EP2440788B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2440788B1
EP2440788B1 EP10723116.9A EP10723116A EP2440788B1 EP 2440788 B1 EP2440788 B1 EP 2440788B1 EP 10723116 A EP10723116 A EP 10723116A EP 2440788 B1 EP2440788 B1 EP 2440788B1
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EP
European Patent Office
Prior art keywords
vacuum pump
cooling
housing
frequency inverter
electric motor
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EP10723116.9A
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German (de)
French (fr)
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EP2440788A2 (en
Inventor
Thomas Dreifert
Wolfgang Giebmanns
Robert Jenkins
Roland Müller
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Leybold GmbH
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Leybold GmbH
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Publication of EP2440788A2 publication Critical patent/EP2440788A2/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • F04C29/047Cooling of electronic devices installed inside the pump housing, e.g. inverters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/30Casings or housings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/808Electronic circuits (e.g. inverters) installed inside the machine

Definitions

  • the invention relates to a vacuum pump, in particular a screw vacuum pump, a Roots vacuum pump or a rotary vane vacuum pump.
  • Vacuum pumps have in a pump chamber formed by the pump chamber arranged pumping elements for conveying the fluid, in particular a gas, such as air on.
  • the pumping elements are usually driven by an electric motor.
  • the frequency converter is a sensitive electronic component.
  • In order to enable a good cooling and vibration-free arrangement of the frequency converter it is known to arrange them in a separate from the vacuum pump control cabinet separately from the pump. However, this is expensive, in particular because of the required wiring between the control cabinet and the electric motor of the vacuum pump. It is therefore generally preferred to arrange the frequency converter directly to the vacuum pump.
  • Out EP 1 936 198 a vacuum pump is known in which a housing for an electronic control system with the interposition of a housing for an intermediate portion and a housing for a peripheral portion is connected to the pump housing.
  • the housing for the control electronics has on its outside cooling fins.
  • this embodiment is only possible if the ambient temperatures are correspondingly low and the pump is operated in a power range in which a strong heating of the frequency converter does not occur. Since the free inflow of air must be ensured, there is also a high risk of contamination in this embodiment.
  • the frequency converter with a direct water cooling.
  • the frequency converter is connected to a cooled surface of the vacuum pump.
  • this has the disadvantage that the frequency converter is exposed to the vibrations of the vacuum pump.
  • the cooling requirement of the vacuum pump and the cooling requirement of the frequency converter must correspond to each other.
  • the frequency converter used must therefore be adapted to the corresponding requirements.
  • cooling of the frequency converter by water cooling has the disadvantage that condensation can also occur within the frequency converter when the humidity is high.
  • EP 0 836 008 is a turbomolecular pump with an electric motor and a frequency converter known. Cooling ribs of the electric motor protrude into a housing of the frequency converter. Both the electric motor and the frequency converter are cooled by an air flow generated by a fan.
  • WO 2008/062598 It is known to arrange electrical components in a housing connected to a vacuum pump. The electrical components are cooled by an air flow, wherein the air flow is cooled by a cooling device.
  • the object of the invention is to provide a vacuum pump with frequency converter, with a reliable cooling of the frequency converter should be guaranteed.
  • the at least one pumping element arranged in the pump chamber is driven by an electric motor.
  • a frequency converter To change the engine speed of the electric motor is connected to a frequency converter.
  • the frequency converter is located in a frequency converter housing directly connected to the pump housing - in the following FU housing.
  • both an air cooler and a liquid cooler are arranged in the fan housing for cooling the frequency converter.
  • the electric motor is likewise arranged in the FC housing.
  • the liquid cooler surrounds the electric motor at least partially.
  • the liquid cooler thus serves on the one hand for cooling the electric motor and for cooling the air flow, which cools the frequency converter.
  • the liquid cooler completely surrounds the electric motor corresponding to a cooling coil.
  • the FU housing and the pump housing is integrally formed, wherein the two housings can of course consist of several individual components. It is preferred in this case that the drive housing is connected directly to the pump housing and thus a compact design can be achieved.
  • the air cooler preferably has a fan which generates a cooling air flow in the FU housing. According to the invention, the cooling of the air flow through the liquid cooler. This has the advantage that the frequency converter is not directly connected to a cooling plate or the like, but the cooling of the frequency converter by one of the Liquid cooler cooled air flow takes place. As a result, the risk of the occurrence of condensate, especially within the frequency converter, significantly reduced.
  • the drive housing can be closed, so that a circulation of the air takes place. There is no need to suck in ambient air that may be dirty.
  • the liquid cooler preferably has a cooling element arranged in or on the FU housing.
  • the air flows along the cooling element, which preferably has cooling fins for surface enlargement.
