EP2518332A1 - Versorgung- und Ablasseinstellungsvorrichtung und Versorgung- und Ablasseinstellungssystem - Google Patents

Versorgung- und Ablasseinstellungsvorrichtung und Versorgung- und Ablasseinstellungssystem Download PDF

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Publication number
EP2518332A1
EP2518332A1 EP12162083A EP12162083A EP2518332A1 EP 2518332 A1 EP2518332 A1 EP 2518332A1 EP 12162083 A EP12162083 A EP 12162083A EP 12162083 A EP12162083 A EP 12162083A EP 2518332 A1 EP2518332 A1 EP 2518332A1
Authority
EP
European Patent Office
Prior art keywords
valve
discharge
air
supply
adjusting apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12162083A
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English (en)
French (fr)
Inventor
Kiyoshi Nagai
Takehito Nakagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Publication of EP2518332A1 publication Critical patent/EP2518332A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
    • F15B11/0413—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed in one direction only, with no control in the reverse direction, e.g. check valve in parallel with a throttle valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40515—Flow control characterised by the type of flow control means or valve with variable throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40576—Assemblies of multiple valves
    • F15B2211/40584—Assemblies of multiple valves the flow control means arranged in parallel with a check valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
    • F15B2211/41527—Flow control characterised by the connections of the flow control means in the circuit being connected to an output member and a directional control valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/47—Flow control in one direction only
    • F15B2211/473—Flow control in one direction only without restriction in the reverse direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/505—Pressure control characterised by the type of pressure control means
    • F15B2211/50509—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure upstream of the pressure control means
    • F15B2211/50518—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure upstream of the pressure control means using pressure relief valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/50—Pressure control
    • F15B2211/515—Pressure control characterised by the connections of the pressure control means in the circuit
    • F15B2211/5153—Pressure control characterised by the connections of the pressure control means in the circuit being connected to an output member and a directional control valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/80—Other types of control related to particular problems or conditions
    • F15B2211/885—Control specific to the type of fluid, e.g. specific to magnetorheological fluid
    • F15B2211/8855—Compressible fluids, e.g. specific to pneumatics

Definitions

  • the present invention relates to a supply and discharge adjusting apparatus including a main unit formed with a main passage communicating a first port with a second port and a speed controller in the main unit to adjust a discharge amount of a fluid flowing in the main passage by use of a needle valve, and a supply and discharge adjusting system provided with the supply and discharge adjusting apparatus.
  • a supply and discharge adjusting apparatus is conventionally used in for example a semiconductor manufacturing apparatus to supply air under pressure or adjust a discharge amount of a fluid (air) to an air-operated valve or the like arranged to control the amount of a chemical solution to be supplied. Further, the supply and discharge adjusting apparatus is used to supply air under pressure or adjust a discharge amount of air to an air cylinder or the like.
  • the air supply under pressure or discharge acts on a valve element to come into or out of contact with a valve seat.
  • a water hammer phenomenon generally occurs at the time of a valve closing operation.
  • Patent Documents 1 and 2 Accordingly, to reduce or prevent such the water hammer phenomenon, various proposals have been disclosed (see, for example, Patent Documents 1 and 2)
  • Patent Document 1 discloses an air-operated valve including a check valve operated by operating pressure and a needle valve.
  • the check valve in a first discharge state where a valve closing operation for bringing a main valve element into contact with a main valve seat starts, the check valve is in a valve open position. Therefore, the air having passed through the check valve is released into atmosphere. As a result, the main valve element of the air-operated valve moves downward toward the valve seat.
  • the check valve is placed in a valve closed state. In this state, the air is little by little discharged through the needle valve.
  • Patent Document 2 discloses that an air-operated valve includes a relief valve whereby air is discharged through the relief valve in a second discharge state, so that a water hammer phenomenon can be prevented.
  • Patent Document 1 JP 2000-120921 A
  • Patent Document 2 JP 2009-180338 A
  • Patent Document 1 the air-operated valve of Patent Document 1 is integrally formed with the check valve. Due to the check valve integrally provided, a discharge amount in the first discharge state cannot be adjusted according to status of use.
  • Patent Document 2 cannot adjust the discharge amount in the first discharge state.
  • the present invention has been made to solve the above problems and has a purpose to provide a supply and discharge adjusting apparatus and a supply and discharge adjusting system, whereby enabling adjustment of a discharge amount of air according to the status of use.
  • one aspect of the invention provides a supply and discharge adjusting apparatus and a supply and discharge adjusting system configured as below.
