EP2539947A1 - Composant multicouche piézoélectrique et procédé de fabrication d'un composant multicouche piézoélectrique - Google Patents

Composant multicouche piézoélectrique et procédé de fabrication d'un composant multicouche piézoélectrique

Info

Publication number
EP2539947A1
EP2539947A1 EP11704780A EP11704780A EP2539947A1 EP 2539947 A1 EP2539947 A1 EP 2539947A1 EP 11704780 A EP11704780 A EP 11704780A EP 11704780 A EP11704780 A EP 11704780A EP 2539947 A1 EP2539947 A1 EP 2539947A1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
layers
sacrificial layer
metal
multilayer component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11704780A
Other languages
German (de)
English (en)
Inventor
Alexander Glazunov
Oliver Dernovsek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Publication of EP2539947A1 publication Critical patent/EP2539947A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Definitions

  • the invention relates to a piezoelectric component with piezoelectric layers.
  • Multilayer piezoelectric devices such as
  • multilayer piezoelectric actuators include multiple layers of piezoelectric material. Piezoelectric actuators can be used, for example, to actuate a
  • Injection valve can be used in a motor vehicle.
  • Piezoelectric actuators are known, for example, from DE 10 2004 031 404 A1, DE 10 2005 052 686 A1 and EP 1926156 A2.
  • the object of the invention is a piezoelectric
  • the stack has an active region with disposed between the piezoelectric layers
  • Electrode layers and at least one inactive region are the end product of the
  • the piezoelectric multilayer component intended to deform at a voltage applied to the electrode layers voltage.
  • the inactive area contains at least one sacrificial layer.
  • the sacrificial layer has an electrical
  • the metal is at least partially diffusible from the sacrificial layer into the piezoelectric layers of the inactive region.
  • Component be designed as a piezoelectric actuator in multi-layer design.
  • the active region of the component has electrode layers arranged between the piezoelectric layers. When a voltage is applied to the electrode layers, a deformation of the piezoelectric material occurs in the active region. If the component is a piezoelectric actuator, this deformation can also be described as
  • the deformation of the inactive area is smaller than the deformation of the active area at one of the
  • Electrode layers of the active region applied voltage.
  • the inactive region has no deformation in response to that in the inactive region
  • the inactive region preferably has no electrode layers.
  • the inactive region may be provided for electrically isolating the active region, for example from a housing in which the device is installed.
  • the inactive area can be used as an end piece of the component for clamping the component.
  • the piezoelectric layers of the component in particular of the intermediate product, can be produced from so-called green sheets which, in addition to other components such as sintering aids, comprise a ceramic powder.
  • Green films can be the electrode layers of the active Range, for example in a screen printing process,
  • the green sheets are then stacked so that an intermediate product of the component is formed, and sintered together so that from the
  • the occurrence of mechanical stresses can lead to the formation of cracks at the boundary between the active region and the inactive region during the heating of the intermediate or in the operation of the final product.
  • the cracks can lead to failure of the piezoelectric actuator.
  • the reduction of the occurrence of cracks can thus crucial to increasing the reliability and the
  • the inactive region has at least one sacrificial layer containing metal.
  • the metal diffuses from the sacrificial layer of the inactive region into the piezoelectric layers of the inactive region. This will be the
  • Sintered shrinkage in the inactive region approximates the sintering shrinkage in the active region.
  • the sacrificial layer points
  • Layers in the active region and in the inactive region have the same concentration of metal. Furthermore, the amount of insulating material contained in the sacrificial layer is preferably selected such that the insulating product of the inactive region is ensured in the end product despite the metal contained in the sacrificial layer.
  • Adjustment of the sintering shrinkage properties of the active and inactive area of the stack can be achieved.
  • the sacrificial layer may contain, in addition to the metal and the electrically insulating material, an organic binder which preferably volatilizes before the sintering of the intermediate product by a suitable temperature treatment.
  • a piezoelectric multilayer component is specified as the end product, which has a stack of piezoelectric layers arranged one above the other.
  • the stack has an active area with between
  • piezoelectric layers arranged electrode layers and at least one inactive region.
