EP2559790A1 - Gas generation device and gas generation method - Google Patents

Gas generation device and gas generation method Download PDF

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Publication number
EP2559790A1
EP2559790A1 EP11768584A EP11768584A EP2559790A1 EP 2559790 A1 EP2559790 A1 EP 2559790A1 EP 11768584 A EP11768584 A EP 11768584A EP 11768584 A EP11768584 A EP 11768584A EP 2559790 A1 EP2559790 A1 EP 2559790A1
Authority
EP
European Patent Office
Prior art keywords
chamber
liquid level
gas
pressure
inverter circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11768584A
Other languages
German (de)
English (en)
French (fr)
Inventor
Yoshio Shodai
Osamu Yoshimoto
Noriyuki Tanaka
Yasuhiro Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Publication of EP2559790A1 publication Critical patent/EP2559790A1/en
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/24—Halogens or compounds thereof
    • C25B1/245—Fluorine; Compounds thereof
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/02—Process control or regulation
    • C25B15/023—Measuring, analysing or testing during electrolytic production
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C25B9/17—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
    • C25B9/19—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms
    • C25B9/23—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms comprising ion-exchange membranes in or on which electrode material is embedded

Definitions

  • the pressure inside the second chamber is detected by the second pressure detector. At least one of the effective value and frequency of the driving voltage generated by the second inverter circuit is controlled such that the pressure detected by the second pressure detector approaches the second target value.
  • the second target value is smaller than the first target value.
  • the pressures inside the first and second chambers are adjusted to approach the first and second target values, respectively, and accordingly, the pressure inside the second chamber becomes lower than the pressure inside the first chamber. This prevents the liquid level of the electrolytic bath in the first chamber from rising beyond the liquid level of the electrolytic bath in the second chamber.
  • first and second open/close valves are opened when electrolysis takes place in the electrolyzer, while the first and second open/close valves are closed when no electrolysis takes place in the electrolyzer.
  • the atmosphere outside the gas generation device is prevented from flowing into the first chamber through the first gas discharge path. And the atmosphere outside the gas generation device is prevented from flowing into the second chamber through the second gas discharge path.
  • the liquid level of the electrolytic bath in the anode chamber is detected by the liquid level detector.
  • the first inverter circuit is controlled such that at least one of the effective value and frequency of the driving voltage being applied to the motor of the first pump increases.
  • the second gas may be fluorine.
  • the liquid level of the electrolytic bath is likely to rise at the time of electrolysis of the compound. Even in such a case, the fluctuations in liquid level of the electrolytic bath in the second chamber are restricted, which ensures a stable supply of fluorine.
  • a gas generation method for generating a first gas and a second gas by electrolysis by using an electrolyzer divided into a first chamber and a second chamber includes the steps of generating the first and second gases in the first and second chambers, respectively, by applying a voltage to an electrolytic bath contained in the electrolyzer, and discharging the first and second gases generated in the first and second chambers through first and second gas discharge paths, respectively, controlling, by a first pump having a motor, the discharge of the first gas through the first gas discharge path, detecting a liquid level of the electrolytic bath in the second chamber, applying a driving voltage to the motor of the first pump by a first inverter circuit, and in the case where the detected liquid level is higher than a predetermined reference level, controlling the first inverter circuit such that at least one of an effective value and a frequency of the driving voltage being applied to the motor of the first pump increases.
  • a voltage is applied to the electrolytic bath contained in the electrolyzer, so that a first gas is generated in the first chamber and a second gas is generated in the second chamber.
  • the first and second gases generated in the first and second chambers are discharged through the first and second gas discharge paths, respectively.
  • the discharge of the first gas through the first gas discharge path is controlled by the first pump having a motor.