  • a supply and discharge adjusting apparatus including: a main unit formed with a main passage for communicating between a first port and a second port; and a speed controller including a needle valve arranged to adjust a discharge amount of a fluid flowing in the main passage of the main unit, wherein a bypass passage is formed in the main unit with respect to the main passage, and the supply and discharge adjusting apparatus further includes a relief valve arranged to adjust a discharge amount of a fluid flowing in the bypass passage. Accordingly, it is possible to adjust a discharge amount of the fluid to a device having a piston according to a use status.
  • a valve closing time of the air-operated valve and others can be shortened in the case where the above supply and discharge adjusting apparatus is used for the air-operated valve or the like.
  • the operation time is made shorter, thereby reducing the takt time of the apparatus.
  • a semiconductor manufacturing apparatus using the air-operated valve and others can manufacture more semiconductors than conventional, so that productivity can be enhanced.
  • chemical solutions and others can be precisely supplied, resulting in improved semiconductor quality.
  • the valve closing time of the air-operated valve and others can be adjusted to be shorter even in the case where air-operated valve and others having different sizes are used or in the case where worksite conditions are different, e.g., a plurality of air pressure levels are used. It is therefore unnecessary to prepare special-purpose components for the air-operated valve and others and reduce costs thereof.
  • the discharge amount can be adjusted according to the status of use and an operation time of the air cylinder can be shortened.
  • the supply and discharge adjusting apparatus described in (1) preferably, includes a first discharge state of performing discharge by use of the relief valve and the needle valve and a second discharge state of performing discharge by use of only the needle valve while the relief valve is closed.
  • the discharge is performed in the first discharge state where the relief valve and the needle valve are operated, so that a large amount of air can be discharged.
  • the main valve element can be rapidly moved toward the main valve seat (in a valve closing direction).
  • the relief valve is closed and the needle valve is operated for discharge, so that a small amount of air can be discharged. Therefore, the main valve element in the air-operated valve and others is caused to move at a slower speed just before contacting with the main valve seat so that the main valve element is moved slowly toward the main valve seat for valve closing.
  • the first discharge state is established, allowing a large amount of air to be discharged.
  • the second discharge state is established, allowing a small amount of air to be discharged.
  • the relief valve When a large amount of discharge air is required in the first discharge state, the relief valve is controlled to increase the time for allowing a large amount of discharge air.
  • the main valve element When the relief valve is controlled to increase the time for allowing a large amount of discharge air, the main valve element can be moved rapidly toward the main valve seat (in the valve closing direction).
  • a valve opening degree of each of the relief valve and the needle valve is adjusted to control a discharge time of the fluid to be discharged through the first port.
  • the valve opening degrees of the relief valve and the needle valve can be adjusted, thereby controlling the discharge time of the fluid to be discharged through the first port.
  • the apparatus including the first discharge state and the second discharge state is discharged in multiple stages.
  • the apparatus includes the first and second discharge states whereby multistage discharge can be performed. Specifically, the flow rate of fluid to be discharged is different between the first discharge state and the second discharge state. Accordingly, it is possible to change the opening and closing speed of the air-operated valve in multiple stages. Alternately, the operation speed of the air cylinder can be changed in multiple stages.
  • water hammer can be restrained.
  • multistage discharge can be conducted to discharge a large amount of fluid in the first discharge state and a small amount of fluid in the second discharge state, so that the valve element is closed at a slow speed. This can restrain water hammer.
  • the apparatus is a normally-open type or a normally-closed type.
  • the supply and discharge adjusting apparatus can be used as a normally-open type apparatus or a normally-closed type apparatus. Thus, it can be used as circumstances demand in actual work sites.
  • the apparatus is configured to be integral with an air-operated valve.
  • the apparatus is configured to be integral with the air-operated valve. This can adjust the valve closing time of the air-operated valve in the first discharge state and the second discharge state. Further, any pipes are not required to connect the air-operated valve and the supply and discharge adjusting apparatus, resulting in space saving.
  • the apparatus is configured to be integral with a solenoid valve.
  • the apparatus is configured to be integral with the solenoid valve.
  • any pipes are not required to connect the solenoid valve and the supply and discharge adjusting apparatus, resulting in space saving.
  • a supply and discharge adjusting system including the supply and discharge adjusting apparatus described in one of (1)-(8), preferably, a plurality of the supply and discharge adjusting apparatuses are provided, and the supply and discharge adjusting apparatuses are arranged in series or in parallel.
  • a plurality of supply and discharge adjusting apparatuses are provided and arranged in series or in parallel, so that the operation of the air-operated valve and others can be changed in multiple stages.
  • the first supply and discharge adjusting apparatus can adjust the amount of a fluid to be supplied to the second supply and discharge adjusting apparatus, and further the second supply and discharge adjusting apparatus can adjust the amount of the fluid to be supplied to the air-operated valve and others.
  • the operation can be changed in multiple stages.
