EP2510559A1 - Système de production d'énergie miniaturisé - Google Patents

Système de production d'énergie miniaturisé

Info

Publication number
EP2510559A1
EP2510559A1 EP10788285A EP10788285A EP2510559A1 EP 2510559 A1 EP2510559 A1 EP 2510559A1 EP 10788285 A EP10788285 A EP 10788285A EP 10788285 A EP10788285 A EP 10788285A EP 2510559 A1 EP2510559 A1 EP 2510559A1
Authority
EP
European Patent Office
Prior art keywords
energy
generation system
piezoelectric
housing
ees
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10788285A
Other languages
German (de)
English (en)
Inventor
Alexander Frey
Ingo KÜHNE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2510559A1 publication Critical patent/EP2510559A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304Beam type
    • H10N30/306Cantilevers
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/185Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators using fluid streams
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings

Definitions

  • Miniaturized power generation system relates to a power generation system, in particular formed as an integrated miniaturized Energyer ⁇ generating system. Furthermore, the invention relates to a method for providing energy for energy self-sufficient systems. Actuators and sensors based on MEMS (Micro Electro mechanization cal Systems) technology, are increasingly being incorporated is ⁇ . Actuator are particularly interesting here or sensor ⁇ nodes and networks that work energy self-sufficient. Such systems do not obtain the electrical energy necessary for the operation of individual components from a mains supply or a battery but via a suitable energy converter from the environment.
  • MEMS Micro Electro mechanization cal Systems
  • the time required for the operation of the Rei ⁇ Pressure Monitoring power is supplied from a battery.
  • the battery limits the life of the tire pressure monitoring system.
  • the object of the present invention is to provide a miniaturized power generation system which has an external tarke power supply and control for decentralized systems, especially in industrial environments.
  • a power generation system in particular designed as an integrated miniaturized power generation system, comprising:
  • a piezoelectric energy converter for converting mechanical energy into electrical energy, with Minim ⁇ least a piezoelectric element in which a caused by a flow of fluid mechanical force may be coupled such that the piezoelectric Ele ⁇ element is excited to mechanical vibrations;
  • a housing having a housing chamber in which the piezoelectric element is arranged and through which the flow of fluid can be passed;
  • the change in volume causes a conversion of mechanical deformation energy into fluidic pressure energy
  • an integrated circuit for energy management of the energy provided by the piezoelectric energy converter.
  • ASIC integrated circuit
  • Fluid flow is thereby conducted past a suitably handled ⁇ ended piezoelectric element that the ⁇ ses is excited to mechanical vibrations.
  • This me ⁇ chanical vibrations are used to generate electrical energy.
  • the energy obtained is processed by Ener ⁇ giemanagementsystem (power management ASIC) and made (decentralized actuators or sensors for example) available to a consumer.
  • the fluid is preferably a gas or gas mixture.
  • a fluid in the form of a liquid is preferably electrically insulating.
  • the housing in which the piezoelectric element ⁇ is arranged and through which the fluid flow can be passed through a fluid flow inlet and a fluid flow outlet.
  • the fluid flow inlet ⁇ relationship through the fluid flow outlet the fluid flows into the housing chamber or out of the housing chamber. The fluid is thereby conducted past the piezoelectric element and makes it vibrate.
  • a first advantageous embodiment of the invention is that by the means for varying the volume of the housing, a pressure surge or a pressure suction of the fluid flow is er ⁇ he witnessed.
  • This makes it possible to use the inventive energy ⁇ generating system in any dynamically deformable environments.
  • the means for changing the volume of the hous ⁇ ses are formed by an elastically deformable wall of the housing or a part of the housing.
