preferably, these two distances 8 to 12 mm, d. H. about 1 cm. The electrodes are regularly each longer than their lateral distance, preferably by a multiple.

Die Voraussetzungen zur Erzeugung einer definierten dielektrisch behinderten Entladung über der freien Oberfläche sind bei der neuen Koplanarentladungsquelle besonders gut. Sie ermöglichen es daher, eine Wechselspannungsquelle zum Anlegen der für die Gasentladung benötigten Wechselspannung zwischen den beiden Elektroden auch aus Batterien oder anderen Akkumulatoren zu betreiben. Konkret kann die neue Koplanarentladungsquelle eine gepulste Wechselspannungsquelle aufweisen, die zwischen den Elektroden eine bipolare Wechselspannung aus hochfrequenten Pulspaketen in Form abklingender Sinusschwingungen anlegt. Die Eigenfrequenz dieser Sinusschwingungen kann in einem typischen Bereich von 10 kHz bis 200 kHz, beispielsweise bei etwa 40 kHz liegen, während eine Wiederholungsfrequenz der Pulspakete in einem typischen Bereich von 200 Hz bis 10 kHz liegt und innerhalb dieses Bereichs auch variiert werden kann, um optimale Bedingungen seitens der angelegten bipolaren Wechselhochspannung für die jeweils gewünschte Behandlung einer Oberfläche bei Atmosphärendruck bereitzustellen. Die Amplitude der Wechselhochspannung liegt typischerweise im Kilovoltbereich. Maximal beträgt sie zu Beginn der Pulspakete etwa 35 kV.The prerequisites for generating a defined dielectrically impeded discharge over the free surface are particularly good in the case of the new coplanar discharge source. They therefore make it possible to operate an AC voltage source for applying the AC voltage required for the gas discharge between the two electrodes also from batteries or other accumulators. In concrete terms, the new coplanar discharge source can have a pulsed AC voltage source which applies a bipolar AC voltage of high-frequency pulse packets in the form of decaying sinusoidal oscillations between the electrodes. The natural frequency of these sinusoidal oscillations may be in a typical range of 10 kHz to 200 kHz, for example about 40 kHz, while a repetition frequency of the pulse packets is in a typical range of 200 Hz to 10 kHz and can also be varied within this range to be optimal Conditions provided by the applied bipolar alternating high voltage for each desired treatment of a surface at atmospheric pressure. The amplitude of the alternating high voltage is typically in the kilovolt range. It is about 35 kV at the beginning of the pulse packets.

Eine Wechselspannungsquelle mit den oben definierten elektrischen Parametern kann ohne weiteres Teil eines batterie- oder akkumulatorbetriebenen Handgeräts sein, so dass die neue Koplanarentladungsquelle einfach und mobil einsetzbar ist.An AC voltage source with the electrical parameters defined above can easily be part of a battery-powered or accumulator-operated hand-held device, so that the new coplanar discharge source can be used simply and mobile.

Bevorzugte Verwendungen der neuen Koplanarentladungsquelle sind die Behandlung von biologischem Material, insbesondere von menschlicher Haut, und die Lackierungsvorbehandlung von Oberflächen von schlecht elektrisch leitenden Materialien, insbesondere Kunststoffen, wie beispielsweise Kunststoffstoßstangen und Kunststoffgehäusen, insbesondere von Kraftfahrzeugen, zur Vorbereitung für eine Neulackierung.Preferred uses of the novel coplanar discharge source are the treatment of biological material, particularly human skin, and the paint pretreatment of surfaces of poorly electrically conductive materials, in particular Plastics, such as plastic bumpers and plastic housings, especially of motor vehicles, in preparation for repainting.