  • the present invention can provide a supply and discharge adjusting apparatus and a supply and discharge adjusting system, whereby enabling adjustment of a discharge amount according to the status of use.
  • FIG. 4 is a diagram showing a whole configuration of a supply and discharge (S/D) adjusting system 1.
  • This system 1 is configured to open and close an air-operated valve 2.
  • the S/D adjusting system 1 includes the air-operated valve 2, a supply and discharge (S/D) adjusting apparatus 3, and a solenoid valve 4.
  • the air-operated valve 2 and the solenoid valve 4 are coupled to each other through a passage, and the S/D adjusting apparatus 3 is connected to the passage.
  • the air-operated valve 2 and the solenoid valve 4 are substantially identical in structure to conventional ones and thus their details are omitted.
  • air supply and discharge of the air-operated valve 2 is adjusted.
  • any configuration having a piston that is slid by air supply or discharge can be installed in the S/D adjusting system 1.
  • FIG. 1 is a sectional view of the S/D adjusting apparatus 3 in the air supply operation.
  • FIG. 2 is a sectional view of the S/D adjusting apparatus 3 in the air discharge operation (a first discharge state).
  • FIG. 3 is a sectional view of the S/D adjusting apparatus 3 in the air discharge operation (a second discharge state).
  • the S/D adjusting apparatus 3 shown in FIG. 1 includes a speed controller unit 5, a relief valve unit 6, and an apparatus main unit 30.
  • the speed controller unit 5 and the relief valve unit 6 are fixedly attached to the apparatus main unit 30.
  • the main unit 30 is formed with a first port 31 and a second port 32 which are communicated to each other through a passage 33.
  • This passage 33 includes a main passage 331 extending from the first port 31 to a first receiving hole 34 and further to the second port 32, providing communication among them.
  • the passage 33 also includes a bypass passage 332 extending to provide communication between the first receiving hole 34 and a second receiving hole 35 and further communicate with the main passage 331.
  • the speed controller unit 5 is configured to adjust the amount of air to be allowed to flow in the main passage 331.
  • the speed controller unit 5 is removably housed in the first receiving hole 34 formed in the apparatus main unit 30.
  • the speed controller unit 5 includes, from a closer side to the center of the S/D adjusting apparatus 3, a body 51, a rotary part 52 placed to be rotatable and in contact with a top of the body 51, an outer sleeve 54 surrounding the body 51 and the rotary part 52, and an operation part 55 surrounding the outer sleeve 54.
  • a needle valve hole 58 is formed to hold a needle valve 7.
  • the needle valve hole 58 includes a small-diameter hole 58a and a large-diameter hole 58b.
  • the body 51 is formed with a circumferential valve seat 51a in a boundary portion between the small-diameter hole 58a and the large diameter hole 58b.
  • the large-diameter hole 58b is communicated with the main passage 331 through communication passages 58d each radially extending through the body 51.
  • a portion defining the large-diameter hole 58b that receives the needle valve 7 in contact relation is formed with a female screw 58c.
  • the rotary part 52 is formed with a male screw 52a on the outer periphery which threadedly engages with a female screw 55b of the operation part 55.
  • the body 51 as shown in FIG. 1 includes a large-diameter portion 51c having almost the same diameter as a hole diameter of the first receiving hole 34 and a small-diameter portion 51d at a leading end of the large-diameter portion 51c, the small-diameter portion 51d having a smaller diameter than the hole diameter of the first receiving hole 34. Since the large-diameter portion 51 c has almost the same diameter as the hole diameter of the first receiving hole 34, the first receiving hole 34 can be sealed (air-tightly closed).
  • the small-diameter portion 51d is formed, on its outer periphery of a leading end portion, with a recess 51e receiving a packing 510 which is an elastic member.
  • the packing 510 is fixedly fitted in the recess 51e.
  • This packing 510 consists of a hollow cylindrical portion 511 and a deformable portion 512 extending radially outward like an umbrella and being elastically deformable with respect to the cylindrical portion 511. Since the deformable portion 512 extends downward like an umbrella as shown in FIG. 1 , it is elastically deformed to a closed form when air flows from above in FIG. 1 into the main passage 331, thereby opening the main passage 331.
  • the needle valve 7 is placed so that a needle portion 71 is inserted in the small-diameter hole 58a by a predetermined depth to adjust the sectional area of the passage.
  • the needle valve 7 includes a body portion 72 and the needle portion 71 including a taper portion formed at a leading end (a lower end in the figure) of the body portion 72.
  • the body portion 72 is formed with a male screw 74 in a portion contacting the large-diameter hole 58b. This male screw 74 is threadedly engaged with the female screw 58c formed in the needle valve hole 58.
