EP2412001A1 - Deuterium lamp - Google Patents

Deuterium lamp

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Publication number
EP2412001A1
EP2412001A1 EP10709392A EP10709392A EP2412001A1 EP 2412001 A1 EP2412001 A1 EP 2412001A1 EP 10709392 A EP10709392 A EP 10709392A EP 10709392 A EP10709392 A EP 10709392A EP 2412001 A1 EP2412001 A1 EP 2412001A1
Authority
EP
European Patent Office
Prior art keywords
gas
barrier layer
diffusion barrier
deuterium
deuterium lamp
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10709392A
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German (de)
French (fr)
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EP2412001B1 (en
Inventor
Thorsten Jenek
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Heraeus Noblelight GmbH
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Heraeus Noblelight GmbH
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Publication of EP2412001A1 publication Critical patent/EP2412001A1/en
Application granted granted Critical
Publication of EP2412001B1 publication Critical patent/EP2412001B1/en
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/68—Lamps in which the main discharge is between parts of a current-carrying guide, e.g. halo lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings

Definitions

  • the invention relates to a deuterium lamp with a lamp base, which has electrode passages, with a piston made of glass and with a housing structure comprising anode, cathode and aperture, wherein at least a part of the piston forms a jet exit surface and wherein lamp base and piston enclose a gas space.
  • the inside of the quartz glass bulb is either unprotected or a coating of boron oxide is applied.
  • the boron oxide diffuses into the quartz glass surface and combines in a chemical reaction with the near-surface layer of the quartz glass.
  • the boron oxide coating has the consequence that the quartz glass surface becomes more chemically resistant.
  • the quartz glass surface is thus better protected from reactions with paste material from the cathode, which occurs during operation of the lamp the piston inside precipitates.
  • the paste material of the cathode contains Ba, Sr and / or Ca.
  • Mercury low pressure or amalgam lamps are known to have an aluminum phosphoric oxide coating which protects the quartz glass surface of the radiator from chemical attack by mercury ions.
  • the mercury ions react with the quartz glass to form mercury oxide, which has a strongly absorbing effect and reduces the intensity of the radiator (DE102004038556 A1).
  • Thin layers are also known from EP0290669 B1, EP0407548 B1, EP1043755 B1, EP1282153 A1.
  • the invention has for its object to reduce gas consumption and to improve the life of deuterium lamps.
  • the piston has a gas diffusion barrier layer on its surface facing the gas chamber, at least at the jet exit surface, the gas diffusion and thus the gas consumption are significantly reduced compared to known techniques.
  • the gas diffusion barrier layer is preferably formed from aluminum-oxide, preferably from amorphous aluminum oxide, since amorphous aluminum oxide is considerably more compact than quartz glass.
  • the gas diffusion barrier layer has a thickness of 10 nm to 10 .mu.m, preferably from 20 nm to 200 nm.
  • the layer thickness can be generated either by a 1-fold layer or by several coating operations.
  • the gas diffusion barrier Layer is preferably optically transparent at a wavelength between 160 nm and 1100 nm.
  • the gas diffusion barrier layer can be arranged on the entire surface of the piston facing the gas chamber.
  • the bulb of the deuterium lamp is preferably formed of quartz glass or borosilicate glass, wherein the advantage of the diffusion barrier layer is particularly evident.
  • the alumina can be applied by PVD, CVD or sol-gel methods.
  • the sol-gel can be sprayed, dipped or applied by pulling a core that acts like a round putty.
  • the layer is preferably applied in a sol-gel immersion process in order to achieve a uniform layer quality.
  • the layer for 1 to 24 hours at temperatures between 30 0 C and 200 0 C dried.
  • the gas diffusion barrier layer at temperatures between 400 0 C and 1400 ° C, preferably between 600 0 C and 1200 0 C, baked between 1 and 24 hours in order to achieve a good barrier effect.
  • Fig. 2 shows a detail of the coated lamp envelope