Vorteilhafte Weiterbildungen der Erfindung ergeben sich aus den Patentansprüchen, der Beschreibung und den Zeichnungen. Die in der Beschreibungseinleitung genannten Vorteile von Merkmalen und von Kombinationen mehrerer Merkmale sind lediglich beispielhaft und können alternativ oder kumulativ zur Wirkung kommen, ohne dass die Vorteile zwingend von erfindungsgemäßen Ausführungsformen erzielt werden müssen. Weitere Merkmale sind den Zeichnungen - insbesondere den dargestellten Geometrien und den relativen Abmessungen mehrerer Bauteile zueinander sowie deren relativer Anordnung und Wirkverbindung - zu entnehmen. Die Kombination von Merkmalen unterschiedlicher Ausführungsformen der Erfindung oder von Merkmalen unterschiedlicher Patentansprüche ist ebenfalls abweichend von den gewählten Rückbeziehungen der Patentansprüche möglich und wird hiermit angeregt. Dies betrifft auch solche Merkmale, die in separaten Zeichnungen dargestellt sind oder bei deren Beschreibung genannt werden. Diese Merkmale können auch mit Merkmalen unterschiedlicher Patentansprüche kombiniert werden.Advantageous developments of the invention will become apparent from the claims, the description and the drawings. The advantages of features and of combinations of several features mentioned in the introduction to the description are merely exemplary and can come into effect alternatively or cumulatively, without the advantages having to be achieved by embodiments according to the invention. Further features are the drawings - in particular the illustrated geometries and the relative dimensions of several components to each other and their relative arrangement and operative connection - refer. The combination of features of different embodiments of the invention or of features of different claims is also possible deviating from the chosen relationships of the claims and is hereby stimulated. This also applies to those features which are shown in separate drawings or are mentioned in their description. These features can also be combined with features of different claims.

KURZBESCHREIBUNG DER FIGURENBRIEF DESCRIPTION OF THE FIGURES

Die Erfindung wird im Folgenden anhand eines Ausführungsbeispiels unter Bezugnahme auf die beigefügten Zeichnungen näher erläutert und beschrieben.

Fig. 1
ist ein Querschnitt durch den prinzipiellen Aufbau der neuen Koplanarentladungsquelle; und
Fig. 2
ist ein Längsschnitt durch den prinzipiellen Aufbau gemäß Fig. 1.
The invention is explained in more detail below with reference to an embodiment with reference to the accompanying drawings and described.
Fig. 1
is a cross section through the basic structure of the new Koplanarentladungsquelle; and
Fig. 2
is a longitudinal section through the basic structure according to Fig. 1 ,