  • the body portion 72 is also formed with a guide groove 73 which is an approximately rectangular parallelepiped hollow part. The body portion 72 with the guide groove 72 is guided by a guide rod 57 fixed to the outer sleeve 54. Accordingly, the needle valve 7 is held against rotation so as to move only in an axial direction.
  • the needle portion 71 is held in a position slightly apart from the valve seat 51a, so that air is allowed to flow in and out through the small-diameter hole 58a, i.e., a gap between the needle portion 71 and the valve seat 51a.
  • the outer sleeve 54 serves to fix the position of the body 51 and the rotary part 52.
  • a hollow part 54a is formed extending along a center axis of the sleeve 54.
  • the body 51 and the rotary part 52 are inserted.
  • the body 51 and the rotary part 52 inserted in the hollow part 54a are fixed in place without moving in the axial direction and the radial direction.
  • the rotary part 52 is rotatably inserted in the sleeve 54 and thus can be rotated.
  • the operation part 55 is used to operate the needle valve 7. By operation of this operation part 55, the needle valve 7 is moved with respect to the valve seat 51a.
  • the operation part 55 is formed, in the center thereof, with a hollow part 55a which receives the rotary part 52 and the outer sleeve 54.
  • An inner wall surface defining the hollow part 55a is formed with a female screw 55b in a portion contacting with a male screw 52a of the rotary part 52.
  • the relief valve unit 6 is configured to regulate the flow rate of air to be allowed to flow in the bypass passage 332.
  • the relief valve unit 6 is received in the second receiving hole 35 formed in the apparatus main unit 30.
  • the relief valve unit 6 includes a relief valve 61 and a positioning member 63, which are arranged from a closer side to the center of the apparatus 3.
  • the relief valve 61 is moved into or out of contact with a valve seat 37 formed in the second receiving hole 35 (hereinafter, a "second-receiving-hole valve seat 37") to regulate the flow rate in the bypass passage 332.
  • This relief valve 61 includes a cylindrical part 612 placed in the main unit 30 and formed with a valve element 614 at a leading end. A middle portion of the cylindrical part 612 is formed with through holes 616 through which the inside of the cylindrical part 612 is communicated with the bypass passage 332.
  • the cylindrical part 612 is formed with a flange 617 on the outer periphery near the valve element 614. The outer diameter of the flange 617 is almost the same as the diameter of the second receiving hole 35 to thereby receive operating pressure (discharge pressure).
  • the cylindrical part 612 is internally formed with an inner passage 618 extending up to the valve element 614.
  • a lower surface of the flange 617 is formed with communication inner passages 613, extending radially like a cross arrangement in plan view, each communicating with the inner passage 618.
  • the valve element 614 has a tapered end portion (at a lower end in FIG. 1 ).
  • An O ring 615 is fitted on the outer periphery of the tapered end portion. When the O ring 615 comes into contact with the second-receiving-hole valve seat 37, this valve seat 37 can be reliably sealed (air-tightly closed).
  • a positioning member 63 is internally formed, along its central axis, with a positioning hole 631 in which the relief valve 61 is inserted.
  • the relief valve 61 is connected to the positioning member 63 while an upper end of the cylindrical part 612 is inserted in the positioning hole 631.
  • One end of an elastic member (a spring in the present embodiment) 62 is fixed to a lower end face of the positioning member 63, while the other end of the elastic member 62 is fixed to an upper surface of the flange 617 of the relief valve 61.
  • the relief valve 61 is urged in a direction apart from the positioning member 63 (in a downward direction) and hence is held in contact with the second-receiving-hole valve seat 37.
  • a relief-valve holder 64 integrally formed with the apparatus main unit 30 is placed to internally hold the positioning member 63.
  • the relief-valve holder 64 is internally formed, along its central axis, with a holder hole 641 in which the positioning member 63 is inserted. This holder hole 641 is communicated with the second communication hole 35.
  • An outer periphery of the positioning member 63 is formed with a male screw 632.
  • An inner peripheral surface of the holder hole 641 is formed with a female screw 642. Those male screw 632 and female screw 642 are engaged with each other.
  • a handle 65 is integrally formed at an upper end of the positioning member 63. In the present embodiment, accordingly, when the handle 65 is turned clockwise, the positioning member 63 is similarly rotated and moved downward (in a valve closing direction). Reversely, when the handle 65 is turned counterclockwise, the positioning member 63 is moved upward (in a valve opening direction). When the positioning member 63 is moved as above, the relief valve 61 is similarly moved and can be positioned in place.
  • FIG. 5 is a graph showing a relationship between valve closing time and operating pressure (discharge pressure) of the air-operated valve 2 in the case where the S/D adjusting apparatus 3 is used.