  • the cooling ribs or the surface of the cooling element, along which the air flows, preferably points in the direction of the frequency converter.
  • the liquid cooler has a cooling plate, in which at least one cooling coil is arranged. The corresponding cooling plate can form part of the drive housing.
  • the liquid cooler is integrated into the coolant circuit of the vacuum pump.
  • the liquid cooler is integrated into the coolant circuit of the vacuum pump.
  • only one coolant circuit is provided. This simplifies the connection of the vacuum pump to a coolant circuit, since no additional coolant circuit for cooling the frequency converter must be connected.
  • the FU housing is thermally coupled to the liquid cooler of the electric motor or a corresponding liquid-cooled housing of the electric motor. As a result, a good heat dissipation can be ensured.
  • the frequency converter is cooled by an air flow, it is not necessary to connect the frequency converter directly to a cooling plate. This has the advantage according to the invention that the frequency converter can be held by means of vibration damping elements.
  • the occurrence of vibration damage to the frequency converters can also be improved by the use of vibration-proof electronics as well as by gluing or casting of the components. Furthermore, the assembly can take place on a vibration-decoupled component.
  • An essential advantage of the invention is that the occurrence of condensation damage to the electronics of the frequency converter is avoided because the frequency converter is not directly connected to the water cycle.
  • the condensation taking place on the coolest component thus takes place on the air cooler or the liquid cooler, but not on the frequency converter itself, since it generates waste heat during operation. Condensation is avoided even when the pump is switched off because the frequency converter is not cooled.
  • the fan of the air cooler is preferably coupled to the operation of the frequency converter.
  • a condensate drain can be arranged in the FU housing.
  • the frequency converter is the most temperature-sensitive component, it is preferable to use the coolant first for cooling the frequency converter, then for cooling the electric motor and then for cooling the pump in a common cooling circuit. Also, an additional control of the water cooling can be done.
  • the integration of the frequency converter according to the invention in the pump housing or in the drive housing has the advantage that a small volume of air must be promoted. In particular, a very targeted air flow within the drive housing can be achieved.
  • a pump chamber 12 is formed by a housing 10, in which two pumping screws 14 are arranged as pumping elements, which rotate in opposite directions. This is usually done via a arranged between the two screw rotors 14, not shown in the drawings gear.
  • a medium is drawn in the direction of an arrow 16 through an inlet opening 18 and an ejection of the medium through an outlet opening 20 in the direction of an arrow 22.
  • an electric motor 24 is disposed in a part 26 of the housing.
  • the electric motor 24 is connected via its output shaft 28 with one of the two pump screws 14.
  • a frequency converter 30 is provided, which is electrically connected to the electric motor 24.
  • the frequency converter 30 is arranged in a frequency converter housing 32 (FU housing).
  • the FU housing 32 is directly connected to the pump housing 10 or formed integrally therewith.
  • an air cooler 34 and a liquid cooler 36 is provided.
  • the air cooler 34 has a fan 38 in the illustrated embodiment.
  • the fan 38 is disposed within the FU housing 32 and serves to circulate the air within the FU housing.
  • the air flow generated by the blower 38 is directed so that it flows along the liquid cooler 36.
  • the air flows along cooling fins 40 of the liquid cooler 36.
  • the cooling fins 40 point into the interior of the FU housing 32 or in the direction of the frequency converter 30.
  • the liquid cooler has a cooling element, such as a cooling plate 42, which simultaneously forms a side wall of the FU housing 32 in the illustrated embodiment.
  • a cooling element such as a cooling plate 42
  • the cooling fins 40 are connected on the inside.
  • a cooling coil 44 is arranged within the cooling plate 42.
  • the cooling coil 44 is connected to coolant lines 46. These are for clarity only as approaches in the Fig. 1 shown.
  • the coolant lines 46 are connected to the liquid cooling system of the electric motor 24 as well as the vacuum pump itself.
  • the cooling lines 46 preferably extend within the housing or directly along the housing outer walls.
  • the frequency converter 30 is held on one of the housing walls of the FU housing 32 via vibration damper 48.
  • Fig. 2 In the preferred embodiment of the invention ( Fig. 2 ) are identical or similar components with the same reference numerals.
  • the main difference to the in Fig. 1 illustrated vacuum pump is that the electric motor 24 is disposed within the FU housing 32.
  • a separate cooling element for the design of the liquid cooler for the frequency converter 30 can thus be omitted.
  • the motor 24 is surrounded by a liquid cooler 50. This preferably completely surrounds the motor 24 and has outwardly directed cooling ribs 52.
  • Within the liquid cooler 50 a spirally arranged, the electric motor 24 surrounding cooling coil 54 is arranged. This is in turn connected to coolant lines 46.
  • a fan 38 is disposed within the FU housing 32. This causes the air in the FU housing 32 to circulate, the air being guided in such a way that the air flows along the fins 52 for cooling.

Description

Die Erfindung betrifft eine Vakuumpumpe, insbesondere eine Schrauben-Vakuumpumpe, eine Roots-Vakuumpumpe oder eine Drehschieber-Vakuumpumpe.The invention relates to a vacuum pump, in particular a screw vacuum pump, a Roots vacuum pump or a rotary vane vacuum pump.

