EP2378063A2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2378063A2
EP2378063A2 EP11002484A EP11002484A EP2378063A2 EP 2378063 A2 EP2378063 A2 EP 2378063A2 EP 11002484 A EP11002484 A EP 11002484A EP 11002484 A EP11002484 A EP 11002484A EP 2378063 A2 EP2378063 A2 EP 2378063A2
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EP
European Patent Office
Prior art keywords
pump
screw
rotary piston
rotary
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11002484A
Other languages
German (de)
French (fr)
Other versions
EP2378063A3 (en
Inventor
Gerhard Baratti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baratti Engineering GmbH
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Baratti Engineering GmbH
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Filing date
Publication date
Application filed by Baratti Engineering GmbH filed Critical Baratti Engineering GmbH
Publication of EP2378063A2 publication Critical patent/EP2378063A2/en
Publication of EP2378063A3 publication Critical patent/EP2378063A3/en
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F04C28/265—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels being obtained by displacing a lateral sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts

Definitions

  • the invention relates to a vacuum pump according to the preamble of claim 1.
  • the invention has for its object to provide a vacuum pump of the aforementioned kind, by means of which with little technical effort, a high vacuum with high efficiency can be achieved.
  • the basic idea of the vacuum pump according to the invention consists in the fact that only a single housing is provided, in which two shafts are mounted. On these two shafts, one behind the other are the rotary lobe pump and, secondly, the screw pump. This means that the two waves are shared for both pump types in a series connection. However, it does not necessarily have to be a continuous wave. The waves can also be divided into two, but coaxially fixed to each other. At one end of the shaft system is the corresponding rotary piston of the rotary lobe pump and at the other end the screw of the screw pump.
  • the pressure relief valve according to the embodiment in claim 4 is a bypass valve, which returns the air of the rotary piston pump.
  • the vacuum pump has a housing 1.
  • This housing 1 has an air inlet 2 at one end and an air outlet 3 at the other end.
  • a rotary piston pump 4 with two rotary pistons 4 ', 4 " is provided on associated shafts 5', 5" in the housing 1. Between the two shafts 5 ', 5 "is a transmission. 7
  • a screw pump 6 with screws 6 ', 6 "adjoins the rotary piston pump 4.
  • These screws 6', 6" are arranged on the same shaft 5 ', 5 “as the rotary piston pump 4.
  • the two shafts 5 ', 5 but not continuously, but in two parts, but coaxially and rotationally connected to each other.
  • the screw pump 6 on the input side has a greater pitch per revolution than on the output side.
  • the slope can either decrease continuously to the output side, or in the region of the input side and / or in the region of the output side, the slope is constant in each case.
  • a bypass valve 8 is still arranged between the rotary piston pump 4 and the screw pump 6.
  • the rotary lobe pump 4 which is characterized by a high pumping speed, sucks in the air via the air inlet 2 and supplies it to the screw pump 6, which is characterized by a high compressibility. The air then exits through the air outlet 3 from the housing 1. The entire flow is in the FIGS. 2 and 3 indicated by the arrows.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The vacuum pump has a rotary piston pump (4) and a rotary screw pump (6) in the flow direction of the air. Two parallel shafts (5',5'') are provided in a common housing (1) for both pumps. The rotary piston (4') of the rotary piston pump and a screw (6') of the screw pump are arranged on the shaft and another rotary piston (4'') of the rotary piston pump and another screw (6'') of the screw pump are arranged on the pump.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des Anspruchs 1.The invention relates to a vacuum pump according to the preamble of claim 1.

Es gibt die unterschiedlichsten Typen von Vakuumpumpen. So gibt es zunächst die sogenannten Drehkolbenpumpen. Bei diesen sind auf zwei zueinander parallelen Wellen Drehkolben angeordnet. Diese Drehkolbenpumpen zeichnen sich durch ein hohes Saugvermögen aus. Weiterhin gibt es die sogenannten Schraubenpumpen. Bei ihnen sind auf zwei zueinander parallelen Wellen wendelförmige Schrauben angeordnet, welche ineinandergreifen. Diese Schraubenpumpen zeichnen sich durch ein hohes Kompressionsvermögen aus.There are many different types of vacuum pumps. So there are first the so-called rotary lobe pumps. In these rotary pistons are arranged on two parallel shafts. These rotary lobe pumps are characterized by a high pumping speed. Furthermore, there are the so-called screw pumps. In them helical screws are arranged on two parallel waves, which mesh. These screw pumps are characterized by a high compression capacity.