  • ⁇ tel for varying the volume of the housing is a pressure shock or generates a Drucksog of the fluid stream. Due to the pressure surge or the pressure suction, the piezoelectric element is excited to me ⁇ chanical vibrations. In a fluidic shock excitation undergoes the piezoelectric element, such as the piezo-flag, a decaying vibration. The piezoelectric effect produces a periodic charge separation between the electrodes. The resulting charge flow is then available externally as electrical energy. To ensure that the force of the pressure surge or the Drucksogs can be coupled into the piezoelectric element efficiently, for example, the piezoelectric element is curved or there are on its surface suitable Anströmungsgeo- metrics or the flow is directly perpendicular.
  • the elastically deformable wall is, for example, a wall of a cavity in the casing of a car tire.
  • the elas ⁇ table deformable wall is connected to the car tire in such a way that a defined deformation of the tire contact area (footprint) to a defined deformation of the
  • Wall of the cavity leads to a defined deformation of the cavity. Due to the defined deformation of the cavity, a defined pressure surge is formed. Thereby, the tire itself can provide the energy necessary for the operation of the tire sensor.
  • the be ⁇ signed deformations are independent of the driving speed. It is only a frequency of the formation of pressure surges dependent on the driving speed.
  • a membrane is also conceivable, which is part of the housing wall.
  • the elastically deformable wall is, for example egg ⁇ ne rubber membrane.
  • a further advantageous embodiment of the invention is that the means for changing the volume of the hous ⁇ ses are formed by deformable mechanical parts of the housing or ei ⁇ nes part of the housing.
  • the piezoelectric element has a multilayer ⁇ construction with MEMS layers (ie in Micro Electro Mechanical Systems - technology).
  • the piezoelectric element has a layer sequence of electrode layer, piezoelectric ⁇ shear layer and further electrode layer.
  • the electrode material of the electrode layers can consist of various metals or metal alloys.
  • Examples of the electrode material are platinum, titanium and a platinum / titanium alloy. Also conceivable are non-metallic, electrically conductive materials.
  • the piezoelectric layer may also consist of different materials ⁇ lichsten. Examples include piezoelectric ceramic materials such as lead zirconate titanate
  • PVDF polyvinylidene difluoride
  • PTFE polytetrafluoroethylene
  • the piezoelectric element has a piezo-flag.
  • the piezoelectric element is designed as a Biegele ⁇ ment, preferably as a piezo-flag.
  • the bending element is for example a piezoelectric bending belt ⁇ ler.
  • ceramic green sheets printed with a metallization for the electrode layers are stacked on top of one another and are sintered. tert.
  • the result is a monolithic bending transducer.
  • the bending transducer can be configured arbitrarily, for example bimorph.
  • MEMS technology is particularly suitable for realizing the bending transducer.
  • the layer thicknesses of the electrode layers are 0.1 .mu.m to 0.5 .mu.m.
  • the piezoelectric element is designed as a thin piezoelectric diaphragm or beam.
  • the piezoelectric element has a very low mass. In addition, such a piezoelectric element can easily become mechanical
  • a carrier layer may be provided, for example a carrier layer of silicon, polysilicon, silicon dioxide (SiO 2) or silicon nitride (S 13 N 4 ).
  • a layer thickness of the Trä is ⁇ carrier layer from the range of 1 ym to 100 ym ⁇ be selected.
  • the carrier layer is optional.
  • a further advantageous embodiment of the invention is that the piezo-flag has a substantially triangular base. This causes a high efficiency in energy conversion.
  • a further advantageous embodiment of the invention is that the piezoelectric element is formed as a membrane ⁇ forms and the fluid flow impinges substantially perpendicular to the membrane and wherein the membrane has at least two intersecting membrane slots.
  • the piezoelectric membrane has a layer sequence of electrode layer, piezoelectric layer and others Electrode layer on. Several such layer sequences can thereby be stacked so that a multi-layer construction with ⁇ stacked, alternately arrange ⁇ th electrode layers and piezoelectric layers re- consulted.
  • the membrane may have a substantially circular base surface, but it is also rectangular Membra ⁇ nen conceivable.
  • a deflection (deformation) of the piezoelectric layer which is caused by applying a mechanical force to the piezoelectric layer, leads to Ladungsver ⁇ shift or charge separation in the piezoelectric