  • Fig. 3 shows the time course of the gas pressure
  • the deuterium lamp shown in Fig. 1 is based on a foot 1 made of quartz glass with electrical cathode feedthrough 2, electrical mass feedthrough 3 and electrical anode feedthrough 4. In the electrical feedthroughs 2, 3, 4 molybdenum foils 5 are used, which provide a gas-tight seal.
  • the housing structure 11 of the deuterium lamp is additionally supported by the front retaining pin 6 and the rear retaining pin 7 in order to increase the mechanical stability.
  • the housing assembly 11 includes the cathode 14, the anode 12 and the aperture 15, which are spaced apart in the housing structure 11.
  • the cathode 14 is isolated from the housing assembly 11 by the cathode insulation 8.
  • the housing structure 11 is surrounded by a gas volume 9.
  • the gas is preferably Hydrogen or deuterium. Housing structure 1 1 and gas volume 9 are enclosed by the piston 10 made of quartz glass and the foot 1 gas-tight.
  • deuterium Due to its small atomic radius, deuterium is able to diffuse into the quartz glass structure.
  • the deuterium diffuses predominantly on interstitial sites and is thus interstitially bound in the structure.
  • the chemical bond to form SiD is also possible, but quantitatively negligible.
  • the diffusion rate is significantly lower.
  • This diffusion process is accelerated by surface activation of the quartz glass by hard UV radiation generated by the deuterium plasma.
  • the diffusion at the quartz glass surface in the region of the beam exit is therefore particularly high.
  • the diffusion process described here results in that the filling pressure of the lamp continuously decreases during operation.
  • the arc discharge necessary for the operation of the lamp can only be maintained up to a certain minimum pressure. If this pressure is exceeded by gas consumption, no arc discharge is possible and the lamp is unusable. The gas consumption thus determines the life of the lamp.
  • a Gasdiffusionsbarrie für 13 is applied from amorphous alumina.
  • crystalline alumina is also conceivable.
  • the gas diffusion barrier layer 13 is shown in FIG. 2 and is applied to the entire inner surface of the piston 10.
  • the gas diffusion barrier layer 13 was applied by 2-fold coating in the sol-gel immersion method. After each individual coating, it was dried at 100 ° C. for 12 hours and baked at 900 ° C. for 12 hours. The resulting gas diffusion barrier layer 13 has a thickness of 100 nm in total. It is optically transparent in the range between 160 nm and 1100 nm.
  • Amorphous alumina is much more compact than the structure of quartz glass and therefore significantly reduces deuterium diffusion.
  • the reduction of gas consumption is shown in FIG.
  • Curve A shows the course of a lamp without gas diffusion barrier layer
  • curve B the course with the gas diffusion barrier layer according to the invention.
  • the reduced gas loss allows a much longer service life of the deuterium lamp until reaching the critical filling pressure.
  • the reduced gas loss also improves the intensity profile of the deuterium lamp, since the UV intensity of a deuterium lamp depends on the particle density of the filling gas and thus depends on the filling pressure.
  • the particle density is related to the number of ionized deuterium molecules, which in turn directly determines the number of photons generated and thus the UV intensity.
  • the optimum filling pressure of a deuterium lamp is about 5 mbar, depending on the geometry. A critical pressure of about 1 mbar should not be undercut.
  • FIG 4 shows the intensity profile of a deuterium lamp without gas diffusion barrier layer (curve A) and with the gas diffusion barrier layer according to the invention (curve B).

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  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

The invention relates to a deuterium lamp having a lamp base (1) comprising electrode penetrations (2, 3, 4), having a bulb (10) made of glass and having a housing assembly (11) comprising an anode (12), cathode (14), and baffle (15), wherein at least one part of the bulb forms a beam discharge surface, and wherein the lamp base and bulb enclose a gas compartment (9). According to the invention, the piston comprises a gas diffusion barrier layer (13) on the surface facing away from the gas compartment at least at the beam discharge surface.