  • a vertical axis represents an air pressure (KPa) in the air-operated valve 2 and a valve stroke amount (mm) of the air-operated valve 2
  • a lateral axis represents time (msec).
  • a solid line X indicates the operating pressure (discharge pressure) and a solid line Y indicates the valve stroke of the air-operated valve 2.
  • a state where the S/D adjusting apparatus 3 is supplied with air through the speed controller 5 is referred to as an air supply state T0.
  • a state where air is discharged through the relief valve 61 and the needle valve 7 is referred to as a first discharge state T1.
  • a state where air is discharged through the needle valve 7 while the relief valve 61 is in a closed position is referred to as a second discharge state T2.
  • Air is supplied from the solenoid valve 4 to the air-operated valve 2 via the S/D adjusting apparatus 3 as shown in FIG. 4 .
  • the air supplied from the solenoid valve 4 flows in the S/D adjusting apparatus 3, from the first port 31 toward the second port 32, as shown in FIG. 1 .
  • Air pressure for air supply is constant as much as 500 KPa in the air supply state T0 as indicated by the solid line X in FIG. 5 .
  • the air flowing from the first port 31 presses the packing 510 from above in FIG. 1 . Since the packing 510 has such an umbrella-like shape spreading radially outward, the deformable portion 512 is elastically deformed radially inward by the air flowing from above, thereby opening the main passage 331. Accordingly, a large amount of air is allowed to flow in the main passage 331.
  • the needle valve 7 is held at a slight distance from the valve seat 51a.
  • a slight amount of air also flows in the main passage 331 through the small-diameter hole 58a of the needle valve hole 58.
  • the air pressure is as high as 500 KPa.
  • the high-pressure air diffuses into every portion of the passage 33 and thus the pressure in the passage 33 is constant.
  • the urging force of the elastic member 62 therefore acts to hold the relief valve 61 in contact with the second-receiving-hole valve seat 37, so that this valve seat 37 is in a valve closing state.
  • the bypass passage 332 is in a closed state. Thus, air does not flow into the main passage 331 via the bypass passage 332.
  • the air flowing through the first port 31 is allowed only to pass through the main passage 331 toward the second port 32.
  • the packing 510 is elastically deformed to close, thereby providing a large passage volume in the main passage 331, so that a sufficient amount of air is supplied.
  • the valve stroke of the air-operated valve 2 is in a full open state as indicated by the solid line Y
  • the operating pressure (discharge pressure) is a constant high value as indicated by the solid line X.
  • An air discharge state (a first discharge state) of the S/D adjusting apparatus 3 is first explained referring to FIGs. 2 and 5 .
  • air is discharged from the air-operated valve 2 through the S/D adjusting apparatus 3 to the solenoid valve 4 in FIG. 4 .
  • the air pressure pressing the relief valve 61 upward is larger than the urging force of the elastic member 62.
  • the relief valve 61 is moved to a position as shown in FIG. 2 , placing the relief valve unit 6 in a valve open state. While this unit 6 is in the valve open state, air is allowed to flow through the communication inner passages 613, the inner passage 618, and the through holes 616 into the bypass passage 332.
  • the air flowing in the second port 32 passes through the bypass passage 332 via the relief valve unit 6 and flows toward the first port 31.
  • the needle valve 7 is held slightly apart from the valve seat 51a.
  • the air in the main passage 331 upstream of the packing 510 during discharge slightly flows through the small-diameter hole 58a of the needle valve hole 58 to a portion of the main passage 331 located downstream of the packing 510, merging with the air flowing out of the bypass passage 332, and then flows into the first port 31.
  • the amount of air flowing out through the needle valve 7 is so slight as not to have an influence on the air pressure difference between the first port 31 side (a portion located on a downstream side than the packing 510) and the second port 32 side (a portion located close to the second port 32).
  • the discharge pressure of 500 KPa which is the constant pressure X1 (indicated by the solid line X in FIG. 5 ) on the second port 32 side, is discharged to the first port 31 via the relief valve unit 6. Accordingly, the pressure on the second port 32 side becomes a pressure X2.
  • the pressure on the first port 31 side the pressure increases by the discharge pressure X3 of the air flowing therein.
  • the pressure in the main passage on the first port 31 side and the pressure in the passage on the second port 32 side both become the pressure X3.
  • the pressure difference in the S/D adjusting apparatus 3 disappears, so that the relief valve 61 is pressed downward in FIG. 3 by the urging force of the elastic member 62.
  • this relief valve 61 contacts with the valve seat 37, the bypass passage 332 is closed. Thereby, a large amount of air is not allowed to flow in the bypass passage 332.