  • the piezoelectric layers of the active region and the inactive region preferably have metal in the
  • layers of the active and inactive regions selected so that the differences in the sintering shrinkage of the active and inactive regions are so small that no formation of cracks occurs during the sintering process.
  • the piezoelectric layers of the active region and the inactive region may have the same metal.
  • the metal in the piezoelectric layers of the active region may be different from the one
  • the piezoelectric layers of the active region and the inactive region preferably have the same chemical composition, in particular the same Metal concentration, on.
  • the piezoelectric layers of the active region and the inactive region have the same chemical composition, in particular the same Metal concentration, on.
  • the piezoelectric layers of the active region and the inactive region comprise the metal, for example copper, contained in the electrode layers of the active region.
  • the amount of metal contained in the inactive region is advantageously chosen so that the inactive region, despite the metal contained in the piezoelectric layers of the inactive region, is electrically insulating with respect to the active region and opposite the actuator
  • the number of sacrificial layers in the inactive region and the amount of metal in the respective sacrificial layer are such
  • the piezoelectric layers assigned to the inactive region have the same concentration of metal as the piezoelectric associated with the active region
  • the number of sacrificial layers in the inactive region and the amount of metal in the respective sacrificial layer are chosen such that the insulating ones
  • Characteristics of the inactive area in particular the insulating effect of the inactive area compared to the external electrodes attached to the actuator, continue to be ensured.
  • the amount of metal contained in the sacrificial layer is selected depending on how much metal the metal has
  • the inactive region can accommodate piezoelectric layers of the inactive region during the heating of the intermediate product. Among other things, this depends on the thickness of the piezoelectric layers of the inactive region.
  • the piezoelectric layers of the inactive region can accommodate piezoelectric layers of the inactive region during the heating of the intermediate product. Among other things, this depends on the thickness of the piezoelectric layers of the inactive region.
  • Sacrificial layer at least as much metal as can diffuse during heating in the piezoelectric layers of the inactive region.
  • Sacrificial layer has a weight ratio between metal and insulating material ranging between 1: 5 and 1:50.
  • the piezoelectric layers comprise a piezoceramic material.
  • the piezoelectric layers comprise a lead zirconate titanate (PZT) ceramic.
  • the piezoelectric layers of the active region and the inactive region may comprise the same piezoceramic material.
  • Piezoelectric material such as the piezoelectric layers.
  • the diffusion behavior of the metal in the inactive region and in the active region can be particularly good at each other
  • the sacrificial layers preferably follow the heating of the device the same composition as the piezoelectric layers of the inactive region and are no longer visible as separate layers.
  • the sacrificial layer has at least as much metal that, due to the diffusion of the metal from the sacrificial layer into the piezoelectric layers of the inactive region
  • Saturation of the piezoelectric layers of metal can be achieved. Preferably diffused during the
  • the sacrificial layer comprises a ceramic powder having a particle size of greater than or equal to 0.2 ym and less than or equal to 1.5 ym.
  • the sacrificial layer comprises a metal powder having a particle size of greater than or equal to 0.01 ⁇ m and less than or equal to 3.0 ⁇ m.
  • a median value d50 of the distribution of the particle sizes in the sacrificial layer is preferred.
  • Heating of the intermediate may be greater than or equal to 0.2 ym and less than or equal to 1.5 ym, and is preferably greater than or equal to 0.4 ym and less than or equal to 1.5 ym.
  • the metal powder has the same particle size as the metal of the electrode layers of the active region.
  • the ceramic powder preferably has the same particle size as the piezoelectric material of the piezoelectric layers of the active region and the inactive region. This is particularly useful to provide the same diffusion behavior of the metal in the active and inactive regions and thus to achieve an adaptation of the sintering shrinkage of the active region and the inactive region during the heating of the device.
  • a further embodiment provides that the distance between two sacrificial layers in the inactive region is 0.3 to 3.0 times the distance between two adjacent electrode layers in the active region.