Description

Deuteriumlampe deuterium lamp
Die Erfindung betrifft eine Deuteriumlampe mit einem Lampenfuß, der Elektrodendurchführungen aufweist, mit einem Kolben aus Glas und mit einem Gehäuseaufbau, der Anode, Kathode und Blende umfasst, wobei mindestens ein Teil des Kolbens eine Strahlaustrittsfläche bildet und wobei Lampenfuß und Kolben einen Gasraum umschließen.The invention relates to a deuterium lamp with a lamp base, which has electrode passages, with a piston made of glass and with a housing structure comprising anode, cathode and aperture, wherein at least a part of the piston forms a jet exit surface and wherein lamp base and piston enclose a gas space.
Alle derzeitigen Deuteriumlampen leiden unter einer sogenannten Gasaufzehrung. Dabei diffundiert im Betrieb der Lampe die Gasfüllung unter anderem in den Quarzglaskolben hinein, vorwiegend auf Zwischengitterplätze und ist so interstitiell in der Struktur gebunden. Aufgrund des kleinen Atomradius von Deuterium ist die Diffusionsrate für Deuterium deutlich höher, als für die wesentlich größeren Edelgase, wie z.B. Neon oder Xenon. Dieser Diffusionsprozess wird durch Oberflächenaktivierung des Quarzglases durch harte UV-Strahlung, die durch das Deuteriumplasma erzeugt wird, noch beschleunigt. Die Diffusion an der Quarzglasoberfläche im Bereich des Strahlaustritts ist deshalb besonders hoch. Der hier beschriebene Diffusionsprozess führt dazu, dass der Fülldruck der Lampe im Betrieb kontinuierlich abnimmt. Die für den Betrieb der Lampe notwendige Bogenentladung lässt sich nur bis zum einem gewissen Minimaldruck aufrecht erhalten. Wird dieser Druck durch Gasaufzehrung unterschritten, verliert die Lampe drastisch an Intensität und ist unbrauchbar. Die Gasaufzehrung bestimmt also die Lebensdauer der Lampe.All current Deuterium lamps suffer from a so-called gas consumption. During operation of the lamp, the gas filling diffuses among other things into the quartz glass bulb, predominantly to interstitial spaces, and is thus interstitially bound in the structure. Due to the small atomic radius of deuterium, the diffusion rate for deuterium is significantly higher than for the much larger noble gases, e.g. Neon or xenon. This diffusion process is accelerated by surface activation of the quartz glass by hard UV radiation generated by the deuterium plasma. The diffusion at the quartz glass surface in the region of the beam exit is therefore particularly high. The diffusion process described here results in that the filling pressure of the lamp continuously decreases during operation. The arc discharge necessary for the operation of the lamp can only be maintained up to a certain minimum pressure. If this pressure is undershot by gas consumption, the lamp drastically loses intensity and is useless. The gas consumption thus determines the life of the lamp.
Bei den derzeitig verwendeten Deuteriumlampen ist die Innenseite des Quarzglaskolbens entweder ungeschützt oder es wird eine Beschichtung aus Boroxid aufgebracht. Das Boroxid diffundiert in die Quarzglasoberfläche hinein und verbindet sich in einer chemischen Reaktion mit der oberflächennahen Schicht des Quarzglases. Die Boroxidbeschichtung hat zur Folge, dass die Quarzglasoberfläche chemisch resistenter wird. Die Quarzglasoberfläche wird so besser vor Reaktionen mit Pastenmaterial von der Kathode geschützt, das sich im Betrieb der Lampe auf der Kolbeninnenseite niederschlägt. Das Pastenmaterial der Kathode enthält Ba, Sr und/oder Ca. Diese Elemente reagieren unter den Betriebsbedingungen der Deuteriumlampe mit der Quarzglasoberfläche und führen so zu kontinuierlichem Intensitätsverlust durch optische Absorption der Reaktionsprodukte. Der Intensitätsverlust ist also auf chemische Reaktionen zurückzuführen. Der Gasverlust der Lampe wird durch die Boroxidbeschichtung kaum beeinflusst. (DE3713704 