  • the electrode material of the electrode layers can consist of a wide variety of metals or metal alloys. Examples of the electrode material are platinum, Ti ⁇ tan and a platinum / titanium alloy. Also conceivable are non-metallic, electrically conductive materials.
  • the piezoelectric layer may also consist of different materials ⁇ lichsten. Examples include piezoelectric ceramic materials such as lead zirconate titanate (PZT), zinc oxide (ZnO) and aluminum nitride (A1N). Piezoelectrical organic materials such as polyvinylidene difluoride
  • PVDF polytetrafluoroethylene
  • PTFE polytetrafluoroethylene
  • the energy converter can have lateral dimensions of a few mm to a few cm. The same applies to lateral dimen ⁇ measurements of the membrane.
  • the layer thicknesses of the layers of the membrane range from a few ym to a few mm.
  • the piezoelectric membrane is in the energy converter so ⁇ introduced that the fluid flow substantially perpendicular to them and makes them vibrate.
  • the membrane slots substantially intersect at the center of the membrane and form triangles in the membrane structure.
  • a lateral membrane diameter (diameter of a membrane opening of the membrane slit) is a few ym.
  • the membrane ⁇ diameter is selected for example from the range of up to ei ⁇ Nigen mm.
  • a further advantageous embodiment of the invention is that the piezoelectric energy converter has piezoelectric elements with a substantially triangular base, which are arranged so that a substantially square base area results, and wherein the
  • the piezoelectric elements are connected via their respective side edges with the inside of the energy ⁇ converter or with a fluid flow guide of the energy converter. The arrangement ensures efficient energy conversion.
  • a further advantageous embodiment of the invention is that a plurality of piezoelectric energy converters are connected in series.
  • the energy produced ⁇ amount is increased. It is thus also supplied systems ⁇ to that require larger amounts of energy. Furthermore, this allows the power generation system to be scaled with respect to the required energy.
  • a further advantageous embodiment of the invention is that the integrated circuit (ASIC) for Energymana ⁇ ABERGEMENT an energy-independent sensors and / or actuators comparable is used.
  • the integrated circuit (ASIC) for Energyma ⁇ management of the energy provided by the piezoelectric energy converter allows the respective energy requirements of the system to be supplied decentralized reasonable fit energy supply. This allows the energy available to the consumer to be adjusted and maximized.
  • the object is further achieved by a method for loading riding provide energy for self-powered systems by order ⁇ convert mechanical energy into electrical energy using an energy generation system according to one of claims 1 to 8 by coupling of an evoked by the fluid flow force in the piezoelectric element so that the piezoelectric element is excited to mechanical Schwingun ⁇ gene and wherein by the integrated circuit (ASIC), the amount of energy for a system demand supplied ⁇ leads is.
  • ASIC integrated circuit
  • the demand made available Ener gy ⁇ allows, the particular requirements in each case adjusted optimal energy consumption. This increases the performance and reliability of the supplied decen ⁇ spectral systems (such as actuators, sensors).
  • a further advantageous embodiment of the invention is that a stationary fluid flow is used. It is possible that a stationary (time invariant) fluid flow is used to generate the mechanical vibrations of the piezoelectric element. For this purpose, for example, a fluid flow obstacle is placed in the housing chamber. By passing the fluid flow past the fluid flow obstruction, turbulences occur that cause a freely movable piezo element to vibrate.
  • a further advantageous embodiment of the invention is that a temporally changing fluid flow is used.
  • the time-varying fluid flow is not only by a pressure surge or Drucksog, but also by permanent pressure fluctuations are triggered, as they übli ⁇ chholder occur in car tires during unwinding.
  • the power generation system can be used in places that are already present (e.g., conveyors, rubber boots, tires) without requiring rebuilding measures without affecting the existing environment (this is made possible, in particular, by the miniaturized design used in MEMS technology).
  • the energy generation system enables a self-sufficient and targeted (scaled) energy supply for decentralized