  • the distance between two sacrificial layers in the inactive region is just as great as the distance between two adjacent electrode layers in the active region.
  • Metal in the piezoelectric layers of the active and inactive area can be achieved.
  • a further embodiment of the intermediate product provides that the sacrificial layer has a structuring in a plane perpendicular to the stacking direction.
  • the sacrificial layer may have a discontinuous structure, or only a part of one
  • the sacrificial layer may be implemented as an array of islands deposited on a piezoelectric layer in the inactive region.
  • the sacrificial layer may, for example, have recesses, in particular in such a way that, as a network structure, they only have a part of the
  • the amount of metal diffusing into the piezoelectric layers of the inactive region during the sintering process can be additionally controlled.
  • Electrode layer the diffusion behavior of the metal from the sacrificial layer of the diffusion behavior of the metal from the electrode layers can be particularly well adjusted and thus the difference in sintering shrinkage in the active region and in the inactive region can be further minimized.
  • the amount of metal is at least
  • a maximum weight for the sacrificial layer is determined.
  • Weight of the insulating material for the sacrificial layer determined from the difference between the maximum weight of the sacrificial layer and the weight of the amount of metal intended for the sacrificial layer.
  • the amount of insulating material present in the sacrificial layer is preferably determined such that the insulating effect of the inactive region is still ensured despite the metal contained in the sacrificial layer.
  • the amount of metal in the sacrificial layer is preferably at least such that in the sintering process as much metal from the sacrificial layer can diffuse into the piezoelectric material of the inactive region as metal from the electrode layers diffuses into the piezoelectric material in the active region.
  • the amount of metal in the sacrificial layer depends on the chemical composition of the
  • the amount of metal depends on the type of metal. From this as well as from the volume of the inactive area, the metal weight per sacrificial layer can be determined.
  • the maximum weight of the sacrificial layer is dependent on the weight of the metal.
  • the layer thickness of the sacrificial layer, and thus the maximum weight of the sacrificial layer, is also dependent on the method, for example a
  • piezoelectric layer of the inactive region is applied.
  • An embodiment of the method provides heating, in particular sintering, of the intermediate product for obtaining the end product for the piezoelectric multilayer component.
  • Multilayer component is sintered, wherein the metal at least partially from the sacrificial layer in the
  • Figure 2 is a schematic representation of a portion
  • FIGS. 3A to 3F show different embodiments of a
  • Figure 1 shows a final product of a multilayered
  • piezoelectric actuator 1 which has a stack 2 of a plurality of piezoelectric layers 3 arranged one above the other.
  • the stack 2 is subdivided into an active area 6 and two inactive areas 7.
  • the inactive regions 7 adjoin the active region 6 in the stacking direction and form the end pieces of the stack 2.
  • the active region 6 of the stack 2 points between the two
  • the actuator 1 is so
  • electrical polarity associated electrode layers 4 do not extend at this point to the edge of the actuator 1.
  • the electrode layers 4 are therefore each formed in the form of nested combs.
  • an electrical voltage can be applied to the electrode layers 4.
  • an electrical voltage can be applied to the electrode layers 4.
  • the inactive regions 7 have no electrode layers 4. When a voltage is applied to the metallizations 5, no electric field is generated in the inactive regions 7. In particular, when a voltage is applied to the metallizations 5, no deformation of the piezoelectric material in the inactive regions 7 occurs. Thus, the inactive regions 7 do not contribute to the stroke of the piezoelectric actuator 1.
  • the inactive areas 7 are used for
  • the inactive regions 7 can for example also be used for clamping the actuator 1.
  • a layer of a piezoelectric layer 3 can be formed from a film (see layers 3 'in the piezoelectric layers 3 of the intermediate product in FIG. 2).
  • a piezoelectric layer 3 may comprise a plurality of layers 3 'of a piezoelectric material (see FIG. 2). In the end product of the actuator 1, in particular after the
  • the layers 3 ' may not be more
  • the piezoelectric material may additionally be provided with dopants.
  • dopants for example, that can be
  • piezoelectric material may be doped with neodymium or with a mixture of zinc and niobium.
  • a metal paste for example a
  • Copper paste, a silver paste or a silver-palladium paste are applied to the films.
  • foils made of the same piezoelectric material as in the active region 6 are used.
