EP2350336A2 - Couche de protection contre l'usure et son procédé de fabrication - Google Patents

Couche de protection contre l'usure et son procédé de fabrication

Info

Publication number
EP2350336A2
EP2350336A2 EP09748318A EP09748318A EP2350336A2 EP 2350336 A2 EP2350336 A2 EP 2350336A2 EP 09748318 A EP09748318 A EP 09748318A EP 09748318 A EP09748318 A EP 09748318A EP 2350336 A2 EP2350336 A2 EP 2350336A2
Authority
EP
European Patent Office
Prior art keywords
wear protection
protection layer
zirconium
aluminum
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09748318A
Other languages
German (de)
English (en)
Inventor
Markus Lechthaler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Publication of EP2350336A2 publication Critical patent/EP2350336A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Definitions

  • the invention relates to a wear protection layer and a method for its production.
  • AlCrN system In addition to the TiAlN system, which has been known for decades, the AlCrN system is already regarded as state of the art. This system is characterized by improved mechanical thermal and tribological properties resulting in increased performance of the coated components and tools in many applications.
  • US 7226670 shows a coated portion having a Schichtsys ⁇ system comprising at least one AlyCrl-yX system comprises wherein X be ⁇ writes N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, CNCO.
  • the described part is a milling tool, a hob cutter, a ball nose cutter, a planer or profile cutter, a reaming tool, a reamer, an indexable insert, a casting mold or an injection molding tool.
  • AlCrN-containing layers show a very high oxidation resistance. Oxidation starts with AlCrN-containing layers in the range of temperatures> 1100 ° C. Depending on the conditions of use of the layer, however, it may happen that the formation of a stable oxide skin is hindered. Such conditions are given, for example, in a glow test in a vacuum or under protective gas, but also in cutting applications where the cutting edge is not directly or only partially exposed to the atmosphere. Conditions be ⁇ write this state, for example, can be placed in a rotating application or in a drilling application.
  • AINbN-containing layers show a comparable oxidation ⁇ resistance, which is in the range of HOO 0 C.
  • the width ⁇ ren also shows this system the decay to thermodynamic mixing ⁇ stable Nb 2 N.
  • this decomposition takes place only at temperatures well in excess of HOO 0 C.
  • Fig. 1 through Fig. 3 show the phase diagrams of the ZweistoffSys ⁇ systems Fe-Ti, Fe-Cr and Fe-Nb.
  • the shaded area always shows the complete miscibility of the two metals.
  • Ver ⁇ we compare the three binary systems so that the Cr-containing layers AlCrNN shows the greatest solubility in iron.
  • the titanium of the Ti-containing layers shows a much lower solubility than Cr, but at high temperatures, as in the field of many wear protection applications, the solubility increases significantly there as well.
  • Nb as it is present in NbAlN-containing layers, this solubility is very small even at high temperatures. Even at 1000 0 C, it is still below one atomic percent.
  • PVD Physical Vapor Deposition
  • the ARC evaporation process is preferred, which allows for its high deposition rate and high ionization economic Ab ⁇ divorce of high quality hard coatings.
  • This process is characterized in that an arc physically vaporizes the target surface.
  • This evaporation process entails that partially vaporized particles, so-called splash, be emit ⁇ greatly from the target surface and these splashes can then be recovered as so-called droplets in the layer.
  • a high quality Evaporation process is characterized in that the number of spatter is kept as low as possible.
  • the object of the invention is to provide an improved wear ⁇ protective layer, which has improved mechanical properties with very good tribochemical properties.
  • the object is achieved by a wear protection ⁇ layer, which despite not disappearing Nb content comprising at least one over the prior art significantly reduced number of Nb-splashes, by the target assembly over the prior art is modified so no or that at least approximates the melting behavior of Al and Nb.
  • the Al powder Zr is admixed, preferably between 10 and 50 at% Zr. In a further limitation, the range is between 20 and 30 at%, and ideally, the in ⁇ termetallische phase A13Zr is used which has an atomic ratio of 75 at% Al and 25 at% Zr.
  • a wear protection layer according to the invention has, for example, the following composition:
  • X is at least one element from the group N, C, B, CN, BN,
  • the wear protection layer has the following composition:
  • X describes N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, CNCO, and 0.3 ⁇ a ⁇ 0.9 0 ⁇ b ⁇ 0.2 0.1 ⁇ c ⁇ 0.5
  • the invention is exemplified with reference to a drawing erläu ⁇ tert. It shows:
  • Figure 1 a phase diagram of the iron-titanium system.
  • the hatched area shows the solubility of titanium in iron.
  • This solubility is an indication of the tribochemical wear resistance of a Materi ⁇ alkomposition, wherein: the smaller the solubility, the greater the chemical wear resistant ⁇ ness.
  • Figure 2 a phase diagram iron-chromium system. The shaded area shows the solubility of chromium in egg ⁇ sen.
  • Figure 3 a phase diagram iron-niobium system. The hatched area shows ⁇ fATOR the solubility of niobium in egg ⁇ sen. Niobium is virtually insoluble in iron, even at very high temperatures (1000 ° C.) as used, unlike titanium and chromium.
  • Figure 4 a phase diagram of aluminum zirconium system. The phase diagram clearly shows that the addition of zirco nium ⁇ leads to aluminum to a melting point elevation. At a phase content of 75 at% Al and 25 at% Zr, a high-melting intermetallic phase and immediately thereafter a high-melting eutectic 1595 ° occur.
  • FIG. 5 shows diagrammatically niobium grains 7 in a continuous aluminum matrix 5 (hatched). This phase mixture is present at high aluminum contents ( ⁇ 60%)
  • Figure 6 schematically niobium grains 11 mixed with aluminum or AlZr 9 (hatched). This constellation is present at low aluminum contents ( ⁇ 60%). In this case, there is no continuous AI matrix. This results in a certain porosity in the target and spatter formation can only be overcome by the adjusted melting points of niobium and AlZr.
  • the zirconium component is added to the target used for the coating.
  • part of the aluminum ⁇ miniums is replaced in the target by zirconium. It has provided ⁇ out that the number of spatter can be greatly reduced with a percentage share of zirconium to aluminum ⁇ 10%. Presumably, this is due to the formation of an intermetallic AlZr phase and the associated increase in melting point. This melting point increase results in an approximation of the melting points of the Nb and of the intermetallic AlZr phase mixture.
  • the difference of the melting point between aluminum and niobium which is in the range of 1800 0 C, can be reduced to the difference of the melting point between aluminum ⁇ zirconium and niobium of 850 0 C.
  • This An ⁇ equation of the melting points finally leads to a much more stable and spatterredu containeren evaporation behavior.
  • the present invention therefore also relates to the components coated in this way.
  • These may include: a milling tool, a hob cutter, a ball nose cutter, a planer or profile cutter, a reaming tool, a reamer, an indexable insert, a mold, or an injection molding tool.
  • Cutting parameters Workpiece: DIN 1.2344 (36 HRC)
  • Cutting tool 3-lipped end mill, 0 mm, fine-grained carbide
  • Cutting parameters Workpiece: DIN 1.2344 (45 HRC)
  • Cutting tool indexable insert, fine-grained hard metal ⁇