  • the integrated circuit (ASIC) for energy management of the energy provided by the piezoelectric energy converter enables an adjusted the respective energy requirements of the to be supplied decentralized system energy ⁇ supply (for example, in standby mode: little energy, in the load mode: a lot of energy). It is also possible to provide (for example, capacitor) with the ASIC ei ⁇ nem energy storage. As a result, the energy management can be further optimized.
  • the piezoelectric energy converter can be operated resonantly, ie with the resonant frequency of the / the piezoelectric beam / membrane. He does not have to. It can thus be operated broadband (frequency range from a few Hz to a few hundred kHz) with consistently high efficiency (provided sufficient mechanical energy is available available) regarding the conversion of mechanical energy into electrical energy.
  • Energy converter for use in the power generation system according to the invention in a lateral cross section, 2 shows a second example of a piezoelectric
  • FIG. 3 shows a piezoelectric diaphragm in plan view, to Ver ⁇ application in a piezoelectric energy converter
  • FIG 4a a first example schematic image of the inventive power generation system in Oxford ⁇ stood
  • FIG 4b is a second exemplary schematic diagram of the OF INVENTION ⁇ to the invention the power generation system area with a reduced chamber volume
  • 4C is a third exemplary schematic diagram of the OF INVENTION ⁇ to the invention the power generation system with expan ⁇ diertem chamber volume
  • FIG 5 shows a tire from the side with the tire contact area, as an example of the use of the power generation system
  • FIG 6 according to the invention, an exemplary piezoelectric flag (or egg ⁇ NEN piezoelectric bending beam) having a substantially triangular base, and
  • FIG. 7 shows an exemplary arrangement of piezoelectric elements.
  • FIG. 1 shows a first example of a piezoelectric energy converter EW for use in the energy generation system EES according to the invention (FIGS. 4a-4c) in a lateral cross section.
  • the piezoelectric energy converter EW is ver ⁇ applies for converting mechanical energy into electrical energy.
  • the energy converter EW has a piezoelectric element PE.
  • the piezoelectric element PE has a Layer sequence of electrode layer ES, piezoelectric layer and further electrode layer on.
  • the piezoelectric element PE ⁇ cal is based on MEMS technology.
  • the piezo ⁇ electric layer is a piezoceramic layer PKS with lead zirconate titanate. Alternatively, the piezoceramic layer comprises aluminum nitride or zinc oxide.
  • the electro ⁇ den slaughteren ES are made of platinum.
  • the conclusion is an optional support layer TS of silicon nitride. Alternatively, as ⁇ to the carrier layer of silicon dioxide.
  • the piezoelectric element PE is arranged in a housing chamber GK of a housing G. It is ensured that the fluid flow FS is passed to the piezoelectric element PE over. In this case, a pre called by the fluid stream FS manufacturing mechanical force is ⁇ coupled into the piezoelectric element PE. It comes to the deflection AL of the piezoelectric element PE and, as a result, to the charge separation, based on which electrical energy can be obtained via the electrodes.
  • Fluidstrom- FSE inlet and a fluid stream outlet FSA are integrated in the housing G and ge ⁇ genüber apart. It will be obvious to one of ordinary skill in the art that other arrangements or forms are possible for fluid flow inlet FSE and fluid flow outlet FSA. Fluid flow inlet FSE and fluid flow outlet FSA Kings ⁇ NEN also be arranged on the same side of the housing or to ⁇ brought. Furthermore, it is also possible to use a single (common) opening of the housing G for fluid flow inlet FSE and fluid flow outlet FSA.
  • the piezoelectric element PE is a bent piezo-flag.
  • the piezo-flag is designed such that the piezo-flag is excited to vibrate by the passing of the fluid flow FS and thus by the coupling of the mechanical force.
  • FIG. 2 shows a second example of a piezoelectric energy converter EW for use in the energy generation system EES according to the invention (FIGS. 4a-4c), likewise in a lateral cross section.
  • the housing includes means G Wl for varying the volume of the Gezza ⁇ ses.
  • the means Wl for changing the volume of the housing, the generation of a pressure surge or a pressure suction of the fluid flow FS.
  • These means are for example a cavity having an elastically deformable wall Wl.
  • the elastically deformable wall Wl for generating the pressure surge or the pressure suction can be integrated into the housing G.
  • the wall is a rubber membrane.
