EP2526563B1 - Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp comprising at least one electrode thus produced - Google Patents

Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp comprising at least one electrode thus produced Download PDF

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Publication number
EP2526563B1
EP2526563B1 EP11778853.9A EP11778853A EP2526563B1 EP 2526563 B1 EP2526563 B1 EP 2526563B1 EP 11778853 A EP11778853 A EP 11778853A EP 2526563 B1 EP2526563 B1 EP 2526563B1
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EP
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Prior art keywords
electrode
laser beam
discharge lamp
tungsten
pressure discharge
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EP11778853.9A
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German (de)
French (fr)
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EP2526563A1 (en
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Wolfgang Seitz
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Osram GmbH
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Osram GmbH
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/04Manufacture of electrodes or electrode systems of thermionic cathodes
    • H01J9/042Manufacture, activation of the emissive part
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/20Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • H01J61/073Main electrodes for high-pressure discharge lamps
    • H01J61/0732Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/04Manufacture of electrodes or electrode systems of thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/19Thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02Manufacture of cathodes

Definitions

  • the present invention relates to a method for producing an electrode for a high-pressure discharge lamp according to claim 1.
  • the emissivity of electrodes of discharge lamps has a decisive influence on the performance and geometrical design of such discharge lamps.
  • the prior art is the pasting with metal powders or mixtures by means of an organic binder and the subsequent sintering or baking to the electrode body.
  • the pasted and sintered layer is mechanically less stable, which can lead to partial crumbling on contact.
  • a method of processing an electrode of a discharge lamp is known.
  • the electrode is oxidized in the region in which it is pinched gas-tight in the neck of a discharge space formed of glass.
  • the oxidation is carried out by chemical routes in normal air atmosphere and ambient air pressure at a temperature between 700 and 1300 K.
  • the oxide layer is then sublimated in a vacuum environment, the temperature during the sublimation between 1450 K and 1900 K is.
  • the electrode obtains a surface of fine roughness in the above-mentioned range, whereby the adhesion of the surface of this electrode portion to the discharge vessel material is reduced. This reduces the risk of cracking in the sealed area of the discharge vessel.
  • the oxide layer also removes any contaminants from the surface of the electrode portion, thereby also reducing adhesion.
  • a discharge lamp in which a rod-shaped electrode made of tungsten is partially introduced into a neck of a discharge vessel by a gas-tight pinch and extends in regions in a discharge space of the discharge vessel.
  • the surface of the electrode is processed.
  • an oxide layer is first produced on the surface. In this case, for example, a tungsten trioxide layer can be produced.
  • the oxidized electrode is then heated at about 1200 ° C in a hydrogen furnace in which hydrogen is bubbled into water.
  • the EP 1 251 548 A1 teaches a method to improve the thermal radiation characteristics of electrodes in a high-pressure discharge lamp of the short arc type.
  • gutters are in the surface of the electrodes brought in.
  • the grooves have a depth that is less than or equal to 12% of the electrode diameter, with the ratio of the depth and spacing of the grooves being greater than or equal to two.
  • a laser device can be used.
  • the grooves may be angular or curved, wherein the surface is ground to produce curved grooves and then electrolytically polished in a 10% sodium hydroxide solution.
  • curved grooves can also be produced by heating to a high temperature in a vacuum, for example by heating the surface at 2000 ° C for 120 minutes.
  • the object of the present invention is to provide a method for producing an electrode for a high-pressure discharge lamp, with which the highest possible emissivity for the electrodes can be achieved.
  • the surface of the electrode should be as mechanically resistant as possible.
  • the object further consists in providing a high-pressure discharge lamp with at least one electrode produced in this way.
  • the present invention is based on the finding that a high emissivity is basically feasible when the electrode has an improved thermal Has radiation behavior.
  • the thermal radiation behavior can be improved by enlarging the surface of the electrode. However, it must be ensured that despite increased surface area of the electrode, the conductivity of the electrode is not affected.
  • the electrode surface for generating an oxide layer is coated with a suitable high-energy beam, for example an electromagnetic beam, in particular a laser beam, or an electron or ion beam.
  • a suitable high-energy beam for example an electromagnetic beam, in particular a laser beam, or an electron or ion beam.
  • EP 1 251 548 A1 can be generated by the inventive method a much larger surface and thus realize a much higher emissivity.
  • step a) the coating is carried out at least on a part of the electrode which is not embedded in the glass of the glass bulb after mounting the electrode in the glass bulb of the high-pressure discharge lamp.
  • the machining can be limited to the part of the electrode which is important for the emission results in a time saving and thus a reduction in the production costs.