Vakuumpumpen weisen in einem durch das Pumpengehäuse gebildeten Schöpfraum angeordnete Pumpelemente zum Fördern des Fluids, insbesondere eines Gases, wie Luft, auf. Die Pumpelemente werden üblicherweise von einem Elektromotor angetrieben. Um die Drehzahl der Vakuumpumpe auf einfache Weise variieren zu können, ist es bekannt, Frequenzumrichter vorzusehen, um die Motordrehzahl auf einfache Weise verändern zu können. Bei dem Frequenzumrichter handelt es sich um ein empfindliches elektronisches Bauteil. Um eine gute Kühlung und vibrationsfreie Anordnung der Frequenzumrichter zu ermöglichen, ist es bekannt, diese in einem von der Vakuumpumpe unabhängigen Schaltschrank getrennt von der Pumpe anzuordnen. Dies ist jedoch insbesondere aufgrund der erforderlichen Verkabelung zwischen Schaltschrank und Elektromotor der Vakuumpumpe aufwändig. Es ist daher grundsätzlich bevorzugt, den Frequenzumrichter unmittelbar an der Vakuumpumpe anzuordnen.Vacuum pumps have in a pump chamber formed by the pump chamber arranged pumping elements for conveying the fluid, in particular a gas, such as air on. The pumping elements are usually driven by an electric motor. In order to be able to vary the speed of the vacuum pump in a simple manner, it is known to provide frequency converters in order to be able to change the engine speed in a simple manner. The frequency converter is a sensitive electronic component. In order to enable a good cooling and vibration-free arrangement of the frequency converter, it is known to arrange them in a separate from the vacuum pump control cabinet separately from the pump. However, this is expensive, in particular because of the required wiring between the control cabinet and the electric motor of the vacuum pump. It is therefore generally preferred to arrange the frequency converter directly to the vacuum pump.

Aus EP 1 936 198 ist eine Vakuumpumpe bekannt, bei der ein Gehäuse für eine Steuerelektronik unter Zwischenschaltung eines Gehäuses für einen Zwischenabschnitt sowie eines Gehäuses für einen Peripherieabschnitt mit dem Pumpengehäuse verbunden ist. Das Gehäuse für die Steuerelektronik weist an seiner Außenseite Kühlrippen auf.Out EP 1 936 198 a vacuum pump is known in which a housing for an electronic control system with the interposition of a housing for an intermediate portion and a housing for a peripheral portion is connected to the pump housing. The housing for the control electronics has on its outside cooling fins.

Bei unmittelbar an der Vakuumpumpe angeordneten Frequenzumrichtern ist es bekannt, eine Luftkühlung zur Kühlung der Frequenzumrichter vorzusehen. Die Kühlung erfolgt hierbei durch Umgebungsluft, die von einem Lüfter angesaugt und in Richtung des Frequenzumrichters geblasen wird. Die Kühlung erfolgt somit durch erzwungene Konvektion. Derartige Luftkühlungen weisen jedoch den Nachteil auf, dass hohe Schutzklassen nicht bzw. nur mit hohem Aufwand realisiert werden können. Auch bei niedrigeren Schutzklassen ist ein aufwändiges Gehäuse erforderlich. Insbesondere bei schmutziger Umgebung ist der Wartungsaufwand hoch, da ein häufiges Reinigen sowie Filterwechsel erforderlich sind. Ferner ist es bekannt, die Frequenzumrichter durch natürliche Konvektion zu kühlen, wobei das Gehäuse des Frequenzumrichters sodann unmittelbar mit Kühlrippen versehen ist. Diese Ausgestaltung ist jedoch nur möglich, wenn die Umgebungstemperaturen entsprechend gering sind und die Pumpe in einem Leistungsbereich betrieben wird, in dem ein starkes Erwärmen des Frequenzumrichters nicht auftritt. Da die freie Zuströmung von Luft gewährleistet sein muss, besteht auch bei dieser Ausgestaltung eine hohe Verschmutzungsgefahr.With frequency converters arranged directly on the vacuum pump, it is known to provide air cooling for cooling the frequency converters. The cooling takes place here by ambient air, which is sucked by a fan and blown in the direction of the frequency converter. The cooling is thus done by forced convection. However, such air cooling systems have the disadvantage that high protection classes can not be realized or only with great effort. Even with lower protection classes, a complex housing is required. Especially in a dirty environment, the maintenance is high, since frequent cleaning and filter replacement are required. Furthermore, it is known to cool the frequency converter by natural convection, wherein the housing of the frequency converter is then provided directly with cooling fins. However, this embodiment is only possible if the ambient temperatures are correspondingly low and the pump is operated in a power range in which a strong heating of the frequency converter does not occur. Since the free inflow of air must be ensured, there is also a high risk of contamination in this embodiment.

Ferner ist es bekannt, den Frequenzumrichter mit einer unmittelbaren Wasserkühlung zu versehen. Hierbei ist der Frequenzumrichter mit einer gekühlten Oberfläche der Vakuumpumpe verbunden. Dies hat jedoch den Nachteil, dass der Frequenzumrichter den Vibrationen der Vakuumpumpe ausgesetzt ist. Ferner müssen der Kühlbedarf der Vakuumpumpe und der Kühlbedarf des Frequenzumrichters einander entsprechen. Der eingesetzte Frequenzumrichter muss somit auf die entsprechenden Anforderungen angepasst sein. Ferner ist es bekannt, eine gesonderte Kühlplatte für den Frequenzumrichter vorzusehen, die sodann mit einem gesonderten Kühlkreislauf verbunden ist. Hierbei handelt es sich um eine äußerst aufwändige Lösung. Generell besteht bei einer Kühlung des Frequenzumrichters durch eine Wasserkühlung der Nachteil, dass bei hoher Luftfeuchtigkeit Kondensatbildung auch innerhalb des Frequenzumrichters auftreten kann.Furthermore, it is known to provide the frequency converter with a direct water cooling. Here, the frequency converter is connected to a cooled surface of the vacuum pump. However, this has the disadvantage that the frequency converter is exposed to the vibrations of the vacuum pump. Furthermore, the cooling requirement of the vacuum pump and the cooling requirement of the frequency converter must correspond to each other. The frequency converter used must therefore be adapted to the corresponding requirements. Furthermore, it is known to provide a separate cooling plate for the frequency converter, which is then connected to a separate cooling circuit. This is a very time-consuming solution. In general, cooling of the frequency converter by water cooling has the disadvantage that condensation can also occur within the frequency converter when the humidity is high.

