EP2483918A1 - Dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé - Google Patents

Dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé

Info

Publication number
EP2483918A1
EP2483918A1 EP10770993A EP10770993A EP2483918A1 EP 2483918 A1 EP2483918 A1 EP 2483918A1 EP 10770993 A EP10770993 A EP 10770993A EP 10770993 A EP10770993 A EP 10770993A EP 2483918 A1 EP2483918 A1 EP 2483918A1
Authority
EP
European Patent Office
Prior art keywords
sample
sample holder
extension
passage
centering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10770993A
Other languages
German (de)
English (en)
Inventor
Ralph DÖHRMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsches Elektronen Synchrotron DESY
Original Assignee
Deutsches Elektronen Synchrotron DESY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Elektronen Synchrotron DESY filed Critical Deutsches Elektronen Synchrotron DESY
Publication of EP2483918A1 publication Critical patent/EP2483918A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/12—Chucks or sockets with fluid-pressure actuator
    • Y10T279/1241—Socket type
    • Y10T279/1249—Collet
    • Y10T279/1258—Fixed cam and moving jaws
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00—Turning
    • Y10T82/10—Process of turning

Definitions

  • the present invention relates to a sample receiving device for sample materials in ultra-high vacuum chambers, in particular for sputter coating equipment.
  • the tension rod carries at its end to be introduced at least two clamping bodies, which are held in such a way movable relative to the tension rod, that they can perform a movement transverse to the longitudinal axis of the through hole and the tie rod.
  • a guide curve fixed relative to this is provided in order to guide the clamping bodies in the direction of the longitudinal axis of the passage opening upon movement of the tension rod.
  • the guide curve is shaped so that the clamping bodies are pressed in a first position in the longitudinal direction of the passage opening in engagement behind the radial engagement projections on the extension.
  • the clamping bodies are behind the radi- alen engagement projections on the extension, ie on the side facing away from the tie rod side of the engagement projections, a positive and positive engagement of the clamping body on the extension of the sample holder is given, so that the pull rod by pulling down on the sample holder in the direction of the centering can exert tensile force directed into the sample holder and thus can attract the sample holder with a predetermined tensile force to the support member.
  • the Füh ⁇ approximate curve is further shaped so that the clamping body at Be ⁇ movement to a second position in the longitudinal direction of the ⁇ hole, wherein the second position is closer to the centering ⁇ opening than the first position in a direction transverse to the longitudinal axis of the passage opening be moved so far that they are outside the passage of the radial engagement ⁇ projections, so that the radial engagement projections can pass through the clamping body when the extension of the sample holder from the through hole and out of the centering hole is pulled out.
  • two elongate retaining elements are attached to the pull rod, each carrying a clamping cylinder as clamping ⁇ body at their remote from the tension rod end.
  • the holding elements are designed so that they can bend elastically transversely to its longitudinal extension, whereby the mobility of the clamping body is made possible when guided on the guide cam.
  • the holding elements may be formed for example in the form of elongated wires.
  • the guide curve is so ⁇ forms that the clamping cam presses the clamping cylinder in its ers ⁇ ter position to an undercut portion of the extension of the sample holder, so that the tension rod is non-positively connected to the sample holder.
  • the guide curve widens upward and has a curved ⁇ component, which moves the clamping cylinder on movement through the passage opening to the centering to the longitudinal axis of the passage opening to the outside.
  • the clamping cylinder Upon movement of the clamping cylinder into a second position they are then moved so ⁇ far radially outwards that the engaging projections on the projection of the sample holder may happen if the sample holder from the passage opening, and centering is pulled out.
  • the clamping bodies can also be formed by three or more balls, which are supported on elongate retaining elements of the tension rod.
  • the clamping body should be arranged so that in the clamping position in contact pressure on the extension of the sample holder cancel their forces on the extension. This is achieved in the case of two clamping bodies, for example, if they are arranged exactly opposite each other are and the guide curve is symmetrically shaped, so that the two clamping bodies act exactly opposite one ⁇ . For more than two clamping bodies, these would have to be arranged distributed along a circle such that the total force exerted by them on the extension is zero. This ensures that the clamping of the sample holder does not cause a net force on the extension transverse to the longitudinal direction thereof, which could lead to a displacement of the sample holder in the centering ⁇ rierö réelle total.
  • the movement of the clamping body from the sample holder einspan ⁇ nenden position need not be radially directed outwardly from the longitudinal axis Be ⁇ movement into a releasing same for removal.
  • the clamping bodies engage behind a radially inwardly directed projection in a hollow body of the extension, wherein the sample holder locking position of the clamping body then radially with respect to the longitudinal axis further out than the sample holder releasing position of the clamping body, in of the clamping body can pass through the projections, that is, the projections are within a lower opening of the hollow body when it is pulled past them upwards.
  • Figures 2 and 3 show cross-sectional views of the embodiment in a sample holder locking position ( Figure 3) and a sample holder releasing position ( Figure 2).
  • the figures show a fixed support part 1, which is provided at the top with a centering opening.
  • the centering opening continues down into a passage opening 8.
  • a sample holder 4 with its extension 4a is inserted or removed therefrom.
  • a tension rod 3 extends partially into the centering opening and the passage opening 8.
  • the tie rod 3 carries at its upper end two clamping body 3b, which are pin-shaped or cylindrical in this embodiment.
  • the clamping body 3b are held by the elastic holding elements, for example thin Me ⁇ talldrähten, above the upper end of the tension rod. 3 It can be used for each clamping body 3b, two metal wires as a carrier, which are connected at one end to one end of the clamping body pin and at the opposite end to the tie rod.
  • the clamping ⁇ body 3b by elastic deformation of the holding elements are laterally movable with respect to the longitudinal axis of tension rod and centering.
  • guide curves 7 are ⁇ in the centering hole. These guide curves 7 are shaped so that a Li ⁇ near movement of the pull rod 3 in the longitudinal direction of passage opening 8 and centering with a vertical movement to said linear movement lateral movement component of the clamping body 3b is accompanied.
  • the forced operation of the clamping body 3b is such that they are pressed in a first position of the tension rod 3 in contact pressure on the extension 4a of the sample holder 4 behind radial projections on it, so that by means of the tension rod 3 via the clamping body 3b, a tensile force on the extension 4a and thus the sample holder 4 can be exerted, which is directed into the centering opening.
  • This position is shown in FIG. 3, in which the clamping body 3b in engagement behind the radial projection at the end of the extension 4a are pressed against this.
  • the sample holder 4 is biased ⁇ turned to the support member 1 and is pulled with a predetermined force against the holding part approximately ⁇ . 1
  • a sample holder 4 e.g. be removed by a robot arm, after which a new sample holder 4 can be introduced and inserted into the centering opening of the support part 1.
  • the reverse movement of the tie rod 3 follows linearly downward in the position shown in Figure 3, after which the new sample holder 4 is clamped in the support member 1 and is pressed thereon with a predetermined force.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé, comprenant un porte-échantillon interchangeable (4) qui a un corps de support d'échantillon en forme de disque et une avancée en saillie, une pièce de retenue (1) avec une ouverture de centrage qui est formée pour la réception centrée de l'avancée du porte-échantillon (4) et se transforme en une ouverture de passage (8) traversant la pièce de retenue, une barre de traction (3) qui est introduite à partir du côté opposé à l'ouverture de centrage dans l'ouverture de passage (8) et maintient de manière mobile avec son extrémité introduite au moins deux corps de serrage (3b) de telle manière qu'ils puissent effectuer un mouvement transversalement à l'axe longitudinal de l'ouverture de passage (8), et une came de guidage (7) fixe par rapport à la pièce de retenue (1) pour guider les corps de serrage (3b) lors du mouvement de la barre de traction en direction de l'axe longitudinal de l'ouverture de passage (8) de telle manière que les corps de serrage (3b), dans une première position de la barre de traction (3), soient pressés contre l'avancée (4a) pour venir se bloquer derrière des saillies d'engagement radiales afin que la barre de traction (3) puisse exercer sur le porte-échantillon (4) une force de traction orientée en direction de l'intérieur de l'ouverture de centrage et que les corps de serrage (3b), dans une deuxième position de la barre de traction (3) dans laquelle celle-ci est poussée plus avant dans l'ouverture de passage, soient poussés dans la direction transversale à l'axe longitudinal de l'ouverture de passage au point que les saillies d'engagement radiales puissent les passer quand l'avancée du porte-échantillon (4) est extraite de l'ouverture de passage et de l'ouverture de centrage.
EP10770993A 2009-10-02 2010-10-04 Dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé Withdrawn EP2483918A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200910048170 DE102009048170B3 (de) 2009-10-02 2009-10-02 Probenaufnahmevorrichtung für Probenmaterialien in Ultrahochvakuumkammern
PCT/EP2010/006052 WO2011038938A1 (fr) 2009-10-02 2010-10-04 Dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé

Publications (1)

Publication Number Publication Date
EP2483918A1 true EP2483918A1 (fr) 2012-08-08

Family

ID=43406243

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10770993A Withdrawn EP2483918A1 (fr) 2009-10-02 2010-10-04 Dispositif de prélèvement d'échantillon pour des matériaux d'échantillon dans des chambres à vide très poussé

Country Status (4)

Country Link
US (1) US8871066B2 (fr)
EP (1) EP2483918A1 (fr)
DE (1) DE102009048170B3 (fr)
WO (1) WO2011038938A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102809661B (zh) * 2011-05-30 2013-11-06 中国科学院电子学研究所 一种用于超高真空测试的送样装置
JP7325345B2 (ja) * 2020-01-15 2023-08-14 東京エレクトロン株式会社 基板処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3318732B2 (ja) * 1995-09-13 2002-08-26 株式会社日研工作所 スピンドルの部品クランプ装置
US6213478B1 (en) * 1999-03-11 2001-04-10 Moore Epitaxial, Inc. Holding mechanism for a susceptor in a substrate processing reactor
JP4331901B2 (ja) 2001-03-30 2009-09-16 日本碍子株式会社 セラミックサセプターの支持構造
JP2003077992A (ja) * 2001-08-31 2003-03-14 Nok Corp ワーク支持装置
US7137632B2 (en) * 2003-10-27 2006-11-21 Hardinge Inc. Force limiting workpiece holding device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2011038938A1 *

Also Published As

Publication number Publication date
DE102009048170B3 (de) 2011-04-28
US20120267244A1 (en) 2012-10-25
WO2011038938A1 (fr) 2011-04-07
US8871066B2 (en) 2014-10-28

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