  • step a) is carried out on the atmosphere, in particular oxygen-enriched atmosphere. Since the electrode is usually made predominantly of tungsten, i. In particular from doped tungsten, and tungsten is very reactive to oxygen, so can easily generate tungsten oxide.
  • step b) is carried out at the same time as step a).
  • step b) is carried out at the same time as step a).
  • Step c) is preferably carried out in a hydrogen-containing atmosphere, in particular in an argon-hydrogen mixture.
  • a preferred argon-hydrogen mixture is known as VARIGON®. This provides particularly easy the possibility that the oxygen from the tungsten oxide with the hydrogen from the atmosphere in which step c) is performed, connects to water. The pure metal remains on the electrode surface.
  • the electrode preferably comprises tungsten, wherein in step c) tungsten oxide is reduced to pure tungsten.
  • the coating is preferably carried out in step a) by means of a laser beam device.
  • a laser beam device precisely that part of the electrode surface which is important for the emissivity can be processed with particular precision.
  • different areas of the electrode surface can be painted over differently.
  • Scanning by means of a laser beam device allows a precise adjustment of a desired emissivity with regard to the adjustable parameters such as energy density, line spacing, focus, and the like.
  • the laser beam device is designed, in particular, to release an energy density which makes it possible to melt, oxidize and sublime at least part of the electrode surface.
  • step a) the laser beam device with a frequency between 1 kHz and 100 kHz, in particular 10 kHz, are clocked.
  • step a) preferably rows with a line spacing between two adjacent lines are preferably interposed on the electrode surface 0.01 and 0.2 mm, in particular 0.1 mm generated.
  • the laser beam device is preferably operated with a laser beam focus between 0.01 and 0.1 mm, in particular 0.02 mm. In this way, the electrode surface can be maximized, whereby at the same time the emissivity of the electrode becomes maximum.
  • the overcoating can also be done with other suitable blasting devices, e.g. Electron or ion beam devices
  • step c) is carried out at a temperature between 700 ° C. and 2500 ° C., in particular 2200 ° C.
  • Step a) is preferably carried out at ambient temperature, in particular a temperature between 15 ° C and 30 ° C, and ambient pressure.
  • Fig. 1 schematically a section of a high-pressure discharge lamp 10 is shown.
  • the high-pressure discharge lamp 10 comprises a discharge vessel 12 having a discharge space 14.
  • a first electrode 16 anode
  • a second electrode 18 cathode
  • At the oval in cross-section formed central part of the discharge vessel 12 close two diametrically opposite necks 20, 22 at.
  • the electrode 16 is melted in the neck 22, the electrode 18 in the neck 20th
  • the electrodes 16, 18 are arranged on rods 24, 26, which are preferably formed from tungsten or a tungsten alloy.
  • the electrodes 16, 18 themselves consist of doped tungsten.
  • step 120 at least part of the surface of the electrode 16 is swept over by means of a laser beam device.
  • the energy density is so high that a part of the electrode surface melts, oxidizes and sublimates. This means that a part of the resulting tungsten oxide goes into the gaseous state, another part of the tungsten oxide remains on the electrode surface.
  • Step 120 is preferably carried out in an oxygen-enriched atmosphere.
  • the laser beam device can be clocked at a frequency between 1 kHz and 100 kHz, in particular 10 kHz.
  • lines with a line spacing between two adjacent lines between 0.01 and 0.2 mm, in particular 0.1 mm are produced on the electrode surface.
  • the laser beam device is operated with a laser beam focus between 0.01 and 0.1 mm, in particular 0.02 mm.
  • the laser beam device for example, a power between 50 W and 200 W, preferably about 120 W, leave.
  • the sweeping can, for example, at a speed between 10 mm / s and 100 mm / s, in particular 30 mm / s, take place.
  • the temperature can be ambient temperature; the pressure is preferably ambient pressure.
  • a preferred laser beam device is known under the name rofin rsmarker and is operated with Galvo head.
  • the power in this embodiment is about 120 W, whereby a current of about 38 A flows.
  • the sweeping speed is approx. 30 mm / s.
  • the electrode 16 is rotatably mounted, so that the entire circumference can be structured by the laser beam device.
  • the step 120 creates a very rough oxidic surface. This is not defined geometrically, as will be explained in more detail below with reference to the other figures.
  • the electrode 16 is preferably inductively heated in a VARIGON atmosphere.
  • the oxidized parts of the surface are reduced by the existing hydrogen to metallic tungsten and water.
  • the result is a metallic, very rough electrode surface with an emissivity that can be adjusted by the degree of treatment.
  • the surface is free from contamination since, in contrast to the prior art, no binder has to be used in a pasting process.
  • the electrode has a very good coupling-in behavior during inductive heating and is mechanically stable, ie the electrode surface shows no tendency to decay.
  • Step 140 is preferably carried out at a temperature between 700 ° C and 2500 ° C, in particular 2200 ° C, performed.
  • step 160 ends in step 160.
  • Fig. 3 shows an enlarged view of the area of the surface of the electrode 16 of FIG Fig. 1 in which the shape changes from cylindrical to conical.
  • the magnification is 10: 1.
  • Fig. 4 shows an enlarged view of a section of Fig. 3 in the transition region cylindrical cone-shaped.
  • the magnification is 1: 30.
  • Fig. 5 a section of Fig. 3 in the cylindrical area.
  • This illustration emphasizes the high roughness of the tungsten surface of the electrode.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Discharge Lamp (AREA)