Aus EP 0 836 008 ist eine Turbomolekularpumpe mit einem Elektromotor und einem Frequenzumrichter bekannt. Kühlrippen des Elektromotors ragen in ein Gehäuse des Frequenzumrichters. Sowohl der Elektromotor als auch der Frequenzumrichter werden durch einen von einem Lüfter erzeugten Luftstrom gekühlt.Out EP 0 836 008 is a turbomolecular pump with an electric motor and a frequency converter known. Cooling ribs of the electric motor protrude into a housing of the frequency converter. Both the electric motor and the frequency converter are cooled by an air flow generated by a fan.

Aus WO 2008/062598 ist es bekannt, Elektrobauteile in einem mit einer Vakuumpumpe verbundenen Gehäuse anzuordnen. Die Elektrobauteile werden von einem Luftstrom gekühlt, wobei der Luftstrom von einer Kühleinrichtung gekühlt wird.Out WO 2008/062598 It is known to arrange electrical components in a housing connected to a vacuum pump. The electrical components are cooled by an air flow, wherein the air flow is cooled by a cooling device.

Aufgabe der Erfindung ist es, eine Vakuumpumpe mit Frequenzumrichter zu schaffen, wobei eine zuverlässige Kühlung des Frequenzumrichters gewährleistet sein soll.The object of the invention is to provide a vacuum pump with frequency converter, with a reliable cooling of the frequency converter should be guaranteed.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Bei der erfindungsgemäßen Vakuumpumpe wird das mindestens eine in dem Schöpfraum angeordnete Pumpelement von einem Elektromotor angetrieben. Zur Veränderung der Motordrehzahl ist der Elektromotor mit einem Frequenzumrichter verbunden. Der Frequenzumrichter ist in einem unmittelbar mit dem Pumpengehäuse verbundenen Frequenzumrichter-Gehäuse - im Folgenden FU-Gehäuse - angeordnet. Erfindungsgemäß ist in dem FU-Gehäuse zur Kühlung des Frequenzumrichters sowohl ein Luftkühler als auch ein Flüssigkeitskühler angeordnet. Durch die erfindungsgemäße Kombination eines Luftkühlers mit einem Flüssigkeitskühler kann ein zuverlässiges Kühlen des Frequenzumrichters auch bei hoher thermischer Belastung des Frequenzumrichters gewährleistet werden, wobei gleichzeitig das Auftreten von Kondensat vermieden ist.In the case of the vacuum pump according to the invention, the at least one pumping element arranged in the pump chamber is driven by an electric motor. To change the engine speed of the electric motor is connected to a frequency converter. The frequency converter is located in a frequency converter housing directly connected to the pump housing - in the following FU housing. According to the invention, both an air cooler and a liquid cooler are arranged in the fan housing for cooling the frequency converter. The inventive combination of an air cooler with a liquid cooler reliable cooling of the frequency converter can be ensured even at high thermal load of the frequency converter, at the same time the occurrence of condensate is avoided.

Erfindungsgemäß ist der Elektromotor ebenfalls in dem FU-Gehäuse angeordnet. Der Flüssigkeitskühler umgibt den Elektromotor zumindest teilweise. Der Flüssigkeitskühler dient somit einerseits zur Kühlung des Elektromotors sowie zur Kühlung des Luftstroms, der den Frequenzumrichter kühlt. Insbesondere umgibt der Flüssigkeitskühler bei dieser Ausführungsform den Elektromotor entsprechend einer Kühlschlange vollständig.According to the invention, the electric motor is likewise arranged in the FC housing. The liquid cooler surrounds the electric motor at least partially. The liquid cooler thus serves on the one hand for cooling the electric motor and for cooling the air flow, which cools the frequency converter. In particular, in this embodiment, the liquid cooler completely surrounds the electric motor corresponding to a cooling coil.

Vorzugsweise ist das FU-Gehäuse und das Pumpengehäuse einstückig ausgebildet, wobei die beiden Gehäuse selbstverständlich aus mehreren einzelnen Bauteilen bestehen können. Bevorzugt ist es hierbei, dass das FU-Gehäuse unmittelbar mit dem Pumpengehäuse verbunden ist und somit eine kompakte Bauform erzielt werden kann.Preferably, the FU housing and the pump housing is integrally formed, wherein the two housings can of course consist of several individual components. It is preferred in this case that the drive housing is connected directly to the pump housing and thus a compact design can be achieved.