  • the first pump operates as a driving voltage is applied to the motor by the first inverter circuit.
  • the liquid level of the electrolytic bath in the second chamber is detected.
  • the first inverter circuit is controlled such that at least one of the effective value and frequency of the driving voltage being applied to the motor of the first pump increases.
  • a gas generation device and a gas generation method according to an embodiment of the present invention will now be described with reference to the drawings.
  • a fluorine gas generation device for generating fluorine gas will be described as an example of the gas generation device.
  • FIG. 1 is a schematic diagram showing the configuration of the fluorine gas generation device according to an embodiment of the present invention.
  • the fluorine gas generation device 100 includes an electrolyzer 1.
  • the electrolyzer 1 is formed, for example, of Ni (nickel), Monel, pure iron, stainless steel, or other metal or alloy.
  • the interior of the electrolyzer 1 is divided by a partition wall 2 into a cathode chamber 3 and an anode chamber 4.
  • the partition wall 2 is made of Ni or Monel, for example.
  • an electrolytic bath 5 of KF-HF-based mixed molten salt is formed.
  • a cathode 6 of Ni (nickel), for example, is disposed in the cathode chamber 3, and an anode 7 of carbon with low polarizability, for example, is disposed in the anode chamber 4.
  • HF hydrogen fluoride
  • HF hydrogen fluoride
  • a cathode outlet 20a is provided at the top of the cathode chamber 3. Connected to the cathode outlet 20a is an (upstream) end of a hydrogen gas discharge pipe 20.
  • the hydrogen gas generated in the cathode chamber 3 exits from the cathode outlet 20a and is discharged through the hydrogen gas discharge pipe 20.
  • the hydrogen gas discharge pipe 20 has an HF adsorption column 24, a control valve 21, a compressor 22, and a control valve 23 provided in this order from the upstream to the downstream.
  • the HF adsorption column 24 is packed with NaF or the like.
  • the HF adsorption column 24 serves to adsorb HF within a mixture of HF and hydrogen gas that is discharged from the cathode chamber 3.
  • the compressor 22 is connected with an inverter circuit 221. A driving voltage generated by the inverter circuit 221 is applied to the compressor 22.
  • the hydrogen gas discharge pipe 20 has its downstream end connected, for example, to an exhaust line in a factory. This allows the hydrogen gas discharged from the cathode chamber 3 to be discharged through the factory exhaust line.
  • the HF adsorption column 34 is packed with NaF or the like.
  • the HF adsorption column 34 serves to adsorb HF within a mixture of HF and fluorine gas that is discharged from the anode chamber 4.
  • the compressor 32 is connected with an inverter circuit 321. A driving voltage generated by the inverter circuit 321 is applied to the compressor 32.
  • the cathode chamber 3 is provided with a pressure gauge PS1 that measures the pressure inside the cathode chamber 3.
  • the anode chamber 4 is provided with a pressure gauge PS2 that measures the pressure inside the anode chamber 4.
  • the anode chamber 4 is further provided with a liquid level sensor 40 that detects the liquid level of the electrolytic bath 5 in the anode chamber 4.
  • the HF supply pipe 10 is provided with an automatic valve 11 and an orifice 12.
  • a control valve 13 is connected between the hydrogen gas discharge pipe 20 and the HF supply pipe 10 on the downstream of the orifice 12. It is noted that the HF supply pipe 10 is provided with a pressure gauge (not shown).
  • FIG. 2 is a block diagram showing a part of a control system in the fluorine gas generation device 100 in FIG. 1 .
  • the control device 90 receives an output signal from the liquid level sensor 40 disposed in the anode chamber 4. This output signal indicates whether the liquid level of the electrolytic bath 5 in the anode chamber 4 is higher than a predetermined liquid level (hereinafter, referred to as the "reference level").
  • the control device 90 controls the inverter circuit 221 on the basis of the output signal from the liquid level sensor 40.
  • the control device 90 increases the frequency of the driving voltage, generated in the inverter circuit 221, by a prescribed value (of not less than 10 Hz and not more than 20 Hz, for example). This increases the rotational speed of the motor 22M included in the compressor 22, and shortens the cycle of expansion and contraction of the bellows, and accordingly, the discharge pressure of the hydrogen gas discharged from the compressor 22 increases, and the pressure inside the cathode chamber 3 decreases. As a result, the liquid level of the electrolytic bath 5 in the cathode chamber 3 rises, and the liquid level of the electrolytic bath 5 in the anode chamber 4 falls below the reference level.