A1 , EP0287706 B1 ).In the deuterium lamps currently in use, the inside of the quartz glass bulb is either unprotected or a coating of boron oxide is applied. The boron oxide diffuses into the quartz glass surface and combines in a chemical reaction with the near-surface layer of the quartz glass. The boron oxide coating has the consequence that the quartz glass surface becomes more chemically resistant. The quartz glass surface is thus better protected from reactions with paste material from the cathode, which occurs during operation of the lamp the piston inside precipitates. The paste material of the cathode contains Ba, Sr and / or Ca. These elements react under the operating conditions of the deuterium lamp with the quartz glass surface and thus lead to a continuous loss of intensity by optical absorption of the reaction products. The loss of intensity is therefore due to chemical reactions. The gas loss of the lamp is hardly affected by the Boroxidbeschichtung. (DE3713704 A1, EP0287706 B1).
Von Quecksilberniederdruck- oder Amalgamlampen ist eine Aluminiumphosphoroxid- Beschichtung bekannt, die die Quarzglasoberfläche des Strahlers vor chemischem Angriff durch Quecksilberionen schützt. Die Quecksilberionen reagieren mit dem Quarzglas zu Quecksilberoxid, das stark absorbierend wirkt und die Intensität des Strahlers verringert (DE102004038556 A1). Dünne Schichten sind auch aus EP0290669 B1 , EP0407548 B1 , EP1043755 B1 , EP1282153 A1 bekannt.Mercury low pressure or amalgam lamps are known to have an aluminum phosphoric oxide coating which protects the quartz glass surface of the radiator from chemical attack by mercury ions. The mercury ions react with the quartz glass to form mercury oxide, which has a strongly absorbing effect and reduces the intensity of the radiator (DE102004038556 A1). Thin layers are also known from EP0290669 B1, EP0407548 B1, EP1043755 B1, EP1282153 A1.
Von Xe-Halogenid Excimerlampen ist eine Aiuminiumoxidschicht bekannt, die die Quarzglasoberfläche des Strahlers vor chemischem Angriff der Halogenide schützt. Die Halogenide, die für die UV-Emission verantwortlich sind, reagieren stark mit der Quarzglasoberfläche, so dass bereits nach wenigen Minuten die Halogenide chemisch im Quarzglas gebunden sind. Auch hier wird die chemische Resistenz von Aluminiumoxid ausgenutzt (DE10137015 A1 , ähnlich CH672380 A5).Of Xe-halide excimer lamps, an Aiuminiumoxidschicht is known, which protects the quartz glass surface of the radiator against chemical attack of the halides. The halides, which are responsible for the UV emission, react strongly with the quartz glass surface, so that after a few minutes, the halides are chemically bound in the quartz glass. Again, the chemical resistance of alumina is exploited (DE10137015 A1, similar to CH672380 A5).
Der Erfindung liegt die Aufgabe zugrunde, die Gasaufzehrung zu verringern und die Lebensdauer der Deuteriumlampen zu verbessern.The invention has for its object to reduce gas consumption and to improve the life of deuterium lamps.
Die Aufgabe wird durch die Merkmale des Anspruchs 1 gelöst. Vorteilhafte Ausgestaltungen sind in den abhängigen Ansprüchen angegeben. Dadurch, dass der Kolben an seiner dem Gasraum zugewandten Oberfläche mindestens an der Strahlaustrittsfläche eine Gasdiffusionsbar- riereschicht aufweist, verringert sich die Gasdiffusion und damit die Gasaufzehrung gegenüber bekannten Techniken signifikant. Vorzugsweise ist die Gasdiffusionsbarriereschicht aus AIu- miuniumoxid, vorzugsweise aus amorphem Aluminiumoxid, gebildet, da amorphes Aluminiumoxid wesentlich kompakter ist als Quarzglas.The object is solved by the features of claim 1. Advantageous embodiments are specified in the dependent claims. Because the piston has a gas diffusion barrier layer on its surface facing the gas chamber, at least at the jet exit surface, the gas diffusion and thus the gas consumption are significantly reduced compared to known techniques. The gas diffusion barrier layer is preferably formed from aluminum-oxide, preferably from amorphous aluminum oxide, since amorphous aluminum oxide is considerably more compact than quartz glass.