Der Luftkühler weist vorzugsweise ein Gebläse auf, das in dem FU-Gehäuse einen kühlenden Luftstrom erzeugt. Erfindungsgemäß erfolgt die Kühlung des Luftstroms durch den Flüssigkeitskühler. Dies hat den Vorteil, dass der Frequenzumrichter nicht unmittelbar mit einer Kühlplatte oder dgl. verbunden ist, sondern die Kühlung des Frequenzumrichters durch einen von dem Flüssigkeitskühler gekühlten Luftstrom erfolgt. Hierdurch ist die Gefahr des Auftretens von Kondensat, insbesondere innerhalb des Frequenzumrichters, erheblich reduziert.The air cooler preferably has a fan which generates a cooling air flow in the FU housing. According to the invention, the cooling of the air flow through the liquid cooler. This has the advantage that the frequency converter is not directly connected to a cooling plate or the like, but the cooling of the frequency converter by one of the Liquid cooler cooled air flow takes place. As a result, the risk of the occurrence of condensate, especially within the frequency converter, significantly reduced.

Das FU-Gehäuse kann geschlossen sein, so dass ein Umwälzen der Luft erfolgt. Es muss keine Umgebungsluft angesaugt werden, die ggf. verschmutzt ist.The drive housing can be closed, so that a circulation of the air takes place. There is no need to suck in ambient air that may be dirty.

Vorzugsweise weist der Flüssigkeitskühler ein in oder an dem FU-Gehäuse angeordnetes Kühlelement auf. An dem Kühlelement, das vorzugsweise zur Oberflächenvergrößerung Kühlrippen aufweist, strömt die Luft entlang. Die Kühlrippen bzw. die Oberfläche des Kühlelements, an dem die Luft entlang strömt, weist vorzugsweise in Richtung des Frequenzumrichters. In bevorzugter Ausführungsform weist der Flüssigkeitskühler eine Kühlplatte auf, in der mindestens eine Kühlschlange angeordnet ist. Die entsprechende Kühlplatte kann einen Teil des FU-Gehäuses ausbilden.The liquid cooler preferably has a cooling element arranged in or on the FU housing. The air flows along the cooling element, which preferably has cooling fins for surface enlargement. The cooling ribs or the surface of the cooling element, along which the air flows, preferably points in the direction of the frequency converter. In a preferred embodiment, the liquid cooler has a cooling plate, in which at least one cooling coil is arranged. The corresponding cooling plate can form part of the drive housing.

Bei einer besonders bevorzugten Ausführungsform der Erfindung ist der Flüssigkeitskühler in den Kühlmittelkreislauf der Vakuumpumpe integriert. Es ist somit lediglich ein Kühlmittelkreislauf vorgesehen. Hierdurch ist das Anschließen der Vakuumpumpe an einen Kühlmittelkreislauf vereinfacht, da kein zusätzlicher Kühlmittelkreislauf zur Kühlung des Frequenzumrichters angeschlossen werden muss.In a particularly preferred embodiment of the invention, the liquid cooler is integrated into the coolant circuit of the vacuum pump. Thus, only one coolant circuit is provided. This simplifies the connection of the vacuum pump to a coolant circuit, since no additional coolant circuit for cooling the frequency converter must be connected.

Vorzugsweise ist das FU-Gehäuse thermisch mit dem Flüssigkeitskühler des Elektromotors bzw. einem entsprechenden flüssigkeitsgekühlten Gehäuse des Elektromotors gekoppelt. Hierdurch kann eine gute Wärmeabfuhr gewährleistet werden.Preferably, the FU housing is thermally coupled to the liquid cooler of the electric motor or a corresponding liquid-cooled housing of the electric motor. As a result, a good heat dissipation can be ensured.

Da erfindungsgemäß der Frequenzumrichter durch einen Luftstrom gekühlt wird, ist es nicht erforderlich, den Frequenzumrichter unmittelbar mit einer Kühlplatte zu verbinden. Dies hat den erfindungsgemäßen Vorteil, dass der Frequenzumrichter über Schwingungsdämpfungselemente gehalten werden kann.Since, according to the invention, the frequency converter is cooled by an air flow, it is not necessary to connect the frequency converter directly to a cooling plate. This has the advantage according to the invention that the frequency converter can be held by means of vibration damping elements.

Das Auftreten von Vibrationsschäden an den Frequenzumrichtern kann ferner durch die Verwendung vibrationsfester Elektronik sowie durch Verkleben oder Vergießen der Bauteile verbessert werden. Ferner kann die Montage an einem schwingungsentkoppelten Bauteil erfolgen.The occurrence of vibration damage to the frequency converters can also be improved by the use of vibration-proof electronics as well as by gluing or casting of the components. Furthermore, the assembly can take place on a vibration-decoupled component.