  • FIG 2 shows only one housing opening which can be used for the fluid flow inlet FSE and the fluid flow outlet FSA.
  • Figure 3 shows a piezoelectric membrane M in plan view, for use in a piezoelectric energy converter EW, suitable for use in the power generation system according to the invention EES (FIG 4a - 4c).
  • EES piezoelectric energy converter
  • the housing G can be used as piezo ⁇ electric element and a membrane M, which is arranged so that the fluid flow FS meets the membrane M and this excites to vibrations.
  • the base GF of the membrane M is circular or rectangular .
  • a symmetrical shape facilitates the attachment of the membrane in the energy converter.
  • Such an abutment are, for example, a stop surface integrated in the housing lower part or a corresponding stop structure in a housing cover. The stop surface or the stop structure ensures that the membrane M can not deflect further. They limit the degree of deflection AL and thus act as overload protection for the membrane M.
  • the membrane M has membrane slots MS, which pass through the membrane M.
  • the membrane slots MS are aligned and arranged radially towards the center of the membrane.
  • the membrane slots MS serve to reduce the rigidity of the membrane M.
  • the piezoelectric membrane M is mounted in the energy converter in such a way that the fluid flow FS hits it substantially perpendicularly and causes it to oscillate.
  • the membrane slots MS advantageously cross substantially in the center of the membrane M and form triangles in the membrane structure.
  • the force of the fluid stream FS is used by the triangular arrangement in this way for efficient Ener ⁇ giewandlung.
  • FIGS. 4a to 4c show an exemplary embodiment of the energy generation system EES according to the invention in different operating states.
  • FIG. 4a to Figure 4c show an exemplary expression for the power generation system according to the invention EES in different operating conditions.
  • the energy generation system EES according to the invention comprises a piezoelectric MEMS generator, an integrated circuit ASIC as an energy management system. an electrical connection EV between the energy converter EW and the integrated circuit ASIC, as well as a housing-integrated chamber GK with variable volume for the conversion of mechanical deformation energy into fluidic pressure energy.
  • the mechanical deformation takes place via means for changing the volume of the housing.
  • Such means for changing the volume are z.
  • B an elastic pad as a deformation source to which the housing is applied or mounted in a housing membrane as integrated Wan ⁇ tion, wherein the membrane is advantageously formed as a rubber membrane.
  • mechanical deformation leads to a reduced or expanding chamber volume. This volume change generates a fluidic flow FS with pressure energy which is converted into electrical energy by the MEMS piezoelectric generator.
  • the ASIC operates as an energy management system that prepares this primary energy and makes it available to a consumer (eg sensor or actuator).
  • the ASIC is equipped with an intelligence that enables a targeted application-oriented and scalable energy supply of the respective consumer. By sequentially switched MEMS generators, the amount of energy generated can be increased. Thus, an energy scaling is possible which makes it possible to provide respectively adapted or required amounts of energy.
  • FIG. 4 a shows a first exemplary schematic diagram of the energy generation system EES according to the invention in the idle state.
  • the power generation system EES comprises a housing G with egg ⁇ ner housing chamber GK is arranged in the piezoelectric element PE ⁇ and through which the fluid flow FS can be passed.
  • a MEMS generator as a piezoelectric energy converter 1 for converting mechanical energy into electrical energy, wherein the piezoelectric element PE of the energy converter ⁇ EW is excited by a fluid flow FS mechanical force to mechanical vibrations that again to be converted into electrical energy.
  • the power generation system EES comprises means W2, W3 for changing the volume of the housing.
  • a means for changing the volume of the housing can, for. B. an elastic pad (eg conveyor belt, or hoop coat) serve as a deformation source and / or a membrane which is integrated in the housing G or in the housing ⁇ wall.
  • an elastic pad eg conveyor belt, or hoop coat
  • FIG. 4b shows a second example schematic diagram of the inventive he ⁇ power generation system EES in Häzu ⁇ stand with a reduced chamber volume.