Zweckmäßig ist es, dass die Gasdiffusionsbarriereschicht eine Dicke von 10 nm bis 10 μm, vorzugsweise von 20 nm bis 200 nm, aufweist. Die Schichtdicke kann entweder durch eine 1-fach Schicht oder durch mehrere Beschichtungsvorgänge erzeugt werden. Die Gasdiffusionsbarrie- reschicht ist vorzugsweise optisch transparent bei einer Wellenlänge zwischen 160 nm und 1100 nm.It is expedient that the gas diffusion barrier layer has a thickness of 10 nm to 10 .mu.m, preferably from 20 nm to 200 nm. The layer thickness can be generated either by a 1-fold layer or by several coating operations. The gas diffusion barrier Layer is preferably optically transparent at a wavelength between 160 nm and 1100 nm.
Die Gasdiffusionsbarriereschicht kann auf der gesamten dem Gasraum zugewandten Oberfläche des Kolbens angeordnet sein. Der Kolben der Deuteriumlampe ist vorzugsweise aus Quarzglas oder Borosilikatglas gebildet, wobei sich der Vorteil der Diffusionsbarriereschicht besonders deutlich zeigt.The gas diffusion barrier layer can be arranged on the entire surface of the piston facing the gas chamber. The bulb of the deuterium lamp is preferably formed of quartz glass or borosilicate glass, wherein the advantage of the diffusion barrier layer is particularly evident.
Das Aluminiumoxid kann über PVD, CVD oder Sol-Gel-Verfahren aufgebracht werden. Beim Sol-Gel-Verfahren kann das SoI-GeI gesprüht, getaucht oder durch das Ziehen eines Kerns, der wie ein Rundspachtel wirkt, aufgebracht werden. Bevorzugt wird die Schicht im SoI-GeI- Tauchverfahren aufgebracht, um eine gleichmäßige Schichtqualität zu erreichen. Im Anschluss wird die Schicht für 1 bis 24 Stunden bei Temperaturen zwischen 300C und 2000C getrocknet. Abschließend wird die Gasdiffusionsbarriereschicht bei Temperaturen zwischen 4000C und 1400°C, vorzugsweise zwischen 6000C und 12000C, zwischen 1 und 24 Stunden eingebrannt, um eine gute Barrierewirkung zu erzielen.The alumina can be applied by PVD, CVD or sol-gel methods. In the sol-gel process, the sol-gel can be sprayed, dipped or applied by pulling a core that acts like a round putty. The layer is preferably applied in a sol-gel immersion process in order to achieve a uniform layer quality. Subsequently, the layer for 1 to 24 hours at temperatures between 30 0 C and 200 0 C dried. Finally, the gas diffusion barrier layer at temperatures between 400 0 C and 1400 ° C, preferably between 600 0 C and 1200 0 C, baked between 1 and 24 hours in order to achieve a good barrier effect.
Nachfolgend wird ein Ausführungsbeispiel der Erfindung anhand einer Zeichnung beschrieben.Hereinafter, an embodiment of the invention will be described with reference to a drawing.
In der Zeichnung zeigtIn the drawing shows
Fig.1 eine Deuteriumlampe mit erfindungsgemäßer Schicht1 shows a deuterium lamp with layer according to the invention
Fig. 2 einen Ausschnitt aus dem beschichteten LampenkolbenFig. 2 shows a detail of the coated lamp envelope
Fig. 3 den zeitlichen Verlauf des Gasdrucks undFig. 3 shows the time course of the gas pressure and
Fig. 4 den zeitlichen Intensitätsverlauf.4 shows the temporal intensity profile.