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Milling, Broaching, Filing, Reaming, And Others (AREA)
  • Gear Processing (AREA)

Abstract

L'invention concerne une couche de protection contre l'usure pour outils tels que fraises, plaquettes de coupe, moules de moulage par injection et similaires, en particulier une couche de protection contre l'usure déposée par déposition en phase vapeur par procédé physique ayant comme composition générale AlNbX, où X représente N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, CNCO. L'invention est caractérisée en ce que la proportion de Nb est inférieure à un pourcentage atomique de 40 % et/ou en ce que la poudre d'aluminium utilisée pour la fabrication est mélangée avec 10 à 50% atomiques de zirconium par rapport à l'aluminium. L'invention concerne en outre un procédé de fabrication d'une couche de protection contre l'usure.
EP09748318A 2008-11-04 2009-11-02 Couche de protection contre l'usure et son procédé de fabrication Withdrawn EP2350336A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11103208P 2008-11-04 2008-11-04
PCT/EP2009/064443 WO2010052184A2 (fr) 2008-11-04 2009-11-02 Couche de protection contre l'usure et son procédé de fabrication

Publications (1)

Publication Number Publication Date
EP2350336A2 true EP2350336A2 (fr) 2011-08-03

Family

ID=41478756

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09748318A Withdrawn EP2350336A2 (fr) 2008-11-04 2009-11-02 Couche de protection contre l'usure et son procédé de fabrication

Country Status (6)

Country Link
US (1) US20110271872A1 (fr)
EP (1) EP2350336A2 (fr)
JP (1) JP2012507635A (fr)
CN (1) CN102224273B (fr)
RU (1) RU2528298C2 (fr)
WO (1) WO2010052184A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102605320A (zh) * 2011-01-24 2012-07-25 鸿富锦精密工业（深圳）有限公司 具有硬质涂层的被覆件及其制备方法
US9027464B1 (en) * 2014-03-26 2015-05-12 Mansour A. KH. Al-Jamaan Two-piece electric coffee maker

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070178330A1 (en) * 2005-05-06 2007-08-02 Seco Tools Ab Thin wear resistent coating

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2228387C2 (ru) * 2002-07-22 2004-05-10 Падеров Анатолий Николаевич Способ нанесения многослойного покрытия на металлические изделия
CN100419117C (zh) * 2004-02-02 2008-09-17 株式会社神户制钢所 硬质叠层被膜、其制造方法及成膜装置
JP4676780B2 (ja) * 2005-02-16 2011-04-27 株式会社神戸製鋼所 硬質皮膜、積層型硬質皮膜およびその製造方法
JP4578382B2 (ja) * 2005-10-25 2010-11-10 日立ツール株式会社 硬質皮膜及び硬質皮膜被覆工具
JP2007119810A (ja) * 2005-10-26 2007-05-17 Hitachi Tool Engineering Ltd 被覆部材
JP4721281B2 (ja) * 2006-04-27 2011-07-13 日立ツール株式会社 耐酸化性皮膜及びその皮膜を被覆した部材
JP5096715B2 (ja) * 2006-09-21 2012-12-12 株式会社神戸製鋼所 硬質皮膜および硬質皮膜被覆工具
JP5261981B2 (ja) * 2007-05-17 2013-08-14 日立ツール株式会社 被覆切削工具
WO2009016938A1 (fr) * 2007-08-02 2009-02-05 Kabushiki Kaisha Kobe Seiko Sho Film de revêtement dur, matériau recouvert d'un film de revêtement dur, moule pour formage plastique à froid et procédé pour former un film de revêtement dur

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070178330A1 (en) * 2005-05-06 2007-08-02 Seco Tools Ab Thin wear resistent coating

Also Published As

Publication number Publication date
WO2010052184A3 (fr) 2010-07-22
JP2012507635A (ja) 2012-03-29
CN102224273A (zh) 2011-10-19
WO2010052184A2 (fr) 2010-05-14
CN102224273B (zh) 2014-09-24
RU2528298C2 (ru) 2014-09-10
RU2011122206A (ru) 2013-01-27
US20110271872A1 (en) 2011-11-10

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