  • control device 90 refrains from increasing the frequency of the driving voltage of the compressor 22, generated in the inverter circuit 221, by the prescribed value described above.
  • control device 90 controls the inverter circuit 221 such that the liquid level falls to the reference level or below.
  • liquid level control the control of the inverter circuit 221 based on the output signal from the liquid level sensor 40 performed by the control device 90 will be referred to as "liquid level control.”
  • the liquid level control may be performed by changing an effective value of the driving voltage generated in the inverter circuit 221.
  • the discharge pressure of the hydrogen gas discharged from the compressor 22 is controlled in accordance with a change in the amount of expansion/contraction of the bellows, whereby the pressure inside the cathode chamber 3 is changed.
  • the liquid level of the electrolytic bath 5 in the cathode chamber 3 changes, and the liquid level in the anode chamber 4 is adjusted.
  • the liquid level control may also be performed by changing both of the effective value and frequency of the driving voltage generated in the inverter circuit 221. As the amount of expansion/contraction and the cycle of expansion and contraction of the bellows change, the discharge pressure of the hydrogen gas discharged from the compressor 22 is controlled, so that the pressure inside the cathode chamber 3 is changed. As a result, the liquid level of the electrolytic bath 5 in the cathode chamber 3 changes, and the liquid level in the anode chamber 4 is adjusted.
  • the control device 90 also receives an output signal from the pressure gauge PS1 disposed in the cathode chamber 3.
  • the control device 90 controls at least one of the effective value and frequency of the driving voltage generated in the inverter circuit 221 on the basis of the output signal from the pressure gauge PS1. As a result, the pressure inside the cathode chamber 3 is adjusted.
  • the control device 90 controls the inverter circuit 221 such that the difference between the cathode chamber pressure value and the target pressure value decreases.
  • the target pressure value is set, for example, to 100 kPa in absolute pressure.
  • control device 90 receives an output signal from the pressure gauge PS2 disposed in the anode chamber 4.
  • the control device 90 controls at least one of an effective value and a frequency of the driving voltage generated in the inverter circuit 321 on the basis of the output signal from the pressure gauge PS2. As a result, the pressure inside the anode chamber 4 is adjusted.
  • the control device 90 controls the inverter circuit 321 such that the difference between the anode chamber pressure value and the target pressure value decreases.
  • the target pressure value is set, for example, to 100 kPa in absolute pressure.
  • pressure control the control of the inverter circuits 221, 321 based on the output signals from the pressure gauges PS1, PS2 performed by the control device 90.
  • the control device 90 opens the control valves 21, 23, 31, 33 while electrolysis of HF is taking place, whereas the control device 90 closes the control valves 21, 23, 31, 33 while no electrolysis of HF is taking place. This prevents the hydrogen gas or the fluorine gas downstream of the compressor 22, 32 from being sucked into the cathode chamber 3 or the anode chamber 4 while no electrolysis of HF is taking place.
  • the control device 90 also controls the opening/closing of the control valve 13.
  • the inverter circuit 221 is controlled such that the liquid level falls to the reference level or below, for the following reason.
  • the inverter circuit 221 is controlled on the basis of the output signal from the liquid level sensor 40 such that, when the liquid level of the electrolytic bath 5 in the anode chamber 4 has risen beyond the reference level, the liquid level is adjusted to fall to the reference level or below, for restricting the fluctuations in liquid level.
  • the inverter circuit 221 is controlled, for the following reason.
  • the fluorine gas discharged from the anode chamber 4 is supplied through the fluorine gas discharge pipe 30 to the manufacturing line in a factory or the like at a predetermined flow rate. Therefore, it is preferable that the discharge pressure of the fluorine gas discharged from the compressor 32 is maintained approximately constant.
  • the inverter circuit 221 is controlled so as to change the discharge pressure of the compressor 22 disposed on the hydrogen gas discharge pipe 20. This allows the liquid level of the electrolytic bath 5 in the anode chamber 4 to be adjusted to the reference level or below, without causing large fluctuations in the flow rate of the fluorine gas discharged from the fluorine gas discharge pipe 30.