Die in Fig. 1 dargestellte Deuteriumlampe basiert auf einem Fuß 1 aus Quarzglas mit elektrischer Kathodendurchführung 2, elektrischer Massendurchführung 3 und elektrischer Anodendurchführung 4. In die elektrischen Durchführungen 2;3;4 sind Molybdänfolien 5 einsetzt, die für einen gasdichten Abschluss sorgen. Der Gehäuseaufbau 11 der Deuteriumlampe wird zusätzlich durch den vorderen Haltestift 6 und den hinteren Haltestift 7 gestützt, um die mechanische Stabilität zu erhöhen. Der Gehäuseaufbau 11 beinhaltet die Kathode 14, die Anode 12 und die Blende 15, die im Gehäuseaufbau 11 beabstandet zueinander angeordnet sind. Die Kathode 14 wird durch die Kathodenisolierung 8 von dem Gehäuseaufbau 11 isoliert. Der Gehäuseaufbau 11 ist von einem Gasvolumen 9 umgeben. Bei dem Gas handelt es sich vorzugsweise um Wasserstoff oder Deuterium. Gehäuseaufbau 1 1 und Gasvolumen 9 werden durch den Kolben 10 aus Quarzglas und den Fuss 1 gasdicht eingeschlossen.The deuterium lamp shown in Fig. 1 is based on a foot 1 made of quartz glass with electrical cathode feedthrough 2, electrical mass feedthrough 3 and electrical anode feedthrough 4. In the electrical feedthroughs 2, 3, 4 molybdenum foils 5 are used, which provide a gas-tight seal. The housing structure 11 of the deuterium lamp is additionally supported by the front retaining pin 6 and the rear retaining pin 7 in order to increase the mechanical stability. The housing assembly 11 includes the cathode 14, the anode 12 and the aperture 15, which are spaced apart in the housing structure 11. The cathode 14 is isolated from the housing assembly 11 by the cathode insulation 8. The housing structure 11 is surrounded by a gas volume 9. The gas is preferably Hydrogen or deuterium. Housing structure 1 1 and gas volume 9 are enclosed by the piston 10 made of quartz glass and the foot 1 gas-tight.
Aufgrund seines kleinen Atomradius ist Deuterium in der Lage, in die Quarzglasstruktur hinein zu diffundieren. Dabei diffundiert das Deuterium vorwiegend auf Zwischengitterplätze und ist so interstitiell in der Struktur gebunden. Die chemische Bindung unter Bildung von SiD ist auch möglich, quantitativ aber vernachlässigbar. Bei den wesentlich größeren Edelgasen (z.B. Neon, Xenon) ist die Diffusionsrate deutlich niedriger. Dieser Diffusionsprozess wird durch Oberflächenaktivierung des Quarzglases durch harte UV-Strahlung, die durch das Deuteriumplasma erzeugt wird, noch beschleunigt. Die Diffusion an der Quarzglasoberfläche im Bereich des Strahlaustritts ist deshalb besonders hoch. Der hier beschriebene Diffusionsprozess führt dazu, dass der Fülldruck der Lampe im Betrieb kontinuierlich abnimmt. Die für den Betrieb der Lampe notwendige Bogenentladung lässt sich nur bis zum einem gewissen Minimaldruck aufrecht erhalten. Wird dieser Druck durch Gasaufzehrung unterschritten, ist keine Bogenentladung mehr möglich und die Lampe ist unbrauchbar. Die Gasaufzehrung bestimmt also die Lebensdauer der Lampe.Due to its small atomic radius, deuterium is able to diffuse into the quartz glass structure. The deuterium diffuses predominantly on interstitial sites and is thus interstitially bound in the structure. The chemical bond to form SiD is also possible, but quantitatively negligible. For the much larger noble gases (e.g., neon, xenon), the diffusion rate is significantly lower. This diffusion process is accelerated by surface activation of the quartz glass by hard UV radiation generated by the deuterium plasma. The diffusion at the quartz glass surface in the region of the beam exit is therefore particularly high. The diffusion process described here results in that the filling pressure of the lamp continuously decreases during operation. The arc discharge necessary for the operation of the lamp can only be maintained up to a certain minimum pressure. If this pressure is exceeded by gas consumption, no arc discharge is possible and the lamp is unusable. The gas consumption thus determines the life of the lamp.