FIGURENBESCHREIBUNGDESCRIPTION OF THE FIGURES

Die neue Koplanarentladungsquelle 10, die in den Fig. 1 und 2 dargestellt ist, weist zwei langgestreckte und in einem festen Abstand parallel zueinander angeordnete Elektroden 1 auf. Die Elektroden 1 sind in einen Festkörper 11 aus einem Dielektrikum 2 eingebettet, das eine dielektrische Abschirmung 12 der Elektroden ausbildet. In einer freien Oberfläche 13 der Abschirmung 12, die einem Objekt 4 mit einer zu behandelnden Oberfläche 14 gegenüberliegt, sind quer zum Verlauf der Elektroden 1 Rillen 5 vorgesehen. Die Rillen 5 verlaufen über die gesamte Breite der Abschirmung 12 parallel zueinander. Ihre Breite ist dabei etwa genauso groß wie ihr seitlicher Abstand und beträgt jeweils etwa 1 mm. Die Tiefe der Rillen 5 beträgt bei rechteckigem freien Querschnitt der Rillen 5 etwa 0,5 mm. D. h., die Breite und die Tiefe der Rillen 5 ist in Fig. 2 nicht maßstabsgetreu wiedergegeben. Dies gilt auch für den Abstand der Elektroden 1 untereinander und zu der Oberfläche 13, der jeweils etwa 1 cm beträgt. Die Rillen 5 deformieren das elektrische Feld über der freien Oberfläche 13 beim Anlegen einer Spannung zwischen den Elektroden 1 mit einer Wechselspannungsquelle 15 (nur in Fig. 1 dargestellt). Diese Deformation des elektrischen Felds führt zu einer leichteren Zündung der Gasentladung im Bereich der Rillen 5 und verhindert ein Erlöschen der Gasentladung selbst dann, wenn die Koplanarentladungsquelle 10 mit der freien Oberfläche 13 auf die Oberfläche 14 des zu behandelnden Objekts 4 aufgesetzt wird. Dies gilt natürlich nur für zu behandelnde Objekte 4 aus schlecht elektrisch leitenden Materialien. Bei Objekten 4 aus gut elektrisch leitenden Materialien bildet sich auch eine elektrische Entladung aus, die durch das Dielektrikum 2 behindert wird, aber primär in den Bereichen zwischen den Bereichen der Oberfläche 13 vor beiden Elektroden und den direkt gegenüberliegenden Bereichen der Oberfläche 14 des Objekts 4.The new coplanar discharge source 10 incorporated in the Fig. 1 and 2 is shown, has two elongate and at a fixed distance parallel to each other arranged electrodes 1. The electrodes 1 are embedded in a solid body 11 of a dielectric 2, which forms a dielectric shield 12 of the electrodes. In a free surface 13 of the shield 12, which faces an object 4 with a surface 14 to be treated, 1 grooves 5 are provided transversely to the course of the electrodes. The grooves 5 extend over the entire width of the shield 12 parallel to each other. Their width is about the same as their lateral distance and is in each case about 1 mm. The depth of the grooves 5 is at a rectangular free cross section of the grooves 5 is about 0.5 mm. D. h., The width and the depth of the grooves 5 is in Fig. 2 not reproduced to scale. This also applies to the distance of the electrodes 1 from each other and to the surface 13, which is in each case about 1 cm. The grooves 5 deform the electric field across the free surface 13 upon application of a voltage between the electrodes 1 to an AC voltage source 15 (only in FIG Fig. 1 shown). This deformation of the electric field leads to a lighter ignition of the gas discharge in the region of the grooves 5 and prevents extinction of the gas discharge even when the coplanar discharge source 10 is placed with the free surface 13 on the surface 14 of the object 4 to be treated. Of course, this only applies to objects 4 to be treated of poorly electrically conductive materials. For objects 4 of good electrically conductive materials, an electrical discharge is also formed, which is hindered by the dielectric 2, but primarily in the regions between the regions of the surface 13 in front of both electrodes and the directly opposite regions of the surface 14 of the object 4.

Die Wechselspannungsquelle legt eine gepulste Wechselhochspannung zwischen den beiden Elektroden 1 an. Die maximale Amplitude dieser Wechselhochspannung beträgt 35 kV. Die Wechselhochspannung setzt sich aus Pulspakten zusammen, deren Wiederholungsfrequenz zwischen 200 Hz und 10 kHz variiert werden kann. Die Signalform der einzelnen Pulspakete ist eine abklingende Sinusschwingung mit einer Eigenfrequenz von etwa 40 kHz.The AC voltage source applies a pulsed alternating high voltage between the two electrodes 1. The maximum amplitude of this alternating high voltage is 35 kV. The alternating high voltage consists of pulse clocks whose repetition frequency can be varied between 200 Hz and 10 kHz. The waveform of the individual pulse packets is a decaying sine wave with a natural frequency of about 40 kHz.

Die neue Koplanarentladungsquelle ist insbesondere auch für eine reizarme Behandlung von biologischem Material, wie beispielsweise menschlicher Haut geeignet, weil über die zu behandelte Oberfläche prinzipiell kein relevanter Strom fließt und auch kein relevanter Ionenbeschuss stattfindet. Es tritt vielmehr eine Gleitentladung 3 auf, die sich ausgehend von den Rillen 5 über die gesamte freie Oberfläche 14 der dielektrischen Abschirmung 12 vor den
Elektroden 1 ausbreitet.The new coplanar discharge source is particularly suitable for low-irritation treatment of biological material, such as human skin, because on the surface to be treated in principle no relevant current flows and no relevant ion bombardment takes place. Rather, a sliding discharge 3 occurs which, starting from the grooves 5, extends over the entire free surface 14 of the dielectric shield 12 in front of
Electrodes 1 spreads.