Das Problem bei den vorbeschriebenen Drehkolbenpumpen sowie Schraubenpumpen besteht darin, daß der Vorteil der einen Pumpe der Nachteil der anderen Pumpe ist und daß - umgekehrt - der Nachteil der einen Pumpe der Vorteil der anderen Pumpe ist. Um ein hohes Vakuum erzielen zu können, werden daher diese beiden Pumpentypen hintereinander geschaltet, und zwar als völlig voneinander separate Pumpen. Der Nachteil liegt dabei in dem großen technischen Aufwand.The problem with the above-described rotary lobe pumps and screw pumps is that the advantage of a pump is the disadvantage of the other pump and that - vice versa - the disadvantage of a pump is the advantage of the other pump. In order to achieve a high vacuum, therefore, these two types of pumps are connected in series, as completely separate pumps. The disadvantage lies in the great technical effort.

Davon ausgehend liegt der Erfindung die Aufgabe zugrunde, eine Vakuumpumpe der eingangs angegebenen Art zu schaffen, mittels welcher mit geringem technischem Aufwand ein hohes Vakuum mit hohem Wirkungsgrad erreicht werden kann.On this basis the invention has for its object to provide a vacuum pump of the aforementioned kind, by means of which with little technical effort, a high vacuum with high efficiency can be achieved.

Die technische Lösung ist gekennzeichnet durch die Merkmale im Kennzeichen des Anspruchs 1.The technical solution is characterized by the features in the characterizing part of claim 1.

Dadurch ist eine Vakuumpumpe in der Kombination Drehkolbenpumpe/Schraubenpumpe geschaffen, welche sich durch einen vergleichsweise geringen technischen Aufwand realisieren läßt. Die Grundidee der erfindungsgemäßen Vakuumpumpe besteht dabei darin, daß nur ein einziges Gehäuse vorgesehen ist, in welchem zwei Wellen gelagert sind. Auf diesen beiden Wellen befinden sich hintereinander zum einen die Drehkolbenpumpe und zum anderen die Schraubenpumpe. Dies bedeutet, daß die beiden Wellen für beide Pumpentypen in einer Hintereinanderschaltung gemeinsam verwendet werden. Es muß sich dabei jedoch nicht unbedingt um eine durchgehende Welle handeln. Die Wellen können auch zweigeteilt sein, jedoch koaxial fest miteinander verbunden sein. Am einen Ende des Wellensystems befindet sich der entsprechende Drehkolben der Drehkolbenpumpe und am anderen Ende die Schraube der Schraubenpumpe.As a result, a vacuum pump in the combination rotary pump / screw pump is created, which can be realized by a comparatively small technical effort. The basic idea of the vacuum pump according to the invention consists in the fact that only a single housing is provided, in which two shafts are mounted. On these two shafts, one behind the other are the rotary lobe pump and, secondly, the screw pump. This means that the two waves are shared for both pump types in a series connection. However, it does not necessarily have to be a continuous wave. The waves can also be divided into two, but coaxially fixed to each other. At one end of the shaft system is the corresponding rotary piston of the rotary lobe pump and at the other end the screw of the screw pump.

Die Weiterbildung gemäß Anspruch 2 schlägt vor, daß eine der beiden Wellen mittels eines Elektromotors angetrieben wird. Die andere Welle wird dann über ein entsprechendes Getriebe angetrieben.The development according to claim 2 suggests that one of the two shafts is driven by means of an electric motor. The other shaft is then driven via a corresponding gear.