  • the energy generation system EES is mounted on an elastic support as a source of deformation energy.
  • a part of this elastic pad is a housing wall W3.
  • a flexible wall W2 of the housing G (eg a rubber membrane) is attached to the elastic support opposite, which can be mechanically pulled together or pulled apart, depending on whether there is a reduced or an expanding chamber volume.
  • Figure 4c shows a third exemplary scheme of the image he ⁇ inventive power generation system EES in an Ar ⁇ beitsschreib with expanded chamber volume.
  • the resilient pad 4c is the example of figure moved in the area of the flexible wall W3 that an expanded chamber volume ⁇ formed within the housing G.
  • the wall W2 substantially opposite the wall W3 is expanded by the deformation of W3 in this example.
  • a fluid flow FS is generated in the direction of the inside of the housing by the expanded chamber volume.
  • the piezoelectric element PE is vibrated by the fluid flow FS offset. Due to the expansion of the chamber volume ent ⁇ is a suction effect (Drucksog), which generates the fluid flow FS.
  • the fluid flow FS penetrates essentially through an opening in the housing and sets the piezoelement PE into vibrations.
  • a flow of the fluid flow FS is generated which points to the outside of the housing.
  • the air (or other gas) in the housing chamber is compressed and creates a pressure surge (which can escape through an opening in the Ge ⁇ housing), which generates the fluid flow FS.
  • the piezo element PE is in turn caused to oscillate by the fluid flow FS.
  • the power generation system according to the invention can be implemented EES tech ⁇ technology based on MEMS (Micro Electro Mechanicial system), thus enabling miniaturization ⁇ tion, which allows very easy to integrate the system at remote locations for power generation.
  • Advantages of the invention are in particular the utilization of any existing mechanical deformation energy, the decoupling of the primary forces of the sensitive piezoceramic (implicit overload protection) in a compact design and low mass.
  • Figure 5 shows a tire R from the side with tire rattle RL, as an example of the use of the power generation system according to the invention.
  • Figure 5 is used as means for changing the volume of an elastically deformable wall, as it is present for example as the wall of a cavity in the shell of a car tire.
  • the elas ⁇ table deformable wall is connected to the car tire in such a way that a defined deformation of the tire contact area (footprint) to a defined deformation of the
  • the cavity is arranged in a tire R so that the formation of the tire rollover RL leads to the formation of the pressure surge.
  • the tire rollover RL forms when rolling the tire on a road F.
  • FIG. 6 shows an exemplary piezoelectric lobe (or a piezoelectric bending beam) with a substantially triangular base area.
  • the fluid flow FS is substantially perpendicular to an end face of the piezo triangle PE and causes the piezo flag to vibrate.
  • the triangular base area brings about a high efficiency in the energy conversion .
  • the piezoelectric lobe according to FIG. 6 can be used, for example, in the energy converter according to FIG. 4 according to the invention.
  • Figure 7 shows an exemplary arrangement of piezoelectric elements PE, each having a substantially triangular Grundflä ⁇ che for use in a piezoelectric energy converter.
  • the piezoelectric elements (PE) are arranged so that a substantially square overall base area results and wherein the fluid flow impinges substantially perpendicularly on the total base area.
  • the piezoelectric elements PE Ele ⁇ are connected via their respective side edges to the inside of Energywandles or with a Fluidstromley- tion of the energy converter. The arrangement ensures efficient energy conversion.
  • Self-sufficient power generation system in particular formed as an integrated miniaturized power generation system ba ⁇ sierend on MEMS technology, comprising a piezoelectric ⁇ rule energy converter for converting mechanical energy into electrical energy, with at least one piezoelectric ⁇ rule element in which (a caused by a flow of fluid mechanical force in particular deformation force) of the ⁇ art can be coupled, that the piezoelectric element is excited to Ele ⁇ mechanical vibrations, and wherein an integrated circuit (ASIC) for energy management of the energy provided by the piezoelectric energy converter is used.
  • ASIC integrated circuit

