DE102010014884A1 - vacuum pump - Google Patents

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Publication number
DE102010014884A1
DE102010014884A1 DE201010014884 DE102010014884A DE102010014884A1 DE 102010014884 A1 DE102010014884 A1 DE 102010014884A1 DE 201010014884 DE201010014884 DE 201010014884 DE 102010014884 A DE102010014884 A DE 102010014884A DE 102010014884 A1 DE102010014884 A1 DE 102010014884A1
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DE
Germany
Prior art keywords
pump
screw
rotary
vacuum pump
rotary lobe
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201010014884
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German (de)
Inventor
Gerhard Baratti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BARATTI ENGINEERING GmbH
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BARATTI ENGINEERING GmbH
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Publication date
Application filed by BARATTI ENGINEERING GmbH filed Critical BARATTI ENGINEERING GmbH
Priority to DE201010014884 priority Critical patent/DE102010014884A1/en
Priority to EP11002484.1A priority patent/EP2378063A3/en
Publication of DE102010014884A1 publication Critical patent/DE102010014884A1/en
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F04C28/265—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels being obtained by displacing a lateral sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Eine Vakuumpumpe weist in Strömungsrichtung der Luft gesehen zunächst eine Drehkolbenpumpe 4 und anschließend eine Schneckenpumpe 6 auf. Für beide Pumpen ist ein gemeinsames Gehäuse 1 mit zwei zueinander parallelen Wellen 5, 5'' vorgesehen, auf denen die Drehkolben 4', 4'' sowie die Schrauben 6', 6'' der beiden Pumpen angeordnet sind.A vacuum pump has a rotary lobe pump 4 and then a screw pump 6 when viewed in the direction of flow of the air. For both pumps, a common housing 1 is provided with two mutually parallel shafts 5, 5 ″, on which the rotary pistons 4 ′, 4 ″ and the screws 6 ′, 6 ″ of the two pumps are arranged.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des Anspruchs 1.The invention relates to a vacuum pump according to the preamble of claim 1.

Es gibt die unterschiedlichsten Typen von Vakuumpumpen. So gibt es zunächst die sogenannten Drehkolbenpumpen. Bei diesen sind auf zwei zueinander parallelen Wellen Drehkolben angeordnet. Diese Drehkolbenpumpen zeichnen sich durch ein hohes Saugvermögen aus. Weiterhin gibt es die sogenannten Schraubenpumpen. Bei ihnen sind auf zwei zueinander parallelen Wellen wendelförmige Schrauben angeordnet, welche ineinandergreifen. Diese Schraubenpumpen zeichnen sich durch ein hohes Kompressionsvermögen aus.There are many different types of vacuum pumps. So there are first the so-called rotary lobe pumps. In these rotary pistons are arranged on two parallel shafts. These rotary lobe pumps are characterized by a high pumping speed. Furthermore, there are the so-called screw pumps. In them helical screws are arranged on two parallel waves, which mesh. These screw pumps are characterized by a high compression capacity.

Das Problem bei den vorbeschriebenen Drehkolbenpumpen sowie Schraubenpumpen besteht darin, daß der Vorteil der einen Pumpe der Nachteil der anderen Pumpe ist und daß – umgekehrt – der Nachteil der einen Pumpe der Vorteil der anderen Pumpe ist. Um ein hohes Vakuum erzielen zu können, werden daher diese beiden Pumpentypen hintereinander geschaltet, und zwar als völlig voneinander separate Pumpen. Der Nachteil liegt dabei in dem großen technischen Aufwand.The problem with the above-described rotary lobe pumps and screw pumps is that the advantage of a pump is the disadvantage of the other pump and that - vice versa - the disadvantage of a pump is the advantage of the other pump. In order to achieve a high vacuum, therefore, these two types of pumps are connected in series, as completely separate pumps. The disadvantage lies in the great technical effort.

Davon ausgehend liegt der Erfindung die Aufgabe zugrunde, eine Vakuumpumpe der eingangs angegebenen Art zu schaffen, mittels welcher mit geringem technischem Aufwand ein hohes Vakuum mit hohem Wirkungsgrad erreicht werden kann.Based on this, the present invention seeks to provide a vacuum pump of the type described above, by means of which with low technical effort, a high vacuum can be achieved with high efficiency.

Die technische Lösung ist gekennzeichnet durch die Merkmale im Kennzeichen des Anspruchs 1.The technical solution is characterized by the features in the characterizing part of claim 1.