  • FIG. 3 (b) shows the cathode chamber pressure value and the anode chamber pressure value when the liquid level control and the pressure control are carried out.
  • the vertical axis represents pressure
  • the horizontal axis represents time.
  • the bold broken line represents the cathode chamber pressure value
  • the solid line represents the anode chamber pressure value.
  • the control device 90 controls the inverter circuits 221, 321 on the basis of the output signals from the pressure gauges PS1, PS2 ( FIG. 1 ) (pressure control).
  • the inverter circuits 221, 32I are controlled in accordance with the fluctuations of the cathode chamber pressure value and the anode chamber pressure value, which results in gradual changes of the rotational speeds of the motors 22M, 32M. In this manner, the pressure inside the cathode chamber 3 and the pressure inside the anode chamber 4 are both adjusted to approach a target pressure value U.
  • the frequency of the driving voltage of the compressor 22, generated in the inverter circuit 221 is maintained at a value increased by a prescribed value T with respect to the frequency at time t1 (liquid level control). This causes the liquid level of the electrolytic bath 5 to be adjusted to fall to the reference level or below.
  • T is set to the order of not less than 5 Hz and not more than 15 Hz, for example.
  • the frequency of the driving voltage, generated in the inverter circuit 221 is decreased by the prescribed value T with respect to the frequency at that time t2.
  • the rotational speed of the motor 22M steeply drops by the prescribed value T from time t2, so that it becomes approximately the same as the rotational speed at the start point (time t1) of that period LP.
  • the liquid level becomes higher than the reference level during the periods from time t3 to time t4, from time t5 to time t6, and from time t7 to time t8.
  • the frequency of the driving voltage generated in the inverter circuit 221 is maintained at a level increased by the prescribed value T with respect to the frequency at the start point (time t3, t5, t7) of each period LP (liquid level control). In this manner, the liquid level of the electrolytic bath 5 is adjusted to fall to the reference level or below.
  • control device 90 continues to control the inverter circuit 321 on the basis of the output signals from the pressure gauge PS2 ( FIG. 1 ) (pressure control).
  • pressure control pressure control
  • FIG. 3 (a) the rotational speed of the motor 32M shows gradual changes during the periods LP as well.
  • control device 90 determines, on the basis of the output signal from the liquid level sensor 40, whether the liquid level of the electrolytic bath 5 in the anode chamber 4 is higher than a reference level (step S3).
  • the control device 90 controls the inverter circuit 221 to increase the rotational speed of the motor 22M by a prescribed value T (step S4).
  • the control device 90 increases the frequency of the driving voltage of the compressor 22, generated in the inverter circuit 221, by a prescribed value from the current frequency, to thereby increase the rotational speed of the motor 22M by the prescribed value T.
  • step S3 If it is determined in step S3 that the liquid level is not higher than the reference level, the control device 90 acquires a cathode chamber pressure value measured by the pressure gauge PS1 (step S7).
  • the control device 90 changes the rotational speed of the motor 22M by controlling the inverter circuit 221 such that the difference between the cathode chamber pressure value and the target pressure value U decreases (step S10).
  • the control device 90 changes the frequency of the driving voltage generated in the inverter circuit 221 from the current value such that the difference between the cathode chamber pressure value and the target pressure value U decreases, to thereby change the rotational speed of the motor 22M.
  • steps S3 through S6 corresponds to the above-described liquid level control
  • processing in steps S7 through S10 corresponds to the above-described pressure control.
  • the control device 90 carries out the pressure control in addition to the liquid level control. This restricts the fluctuations in pressure inside the cathode chamber 3 and the anode chamber 4, while restricting the fluctuations in liquid level of the electrolytic bath 5. As a result, the fluctuations in electrolysis conditions upon electrolysis of HF are restricted.
  • the target pressure value (first target pressure value) set for the cathode chamber pressure value and the target pressure value (second target pressure value) set for the anode chamber pressure value may differ from each other.