  • the needle valve 7 is also held slightly apart from the valve seat 51a. Accordingly, a slight amount of air passes through the small-diameter hole 58a of the needle valve hole 58 and flows toward the first port 31 via the main passage 331 located downstream of the packing 510.
  • the first discharge state T1 starts from the time when the solid line X begins decreasing from a pressure X1 as in FIG. 5 .
  • the first discharge state T1 terminates when the solid line X decreases below 250 KPa and a pressure X2 is obtained from which the graph is sloped gently.
  • the time (duration) required to decrease the operating pressure (discharge pressure) below the pressure X2 is 100 msec.
  • the relief valve 61 is opened and closed dramatically in a short time of 100 msec.
  • the stroke Y2 represents a state where the relief valve 61 is moved by about half operation from the valve open state to the valve closed state. Shortening of the time needed to close the valve enables the semiconductor manufacturing apparatus to produce more semiconductors than conventional. Productivity can thus improved.
  • the air when the relief valve 61 is closed as above, the air is not allowed to flow through the bypass passage 332. Thus, the air flows in the main passage 331 on the first port 31 side via the small-diameter hole 58a and the outer circumferential communication passage 58d of the needle valve hole 58 and then is discharged out through the first port 31.
  • the operating pressure decreases.
  • the valve stroke takes much time, becoming slower, from Y2 to Y3 in the second discharge state T2 and subsequent states. In the present embodiment, it takes 100 msec to 200 msec from the valve stroke Y2 to Y3 in the second discharge state T2 and subsequent states. Thus, it takes long for the main valve element of the air-operated valve 2 to come into contact with the main valve seat. Since the valve stroke required to bring the main valve element of the air-operated valve 2 into contact with the main valve seat is made slow, it is possible to restrain a water hammer phenomenon apt to occur when the main valve element collides with the main valve seat (abrupt contact).
  • the water hammer resulting from the sharp decrease in operating pressure can be prevented by allowing a flow of air little by little by use the needle valve 7. Since the water hammer can be restrained, a decrease in the generation of particles can be achieved. Further, the abrupt closing of the air-operated valve 2 can be prevented, so that the durability of the air-operated valve 2 can be enhanced.
  • the needle valve 7 shown in FIGs. 1 to 3 can be moved in the axial direction by rotation of the operation part 55.
  • the female screw 55a of the operation part 55 is threadedly engaged with the male screw 52a of the rotary part 52 and further the female screw 55b of the rotary part 52 is threadedly engaged with the male screw 74 of the needle valve 7, they function as differential screws.
  • the needle valve 7 can be adjusted in the axial direction. Since the needle valve 7 can be adjusted in the axial direction, the discharge amount of air allowed to flow through the main passage 331 in the second discharge state can be regulated. Accordingly, the discharge time in the second discharge state can be adjusted. This adjustment of discharge time in the second discharge state enables rapid closing of the air-operated valve 2 without causing water hammer.
  • the relief valve 61 shown in FIGs. 1 to 3 can be moved in the axial direction by rotation of the handle 65. Specifically, by rotation of the handle 65, the male screw 632 of the positioning member 63 is threadedly engaged with the female screw 642 of the relief valve holder 64, allowing axial movement of the positioning member 63. When the positioning member 63 is moved axially, the position of the relief valve 61 can be moved. Thus, the discharge air flowing through the bypass passage 332 in the first discharge state can be regulated. The discharge time in the first discharge state can further be adjusted. This enables rapid closing of the air-operated valve 2.
  • the semiconductor manufacturing apparatus can therefore manufacture a larger amount of semiconductors than conventional arts. Productivity can also be enhanced.
  • the needle valve 7 and the relief valve 61 shown in FIGs. 2 and 3 can be adjusted to thereby control the operating pressure (discharge pressure) in the first and second discharge states.
  • the needle valve 7 and the relief valve 61 are mounted in the S/D adjusting apparatus 3 which is able to be retrofitted to an existing air-operated valve. With such a retrofitted S/D adjusting apparatus 3, the valve closing time of the existing air-operated valve can be adjusted. Thus, this S/D adjusting apparatus 3 can be adopted in various air-operated valves.
  • the S/D adjusting apparatus 3 can adjust the valve closing time of any air-operated valves even if they have different sizes or different conditions such as a plurality of air pressures from site to site, there is no need to prepare separate air-operated valves according to various specifications. Accordingly, costs for individual designs of the air-operated valves can be reduced.
  • discharge can be conducted in multiple stages.
  • the flow rate of discharge air is different between the first discharge state T1 and the second discharge state T2. Therefore, the opening and closing speed of the air-operated valve 2 can be changed in multiple stages so as to be different between the first discharge state T1 and the second discharge state T2.
  • the operation speed of an air cylinder can be changed in multiple stages.
  • the present embodiment can provide the following effects.