Description

Technisches GebietTechnical area

Die vorliegende Erfindung betrifft ein Verfahren zum Herstellen einer Elektrode für eine Hochdruckentladungslampe gemäss Anspruch 1.The present invention relates to a method for producing an electrode for a high-pressure discharge lamp according to claim 1.

Stand der TechnikState of the art

Der Emissionsgrad von Elektroden von Entladungslampen hat auf die Performance und die geometrische Auslegung derartiger Entladungslampen einen entscheidenden Einfluss.The emissivity of electrodes of discharge lamps has a decisive influence on the performance and geometrical design of such discharge lamps.

Stand der Technik ist das Bepasten mit Metallpulvern oder Stoffgemengen mittels eines organischen Binders und das darauf folgende Einsintern beziehungsweise Anbacken an den Elektrodenkörper. Allerdings ist die bepastete und eingesinterte Schicht mechanisch wenig beständig, was zu einem teilweisen Abbröckeln bei Berührung führen kann.The prior art is the pasting with metal powders or mixtures by means of an organic binder and the subsequent sintering or baking to the electrode body. However, the pasted and sintered layer is mechanically less stable, which can lead to partial crumbling on contact.

Aus der WO 2008/090030 A1 ist ein Verfahren zum Bearbeiten einer Elektrode einer Entladungslampe bekannt. Dabei wird die Elektrode in dem Bereich oxidiert, in dem sie im Hals eines aus Glas gebildeten Entladungsraums gasdicht eingequetscht ist. Die Oxidation erfolgt auf chemischen Wege bei normaler Luftatmosphäre und Umgebungsluftdruck bei einer Temperatur zwischen 700 und 1300 K. Die Oxidschicht wird anschließend in einer Vakuumumgebung sublimiert, wobei die Temperatur während des Sublimierens zwischen 1450 K und 1900 K beträgt. Durch diese Vorgehensweise erhält die Elektrode in dem genannten Bereich eine Oberfläche mit feiner Rauigkeit, wodurch die Haftung der Oberfläche dieses Elektrodenabschnitts am Entladungsgefäßmaterial reduziert wird. Dadurch reduziert sich die Gefahr der Rissbildung im abgedichteten Bereich des Entladungsgefäßes. Während des Sublimationsschritts werden mit der Oxidschicht auch etwaige Verunreinigungen von der Oberfläche des Elektrodenabschnitts entfernt, wodurch die Haftung ebenfalls reduziert wird.From the WO 2008/090030 A1 For example, a method of processing an electrode of a discharge lamp is known. In this case, the electrode is oxidized in the region in which it is pinched gas-tight in the neck of a discharge space formed of glass. The oxidation is carried out by chemical routes in normal air atmosphere and ambient air pressure at a temperature between 700 and 1300 K. The oxide layer is then sublimated in a vacuum environment, the temperature during the sublimation between 1450 K and 1900 K is. By doing so, the electrode obtains a surface of fine roughness in the above-mentioned range, whereby the adhesion of the surface of this electrode portion to the discharge vessel material is reduced. This reduces the risk of cracking in the sealed area of the discharge vessel. During the sublimation step, the oxide layer also removes any contaminants from the surface of the electrode portion, thereby also reducing adhesion.

Aus der US 6,626,725 B1 ist eine Entladungslampe bekannt, bei der eine stabförmige Elektrode aus Wolfram bereichsweise in einen Hals eines Entladungsgefäßes durch eine gasdichte Quetschung eingebracht ist und sich bereichsweise in einen Entladungsraum des Entladungsgefäßes erstreckt. Um eine Rissbildung des Entladungsgefäßes im Quetschungsbereich im Betrieb der Entladungslampe verhindern zu können, wird die Oberfläche der Elektrode bearbeitet. Zur Erzeugung einer elementaren Wolframschicht an der Oberfläche der Elektrode in dem Längenbereich, in dem die Elektrode im Quetschbereich angeordnet ist, wird zunächst eine Oxidschicht auf der Oberfläche erzeugt. Dabei kann beispielsweise eine Wolframtrioxidschicht erzeugt werden. Um die elementare Wolframschicht zu erzeugen, wird dann die oxidierte Elektrode bei etwa 1200°C in einem Wasserstoffofen, in dem Wasserstoff in Wasser aufsprudelt, erhitzt.From the US 6,626,725 B1 a discharge lamp is known in which a rod-shaped electrode made of tungsten is partially introduced into a neck of a discharge vessel by a gas-tight pinch and extends in regions in a discharge space of the discharge vessel. In order to prevent cracking of the discharge vessel in the pinch region during operation of the discharge lamp, the surface of the electrode is processed. To produce an elementary tungsten layer on the surface of the electrode in the length range in which the electrode is arranged in the pinch region, an oxide layer is first produced on the surface. In this case, for example, a tungsten trioxide layer can be produced. To produce the elemental tungsten layer, the oxidized electrode is then heated at about 1200 ° C in a hydrogen furnace in which hydrogen is bubbled into water.

Die EP 1 251 548 A1 lehrt ein Verfahren, um die thermischen Strahlungseigenschaften von Elektroden in einer Hochdruckentladungslampe vom Kurzbogentyp zu verbessern. Zu diesem Zweck werden Rinnen in die Oberfläche der Elektroden eingebracht. Die Rinnen weisen eine Tiefe auf, die kleiner gleich 12 % des Elektrodendurchmessers ist, wobei das Verhältnis aus Tiefe und Abstand der Rinnen größer gleich zwei ist. Zum Einbringen der Rinnen kann eine Laservorrichtung Verwendung finden. Die Rinnen können eckig oder gebogen ausgebildet sein, wobei zur Erzeugung von gebogenen Rinnen die Oberfläche geschliffen wird und anschließend elektrolytisch poliert wird in einer 10-%igen Natriumhydroxidlösung. Gebogene Rinnen können jedoch auch durch Erhitzen auf eine hohe Temperatur in einem Vakuum erzeugt werden, beispielsweise indem die Oberfläche über 120 min bei 2000°C erhitzt wird.The EP 1 251 548 A1 teaches a method to improve the thermal radiation characteristics of electrodes in a high-pressure discharge lamp of the short arc type. For this purpose, gutters are in the surface of the electrodes brought in. The grooves have a depth that is less than or equal to 12% of the electrode diameter, with the ratio of the depth and spacing of the grooves being greater than or equal to two. For introducing the grooves, a laser device can be used. The grooves may be angular or curved, wherein the surface is ground to produce curved grooves and then electrolytically polished in a 10% sodium hydroxide solution. However, curved grooves can also be produced by heating to a high temperature in a vacuum, for example by heating the surface at 2000 ° C for 120 minutes.

Aus DE102007015243 ist bekannt, Laserstrahlung zur Sublimation der Leuchtkörperoberfläche einer Halogenlampe oder auch zum Einbrennen / Abscheiden von Material auf dieser Oberfläche einzusetzen.Out DE102007015243 It is known to use laser radiation for sublimation of the filament surface of a halogen lamp or also for burning / depositing material on this surface.

Darstellung der ErfindungPresentation of the invention

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Verfahren zum Herstellen einer Elektrode für eine Hochdruckentladungslampe bereitzustellen, mit dem sich ein möglichst hoher Emissionsgrad für die Elektroden erzielen lässt. Dabei soll die Oberfläche der Elektrode mechanisch möglichst beständig sein. Die Aufgabe besteht weiterhin darin, eine Hochdruckentladungslampe mit mindestens einer derart hergestellten Elektrode bereitzustellen.The object of the present invention is to provide a method for producing an electrode for a high-pressure discharge lamp, with which the highest possible emissivity for the electrodes can be achieved. The surface of the electrode should be as mechanically resistant as possible. The object further consists in providing a high-pressure discharge lamp with at least one electrode produced in this way.