  • the second target pressure value is preferably set smaller than the first target pressure value.
  • the first target pressure value is set to 100 kPa in absolute pressure
  • the second target pressure value is set to not less than 95 kPa and not more than 99 kPa in absolute pressure.
  • first and second target pressure values may be set as appropriate in accordance with the volumetric capacities of the cathode chamber 3 and the anode chamber 4.
  • the liquid level sensor 40 for detecting the liquid level of the electrolytic bath 5 is disposed in the anode chamber 4.
  • the control device 90 carries out the liquid level control on the basis of the output signal from the liquid level sensor 40.
  • the liquid level sensor 40 may be disposed in the cathode chamber 3. Further, the control device 90 may carry out the liquid level control on the basis of the output signal from the liquid level sensor 40 disposed in the cathode chamber 3.
  • FIG. 6 is a schematic diagram showing the configuration of the fluorine gas generation device according to another embodiment. In the following, the differences of the fluorine gas generation device 100 in FIG.6 from the fluorine gas generation device 100 in FIG. 1 will be described.
  • the liquid level sensor 40 is not disposed in the anode chamber 4, but disposed in the cathode chamber 3.
  • the control device 90 controls the inverter circuit 321 on the basis of the output signal from the liquid level sensor 40 (liquid level control).
  • the control device 90 causes the frequency of the driving voltage generated in the inverter circuit 321 to be increased by a prescribed value with respect to the frequency at that time point.
  • This increases the rotational speed of the motor 32M included in the compressor 32, and increases the discharge pressure of the fluorine gas discharged from the compressor 32, whereby the pressure inside the anode chamber 4 decreases.
  • the liquid level of the electrolytic bath 5 in the anode chamber 4 rises, and also, the liquid level of the electrolytic bath 5 in the cathode chamber 3 falls below the reference level.
  • the liquid level control is carried out on the basis of the output signal from the liquid level sensor 40, so that the liquid level is adjusted to fall to the reference level or below.
  • the liquid level sensor 40 may be provided in each of the cathode chamber 3 and the anode chamber 4.
  • the control device 90 may carry out the liquid level control on the basis of the output signals from the liquid level sensors 40 disposed in the cathode chamber 3 and the anode chamber 4.
  • FIG. 7 is a schematic diagram showing the configuration of the fluorine gas generation device according to yet another embodiment.
  • a liquid level sensor 40 is disposed in each of the cathode chamber 3 and the anode chamber 4.
  • the control device 90 controls the inverter circuits 221, 321 on the basis of the output signals from the respective liquid level sensors 40 (liquid level control).
  • the hydrogen gas is an example of the first gas
  • the fluorine gas is an example of the second gas
  • the cathode chamber 3 is an example of the first chamber
  • the anode chamber 4 is an example of the second chamber
  • the hydrogen gas discharge pipe 20 is an example of the first gas discharge path
  • the fluorine gas discharge pipe 30 is an example of the second gas discharge path.
  • liquid level sensor 40 is an example of the liquid level detector
  • the compressor 22 is an example of the first pump
  • the motor 22M is an example of the motor of the first pump
  • the inverter circuit 221 is an example of the first inverter circuit
  • the pressure gauge PS1 is an example of the first pressure detector.
  • the compressor 32 is an example of the second pump
  • the motor 32M is an example of the motor of the second pump
  • the inverter circuit 321 is an example of the second inverter circuit
  • the pressure gauge PS2 is an example of the second pressure detector.
  • control device 90 is an example of the controller
  • control valves 21, 23 are examples of the first open/close valve
  • control valves 31, 34 are examples of the second open/close valve.
  • the target pressure value U is an example of the first and second target values
  • the first target pressure value is an example of the first target value
  • the second target pressure value is an example of the second target value.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
EP11768584A 2010-04-14 2011-03-23 Gas generation device and gas generation method Withdrawn EP2559790A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010093437A JP5567375B2 (ja) 2010-04-14 2010-04-14 気体発生装置および気体発生方法
PCT/JP2011/001709 WO2011129057A1 (ja) 2010-04-14 2011-03-23 気体発生装置および気体発生方法