Dadurch ist eine Vakuumpumpe in der Kombination Drehkolbenpumpe/Schraubenpumpe geschaffen, welche sich durch einen vergleichsweise geringen technischen Aufwand realisieren läßt. Die Grundidee der erfindungsgemäßen Vakuumpumpe besteht dabei darin, daß nur ein einziges Gehäuse vorgesehen ist, in welchem zwei Wellen gelagert sind. Auf diesen beiden Wellen befinden sich hintereinander zum einen die Drehkolbenpumpe und zum anderen die Schraubenpumpe. Dies bedeutet, daß die beiden Wellen für beide Pumpentypen in einer Hintereinanderschaltung gemeinsam verwendet werden. Es muß sich dabei jedoch nicht unbedingt um eine durchgehende Welle handeln. Die Wellen können auch zweigeteilt sein, jedoch koaxial fest miteinander verbunden sein. Am einen Ende des Wellensystems befindet sich der entsprechende Drehkolben der Drehkolbenpumpe und am anderen Ende die Schraube der Schraubenpumpe.As a result, a vacuum pump in the combination rotary pump / screw pump is created, which can be realized by a comparatively small technical effort. The basic idea of the vacuum pump according to the invention consists in the fact that only a single housing is provided, in which two shafts are mounted. On these two shafts, one behind the other are the rotary lobe pump and, secondly, the screw pump. This means that the two waves are shared for both pump types in a series connection. However, it does not necessarily have to be a continuous wave. The waves can also be divided into two, but coaxially fixed to each other. At one end of the shaft system is the corresponding rotary piston of the rotary lobe pump and at the other end the screw of the screw pump.

Die Weiterbildung gemäß Anspruch 2 schlägt vor, daß eine der beiden Wellen mittels eines Elektromotors angetrieben wird. Die andere Welle wird dann über ein entsprechendes Getriebe angetrieben.The development according to claim 2 suggests that one of the two shafts is driven by means of an electric motor. The other shaft is then driven via a corresponding gear.

Eine weitere Weiterbildung schlägt gemäß Anspruch 3 vor, daß zwischen der Drehkolbenpumpe und der Schraubenpumpe ein Überdruckventil vorgesehen ist. Denn das Problem bei der Kombination einer Drehkolbenpumpe mit einer Schraubenpumpe besteht darin, daß die Drehkolbenpumpe am Anfang ein hohes Saugvermögen besitzt und dadurch eine sehr hohe Luftmenge an die dahinter befindliche Schraubenpumpe liefert. Diese kann aufgrund ihres geringen Saugvermögens nicht die von der Drehkolbenpumpe ankommenden Lufmassen bewältigen. Wird somit der Druck zu hoch, wird das Überdruckventil geöffnet. Hier kann es sich um ein einfaches gewichtsbelastetes oder federbelastetes Ventil handeln.A further development proposes according to claim 3, that between the rotary pump and the screw pump, a pressure relief valve is provided. Because the problem with the combination of a rotary pump with a screw pump is that the rotary lobe pump at the beginning has a high pumping speed and thus provides a very high amount of air to the screw pump located behind it. Due to its low pumping speed, it can not cope with the air masses arriving from the rotary lobe pump. Thus, if the pressure is too high, the pressure relief valve is opened. This may be a simple weighted or spring loaded valve.

Vorzugsweise handelt es sich bei dem Überdruckventil gemäß der Weiterbildung in Anspruch 4 um ein Bypassventil, welches die Luft der Drehkolbenpumpe zurückführt.Preferably, the pressure relief valve according to the embodiment in claim 4 is a bypass valve, which returns the air of the rotary piston pump.

Ein Ausführungsbeispiel einer erfindungsgemäßen Vakuumpumpe wird nachfolgend anhand der Zeichnungen beschrieben. In diesen zeigt:An embodiment of a vacuum pump according to the invention will be described below with reference to the drawings. In these shows:

1 eine Ansicht der Vakuumpumpe; 1 a view of the vacuum pump;

2 eine Schnittdarstellung durch die Vakuumpumpe in 1; 2 a sectional view through the vacuum pump in 1 ;

3 eine Längsschnittdarstellung der Vakuumpumpe in 1. 3 a longitudinal sectional view of the vacuum pump in 1 ,

Die Vakuumpumpe weist ein Gehäuse 1 auf. Dieses Gehäuse 1 weist am einen Ende einen Lufteintritt 2 und am anderen Ende einen Luftaustritt 3 auf.The vacuum pump has a housing 1 on. This case 1 has an air inlet at one end 2 and at the other end an air outlet 3 on.