Eine weitere Weiterbildung schlägt gemäß Anspruch 3 vor, daß zwischen der Drehkolbenpumpe und der Schraubenpumpe ein Überdruckventil vorgesehen ist. Denn das Problem bei der Kombination einer Drehkolbenpumpe mit einer Schraubenpumpe besteht darin, daß die Drehkolbenpumpe am Anfang ein hohes Saugvermögen besitzt und dadurch eine sehr hohe Luftmenge an die dahinter befindliche Schraubenpumpe liefert. Diese kann aufgrund ihres geringen Saugvermögens nicht die von der Drehkolbenpumpe ankommenden Lufmassen bewältigen. Wird somit der Druck zu hoch, wird das Überdruckventil geöffnet. Hier kann es sich um ein einfaches gewichtsbelastetes oder federbelastetes Ventil handeln.A further development proposes according to claim 3, that between the rotary pump and the screw pump, a pressure relief valve is provided. Because the problem with the combination of a rotary pump with a screw pump is that the rotary lobe pump at the beginning has a high pumping speed and thus provides a very high amount of air to the screw pump located behind it. Due to its low pumping speed, it can not cope with the air masses arriving from the rotary lobe pump. Thus, if the pressure is too high, the pressure relief valve is opened. This may be a simple weighted or spring loaded valve.

Vorzugsweise handelt es sich bei dem Überdruckventil gemäß der Weiterbildung in Anspruch 4 um ein Bypassventil, welches die Luft der Drehkolbenpumpe zurückführt.Preferably, the pressure relief valve according to the embodiment in claim 4 is a bypass valve, which returns the air of the rotary piston pump.

Schließlich schlägt die Weiterbildung gemäß Anspruch 5 vor, daß die Schraubenpumpe auf der Eingangsseite eine größere Steigung pro Umdrehung besitzt als auf der Ausgangsseite. Dadurch erhöht sich der Wirkungsgrad, so daß für den Betrieb der Vakuumpumpe weniger Energie benötigt wird.Finally, the development proposes according to claim 5, that the screw pump on the input side has a greater pitch per revolution than on the output side. This increases the efficiency, so that less energy is needed for the operation of the vacuum pump.

Ein Ausführungsbeispiel einer erfindungsgemäßen Vakuumpumpe wird nachfolgend anhand der Zeichnungen beschrieben. In diesen zeigt:

Fig. 1
eine Ansicht der Vakuumpumpe;
Fig. 2
eine Schnittdarstellung durch die Vakuumpumpe in Fig. 1;
Fig. 3
eine Längsschnittdarstellung der Vakuumpumpe in Fig. 1.
An embodiment of a vacuum pump according to the invention will be described below with reference to the drawings. In these shows:
Fig. 1
a view of the vacuum pump;
Fig. 2
a sectional view through the vacuum pump in Fig. 1 ;
Fig. 3
a longitudinal sectional view of the vacuum pump in Fig. 1 ,

Die Vakuumpumpe weist ein Gehäuse 1 auf. Dieses Gehäuse 1 weist am einen Ende einen Lufteintritt 2 und am anderen Ende einen Luftaustritt 3 auf.The vacuum pump has a housing 1. This housing 1 has an air inlet 2 at one end and an air outlet 3 at the other end.

Im Bereich des Lufteintritts 2 ist in dem Gehäuse 1 eine Drehkolbenpumpe 4 mit zwei Drehkolben 4', 4" auf zugehörigen Wellen 5', 5" vorgesehen. Zwischen den beiden Wellen 5', 5" befindet sich ein Getriebe 7.In the area of the air inlet 2, a rotary piston pump 4 with two rotary pistons 4 ', 4 "is provided on associated shafts 5', 5" in the housing 1. Between the two shafts 5 ', 5 "is a transmission. 7

In Strömungsrichtung dahinter schließt sich an die Drehkolbenpumpe 4 eine Schraubenpumpe 6 mit Schrauben 6', 6" an. Diese Schrauben 6', 6" sind dabei auf der gleichen Welle 5', 5" wie die Drehkolbenpumpe 4 angeordnet. In dem dargestellten Ausführungsbeispiel sind dabei die beiden Wellen 5', 5" jedoch nicht durchgehend, sondern zweigeteilt, jedoch koaxial und drehfest miteinander verbunden.In the flow direction behind it, a screw pump 6 with screws 6 ', 6 "adjoins the rotary piston pump 4. These screws 6', 6" are arranged on the same shaft 5 ', 5 "as the rotary piston pump 4. In the exemplary embodiment shown while the two shafts 5 ', 5 "but not continuously, but in two parts, but coaxially and rotationally connected to each other.