Ein wesentlicher Vorteil der Erfindung besteht darin, dass das Auftreten von Kondensationsschäden an der Elektronik des Frequenzumrichters vermieden ist, da der Frequenzumrichter nicht direkt mit dem Wasserkreislauf verbunden ist. Die an dem kühlsten Bauteil stattfindende Kondensation erfolgt somit an dem Luftkühler oder dem Flüssigkeitskühler, nicht jedoch an dem Frequenzumrichter selbst, da dieser im Betrieb Abwärme erzeugt. Auch bei abgeschalteter Pumpe wird Kondensation vermieden, da der Frequenzumrichter nicht gekühlt wird. Dazu wird das Gebläse des Luftkühlers vorzugsweise an den Betrieb des Frequenzumrichters gekoppelt. Vorzugsweise kann ein Kondensatablauf in dem FU-Gehäuse angeordnet werden.An essential advantage of the invention is that the occurrence of condensation damage to the electronics of the frequency converter is avoided because the frequency converter is not directly connected to the water cycle. The condensation taking place on the coolest component thus takes place on the air cooler or the liquid cooler, but not on the frequency converter itself, since it generates waste heat during operation. Condensation is avoided even when the pump is switched off because the frequency converter is not cooled. For this purpose, the fan of the air cooler is preferably coupled to the operation of the frequency converter. Preferably, a condensate drain can be arranged in the FU housing.

Da der Frequenzumrichter das temperaturempfindlichste Bauteil darstellt, ist es bevorzugt, bei einem gemeinsamen Kühlkreislauf das Kühlmittel zunächst zur Kühlung des Frequenzumrichters, dann zur Kühlung des Elektromotors und anschließend zur Kühlung der Pumpe zu verwenden. Auch kann eine zusätzliche Regelung der Wasserkühlung erfolgen.Since the frequency converter is the most temperature-sensitive component, it is preferable to use the coolant first for cooling the frequency converter, then for cooling the electric motor and then for cooling the pump in a common cooling circuit. Also, an additional control of the water cooling can be done.

Gegenüber der Anordnung der Frequenzumrichter in Schaltschränken weist die erfindungsgemäße Integration der Frequenzumrichter in das Pumpengehäuse bzw. in das FU-Gehäuse den Vorteil auf, dass ein geringes Luftvolumen gefördert werden muss. Insbesondere kann eine sehr gezielte Luftführung innerhalb des FU-Gehäuses erzielt werden.Compared with the arrangement of the frequency in control cabinets, the integration of the frequency converter according to the invention in the pump housing or in the drive housing has the advantage that a small volume of air must be promoted. In particular, a very targeted air flow within the drive housing can be achieved.

Aufgrund der erfindungsgemäßen Anordnung des Frequenzumrichters einschließlich der erfindungsgemäß ausgebildeten Kühlung kann eine hohe Schutzklasse von beispielsweise IP54 erzielt werden.Due to the arrangement of the frequency converter according to the invention including the inventively designed cooling a high degree of protection, for example IP54 can be achieved.

Nachfolgend wird die Erfindung unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to the accompanying drawings.

Es zeigen:

Fig. 1
eine schematische Schnittansicht einer Ausführungsform einer Vakuumpumpe, welche nicht in den Umfang der Ansprüche fällt,
und
Fig. 2
eine schematische Schnittansicht einer bevorzugten Ausführungsform der Erfindung.
Show it:
Fig. 1
a schematic sectional view of an embodiment of a vacuum pump, which does not fall within the scope of the claims,
and
Fig. 2
a schematic sectional view of a preferred embodiment of the invention.

In den Fig. sind als Beispiele jeweils Schrauben-Vakuumpumpen sehr schematisch dargestellt. Hierbei ist durch ein Gehäuse 10 ein Schöpfraum 12 ausgebildet, in den als Pumpelemente zwei Pumpschrauben 14 angeordnet sind, die sich in einander entgegengesetzte Richtung drehen. Dies erfolgt üblicherweise über ein zwischen den beiden Schraubenrotoren 14 angeordnetes, in den Skizzen nicht dargestelltes Getriebe. Durch Rotation der beiden Pumpelemente 14 erfolgt ein Ansaugen von Medium in Richtung eines Pfeils 16 durch eine Einlassöffnung 18 und ein Ausstoßen des Mediums durch eine Auslassöffnung 20 in Richtung eines Pfeils 22.In the figures, screw vacuum pumps are shown very schematically as examples. In this case, a pump chamber 12 is formed by a housing 10, in which two pumping screws 14 are arranged as pumping elements, which rotate in opposite directions. This is usually done via a arranged between the two screw rotors 14, not shown in the drawings gear. By rotation of the two pumping elements 14, a medium is drawn in the direction of an arrow 16 through an inlet opening 18 and an ejection of the medium through an outlet opening 20 in the direction of an arrow 22.

Gemäß der in Fig. 1 dargestellten Ausführungsform, welche nicht in den Umfang der Ansprüche fällt, ist ein Elektromotor 24 in einem Teil 26 des Gehäuses angeordnet. Der Elektromotor 24 ist über seine Abtriebswelle 28 mit einer der beiden Pumpschrauben 14 verbunden.According to the in Fig. 1 illustrated embodiment, which does not fall within the scope of the claims, an electric motor 24 is disposed in a part 26 of the housing. The electric motor 24 is connected via its output shaft 28 with one of the two pump screws 14.