Im Bereich des Lufteintritts 2 ist in dem Gehäuse 1 eine Drehkolbenpumpe 4 mit zwei Drehkolben 4', 4'' auf zugehörigen Wellen 5', 5'' vorgesehen. Zwischen den beiden Wellen 5', 5'' befindet sich ein Getriebe 7.In the area of air intake 2 is in the case 1 a rotary lobe pump 4 with two rotary pistons 4 ' . 4 '' on associated waves 5 ' . 5 '' intended. Between the two waves 5 ' . 5 '' there is a gearbox 7 ,

In Strömungsrichtung dahinter schließt sich an die Drehkolbenpumpe 4 eine Schneckenpumpe 6 mit Schnecken 6', 6'' an. Diese Schnecken 6', 6'' sind dabei auf der gleichen Welle 5', 5'' wie die Drehkolbenpumpe 4 angeordnet. In dem dargestellten Ausführungsbeispiel sind dabei die beiden Wellen 5', 5'' jedoch nicht durchgehend, sondern zweigeteilt, jedoch koaxial und drehfest miteinander verbunden.In the flow direction behind it connects to the rotary lobe pump 4 a screw pump 6 with snails 6 ' . 6 '' at. These snails 6 ' . 6 '' are on the same wave 5 ' . 5 '' like the rotary lobe pump 4 arranged. In the illustrated embodiment are the two waves 5 ' . 5 '' but not continuous, but two parts, but coaxial and rotatably connected.

Schließlich ist noch zwischen der Drehkolbenpumpe 4 und der Schneckenpumpe 6 ein Bypassventil 8 angeordnet.Finally, between the rotary lobe pump 4 and the auger pump 6 a bypass valve 8th arranged.

Die Funktionsweise ist wie folgt:
Der Antrieb der Vakuumpumpe erfolgt mittels eines – nicht dargestellten – Elektromotors. Dieser ist an einen Anschlußflansch 9 des Gehäuses 1 angeschlossen. Der Elektromotor treibt dabei die Welle 5' an. Über das Getriebe 7 wird dann synchron die zweite Welle 5'' angetrieben.The operation is as follows:
The drive of the vacuum pump by means of a - not shown - electric motor. This is connected to a connection flange 9 of the housing 1 connected. The electric motor drives the shaft 5 ' at. About the transmission 7 then becomes synchronous the second wave 5 '' driven.

Die Drehkolbenpumpe 4, welche sich durch ein hohes Saugvermögen auszeichnet, saugt über den Lufteintritt 2 die Luft an und führt diese der Schneckenpumpe 6 zu, welche sich durch ein hohes Kompressionsvermögen auszeichnet. Die Luft tritt dann über den Luftaustritt 3 aus dem Gehäuse 1 aus. Der gesamte Strömungsverlauf ist in den 2 und 3 durch die Pfeile angedeutet.The rotary lobe pump 4 , which is characterized by a high suction, sucks on the air inlet 2 the air and leads it to the screw pump 6 too, which is characterized by a high compression capacity. The air then passes over the air outlet 3 out of the case 1 out. The entire flow is in the 2 and 3 indicated by the arrows.

Da die Drehkolbenpumpe 4 ein hohes Saugvermögen besitzt, liefert diese eine sehr hohe Luftmenge an die dahinter befindliche Schraubenpumpe 6. Diese kann aufgrund des geringeren Saugvermögens nicht diese großen Luftmassen nicht immer bewältigen. Wird somit der Druck zu hoch, wird das Bypassventil 8 geöffnet, welches sich zwischen der Drehkolbenpumpe 4 und der Schraubenpumpe 6 befindet, so daß die Luft wieder zu der Drehkolbenpumpe 4 rückgeführt wird.Because the rotary lobe pump 4 has a high pumping speed, this provides a very high amount of air to the behind it screw pump 6 , This can not always cope with these large air masses due to the lower pumping speed. Thus, if the pressure is too high, the bypass valve 8th opened, which is located between the rotary lobe pump 4 and the screw pump 6 is located so that the air returns to the rotary lobe pump 4 is returned.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

11
Gehäusecasing
22
Lufteintrittair inlet
33
Luftaustrittair outlet
44
DrehkolbenpumpeRotary pump
4'4 '
Drehkolbenrotary pistons
4''4 ''
Drehkolbenrotary pistons
5'5 '
Wellewave
5''5 ''
Wellewave
66
Schneckenpumpescrew pump
6'6 '
Schneckeslug
6''6 ''
Schneckeslug
77
Getriebetransmission
88th
Bypassventilbypass valve
99
Anschlußflanschflange