  • the films for the inactive regions 7 have no printing with the metal paste for the production of electrode layers 4. All films are stacked, pressed and sintered together at temperatures between 900 ° C and 1200 ° C, so that the end product is a monolithic body.
  • FIG. 2 shows a schematic representation of a
  • FIG. 2 shows an inactive region 7 as well as a part of the active region 6 of a multi-layered piezoelectric actuator 1 adjoining the inactive region 7. All of the features of the actuator 1 cited in the description of FIG. 1 also apply to the end product according to the invention, which consists of the
  • the intermediate product described below may be formed except that the final product has metal in the piezoelectric layers 3 of the inactive region 7 and, more particularly, the metal concentration in the piezoelectric layers 3 of the active region 6 and the inactive region 7 is the same. This will be explained in detail below.
  • the inactive area 7 has in the illustrated here
  • Embodiment a piezoelectric layer 3 on.
  • the active region 6 consists of a plurality of piezoelectric layers 3, which also have a plurality of layers 3 'of the piezoelectric material (not explicitly
  • the inactive area 7 has the same
  • piezoelectric material such as the active region 6.
  • Polarity contacted electrode layers 4 introduced.
  • the layer thickness of the piezoelectric layer 3 in the inactive region 7 is greater, preferably at least ten times greater than the layer thickness of a piezoelectric layer 3 in the active region 6. The greater the thickness of the piezoelectric layer 3 in the inactive region 7 the better
  • Layer thickness of the inactive region 7 associated piezoelectric layer 3 but also be smaller than the layer thicknesses of the piezoelectric layers 3 in the active region 6, in particular when the inactive region 7 has a plurality of piezoelectric layers 3.
  • the sacrificial layer 8 comprises an organic binder and a mixture of a metal powder and an electrically insulating material, in this embodiment a ceramic powder.
  • a ceramic powder In this case, the ceramic powder of the
  • Sacrificial layer 8 has the same chemical composition as the piezoelectric material of the piezoelectric layers 3 in the active region 6 and in the inactive regions 7, for example, PZT.
  • the metal powder has the same metal as the electrode layers 4 in the active region 6 of the actuator 1.
  • the metal powder has copper.
  • Electrode layers 4 of the active region 6, a silver paste or a silver-palladium paste are used, the metal powder of the sacrificial layer 8 on silver.
  • the metal powder has, for example, no palladium, since palladium has only a low diffusibility when heating the actuator 1.
  • the existing in the sacrificial layer 8 metal is to
  • the ceramic powder in the sacrificial layer 8 preferably has a particle size of greater than or equal to 0.4 ⁇ m and less than or equal to 1.5 ⁇ m.
  • the metal powder preferably has a particle size of greater than or equal to 0.4 ym and less than or equal to 1.5 ym.
  • the metal powder may have a smaller particle size than the ceramic powder, resulting in better diffusion of the metal particles into the
  • the metal powder has the same particle size as the metal of the electrode layers 4.
  • Sacrificial layer 8 may be applied.
  • a sacrificial layer 8 can be applied only to selected layers 3 'of the piezoelectric material in the inactive region 7, for example to every second layer 3'. The distance between two provided with the sacrificial layer 8 layers 3 'of the
  • the piezoelectric material in the inactive region 7 is approximately the same size as the distance between two adjacent electrode layers 4 in the active region 6.
  • the piezoelectric material in the active region 6 and the piezoelectric material in the inactive Areas 7 consequently the same chemical composition and,
  • the end product of the actuator 1 produced by the sintering can, as already mentioned before, look like the end product described in connection with FIG. 1, except that the metal concentration in the piezoelectric layers 3 in the active region 6 and inactive region 7 in the case described here End product is the same.
  • Sacrificial layer 8 additionally contains the same ceramic material as the piezoelectric layers 3 of the active region 6 and the inactive region 7, the sacrificial layer 8 after the sintering process is little or no longer of the piezoelectric material of the piezoelectric layers 3 of the active and inactive region 6, 7 to distinguish. In other words, after the sintering process, there is preferably no difference between the piezoelectric material in the active region 6 and in the inactive region 7.
  • the sacrificial layers 8 contain more metal than can be accommodated by the piezoelectric layer 3 of the inactive region 7 during the sintering process and, in particular, until it reaches the saturation state, the remaining metal, for example in the form of small ones, may be present