Zur Drehzahlregelung des Elektromotors 24 ist ein Frequenzumrichter 30 vorgesehen, der elektrisch mit dem Elektromotor 24 verbunden ist. Der Frequenzumrichter 30 ist in einem Frequenzumrichter-Gehäuse 32 (FU-Gehäuse) angeordnet. Das FU-Gehäuse 32 ist unmittelbar mit dem Pumpengehäuse 10 verbunden oder einstückig mit diesem ausgebildet.For speed control of the electric motor 24, a frequency converter 30 is provided, which is electrically connected to the electric motor 24. The frequency converter 30 is arranged in a frequency converter housing 32 (FU housing). The FU housing 32 is directly connected to the pump housing 10 or formed integrally therewith.

Zur Kühlung des Frequenzumrichters ist ein Luftkühler 34 sowie ein Flüssigkeitskühler 36 vorgesehen. Der Luftkühler 34 weist im dargestellten Ausführungsbeispiel ein Gebläse 38 auf. Das Gebläse 38 ist innerhalb des FU-Gehäuses 32 angeordnet und dient zum Umwälzen der Luft innerhalb des FU-Gehäuses. Hierbei ist die von dem Gebläse 38 erzeugte Luftströmung derart gelenkt, dass sie an dem Flüssigkeitskühler 36 entlang strömt. Im dargestellten Ausführungsbeispiel strömt die Luft an Kühlrippen 40 des Flüssigkeitskühlers 36 entlang. Die Kühlrippen 40 weisen ins Innere des FU-Gehäuses 32 bzw. in Richtung des Frequenzumrichters 30.For cooling the frequency converter, an air cooler 34 and a liquid cooler 36 is provided. The air cooler 34 has a fan 38 in the illustrated embodiment. The fan 38 is disposed within the FU housing 32 and serves to circulate the air within the FU housing. Here, the air flow generated by the blower 38 is directed so that it flows along the liquid cooler 36. In the illustrated embodiment, the air flows along cooling fins 40 of the liquid cooler 36. The cooling fins 40 point into the interior of the FU housing 32 or in the direction of the frequency converter 30.

Der Flüssigkeitskühler weist ein Kühlelement, wie eine Kühlplatte 42, auf, die im dargestellten Ausführungsbeispiel gleichzeitig eine Seitenwand des FU-Gehäuses 32 ausbildet. Mit der Kühlplatte 42 sind auf der Innenseite die Kühlrippen 40 verbunden. Innerhalb der Kühlplatte 42 ist insbesondere mäanderförmig eine Kühlschlange 44 angeordnet. Die Kühlschlange 44 ist mit Kühlmittelleitungen 46 verbunden. Diese sind zur Verdeutlichung lediglich als Ansätze in der Fig. 1 dargestellt. In bevorzugter Ausführungsform sind die Kühlmittelleitungen 46 mit den Flüssigkeitskühlsystem des Elektromotors 24 sowie auch der Vakuumpumpe selbst verbunden. Hierbei verlaufen die Kühlleitungen 46 vorzugsweise innerhalb des Gehäuses oder unmittelbar entlang der Gehäuseaußenwände.The liquid cooler has a cooling element, such as a cooling plate 42, which simultaneously forms a side wall of the FU housing 32 in the illustrated embodiment. With the cooling plate 42, the cooling fins 40 are connected on the inside. Within the cooling plate 42, in particular a meandering shape, a cooling coil 44 is arranged. The cooling coil 44 is connected to coolant lines 46. These are for clarity only as approaches in the Fig. 1 shown. In a preferred embodiment, the coolant lines 46 are connected to the liquid cooling system of the electric motor 24 as well as the vacuum pump itself. Here, the cooling lines 46 preferably extend within the housing or directly along the housing outer walls.

Der Frequenzumrichter 30 ist über Schwingungsdämpfer 48 an einer der Gehäusewände des FU-Gehäuses 32 gehalten.The frequency converter 30 is held on one of the housing walls of the FU housing 32 via vibration damper 48.

Bei der bevorzugten Ausführungsform der Erfindung (Fig. 2) sind identische oder ähnliche Bauteile mit denselben Bezugszeichen gekennzeichnet. Der wesentliche Unterschied zu der in Fig. 1 dargestellten Vakuumpumpe besteht darin, dass der Elektromotor 24 innerhalb des FU-Gehäuses 32 angeordnet ist. Ein gesondertes Kühlelement zur Ausgestaltung des Flüssigkeitskühlers für den Frequenzumrichter 30 kann somit entfallen. Der Motor 24 ist von einem Flüssigkeitskühler 50 umgeben. Dieser umschließt den Motor 24 vorzugsweise vollständig und weist nach außen gerichtete Kühlrippen 52 auf. Innerhalb des Flüssigkeitskühlers 50 ist eine spiralförmig angeordnete, den Elektromotor 24 umgebende Kühlschlange 54 angeordnet. Diese ist wiederum mit Kühlmittelleitungen 46 verbunden.In the preferred embodiment of the invention ( Fig. 2 ) are identical or similar components with the same reference numerals. The main difference to the in Fig. 1 illustrated vacuum pump is that the electric motor 24 is disposed within the FU housing 32. A separate cooling element for the design of the liquid cooler for the frequency converter 30 can thus be omitted. The motor 24 is surrounded by a liquid cooler 50. This preferably completely surrounds the motor 24 and has outwardly directed cooling ribs 52. Within the liquid cooler 50, a spirally arranged, the electric motor 24 surrounding cooling coil 54 is arranged. This is in turn connected to coolant lines 46.