  • the operating pressure discharge pressure
  • the time needed to close the air-operated valve 2 can be shortened.
  • SO indicates an air supply state
  • Q (Q1, Q2) indicates operating pressure (discharge pressure)
  • R (R1, R2) indicates valve stroke of the conventional air-operated valve 2.
  • the present embodiment can complete the valve closing in 300 msec throughout the first discharge state T1 and the second discharge state T2 as shown in FIG. 5 .
  • the present embodiment can shorten the time needed for valve closing as restraining water hammer to about 21% of the valve closing time in the conventional case.
  • This shortening of the valve closing time enables the semiconductor manufacturing apparatus to produce semiconductors in larger amounts than the conventional arts. Higher productivity can thus be achieved.
  • a transient state is shortened and precise chemical solutions and others can be supplied, thereby improving the quality of semiconductors.
  • the S/D adjusting apparatus 3 including the relief valve 61 and the needle valve 7 can adjust the time needed to close any air-operated valves 2 to a shorter time even the valves 2 are different in size or condition such as air pressure from site to site. Accordingly, there is no need to prepare a special-purpose component for the air-operated valve 2, leading to cost reduction.
  • the water hammer can be prevented, restraining the occurrence of shocks in the air-operated valve. This can reduce particles and enhance durability of the air-operated valve.
  • the S/D adjusting apparatus 3 is designed so that the relief valve 61 and the speed controller 5 are fixed and arranged in the form of a manifold. Such configured S/D adjusting apparatus 3 therefore can be installed in a smaller space than conventional.
  • the first discharge state T1 is established, allowing a large amount of air to be discharged.
  • the second discharge state T2 is established, allowing a small amount of air to be discharged.
  • the relief valve 61 is adjusted to increase the operating pressure (discharge pressure) of the air-operated valve 2.
  • the operating pressure (discharge pressure) is increased by adjustment of the relief valve 61, the main valve element can be moved rapidly toward the main valve seat (in the valve closing direction) in the air-operated valve 2.
  • the discharge time can be adjusted.
  • the operating pressure discharge pressure
  • the discharge pressure can be regulated by adjustment of the valve opening degrees of the relief valve 61 and the needle valve 7, so that the time required to bring the main valve element into contact with the main valve seat in the air-operated valve 2 can be adjusted. Accordingly, the discharge time can be adjusted.
  • Such adjustment of the discharge time makes it possible to rapidly close the air-operated valve 2 without causing water hammer.
  • the S/D adjusting apparatus 3 is a normally-closed type apparatus but may be configured as a normally-open type apparatus by reverse connection of a supply port and a discharge port.
  • One S/D adjusting apparatus 3 has both functions of the normally-open type apparatus and the normally-closed type apparatus. If such S/D adjusting apparatuses 3 are stocked, there is no need to prepare separate apparatuses for respective functions. This can achieve a reduced cost.
  • the above embodiment shows a connecting method of the S/D adjusting apparatus shown in FIG. 4 but may adopt any connecting methods of the S/D adjusting apparatus other than the connecting method shown in FIG. 4 .
  • the above embodiment adopts the S/D adjusting apparatus for the air-operated valve, but may replace the air-operated valve by an air cylinder.
  • the S/D adjusting apparatus of the above embodiment is used for the air cylinder, it is possible to absorb shocks and restrain water hammer which is caused when the air cylinder is closed.
  • the S/D adjusting apparatus in the above embodiment is provided separately from the air-operated valve, but the S/D adjusting apparatus may be configured to be integral with the air-operated valve. If the S/D adjusting apparatus is integral with the air-operated valve, the valve closing time of the air-operated valve in the first discharge state and the second discharge state can be adjusted and also space saving can be achieved.
  • the S/D apparatus is provided separately from the solenoid valve, but it may be configured to be integral with the solenoid valve. If the S/D adjusting apparatus is integral with the solenoid valve, space saving can be achieved.
  • FIG. 7 shows a whole configuration of an S/D adjusting system 10 in a first modified example.
  • the S/D adjusting system 10 in the first modified example is a system to open and close the air-operated valve 2.
  • the S/D adjusting system 10 includes the air-operated valve 2, two supply and discharge (S/D) adjusting apparatuses 3A and 3B, and the solenoid valve 4.
  • the air-operated valve 2 and the solenoid valve 4 are connected through a passage.
  • the two S/D adjusting apparatuses 3A and 3B are connected to that passage.
  • the S/D adjusting apparatuses 3A and 3B are connected in series with respect to the passage.
  • the operation of the air-operated valve 2 can be changed in multiple stages.