In Fig. 2 ist darüber hinaus erkennbar, daß die Schraubenpumpe 6 auf der Eingangsseite eine größere Steigung pro Umdrehung besitzt als auf der Ausgangsseite. Dabei kann sich die Steigung entweder kontinuierlich zur Ausgangsseite hin verringern, oder aber im Bereich der Eingangsseite und/oder im Bereich der Ausgangsseite ist die Steigung jeweils konstant. Es sind dabei in den Bereichen Eingangsseite/Ausgangsseite sämtliche möglichen Kombinationen konstante Steigung / sich verändernde Steigung denkbar. Es muß nur gewährleistet sein, daß sich über die gesamte Pumpstrecke die Steigung verringert. Auf jeden Fall erfolgt in dem Bereich mit der geringeren Steigung eine höhere Verdichtung. Dies erhöht den Wirkungsgrad der Pumpe.In Fig. 2 In addition, it can be seen that the screw pump 6 on the input side has a greater pitch per revolution than on the output side. In this case, the slope can either decrease continuously to the output side, or in the region of the input side and / or in the region of the output side, the slope is constant in each case. There are conceivable in the areas input side / output side all possible combinations constant slope / changing slope. It must only be ensured that the slope is reduced over the entire pumping section. In any case, a higher compression occurs in the area with the lower pitch. This increases the efficiency of the pump.

Schließlich ist noch zwischen der Drehkolbenpumpe 4 und der Schraubenpumpe 6 ein Bypassventil 8 angeordnet.Finally, a bypass valve 8 is still arranged between the rotary piston pump 4 and the screw pump 6.

Die Funktionsweise ist wie folgt:

  • Der Antrieb der Vakuumpumpe erfolgt mittels eines - nicht dargestellten - Elektromotors. Dieser ist an einen Anschlußflansch 9 des Gehäuses 1 angeschlossen. Der Elektromotor treibt dabei die Welle 5' an. Über das Getriebe 7 wird dann synchron die zweite Welle 5" angetrieben.
The operation is as follows:
  • The drive of the vacuum pump by means of a - not shown - electric motor. This is connected to a connecting flange 9 of the housing 1. The electric motor drives the shaft 5 '. The second shaft 5 "is then synchronously driven via the gear 7.

Die Drehkolbenpumpe 4, welche sich durch ein hohes Saugvermögen auszeichnet, saugt über den Lufteintritt 2 die Luft an und führt diese der Schraubenpumpe 6 zu, welche sich durch ein hohes Kompressionsvermögen auszeichnet. Die Luft tritt dann über den Luftaustritt 3 aus dem Gehäuse 1 aus. Der gesamte Strömungsverlauf ist in den Fig. 2 und 3 durch die Pfeile angedeutet.The rotary lobe pump 4, which is characterized by a high pumping speed, sucks in the air via the air inlet 2 and supplies it to the screw pump 6, which is characterized by a high compressibility. The air then exits through the air outlet 3 from the housing 1. The entire flow is in the FIGS. 2 and 3 indicated by the arrows.

Da die Drehkolbenpumpe 4 ein hohes Saugvermögen besitzt, liefert diese eine sehr hohe Luftmenge an die dahinter befindliche Schraubenpumpe 6. Diese kann aufgrund des geringeren Saugvermögens nicht diese großen Luftmassen nicht immer bewältigen. Wird somit der Druck zu hoch, wird das Bypassventil 8 geöffnet, welches sich zwischen der Drehkolbenpumpe 4 und der Schraubenpumpe 6 befindet, so daß die Luft wieder zu der Drehkolbenpumpe 4 rückgeführt wird.Since the rotary lobe pump 4 has a high pumping speed, this delivers a very large amount of air to the behind it screw pump 6. This can not always cope with these large air masses due to the lower pumping speed. Thus, if the pressure is too high, the bypass valve 8 is opened, which is located between the rotary pump 4 and the screw pump 6, so that the air is returned to the rotary pump 4 again.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

11
Gehäusecasing
22
Lufteintrittair inlet
33
Luftaustrittair outlet
44
DrehkolbenpumpeRotary pump
4'4 '
Drehkolbenrotary pistons
4"4 '
Drehkolbenrotary pistons
5'5 '
Wellewave
5"5 '
Wellewave
66
Schraubenpumpescrew pump
6'6 '
Schraubescrew
6"6 "
Schraubescrew
77
Getriebetransmission
88th
Bypassventilbypass valve
99
Anschlußflanschflange

Claims (5)