Diese Aufgaben werden gelöst durch ein Verfahren mit den Merkmalen von Patentanspruch 1.These objects are achieved by a method having the features of claim 1.

Der vorliegenden Erfindung liegt die Erkenntnis zugrunde, dass ein hoher Emissionsgrad grundsätzlich dann realisierbar ist, wenn die Elektrode ein verbessertes thermisches Abstrahlverhalten aufweist. Das thermische Abstrahlverhalten lässt sich durch Vergrößerung der Oberfläche der Elektrode verbessern. Dabei muss jedoch sichergestellt werden, dass trotz vergrößerter Oberfläche der Elektrode die Leitfähigkeit der Elektrode nicht beeinträchtigt wird.The present invention is based on the finding that a high emissivity is basically feasible when the electrode has an improved thermal Has radiation behavior. The thermal radiation behavior can be improved by enlarging the surface of the electrode. However, it must be ensured that despite increased surface area of the electrode, the conductivity of the electrode is not affected.

Erfindungsgemäß wird deshalb zunächst zumindest ein Teil der Elektrodenoberfläche zur Erzeugung einer Oxidschicht mit einem hierfür geeigneten, energiereichen Strahl, beispielsweise einem elektromagnetischen Strahl, insbesondere einem Laserstrahl, oder einem Elektronen- oder Ionenstrahl, überstrichen. Durch entsprechende Wahl der Energiedichte wird dabei zumindest ein Teil der entstehenden Oxidschicht bereits sublimiert. Als Zwischenergebnis erhält man eine Elektrodenoberfläche, die zwar bereits extrem rau ist, jedoch oxidisch ist, das heißt eine reduzierte Leitfähigkeit aufweist. Aus diesem Grund wird in einem Folgeschritt die nicht sublimierte Oxidschicht zum Metall reduziert. Im Ergebnis entsteht eine extrem raue Oberfläche mit einem hohen Emissionsgrad, wobei der Emissionsgrad abhängig von der Strukturierung und Oxidation einstellbar ist. Die entstehende Oberfläche ist mechanisch sehr fest und sehr beständig. Überdies wird im Gegensatz zur aus dem Stand der Technik bekannten Bepastungsvariante keine zusätzliche Verunreinigung eingebracht.According to the invention, therefore, first at least a part of the electrode surface for generating an oxide layer is coated with a suitable high-energy beam, for example an electromagnetic beam, in particular a laser beam, or an electron or ion beam. By appropriate choice of the energy density while at least a portion of the resulting oxide layer is already sublimated. As an intermediate result, an electrode surface is obtained which, although extremely rough, is oxidic, that is to say has a reduced conductivity. For this reason, in a subsequent step, the non-sublimated oxide layer is reduced to the metal. The result is an extremely rough surface with a high emissivity, whereby the emissivity is adjustable depending on the structuring and oxidation. The resulting surface is mechanically very strong and very resistant. Moreover, in contrast to the known from the prior art Bepastungsvariante no additional contamination is introduced.

Im Gegensatz zur Erzeugung einer Oxidschicht auf chemischem Wege können bei dem erfindungsgemäßen Verfahren auch nur Teilbereiche oxidiert werden. Dies ist insbesondere vorteilhaft zum Definieren unterschiedlicher Funktionsbereiche an der Elektrode.In contrast to the production of an oxide layer by chemical means, only partial areas can be oxidized in the method according to the invention. This is particularly advantageous for defining different functional areas on the electrode.

Im Vergleich zur definierten Einbringung von Rillen gemäß der Lehre der oben erwähnten EP 1 251 548 A1 lässt sich durch das erfindungsgemäße Verfahren eine sehr viel gröβere Oberfläche erzeugen und damit ein deutlich höherer Emissionsgrad realisieren.In comparison to the defined introduction of grooves according to the teaching of the above-mentioned EP 1 251 548 A1 can be generated by the inventive method a much larger surface and thus realize a much higher emissivity.

Zum Beispiel erfolgt in Schritt a) das Überstreichen zumindest auf einem Teil der Elektrode, der nach der Montage der Elektrode im Glaskolben der Hochdruckentladungslampe nicht im Glas des Glaskolbens eingebettet ist. Dadurch, dass die Bearbeitung auf den Teil der Elektrode beschränkt werden kann, der für die Emission von Bedeutung ist, ergibt sich eine Zeitersparnis und damit eine Reduktion der Herstellungskosten. Bevorzugt wird Schritt a) an Atmosphäre, insbesondere sauerstoffangereicherter Atmosphäre, durchgeführt. Da die Elektrode üblicherweise überwiegend aus Wolfram besteht, d.h. insbesondere aus dotiertem Wolfram, und Wolfram sehr reaktionsfreudig gegenüber Sauerstoff ist, lässt sich so auf einfache Weise Wolframoxid erzeugen.For example, in step a) the coating is carried out at least on a part of the electrode which is not embedded in the glass of the glass bulb after mounting the electrode in the glass bulb of the high-pressure discharge lamp. The fact that the machining can be limited to the part of the electrode which is important for the emission results in a time saving and thus a reduction in the production costs. Preferably, step a) is carried out on the atmosphere, in particular oxygen-enriched atmosphere. Since the electrode is usually made predominantly of tungsten, i. In particular from doped tungsten, and tungsten is very reactive to oxygen, so can easily generate tungsten oxide.

Weiterhin bevorzugt wird Schritt b) zeitgleich mit Schritt a) ausgeführt. Beim Überstreichen geht daher ein Teil des Wolframoxids durch Sublimation bereits in den gasförmigen Zustand über, während ein anderer Teil des Wolframoxids auf der Oberfläche der Elektrode verbleibt.Further preferably, step b) is carried out at the same time as step a). When overcoating, therefore, a part of the tungsten oxide already passes through the sublimation in the gaseous state, while another part of the tungsten oxide remains on the surface of the electrode.