Eine weitere bevorzugte Verwendungsmöglichkeit der neuen Koplanarentladungsquelle besteht in einer Lackierungsvorbehandlung von Oberflächen von schlecht elektrisch leitenden Materialien, wie beispielsweise Kunststoffen. So kann die Koplanarentladungsquelle zum Beispiel eingesetzt werden, um Kunststoffstoßstangen oder Kunststoff-Rückspiegelgehäuse oder andere Kunststoffteile von Kraftfahrzeugen vor einer Neulackierung zu behandeln.Another preferred use of the new coplanar discharge source is in a paint pretreatment of surfaces of poorly electrically conductive materials, such as plastics. For example, the coplanar discharge source can be used to treat plastic bumpers or plastic rear-view mirror housings or other plastic parts of motor vehicles before repainting.

BEZUGSZEICHENLISTELIST OF REFERENCE NUMBERS

11
Elektrodeelectrode
22
Dielektrikumdielectric
33
Gleitentladungcreeping
44
Objektobject
55
Rillegroove
1010
KoplanarentladungsquelleKoplanarentladungsquelle
1111
Formkörpermoldings
1212
Abschirmungshielding
1313
Oberflächesurface
1414
Oberflächesurface
1515
WechselspannungsquelleAC voltage source

Claims (11)

  1. Coplanar dielectric barrier discharge source (10) comprising two elongated electrodes (1) which have a common shielding (12) made of a dielectric (2) and which extend in parallel with regard to each other and in parallel to a free surface (13) of the shielding (12), characterised in that the shielding (12) comprises grooves (5) in the free surface (13) that extend transversely to the electrodes (1) from in front of the one electrode (1) to in front of the other electrode (1).
  2. Coplanar discharge source (10) of claim 1, characterised in that the grooves (5) extend over the full width of the shielding (12).
  3. Coplanar discharge source (10) of any of the preceding claims, characterised in that the grooves (5) extend along straight lines and in parallel to each other.
  4. Coplanar discharge source (10) of any of the preceding claims, characterised in that a sidewise distance of the grooves (5) is 0.5 to 2 times, preferably as great as, a width of the grooves (5).
  5. Coplanar discharge source (10) of claim 4, characterised in that the width of the grooves (5) is in a range from 0.2 to 3 mm, preferably in a range from 0.8 to 1.2 mm.
  6. Coplanar discharge source (10) of any of the preceding claims, characterised in that a depth of the grooves (5) is in a range from 0.2 to 2 mm, preferably in a range from 0.3 to 0.7 mm.
  7. Coplanar discharge source (10) of any of the preceding claims, characterised in that the grooves (5) have a rectangular free cross section.
  8. Coplanar discharge source (10) of any of the preceding claims, characterised in that the electrodes (1) extend along straight lines at a distance in a range from 2 to 20 mm, preferably in a range from 8 to 12 mm.
  9. Coplanar discharge source (10) of any of the preceding claims, characterised in that a pulsed alternating voltage source (15) applies a bipolar alternating high voltage of high frequency pulse packets in form of decaying sine oscillations at an eigenfrequency in a range from 10 kHz to 200 kHz and at a repetition frequency in a range from 20 Hz to 10 kHz between the electrodes (1).
  10. Coplanar discharge source (10) of any of the preceding claims, characterised by an implementation as a battery or accumulator driven hand device.
  11. Using a coplanar discharge source (10) of any of the preceding claims 1 to 10 for lacquering pre-treatment of surfaces (14) of poorly electrically conductive materials, particularly plastics.
EP11852212.7A 2011-01-21 2011-12-01 Coplanar dielectric barrier discharge source for a surface treatment under atmospheric pressure Not-in-force EP2666340B1 (en)

Applications Claiming Priority (2)

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DE102011000261A DE102011000261A1 (en) 2011-01-21 2011-01-21 Dielectric coplanar discharge source for surface treatment under atmospheric pressure
PCT/EP2011/071463 WO2012097904A2 (en) 2011-01-21 2011-12-01 Coplanar dielectric barrier discharge source for a surface treatment under atmospheric pressure

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EP2666340B1 true EP2666340B1 (en) 2016-12-14

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