  • the S/D adjusting apparatus 3B can adjust the amount of a fluid to be supplied to the S/D adjusting apparatus 3A, and further the S/D adjusting apparatus 3A can adjust the amount of the fluid to be supplied to the air-operated valve 2, thereby changing the operation of the valve 2 in multiple stages.
  • the first modified example uses two supply and discharge adjusting apparatuses but may adopt more than two supply and discharge adjusting apparatuses for more multiple-stage operation.
  • FIG. 8 shows a whole configuration of a supply and discharge adjusting system 20 in a second modified example.
  • two S/D adjusting apparatuses are connected in series.
  • two S/D adjusting apparatuses 3D and 3E are connected in parallel as shown in FIG. 8 .
  • the second modified example is substantially identical to the first modified example excepting the parallel connection of the S/D adjusting apparatuses 3D and 3E. Their operations and effects are similar to those in the first modified example and thus omitted herein.
  • the second modified example uses two S/D adjusting apparatuses but may adopt more than two S/D adjusting apparatuses for more multiple-stage operation.
  • the above embodiment shows the configuration for discharge from a supply port to a discharge port.
  • a configuration for discharge from the discharge port to the supply port may also be adopted. It is therefore possible to discharge air from the air-operated valve 2 to the solenoid valve 4 in FIG. 4 and also from the solenoid valve 4 to the air-operated valve 2.
  • the above embodiment discloses the speed of closing the air-operated valve is made slow.
  • the speed of opening the air-operated valve may be made slow. This change can be achieved by interchanging the supply port with the discharge port with respect to the air-operated valve.
  • the flowing direction of air to be discharged may be changed to an opposite direction to that in the above embodiment.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
  • Check Valves (AREA)
  • Safety Valves (AREA)
EP12162083A 2011-04-28 2012-03-29 Versorgung- und Ablasseinstellungsvorrichtung und Versorgung- und Ablasseinstellungssystem Withdrawn EP2518332A1 (de)

Applications Claiming Priority (1)

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JP2011101374A JP5728288B2 (ja) 2011-04-28 2011-04-28 給排気調整装置、給排気調整システム

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EP2518332A1 true EP2518332A1 (de) 2012-10-31

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN108105436A (zh) * 2017-12-21 2018-06-01 宁波文泽机电技术开发有限公司 一种单向调速阀
CN113710369A (zh) * 2019-04-18 2021-11-26 Smc 株式会社 高压流体喷出装置
US11458834B2 (en) 2018-06-06 2022-10-04 Aisan Kogyo Kabushiki Kaisha Fluid control valve and evaporated fuel processing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113653821B (zh) * 2021-08-25 2023-08-29 帕菲诺智能制造(天津)有限公司 一种液体流动管道连接式防液体倒流阀

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US4262695A (en) * 1976-09-02 1981-04-21 Shoketsu Kinzoku Kogyo Kabushiki Kaisha Flow rate control valve
US4917001A (en) * 1987-10-16 1990-04-17 Smc Corporation Drive control valve for constant speed
JP2000120921A (ja) 1998-10-21 2000-04-28 Fujikura Rubber Ltd スローシャット弁
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JPS59115103U (ja) * 1983-01-26 1984-08-03 日産自動車株式会社 空圧制御回路
JPH0743447Y2 (ja) * 1988-10-14 1995-10-09 株式会社巴技術研究所 弁の操作速度制御装置

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US4262695A (en) * 1976-09-02 1981-04-21 Shoketsu Kinzoku Kogyo Kabushiki Kaisha Flow rate control valve
FR2458841A1 (fr) * 1979-06-11 1981-01-02 Mac Valves Inc Mecanisme regulateur de pression et de debit, notamment pour la commande de verins pneumatiques
US4917001A (en) * 1987-10-16 1990-04-17 Smc Corporation Drive control valve for constant speed
JP2000120921A (ja) 1998-10-21 2000-04-28 Fujikura Rubber Ltd スローシャット弁
US6296013B1 (en) * 1999-03-10 2001-10-02 Smc Kabushiki Kaisha Pressure/flow rate control valve
JP2009180338A (ja) 2008-01-31 2009-08-13 Ckd Corp 流体制御弁及び操作エア用中間弁

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Publication number Priority date Publication date Assignee Title
CN108105436A (zh) * 2017-12-21 2018-06-01 宁波文泽机电技术开发有限公司 一种单向调速阀
US11458834B2 (en) 2018-06-06 2022-10-04 Aisan Kogyo Kabushiki Kaisha Fluid control valve and evaporated fuel processing device
CN113710369A (zh) * 2019-04-18 2021-11-26 Smc 株式会社 高压流体喷出装置
CN113710369B (zh) * 2019-04-18 2022-11-25 Smc 株式会社 高压流体喷出装置

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JP2012233512A (ja) 2012-11-29

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