Schritt c) wird bevorzugt in einer wasserstoffhaltigen Atmosphäre, insbesondere in einem Argon-Wasserstoff-Gemisch, ausgeführt. Ein bevorzugtes Argon-Wasserstoff-Gemisch ist unter der Bezeichnung VARIGON® bekannt. Dadurch wird besonders einfach die Möglichkeit bereitgestellt, dass sich der Sauerstoff aus dem Wolframoxid mit dem Wasserstoff aus der Atmosphäre, in der Schritt c) durchgeführt wird, zu Wasser verbindet. Auf der Elektrodenoberfläche bleibt das reine Metall übrig.Step c) is preferably carried out in a hydrogen-containing atmosphere, in particular in an argon-hydrogen mixture. A preferred argon-hydrogen mixture is known as VARIGON®. This provides particularly easy the possibility that the oxygen from the tungsten oxide with the hydrogen from the atmosphere in which step c) is performed, connects to water. The pure metal remains on the electrode surface.

Wie bereits ausgeführt, umfasst die Elektrode bevorzugt Wolfram, wobei in Schritt c) Wolframoxid zu reinem Wolfram reduziert wird.As already stated, the electrode preferably comprises tungsten, wherein in step c) tungsten oxide is reduced to pure tungsten.

Bevorzugt erfolgt das Überstreichen in Schritt a) mittels einer Laserstrahlvorrichtung. Dadurch kann besonders präzise genau der Teil der Elektrodenoberfläche bearbeitet werden, der für den Emissionsgrad von Bedeutung ist. Im Gegensatz zu einer chemischen Bearbeitung können unterschiedliche Bereiche der Elektrodenoberfläche unterschiedlich überstrichen werden. Durch Variation der auf der Elektrodenoberfläche mittels der Laserstrahlvorrichtung verursachten Modifikationen kann eine weitere Optimierung im Hinblick auf einen hohen Emissionsgrad vorgenommen werden. Ein Überstreichen mittels Laserstrahlvorrichtung erlaubt im Hinblick auf die einstellbaren Parameter wie Energiedichte, Zeilenabstand, Focus, und dergleichen, eine präzise Einstellung eines gewünschten Emissionsgrads.The coating is preferably carried out in step a) by means of a laser beam device. As a result, precisely that part of the electrode surface which is important for the emissivity can be processed with particular precision. In contrast to a chemical treatment, different areas of the electrode surface can be painted over differently. By varying the modifications made on the electrode surface by means of the laser beam device, a further optimization with regard to a high emissivity can be carried out. Scanning by means of a laser beam device allows a precise adjustment of a desired emissivity with regard to the adjustable parameters such as energy density, line spacing, focus, and the like.

Die Laserstrahlvorrichtung ist in diesem Zusammenhang insbesondere ausgelegt, eine Energiedichte freizusetzen, die ein Schmelzen, Oxidieren sowie Sublimieren zumindest eines Teils der Elektrodenoberfläche ermöglicht.In this context, the laser beam device is designed, in particular, to release an energy density which makes it possible to melt, oxidize and sublime at least part of the electrode surface.

Dabei kann in Schritt a) die Laserstrahlvorrichtung mit einer Frequenz zwischen 1 kHz und 100 kHz, insbesondere 10 kHz, getaktet werden. In Schritt a) werden bevorzugt auf der Elektrodenoberfläche bevorzugt Zeilen mit einem Zeilenabstand zwischen zwei benachbarten Zeilen zwischen 0,01 und 0,2 mm, insbesondere 0,1 mm, erzeugt. Bevorzugt wird die Laserstrahlvorrichtung mit einem Laserstrahlfokus zwischen 0,01 und 0,1 mm, insbesondere 0,02 mm, betrieben. Auf diese Weise lässt sich die Elektrodenoberfläche maximieren, wodurch gleichzeitig der Emissionsgrad der Elektrode maximal wird.In this case, in step a), the laser beam device with a frequency between 1 kHz and 100 kHz, in particular 10 kHz, are clocked. In step a), preferably rows with a line spacing between two adjacent lines are preferably interposed on the electrode surface 0.01 and 0.2 mm, in particular 0.1 mm generated. The laser beam device is preferably operated with a laser beam focus between 0.01 and 0.1 mm, in particular 0.02 mm. In this way, the electrode surface can be maximized, whereby at the same time the emissivity of the electrode becomes maximum.

Alternativ kann das Überstreichen auch mit anderen geeignete Strahlvorrichtungen erfolgen, wie z.B. Elektronen- oder IonenstrahlvorrichtungenAlternatively, the overcoating can also be done with other suitable blasting devices, e.g. Electron or ion beam devices

Gemäß einer bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens wird Schritt c) bei einer Temperatur zwischen 700°C und 2500°C, insbesondere 2200°C, durchgeführt. Schritt a) hingegen wird bevorzugt bei Umgebungstemperatur, insbesondere einer Temperatur zwischen 15°C und 30°C, und Umgebungsdruck durchgeführt.According to a preferred embodiment of the method according to the invention, step c) is carried out at a temperature between 700 ° C. and 2500 ° C., in particular 2200 ° C. Step a), however, is preferably carried out at ambient temperature, in particular a temperature between 15 ° C and 30 ° C, and ambient pressure.

Weitere bevorzugte Ausführungsformen ergeben sich aus den Unteransprüchen.Further preferred embodiments emerge from the subclaims.

Die mit Bezug auf das erfindungsgemäße Verfahren vorgestellten bevorzugten Ausführungsformen und deren Vorteile gelten entsprechend, soweit anwendbar, für eine Hochdruckentladungslampe mit mindestens einer derart hergestellten Elektrode.The preferred embodiments presented with reference to the method according to the invention and their advantages apply correspondingly, as far as applicable, to a high-pressure discharge lamp having at least one electrode produced in this way.