Entsprechend der Ausführungsform der in Fig. 1 dargestellten Vakuumpumpe, welche nicht in den Umfang der Ansprüche fällt, ist innerhalb des FU-Gehäuses 32 ein Gebläse 38 angeordnet. Durch dieses erfolgt ein Umwälzen der Luft in dem FU-Gehäuse 32, wobei die Luft derart geführt ist, dass die Luft zur Kühlung an den Rippen 52 entlang strömt.According to the embodiment of in Fig. 1 illustrated vacuum pump, which does not fall within the scope of the claims, a fan 38 is disposed within the FU housing 32. This causes the air in the FU housing 32 to circulate, the air being guided in such a way that the air flows along the fins 52 for cooling.

Claims (14)

  1. A vacuum pump comprising
    a pump housing (10) forming a pumping chamber (12),
    at least one pumping element (14) arranged in the pumping chamber (12),
    an electric motor (24) for driving the at least one pumping element (14), and
    a frequency inverter (30) for changing the rotational speed of the motor, connected to the electric motor (24),
    characterized in that the frequency inverter (30) and the electric motor (24) are arranged in a frequency inverter housing (32) immediately connected to the pump housing (10), and
    an air cooler (34) and a liquid cooler (36, 50) are arranged in the frequency inverter housing (32) to cool the frequency inverter (30), and the liquid cooler (50) surrounds the electric motor (24) at least partly.
  2. The vacuum pump of claim 1, characterized in that the frequency inverter housing (32) and the pump housing (10) are formed integrally.
  3. The vacuum pump of claim 1 or 2, characterized in that the air cooler (34) comprises a blower (38) generating an air flow cooling the frequency inverter (30).
  4. The vacuum pump of claim 3, characterized in that the liquid cooler (36, 50) comprises a cooling element (40, 42, 44; 52, 54) arranged in the frequency inverter housing (32), along which element the air flow flows for cooling.
  5. The vacuum pump of claim 4, characterized in that the cooling element (40, 42, 44; 52, 54) has cooling ribs (40, 52) to increase the surface, which ribs are preferably directed towards the frequency inverter (30).
  6. The vacuum pump of one of claims 1-5, characterized in that the liquid cooler (36) comprises a cooling plate (42) preferably connected to a cooling coil (44) through which a coolant flows.
  7. The vacuum pump of claim 6 when referred to claim 5, characterized in that the cooling ribs (40) are directly connected to the cooling plate (42).
  8. The vacuum pump of claim 6 or 7, characterized in that the cooling plate (42) forms at least a part of a side wall of the frequency inverter housing (32).
  9. The vacuum pump of one of claims 1-8, characterized in that the liquid cooler (50) surrounds the electric motor (24) entirely.
  10. The vacuum pump of one of claims 1-9, characterized in that a cooling coil (54) is arranged in the liquid cooler (50), in particular in a helical manner, surrounding the electric motor (24).
  11. The vacuum pump of one of claims 1-10, characterized in that the liquid cooler (50) in particular has cooling ribs (52) directed radially outward.
  12. The vacuum pump of one of claims 1 - 11, characterized in that the liquid cooler (36) is integrated into the cooling circuit of the vacuum pump.
  13. The vacuum pump of one of claims 1-12, characterized in that the frequency inverter (30) and/or the frequency inverter housing (32) is/are supported by vibration damping elements (48).
  14. The vacuum pump of one of claims 1-13, characterized in that the frequency inverter housing (32) is connected in a thermally coupled manner to a liquid-cooled housing of the electric motor.
EP10723116.9A 2009-06-09 2010-06-07 Vacuum pump Active EP2440788B1 (en)

Applications Claiming Priority (2)

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DE102009024336A DE102009024336A1 (en) 2009-06-09 2009-06-09 vacuum pump
PCT/EP2010/057899 WO2010142631A2 (en) 2009-06-09 2010-06-07 Vacuum pump

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EP2440788A2 EP2440788A2 (en) 2012-04-18
EP2440788B1 true EP2440788B1 (en) 2017-01-18

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US (1) US9234519B2 (en)
EP (1) EP2440788B1 (en)
JP (1) JP5756097B2 (en)
KR (1) KR101740235B1 (en)
CN (1) CN102450115B (en)
DE (1) DE102009024336A1 (en)
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WO (1) WO2010142631A2 (en)

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EP2440788A2 (en) 2012-04-18
DE102009024336A1 (en) 2010-12-23
WO2010142631A2 (en) 2010-12-16
CN102450115A (en) 2012-05-09
US20120315165A1 (en) 2012-12-13
US9234519B2 (en) 2016-01-12
JP5756097B2 (en) 2015-07-29
CN102450115B (en) 2015-07-15
TW201104077A (en) 2011-02-01
WO2010142631A3 (en) 2011-07-28
KR101740235B1 (en) 2017-06-08
JP2012529590A (en) 2012-11-22
KR20120027052A (en) 2012-03-20

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