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un système autonome de production d'énergie, conçu notamment sous la forme d'un système de production d'énergie, miniaturisé et intégré, fondé sur la technologie des systèmes microélectromécaniques (MEMS), qui comprend un convertisseur d'énergie piézoélectrique destiné à convertir de l'énergie mécanique en énergie électrique, ledit convertisseur comprenant au moins un élément piézoélectrique dans lequel peut être injectée une force mécanique générée par un flux de fluide (en particulier une force de déformation) de telle sorte que l'élément piézoélectrique est excité de manière à produire des vibrations mécaniques. Un circuit intégré (ASIC) est utilisé pour la gestion de l'énergie fournie par le convertisseur d'énergie piézoélectrique.
EP10788285A 2009-12-07 2010-11-29 Système de production d'énergie miniaturisé Withdrawn EP2510559A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009057279 2009-12-07
DE102010019740A DE102010019740A1 (de) 2009-12-07 2010-05-07 Miniaturisiertes Energieerzeugungssystem
PCT/EP2010/068379 WO2011069851A1 (fr) 2009-12-07 2010-11-29 Système de production d'énergie miniaturisé

Publications (1)

Publication Number Publication Date
EP2510559A1 true EP2510559A1 (fr) 2012-10-17

Family

ID=43972489

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10788285A Withdrawn EP2510559A1 (fr) 2009-12-07 2010-11-29 Système de production d'énergie miniaturisé

Country Status (5)

Country Link
US (1) US20120240672A1 (fr)
EP (1) EP2510559A1 (fr)
JP (1) JP2013513355A (fr)
DE (1) DE102010019740A1 (fr)
WO (1) WO2011069851A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101725115B1 (ko) * 2010-12-16 2017-04-26 한국전자통신연구원 플렉시블 기판을 이용한 자급자족형 전원 공급 장치 및 센서 노드
WO2013171376A1 (fr) * 2012-05-16 2013-11-21 Teknologian Tutkimuskeskus Vtt Procédé et structure de collecteur d'énergie
WO2013186965A1 (fr) * 2012-06-12 2013-12-19 パナソニック株式会社 Appareil de génération de puissance et module de génération de puissance
WO2014013638A1 (fr) * 2012-07-20 2014-01-23 パナソニック株式会社 Module de production de puissance et système de commande de climatisation utilisant ce module
JP6133050B2 (ja) * 2012-12-18 2017-05-24 古河電気工業株式会社 積層発電装置
JP2014200162A (ja) * 2013-03-13 2014-10-23 パナソニック株式会社 圧電変換デバイス及びそれを用いたフローセンサ
EP3038247A4 (fr) * 2013-08-16 2017-05-10 AMC ENERGY CO., Ltd. Système de collecte piézoélectrique utilisant la force de répulsion
EP2857064B1 (fr) * 2013-10-01 2015-10-14 Sorin CRM SAS Capsule intracorporelle autonome à récupération d'énergie par transducteur piézoélectrique
DE102013225533B3 (de) * 2013-12-11 2015-01-22 Phoenix Conveyor Belt Systems Gmbh Förderanlage mit Einrichtung zur Stromerzeugung
US9935563B2 (en) * 2015-08-05 2018-04-03 Nxp Usa, Inc. Electrical energy generation within a vehicle tire
CN109313496B (zh) * 2016-06-09 2021-11-09 艾托有限公司 压电触摸装置
RU2660187C1 (ru) * 2017-04-04 2018-07-05 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Маловентильный четырёхквадрантный электропривод переменного тока и способ управления им
US11031885B1 (en) * 2017-05-04 2021-06-08 Dmitriy Yavid Electric power generator for a projectile moving through the air
EP4243273A1 (fr) * 2022-03-08 2023-09-13 Instytut Wysokich Cisnien Polskiej Akademii Nauk Module de génération d'énergie et procédé de collecte d'énergie à l'aide de fluctuations de pression

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3822388A (en) * 1973-03-26 1974-07-02 Mc Donald Douglas Corp Stirling engine power system and coupler
EP1350276A2 (fr) * 2000-10-25 2003-10-08 Washington State University Research Foundation Microtransducteurs piezo-electriques, procedes d'utilisation et procedes de fabrication correspondants
KR100494067B1 (ko) * 2002-02-25 2005-06-13 한국과학기술연구원 기포를 이용한 미소 전자 기계 구조의 발전장치
JP2003286960A (ja) * 2002-03-26 2003-10-10 Usc Corp エアー噴出装置及びこの装置を利用した発電装置並びにこの発電装置を利用した監視装置
JP4677553B2 (ja) * 2004-11-04 2011-04-27 国立大学法人秋田大学 流力振動を利用した圧電セラミックによる発電方法及び装置
JP2006158111A (ja) * 2004-11-30 2006-06-15 Matsushita Electric Works Ltd 圧電型発電素子及び圧電型発電素子を利用したワイヤレススイッチ
GB0525989D0 (en) * 2005-12-21 2006-02-01 Qinetiq Ltd Generation of electrical power from fluid flows
JP5312739B2 (ja) * 2006-12-05 2013-10-09 日本電信電話株式会社 発電装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2011069851A1 *