Claims (4)

Vakuumpumpe, bei der in Strömungsrichtung der Luft gesehen zunächst eine Drehkolbenpumpe (4) und anschließend eine Schraubenpumpe (6) vorgesehen ist, dadurch gekennzeichnet, daß in einem für beide Pumpen (4, 6) gemeinsamen Gehäuse (1) zwei zueinander parallele Wellen (5', 5'') vorgesehen sind, wobei auf der ersten Welle (5') der erste Drehkolben (4') der Drehkolbenpumpe (4) und die erste Schraube (6') der Schraubenpumpe (6) angeordnet sind und wobei auf der zweiten Welle (5'') der zweite Drehkolben (4'') der Drehkolbenpumpe (4) und die zweite Schraube (6'') der Schraubenpumpe (6) angeordnet sind.Vacuum pump, when seen in the flow direction of the air, first a rotary lobe pump ( 4 ) and then a screw pump ( 6 ), characterized in that in one for both pumps ( 4 . 6 ) common housing ( 1 ) two parallel waves ( 5 ' . 5 '' ) are provided, wherein on the first wave ( 5 ' ) the first rotary piston ( 4 ' ) of the rotary lobe pump ( 4 ) and the first screw ( 6 ' ) of the screw pump ( 6 ) and wherein on the second shaft ( 5 '' ) the second rotary piston ( 4 '' ) of the rotary lobe pump ( 4 ) and the second screw ( 6 '' ) of the screw pump ( 6 ) are arranged. Vakuumpumpe nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die erste Welle (5') mittels eines Elektromotors antreibbar ist und daß die zweite Welle (5'') über ein Getriebe (7) von der ersten Welle (5') antreibbar ist.Vacuum pump according to the preceding claim, characterized in that the first shaft ( 5 ' ) is drivable by means of an electric motor and that the second shaft ( 5 '' ) via a transmission ( 7 ) from the first wave ( 5 ' ) is drivable. Vakuumpumpe nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß zwischen der Drehkolbenpumpe (4) und der Schneckenpumpe (6) ein Überdruckventil vorgesehen ist.Vacuum pump according to the preceding claim, characterized in that between the rotary piston pump ( 4 ) and the screw pump ( 6 ) A pressure relief valve is provided. Vakuumpumpe nach Anspruch 3, dadurch gekennzeichnet, daß das Überdruckventil ein Bypassventil (8) ist, welches die nicht der Schraubenpumpe (6) zugeführte Luft der Drehkolbenpumpe (4) zurückführt.Vacuum pump according to claim 3, characterized in that the overpressure valve is a bypass valve ( 8th ), which is not the screw pump ( 6 ) supplied air of the rotary lobe pump ( 4 ).
DE201010014884 2010-04-14 2010-04-14 vacuum pump Withdrawn DE102010014884A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE201010014884 DE102010014884A1 (en) 2010-04-14 2010-04-14 vacuum pump
EP11002484.1A EP2378063A3 (en) 2010-04-14 2011-03-25 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010014884 DE102010014884A1 (en) 2010-04-14 2010-04-14 vacuum pump

Publications (1)

Publication Number Publication Date
DE102010014884A1 true DE102010014884A1 (en) 2011-10-20

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ID=44546305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201010014884 Withdrawn DE102010014884A1 (en) 2010-04-14 2010-04-14 vacuum pump

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EP (1) EP2378063A3 (en)
DE (1) DE102010014884A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7074026B2 (en) * 2000-10-18 2006-07-11 Leybold Vakuum Gmbh Multi-stage helical screw rotor
EP1643129B1 (en) * 2004-10-01 2008-05-14 LOT Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
US7611340B2 (en) * 2006-07-28 2009-11-03 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots and screw rotor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0965756B1 (en) * 1998-06-17 2006-02-08 The BOC Group plc Screw pump
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP4218756B2 (en) * 2003-10-17 2009-02-04 株式会社荏原製作所 Vacuum exhaust device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7074026B2 (en) * 2000-10-18 2006-07-11 Leybold Vakuum Gmbh Multi-stage helical screw rotor
EP1643129B1 (en) * 2004-10-01 2008-05-14 LOT Vacuum Co., Ltd. Composite dry vacuum pump having roots rotor and screw rotor
US7611340B2 (en) * 2006-07-28 2009-11-03 Lot Vacuum Co., Ltd. Composite dry vacuum pump having roots and screw rotor

Also Published As

Publication number Publication date
EP2378063A3 (en) 2013-05-01
EP2378063A2 (en) 2011-10-19

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