Kurze Beschreibung der ZeichnungenBrief description of the drawings

Im Nachfolgenden werden Ausführungsbeispiele der vorliegenden Erfindung unter Bezugnahme auf die beigefügten Zeichnungen näher beschrieben. Es zeigen:

Fig. 1
in schematischer Darstellung eine Hochdruckentladungslampe;
Fig. 2
einen Signalflussgraphen für ein Ausführungsbeispiel eines erfindungsgemäßen Verfahrens;
Fig. 3
einen Ausschnitt der Anode der in Fig. 1 dargestellten Hochdruckentladungslampe;
Fig. 4
eine erste vergrößerte Darstellung eines ersten Ausschnitts der in Fig. 3 dargestellten Elektrodenoberfläche;
Fig. 5
eine erste vergrößerte Darstellung eines zweiten Ausschnitts der in Fig. 3 dargestellten Elektrodenoberfläche;
Fig. 6
eine vergrößerte Darstellung des in Fig. 5 dargestellten Ausschnitts; und
Fig. 7
eine vergrößerte Darstellung des in Fig. 6 dargestellten Ausschnitts.
Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. Show it:
Fig. 1
a schematic representation of a high pressure discharge lamp;
Fig. 2
a signal flow graph for an embodiment of a method according to the invention;
Fig. 3
a section of the anode of in Fig. 1 illustrated high pressure discharge lamp;
Fig. 4
a first enlarged view of a first section of in Fig. 3 represented electrode surface;
Fig. 5
a first enlarged view of a second section of in Fig. 3 represented electrode surface;
Fig. 6
an enlarged view of the in Fig. 5 section shown; and
Fig. 7
an enlarged view of the in Fig. 6 section shown.

Bevorzugte Ausführung der ErfindungPreferred embodiment of the invention

In Fig. 1 ist schematisch ein Ausschnitt einer Hochdruckentladungslampe 10 dargestellt. Die Hochdruckentladungslampe 10 umfasst ein Entladungsgefäß 12 mit einem Entladungsraum 14. In den Entladungsraums 14 erstrecken sich eine erste Elektrode 16 (Anode) und eine zweite Elektrode 18 (Kathode). An den im Querschnitt oval ausgebildeten Mittelteil des Entladungsgefäßes 12 schließen zwei diametral gegenüberliegende Hälse 20, 22 an. Die Elektrode 16 ist im Hals 22 eingeschmolzen, die Elektrode 18 im Hals 20.In Fig. 1 schematically a section of a high-pressure discharge lamp 10 is shown. The high-pressure discharge lamp 10 comprises a discharge vessel 12 having a discharge space 14. In the discharge space 14, a first electrode 16 (anode) and a second electrode 18 (cathode) extend. At the oval in cross-section formed central part of the discharge vessel 12 close two diametrically opposite necks 20, 22 at. The electrode 16 is melted in the neck 22, the electrode 18 in the neck 20th

Die Elektroden 16, 18 sind auf Stäben 24, 26 angeordnet, die bevorzugt aus Wolfram oder einer Wolframlegierung gebildet sind. Die Elektroden 16, 18 selbst bestehen aus dotiertem Wolfram.The electrodes 16, 18 are arranged on rods 24, 26, which are preferably formed from tungsten or a tungsten alloy. The electrodes 16, 18 themselves consist of doped tungsten.

Das erfindungsgemäße Verfahren wird am Beispiel der Elektrode 16, das heißt der Anode, näher dargestellt. Selbstverständlich sind Ausführungsformen denkbar, in denen überdies die Kathode entsprechend dem erfindungsgemäβen Verfahren bearbeitet wird.The process according to the invention is illustrated in more detail using the example of the electrode 16, that is to say the anode. Of course, embodiments are conceivable in which, moreover, the cathode is processed according to the method according to the invention.

Das Verfahren beginnt im Schritt 100. Im Schritt 120 wird zumindest ein Teil der Oberfläche der Elektrode 16 mittels einer Laserstrahlvorrichtung überstrichen. Die Energiedichte ist dabei so hoch, dass ein Teil der Elektrodenoberfläche schmilzt, oxidiert sowie sublimiert. Das bedeutet, dass eine Teil des entstehenden Wolframoxids in den gasförmigen Zustand übergeht, ein anderer Teil des Wolframoxids auf der Elektrodenoberfläche verbleibt. Schritt 120 wird bevorzugt in einer sauerstoffangereicherten Atmosphäre durchgeführt. Die Laserstrahlvorrichtung kann mit einer Frequenz zwischen 1 kHz und 100 kHz, insbesondere 10 kHz getaktet werden. Bevorzugt werden auf der Elektrodenoberfläche Zeilen mit einem Zeilenabstand zwischen zwei benachbarten Zeilen zwischen 0,01 und 0,2 mm, insbesondere 0,1 mm erzeugt. Bei einer bevorzugten Ausführungsform wird die Laserstrahlvorrichtung mit einem Laserstrahlfokus zwischen 0,01 und 0,1 mm, insbesondere 0,02 mm, betrieben. Die Laserstrahlvorrichtung kann beispielsweise eine Leistung zwischen 50 W und 200 W, bevorzugt ca. 120 W, abgeben. Das Überstreichen kann beispielsweise mit einer Geschwindigkeit zwischen 10 mm/s und 100 mm/s, insbesondere 30 mm/s, erfolgen. Die Temperatur kann Umgebungstemperatur sein; der Druck ist bevorzugt Umgebungsdruck.The method begins in step 100. In step 120, at least part of the surface of the electrode 16 is swept over by means of a laser beam device. The energy density is so high that a part of the electrode surface melts, oxidizes and sublimates. This means that a part of the resulting tungsten oxide goes into the gaseous state, another part of the tungsten oxide remains on the electrode surface. Step 120 is preferably carried out in an oxygen-enriched atmosphere. The laser beam device can be clocked at a frequency between 1 kHz and 100 kHz, in particular 10 kHz. Preferably, lines with a line spacing between two adjacent lines between 0.01 and 0.2 mm, in particular 0.1 mm, are produced on the electrode surface. In a preferred embodiment, the laser beam device is operated with a laser beam focus between 0.01 and 0.1 mm, in particular 0.02 mm. The laser beam device, for example, a power between 50 W and 200 W, preferably about 120 W, leave. The sweeping can, for example, at a speed between 10 mm / s and 100 mm / s, in particular 30 mm / s, take place. The temperature can be ambient temperature; the pressure is preferably ambient pressure.