Vakuumpumpe,
bei der in Strömungsrichtung der Luft gesehen zunächst eine Drehkolbenpumpe (4) und anschließend eine Schraubenpumpe (6) vorgesehen ist,
dadurch gekennzeichnet,
daß in einem für beide Pumpen (4, 6) gemeinsamen Gehäuse (1) zwei zueinander parallele Wellen (5', 5") vorgesehen sind,
wobei auf der ersten Welle (5') der erste Drehkolben (4') der Drehkolbenpumpe (4) und die erste Schraube (6') der Schraubenpumpe (6) angeordnet sind und
wobei auf der zweiten Welle (5") der zweite Drehkolben (4") der Drehkolbenpumpe (4) und die zweite Schraube (6") der Schraubenpumpe (6) angeordnet sind.Vacuum pump
in which, viewed in the flow direction of the air, first a rotary piston pump (4) and then a screw pump (6) are provided,
characterized,
in that two mutually parallel shafts (5 ', 5 ") are provided in a housing (1) common to both pumps (4, 6),
wherein on the first shaft (5 ') of the first rotary piston (4') of the rotary piston pump (4) and the first screw (6 ') of the screw pump (6) are arranged, and
wherein on the second shaft (5 "), the second rotary piston (4") of the rotary piston pump (4) and the second screw (6 ") of the screw pump (6) are arranged. Vakuumpumpe nach dem vorhergehenden Anspruch,
dadurch gekennzeichnet,
daß die erste Welle (5') mittels eines Elektromotors antreibbar ist und
daß die zweite Welle (5") über ein Getriebe (7) von der ersten Welle (5') antreibbar ist.Vacuum pump according to the preceding claim,
characterized,
that the first shaft (5 ') is drivable by means of an electric motor and
that the second shaft (5 ") via a transmission (7) of the first shaft (5 ') can be driven. Vakuumpumpe nach einem der vorhergehenden Ansprüche,
dadurch gekennzeichnet,
daß zwischen der Drehkolbenpumpe (4) und der Schraubenpumpe (6) ein Überdruckventil vorgesehen ist.Vacuum pump according to one of the preceding claims,
characterized,
that between the rotary piston pump (4) and the screw pump (6), a pressure relief valve is provided. Vakuumpumpe nach Anspruch 3,
dadurch gekennzeichnet,
daß das Überdruckventil ein Bypassventil (8) ist, welches die nicht der Schraubenpumpe (6) zugeführte Luft der Drehkolbenpumpe (4) zurückführt.Vacuum pump according to claim 3,
characterized,
that the pressure relief valve is a bypass valve (8), which returns the not the screw pump (6) of air supplied to the rotary pump (4). Vakuumpumpe nach einem der vorhergehenden Ansprüche,
dadurch gekennzeichnet,
daß die Schraubenpumpe (6) auf der Eingangsseite eine größere Steigung pro Umdrehung besitzt als auf der Ausgangsseite.Vacuum pump according to one of the preceding claims,
characterized,
that the screw pump (6) on the input side has a greater pitch per revolution than on the output side.
EP11002484.1A 2010-04-14 2011-03-25 Vacuum pump Withdrawn EP2378063A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010014884 DE102010014884A1 (en) 2010-04-14 2010-04-14 vacuum pump

Publications (2)

Publication Number Publication Date
EP2378063A2 true EP2378063A2 (en) 2011-10-19
EP2378063A3 EP2378063A3 (en) 2013-05-01

Family

ID=44546305

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11002484.1A Withdrawn EP2378063A3 (en) 2010-04-14 2011-03-25 Vacuum pump

Country Status (2)

Country Link
EP (1) EP2378063A3 (en)
DE (1) DE102010014884A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0965757A3 (en) * 1998-06-17 2001-01-31 The BOC Group plc Vacuum pumps
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
WO2002033262A1 (en) * 2000-10-18 2002-04-25 Leybold Vakuum Gmbh Multi-stage helical screw rotor
JP4218756B2 (en) * 2003-10-17 2009-02-04 株式会社荏原製作所 Vacuum exhaust device
US7722332B2 (en) * 2004-10-01 2010-05-25 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
TWI438342B (en) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd Complex dry vacuum pump having root and screw rotors

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Also Published As

Publication number Publication date
EP2378063A3 (en) 2013-05-01
DE102010014884A1 (en) 2011-10-20

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