Also Published As

Publication number Publication date
WO2011069851A1 (fr) 2011-06-16
US20120240672A1 (en) 2012-09-27
JP2013513355A (ja) 2013-04-18
DE102010019740A1 (de) 2011-06-09

Similar Documents

Publication Publication Date Title
EP2510559A1 (fr) Système de production d'énergie miniaturisé
EP3852391B1 (fr) Haut-parleurs mems ayant une efficacité accrue
EP4247005A2 (fr) Transducteur acoustique micromécanique
AU2010201578B2 (en) Electroactive polymer pre-strain
US20110210554A1 (en) High-Efficiency MEMS Micro-Vibrational Energy Harvester And Process For Manufacturing Same
WO2012108192A1 (fr) Élément de génération d'électricité de type à changement de capacité
DE102009043251A1 (de) Biegevorrichtung zum Verbiegen eines piezoelektrischen Biegeelements, piezoelektrischer Energiewandler zum Umwandeln mechanischer Energie in elektrische Energie mit Hilfe der Biegevorrichtung und Verfahren zum Umwandeln der mechanischen Energie in elektrische Energie
US20180159022A1 (en) Electromechanical converter consisting of a cyclically stable, reversible, and expandable electrode, and a method for producing same
US20080193307A1 (en) Motion Imparting Device
DE102010040243A1 (de) Piezobasierter Generator mit mechanischem Energiespeicher und direktmechanischer Breitbandanregung
WO2011069850A1 (fr) Piézogénérateur protégé contre les surcharges
DE102010016499A1 (de) Flächige Piezogeneratormodule und Verfahren zu ihrer Herstellung
DE102009043218A1 (de) Piezoelektrischer Energiewandler zum Umwandeln von mechanischer Energie in elektrische Energie mit erhöhter Effizienz der Umwandlung, Verfahren zum Umwandeln von mechanischer Energie in elektrische Energie und Verwendung des Verfahrens
WO2009030572A1 (fr) Convertisseur d'énergie piézoélectrique à membrane double
DE102010040238B4 (de) Hochintegriertes piezoelektrisches Energieversorgungsmodul
DE102010035247A1 (de) Dielektrischer kapazitiver MEMS Energiewandler
WO2011012403A1 (fr) Convertisseur d’énergie piézoélectrique permettant de convertir l’énergie mécanique en énergie électrique à l’aide de l’écoulement d’un fluide, procédé permettant de convertir l’énergie mécanique en énergie électrique au moyen dudit convertisseur d’énergie et utilisation dudit procédé
DE102010040220B4 (de) Vorrichtung zur gepulsten direktmechanischen Anregung eines Piozobalkengenerators
EP2646837B1 (fr) Module capteur comprenant un dispositif réveil
WO2011012365A1 (fr) Convertisseur d’énergie piézoélectrique permettant de convertir l’énergie mécanique en énergie électrique à l’aide de variations de pression, procédé permettant de convertir l’énergie mécanique en énergie électrique par utilisation dudit convertisseur d’énergie et utilisation dudit procédé
DE102010019738A1 (de) Passives Element zur Strömungserzeugung in mechanisch verformbaren Umgebungen
WO2011069818A1 (fr) Convertisseur piézoélectrique d'énergie avec protection contre la surcharge
US11713240B2 (en) Cellular array electrostatic actuator
WO2023165890A1 (fr) Composant piézoélectrique
DE102022122840A1 (de) Piezoelektrisches Bauteil

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20120405

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: SIEMENS AKTIENGESELLSCHAFT

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20140603