Eine bevorzugte Laserstrahlvorrichtung ist unter der Bezeichnung rofin rsmarker bekannt und wird mit Galvokopf betrieben. Die Leistung beträgt bei diesem Ausführungsbeispiel ca. 120 W, wodurch ein Strom von ca. 38 A fließt. Die Überstreichgeschwindigkeit beträgt ca. 30 mm/s.A preferred laser beam device is known under the name rofin rsmarker and is operated with Galvo head. The power in this embodiment is about 120 W, whereby a current of about 38 A flows. The sweeping speed is approx. 30 mm / s.

Bevorzugt ist die Elektrode 16 drehbar gelagert, so dass durch die Laserstrahlvorrichtung der gesamte Umfang strukturiert werden kann.Preferably, the electrode 16 is rotatably mounted, so that the entire circumference can be structured by the laser beam device.

Durch den Schritt 120 entsteht eine sehr raue oxidische Oberfläche. Diese ist geometrisch nicht definiert, wie weiter unten mit Bezug auf die weiteren Figuren noch näher erläutert werden wird.The step 120 creates a very rough oxidic surface. This is not defined geometrically, as will be explained in more detail below with reference to the other figures.

In Schritt 140 wird die Elektrode 16 in einer VARIGON-Atmosphäre bevorzugt induktiv erhitzt. Dadurch werden die oxidierten Teile der Oberfläche durch den vorhandenen Wasserstoff zu metallischem Wolfram und Wasser reduziert. Im Ergebnis erhält man eine metallische, sehr raue Elektrodenoberfläche mit über den Behandlungsgrad einstellbarem Emissionsgrad. Die Oberfläche ist verunreinigungsfrei, da im Gegensatz zum Stand der Technik kein Binder in einem Bepastungsprozess verwendet werden muss. Die Elektrode weist ein sehr gutes Einkoppelverhalten beim induktiven Erwärmen auf und ist mechanisch stabil, das heißt die Elektrodenoberfläche zeigt keine Tendenz abzubröckeln. Schritt 140 wird bevorzugt bei einer Temperatur zwischen 700°C und 2500°C, insbesondere 2200°C, durchgeführt.In step 140, the electrode 16 is preferably inductively heated in a VARIGON atmosphere. As a result, the oxidized parts of the surface are reduced by the existing hydrogen to metallic tungsten and water. The result is a metallic, very rough electrode surface with an emissivity that can be adjusted by the degree of treatment. The surface is free from contamination since, in contrast to the prior art, no binder has to be used in a pasting process. The electrode has a very good coupling-in behavior during inductive heating and is mechanically stable, ie the electrode surface shows no tendency to decay. Step 140 is preferably carried out at a temperature between 700 ° C and 2500 ° C, in particular 2200 ° C, performed.

Das erfindungsgemäße Verfahren endet im Schritt 160.The method according to the invention ends in step 160.

Durch das erfindungsgemäße Verfahren lassen sich Elektroden mit einem Emissionsgrad der erzeugten Oberfläche von bis 0,6 erzeugen. Damit wird der Bereich, der im Stand der Technik mit Bepastung erreicht werden konnte, sogar geringfügig übertroffen.By means of the method according to the invention, it is possible to produce electrodes with an emissivity of the generated surface of up to 0.6. Thus, the range that could be achieved in the state of the art with paste, even slightly exceeded.

Fig. 3 zeigt eine vergrößerte Aufnahme des Bereichs der Oberfläche der Elektrode 16 von Fig. 1, bei dem die Form von zylindrisch in kegelförmig übergeht. Die Vergrößerung beträgt 10 : 1. Man erkennt deutlich die Spuren der Laserbearbeitung, insbesondere auch die Überlappungsbereiche der Laserstruktur, die dadurch entstanden sind, dass der Strahl beim Aufbringen der parallelen Linien in dem kegeligen Bereich der Elektrode 16 ausgelaufen ist. Fig. 3 shows an enlarged view of the area of the surface of the electrode 16 of FIG Fig. 1 in which the shape changes from cylindrical to conical. The magnification is 10: 1. The tracks of the laser processing, in particular also the overlapping areas of the laser structure, which have arisen due to the fact that the beam has run out during the application of the parallel lines in the conical region of the electrode 16, can be clearly recognized.

Fig. 4 zeigt eine vergrößerte Darstellung eines Ausschnitts von Fig. 3 im Übergangsbereich zylindrischkegelförmig. Die Vergrößerung beträgt 1 : 30. Bei derselben Vergrößerung zeigt Fig. 5 einen Ausschnitt von Fig. 3 im zylindrischen Bereich. Fig. 4 shows an enlarged view of a section of Fig. 3 in the transition region cylindrical cone-shaped. The magnification is 1: 30. At the same magnification shows Fig. 5 a section of Fig. 3 in the cylindrical area.

Bei weiterer Vergrößerung auf den Faktor 1 : 200 zeigt Fig. 6 einen vergrößerten Ausschnitt der Darstellung in Fig. 5. Es sind deutlich Rippen zu erkennen, wobei die Unregelmäßigkeit der Oberfläche ins Auge fällt. Durch die Unregelmäßigkeit ergibt sich eine deutlich Vergrößerung der Elektrodenoberfläche, wodurch sich hohe Emissionsgrade erzielen lassen.With further enlargement to the factor 1: 200 shows Fig. 6 an enlarged section of the illustration in Fig. 5 , There are clearly visible ribs, with the irregularity of the surface striking the eye. Due to the irregularity results in a significant increase in the electrode surface, which can achieve high emissivities.