  • the sacrificial layer 8, like the electrode layers 4 in the active region 6, can be applied in a screen printing process to the layers 3 'of the piezoelectric material of the inactive region.
  • Sacrificial layer 8 only on local areas of a layer 3 'of the piezoelectric material in the inactive region 7 and by a suitable choice of shape and size of the sacrificial layer 8 printed surface of the layer 3', the amount of metal during the sintering process in the
  • Electrode layer 4 the diffusion behavior of the metal from the sacrificial layer 8, the diffusion behavior of the metal from the electrode layers 4 can be further adjusted and thus the difference in sintering shrinkage can be further minimized. In particular, this can be the same
  • Figure 3A shows the top view of a
  • Sacrificial layer 8 which covers the entire top of a layer 3 'of the piezoelectric material in the inactive region 7.
  • FIG. 3B shows the top view of a sacrificial layer 8 which covers the entire upper side of a layer 3 'of the piezoelectric material in the inactive region 7, apart from a recess 9 running around the edge of the layer 3'.
  • Recess 9 can be the diffusion of metal from the
  • Embodiment of the sacrificial layer 8 can be increased.
  • the recess 9 is particularly advantageous in order to continue to ensure the electrically insulating effect of the inactive region 7 with respect to the metallizations 5 attached to the actuator 1 (see FIG. 1).
  • FIG. 3C shows the top view of a structured one
  • Sacrificial layer 8 Here, the material of the sacrificial layer 8 in the form of individual islands 10 on the top of the layer 3 ' applied. Recesses 12 can be seen between the islands 10, so that the sacrificial layer 8 only a part of the
  • Sacrificial layer 8 diffused into the piezoelectric layers 3 of the inactive region 7, further controlled.
  • the islands 10 are, for example, circular and in
  • FIG. 3D shows an embodiment of the sacrificial layer 8 in which the islands 10 are square.
  • FIG. 3E shows a sacrificial layer 8, which as a kind
  • FIG. 3F shows a sacrificial layer 8, which is applied as an arrangement of concentric, frame-shaped regions 13, 14 on a layer 3 '.
  • the regions 13, 14 may have circular or square outlines. They can be called annular islands that have a common center
  • frame-shaped portion 14 of the sacrificial layer 8 concentrically disposed within the frame-shaped portion 13. Between the frame-shaped areas 13, 14 can be seen a recess 12a. Furthermore, it is located within the
  • a recess 12b of the sacrificial layer 8 At the edge of the layer 3', a circumferential recess 9 is provided.
  • Electrode layers 4 of the active region 6 diffused, be adapted.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne un composant multicouche piézoélectrique (1) comme produit intermédiaire qui comporte un empilement (2) de couches piézoélectriques (3) disposées les unes sur les autres. L'empilement (2) comporte une zone active (6) avec des couches d'électrodes (4) disposées entre les couches piézoélectriques (3) et au moins une zone inactive (7), la zone active (6) étant prévue lors du produit fini du composant multicouche piézoélectrique (1) pour se déformer sous l'action d'une tension appliquée aux couches d'électrodes (4). La zone inactive (7) contient au moins une couche sacrificielle (8) qui comporte un matériau électriquement isolant et un métal, le métal pouvant être diffusé au moins partiellement par chauffage de l'élément multicouche (1) hors de la couche sacrificielle (8) dans les couches piézoélectriques (3) de la zone inactive (7).
EP11704780A 2010-02-22 2011-02-21 Composant multicouche piézoélectrique et procédé de fabrication d'un composant multicouche piézoélectrique Withdrawn EP2539947A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010008775A DE102010008775A1 (de) 2010-02-22 2010-02-22 Piezoelektrisches Vielschichtbauelement und Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements
PCT/EP2011/052527 WO2011101473A1 (fr) 2010-02-22 2011-02-21 Composant multicouche piézoélectrique et procédé de fabrication d'un composant multicouche piézoélectrique

Publications (1)

Publication Number Publication Date
EP2539947A1 true EP2539947A1 (fr) 2013-01-02

Family

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Family Applications (1)

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EP11704780A Withdrawn EP2539947A1 (fr) 2010-02-22 2011-02-21 Composant multicouche piézoélectrique et procédé de fabrication d'un composant multicouche piézoélectrique

Country Status (6)

Country Link
US (1) US20130057114A1 (fr)
EP (1) EP2539947A1 (fr)
JP (1) JP5879272B2 (fr)
CN (1) CN102754231A (fr)
DE (1) DE102010008775A1 (fr)
WO (1) WO2011101473A1 (fr)

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Also Published As

Publication number Publication date
DE102010008775A1 (de) 2011-08-25
JP2013520788A (ja) 2013-06-06
CN102754231A (zh) 2012-10-24
JP5879272B2 (ja) 2016-03-08
US20130057114A1 (en) 2013-03-07
WO2011101473A1 (fr) 2011-08-25

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