Auf der Innenseite des Kolbens 10 ist deshalb eine Gasdiffusionsbarrieschicht 13 aus amorphem Aluminiumoxid aufgebracht. Kristallines Aluminiumoxid ist aber ebenfalls denkbar. Die Gasdiffusionsbarriereschicht 13 ist in Fig. 2 dargestellt und ist auf der gesamten Innenfläche des Kolbens 10 aufgebracht.On the inside of the piston 10, therefore, a Gasdiffusionsbarrieschicht 13 is applied from amorphous alumina. However, crystalline alumina is also conceivable. The gas diffusion barrier layer 13 is shown in FIG. 2 and is applied to the entire inner surface of the piston 10.
Die Gasdiffusionsbarriereschicht 13 wurde durch 2fache Beschichtung im SoI-GeI- Tauchverfahren aufgebracht. Nach jeder einzelnen Beschichtung wurde 12 Stunden lang bei 100 0C getrocknet und 12 Stunden lang bei 9000C eingebrannt. Die entstandene Gasdiffusionbarriereschicht 13 weist eine Dicke von insgesamt 100 nm auf. Sie ist optisch transparent im Bereich zwischen 160 nm und 1100 nm.The gas diffusion barrier layer 13 was applied by 2-fold coating in the sol-gel immersion method. After each individual coating, it was dried at 100 ° C. for 12 hours and baked at 900 ° C. for 12 hours. The resulting gas diffusion barrier layer 13 has a thickness of 100 nm in total. It is optically transparent in the range between 160 nm and 1100 nm.
Amorphes Aluminiumoxid ist wesentlich kompakter als die Struktur des Quarzglases und verringert deshalb die Deuteriumdiffusion deutlich. Die Reduzierung der Gasaufzehrung ist in Fig. 3 dargestellt. Kurve A zeigt den Verlauf einer Lampe ohne Gasdiffusionsbarriereschicht, Kurve B den Verlauf mit der erfindungsgemäßen Gasdiffusionsbarriereschicht. Der verringerte Gasverlust ermöglicht eine wesentlich längere Betriebsdauer der Deuteriumlampe bis zum Erreichen des kritischen Fülldrucks.Amorphous alumina is much more compact than the structure of quartz glass and therefore significantly reduces deuterium diffusion. The reduction of gas consumption is shown in FIG. Curve A shows the course of a lamp without gas diffusion barrier layer, curve B the course with the gas diffusion barrier layer according to the invention. The reduced gas loss allows a much longer service life of the deuterium lamp until reaching the critical filling pressure.
Durch den verringerten Gasverlust verbessert sich auch der Intensitätsverlauf der Deuteriumlampe, da die UV-Intensität einer Deuteriumlampe von der Teilchendichte des Füllgases und somit vom Fülldruck abhängig ist. Die Teilchendichte steht in Beziehung mit der Anzahl an ionisierten Deuteriummolekülen, die wiederum direkt die Anzahl der erzeugten Photonen und somit die UV-Intensität bestimmt. Es gibt hierbei einen optimalen Fülldruck, bei dem ein Maximum an UV-Intensität emittiert wird. Wird dieser optimale Fülldruck unterschritten, sinkt die UV-Intensität kontinuierlich bis zum Erlöschen der Bogenentladung. Der optimale Fülldruck einer Deuteriumlampe liegt abhängig von der Geometrie bei etwa 5 mbar. Ein kritischer Druck von etwa 1 mbar sollte nicht unterschritten werden.The reduced gas loss also improves the intensity profile of the deuterium lamp, since the UV intensity of a deuterium lamp depends on the particle density of the filling gas and thus depends on the filling pressure. The particle density is related to the number of ionized deuterium molecules, which in turn directly determines the number of photons generated and thus the UV intensity. There is an optimal filling pressure at which a maximum of UV intensity is emitted. If this optimum filling pressure is undercut, the UV intensity decreases continuously until the arc discharge ceases. The optimum filling pressure of a deuterium lamp is about 5 mbar, depending on the geometry. A critical pressure of about 1 mbar should not be undercut.
Fig. 4 zeigt den Intensitätsverlauf einer Deuteriumlampe ohne Gasdiffusionsbarriereschicht (Kurve A) und mit der erfindungsgemäßen Gasdiffusionsbarriereschicht (Kurve B). 4 shows the intensity profile of a deuterium lamp without gas diffusion barrier layer (curve A) and with the gas diffusion barrier layer according to the invention (curve B).