Fig. 7 schließlich zeigt das Detail einer Rippe der Darstellung von Fig. 6. Die Vergrößerung beträgt 1 : 1000. Fig. 7 finally, the detail of a rib shows the representation of Fig. 6 , The magnification is 1: 1000.

Diese Darstellung unterstreicht die hohe Rauigkeit der Wolframoberfläche der Elektrode.This illustration emphasizes the high roughness of the tungsten surface of the electrode.

Claims (12)

  1. Method for producing an electrode (16) comprising tungsten for a high-pressure discharge lamp (10), comprising the following steps:
    a) scanning at least part of the electrode surface using a high-energy beam for producing an oxide layer (step 120);
    b) at least partially sublimating the oxide layer formed in step a) (step 120); and
    c) reducing the rest of the oxide layer (140).
  2. Method according to Claim 1,
    characterized
    in that step a) is carried out in atmosphere, in particular in an oxygen-enriched atmosphere (step 120).
  3. Method according to one of the preceding claims,
    characterized
    in that step b) is performed at the same time as step a) (step 120).
  4. Method according to one of the preceding claims,
    characterized
    in that step c) is performed in a hydrogen-containing atmosphere, in particular in an argon/hydrogen mixture (step 140).
  5. Method according to one of the preceding claims,
    characterized
    in that tungsten oxide is reduced to form pure tungsten in step c) (step 140).
  6. Method according to one of the preceding claims,
    characterized
    in that the scanning in step a) is effected by means of a laser beam, electron beam or ion beam apparatus (step 120).
  7. Method according to Claim 6,
    characterized
    in that the laser beam, electron beam or ion beam apparatus is designed to release an energy density which makes it possible for at least part of the electrode surface to be melted, oxidized and sublimated.
  8. Method according to either of Claims 6 and 7,
    characterized
    in that, in step a), the laser beam apparatus is clocked at a frequency of between 1 kHz and 100 kHz, in particular 10 kHz (step 120).
  9. Method according to one of Claims 6 to 8,
    characterized
    in that lines with a spacing of between 0.01 and 0.2 mm, in particular 0.1 mm, between two adjacent lines are produced on the electrode surface in step a) (step 120).
  10. Method according to one of Claims 6 to 9,
    characterized
    in that the laser beam apparatus is operated with a laser beam focus of between 0.01 and 0.1 mm, in particular 0.02 mm.
  11. Method according to one of the preceding claims,
    characterized
    in that step c) is carried out at a temperature of between 700°C and 2500°C, in particular 2200°C (step 140).
  12. Method according to one of the preceding claims,
    characterized
    in that step a) is carried out at ambient temperature, in particular at a temperature of between 15°C and 30°C, and at ambient pressure (step 120).
EP11778853.9A 2010-11-05 2011-10-28 Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp comprising at least one electrode thus produced Not-in-force EP2526563B1 (en)

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DE102010043463A DE102010043463A1 (en) 2010-11-05 2010-11-05 Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp with at least one electrode produced in this way
PCT/EP2011/069030 WO2012059435A1 (en) 2010-11-05 2011-10-28 Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp comprising at least one electrode thus produced

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DE721503C (en) 1940-03-14 1942-06-08 Aeg High pressure discharge lamp with hydrogen filling
DE4206002A1 (en) 1992-02-27 1993-09-02 Philips Patentverwaltung METHOD FOR PRODUCING A PATTERN IN THE SURFACE OF A WORKPIECE
JP3283116B2 (en) 1993-08-31 2002-05-20 株式会社東芝 Manufacturing method of oxide cathode
EP0903771B1 (en) * 1997-09-19 2004-03-03 Matsushita Electric Industrial Co., Ltd. High-pressure discharge lamp and method for manufacturing the same
US6626725B1 (en) * 2000-05-08 2003-09-30 Welch Allyn, Inc Electrode treatment surface process for reduction of a seal cracks in quartz
JP4512968B2 (en) 2000-08-03 2010-07-28 ウシオ電機株式会社 Short arc type high pressure discharge lamp
AT5322U1 (en) * 2001-05-11 2002-05-27 Plansee Ag METHOD FOR PRODUCING A HIGH PRESSURE DISCHARGE LAMP
JP3648184B2 (en) * 2001-09-07 2005-05-18 株式会社小糸製作所 Discharge lamp arc tube and method of manufacturing the same
JP4427391B2 (en) 2003-09-24 2010-03-03 東芝ライテック株式会社 High pressure discharge lamp and method of manufacturing high pressure discharge lamp
DE10360545A1 (en) 2003-12-22 2005-07-14 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Electrode for a high pressure discharge lamp
JP4453487B2 (en) * 2004-08-24 2010-04-21 岩崎電気株式会社 Oxygen sealing method for high pressure discharge lamp
JP4509754B2 (en) * 2004-12-02 2010-07-21 株式会社小糸製作所 Arc tube for discharge lamp device and method of manufacturing the same
JP4815839B2 (en) * 2005-03-31 2011-11-16 ウシオ電機株式会社 High load high intensity discharge lamp
DE102007003486A1 (en) 2007-01-24 2008-07-31 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Method for processing an electrode of a discharge lamp
DE102007015243A1 (en) * 2007-03-29 2008-10-02 Osram Gesellschaft mit beschränkter Haftung Electric light bulb e.g. halogen lamp, has molybdenum foils that are arranged between outer and inner leads of pinch seal and are processed using laser
JP4636156B2 (en) 2008-10-01 2011-02-23 ウシオ電機株式会社 Short arc type discharge lamp
JP4872999B2 (en) 2008-12-01 2012-02-08 ウシオ電機株式会社 High pressure discharge lamp

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EP2526563A1 (en) 2012-11-28
US20130221842A1 (en) 2013-08-29
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CN103189958B (en) 2016-08-03
CN103189958A (en) 2013-07-03

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