Publications (1)

Publication Number Publication Date
EP2559790A1 true EP2559790A1 (en) 2013-02-20

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EP11768584A Withdrawn EP2559790A1 (en) 2010-04-14 2011-03-23 Gas generation device and gas generation method

Country Status (6)

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US (1) US20130068627A1 (ja)
EP (1) EP2559790A1 (ja)
JP (1) JP5567375B2 (ja)
KR (1) KR20130040817A (ja)
CN (1) CN102834549B (ja)
WO (1) WO2011129057A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108136142A (zh) * 2015-07-02 2018-06-08 北门科技股份有限公司 气体再循环系统
CN108286056B (zh) * 2018-02-08 2019-03-01 青岛微电新能源科技股份有限公司 一种电解水制氢设备
JP7247150B2 (ja) * 2020-09-02 2023-03-28 株式会社東芝 二酸化炭素電解装置および二酸化炭素電解方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1028249C (zh) * 1992-07-24 1995-04-19 吴吉丰 改进的电解制氟方法及专用的电解槽
JPH0861287A (ja) * 1994-08-11 1996-03-08 Ebara Corp ポンプ用インバータユニット及びそのユニットを備えたポンプ装置
GB9418598D0 (en) * 1994-09-14 1994-11-02 British Nuclear Fuels Plc Fluorine cell
JPH08291798A (ja) * 1995-04-20 1996-11-05 Hitachi Ltd 給水装置
CA2271517A1 (en) * 1999-05-12 2000-11-12 William J. Stewart Pressure control system in a water electrolytic cell
KR100519843B1 (ko) * 2002-05-29 2005-10-06 도요탄소 가부시키가이샤 불소가스 발생장치
JP4085174B2 (ja) * 2002-05-29 2008-05-14 東洋炭素株式会社 フッ素ガス発生装置
JP3905433B2 (ja) * 2002-07-11 2007-04-18 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード フッ素ガス生成装置
JP2004124148A (ja) * 2002-10-01 2004-04-22 Mitsubishi Heavy Ind Ltd 発生水素の圧力制御方法及び水素発生装置
JP2005097667A (ja) * 2003-09-24 2005-04-14 Air Liquide Japan Ltd フッ素ガス生成装置
US7605326B2 (en) * 2003-11-24 2009-10-20 Anderson Christopher M Solar electrolysis power co-generation system
US20080063910A1 (en) * 2004-12-28 2008-03-13 Gs Yuasa Ccorporation Fuel Cell Power Generating Device
JP5033312B2 (ja) * 2005-03-10 2012-09-26 日立造船株式会社 固体高分子型水電解装置
TW200738911A (en) * 2006-01-20 2007-10-16 Toyo Tanso Co Electrolytic apparatus for producing fluorine or nitrogen trifluoride
JP5584904B2 (ja) * 2008-03-11 2014-09-10 東洋炭素株式会社 フッ素ガス発生装置
JP2009228955A (ja) * 2008-03-21 2009-10-08 Toshiba Corp 冷蔵庫

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2011129057A1 *

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Publication number Publication date
JP2011219847A (ja) 2011-11-04
WO2011129057A1 (ja) 2011-10-20
CN102834549A (zh) 2012-12-19
CN102834549B (zh) 2015-11-25
JP5567375B2 (ja) 2014-08-06
KR20130040817A (ko) 2013-04-24
US20130068627A1 (en) 2013-03-21

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