Claims

Patentansprüche claims
1. Deuteriumlampe mit einem Lampenfuß, der Elektrodendurchführungen aufweist, mit einem Kolben aus Glas und mit einem Gehäuseaufbau, der Anode, Kathode und Blende umfasst, wobei mindestens ein Teil des Kolbens eine Strahlaustrittsfläche bildet und wobei Lampenfuß und Kolben einen Gasraum umschließen, dadurch gekennzeichnet, dass der Kolben an seiner dem Gasraum zugewandten Oberfläche mindestens an der Strahlaustrittsfläche eine Gasdiffusionsbarriereschicht aufweist.A deuterium lamp comprising a lamp base having electrode passages comprising a glass bulb and a housing structure comprising anode, cathode and baffle, wherein at least a portion of the bulb forms a beam exit surface and wherein the lamp base and piston surround a gas space, characterized the piston has a gas diffusion barrier layer on its surface facing the gas chamber at least at the jet outlet surface.
2. Deuteriumlampe nach Anspruch 1 , dadurch gekennzeichnet, dass die Gasdiffusionsbarriereschicht aus Alumiuniumoxid, vorzugsweise aus amorphem Aluminiumoxid, gebildet ist.2. Deuterium lamp according to claim 1, characterized in that the gas diffusion barrier layer of Alumiuniumoxid, preferably of amorphous alumina, is formed.
3. Deuteriumlampe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Gasdiffusionsbarriereschicht eine Dicke von 10 nm bis 10 μm, vorzugsweise von 20 nm bis 200 nm, aufweist.3. Deuterium lamp according to claim 1 or 2, characterized in that the gas diffusion barrier layer has a thickness of 10 nm to 10 microns, preferably from 20 nm to 200 nm.
4. Deuteriumlampe nach mindestens einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Gasdiffusionsbarriereschicht auf der gesamten dem Gasraum zugewandten Oberfläche des Kolbens angeordnet ist.4. deuterium lamp according to at least one of claims 1 to 3, characterized in that the gas diffusion barrier layer is arranged on the entire surface of the gas chamber facing the piston.
5. Deuteriumlampe nach mindestens einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Gasdiffusionsbarriereschicht transparent ist für Strahlung einer Wellenlänge im Bereich von 160 nm bis 1100 nm.5. deuterium lamp according to at least one of claims 1 to 4, characterized in that the gas diffusion barrier layer is transparent to radiation of a wavelength in the range of 160 nm to 1100 nm.
6. Deuteriumlampe nach mindestens einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass der Kolben aus Quarzglas oder Borosilikatglas gebildet ist. 6. Deuterium lamp according to at least one of claims 1 to 5, characterized in that the piston is formed of quartz glass or borosilicate glass.
EP10709392.4A 2009-03-26 2010-02-25 Deuterium lamp Active EP2412001B1 (en)

Applications Claiming Priority (2)

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DE102009014425A DE102009014425B4 (en) 2009-03-26 2009-03-26 deuterium lamp
PCT/EP2010/001157 WO2010108581A1 (en) 2009-03-26 2010-02-25 Deuterium lamp

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EP2412001A1 true EP2412001A1 (en) 2012-02-01
EP2412001B1 EP2412001B1 (en) 2014-12-17

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KR (1) KR101553734B1 (en)
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DE (1) DE102009014425B4 (en)
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KR20120001725A (en) 2012-01-04
CN102365706B (en) 2016-03-16
DE102009014425A1 (en) 2010-10-21
AU2010227909B2 (en) 2014-05-01
EP2412001B1 (en) 2014-12-17
CN102365706A (en) 2012-02-29
SG174121A1 (en) 2011-10-28
WO2010108581A1 (en) 2010-09-30
US20110285282A1 (en) 2011-11-24
DE102009014425B4 (en) 2011-02-03
JP5362098B2 (en) 2013-12-11
JP2012521621A (en) 2012-09-13
KR101553734B1 (en) 2015-09-16
AU2010227909A1 (en) 2011-09-01

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