EP2321655A1 - Kontaktlose schleifensonde - Google Patents

Kontaktlose schleifensonde

Info

Publication number
EP2321655A1
EP2321655A1 EP09777210A EP09777210A EP2321655A1 EP 2321655 A1 EP2321655 A1 EP 2321655A1 EP 09777210 A EP09777210 A EP 09777210A EP 09777210 A EP09777210 A EP 09777210A EP 2321655 A1 EP2321655 A1 EP 2321655A1
Authority
EP
European Patent Office
Prior art keywords
loop probe
probe according
contactless
conductor
coupling structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP09777210A
Other languages
German (de)
English (en)
French (fr)
Inventor
Thomas Zelder
Bernd Geck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosenberger Hochfrequenztechnik GmbH and Co KG
Original Assignee
Rosenberger Hochfrequenztechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosenberger Hochfrequenztechnik GmbH and Co KG filed Critical Rosenberger Hochfrequenztechnik GmbH and Co KG
Publication of EP2321655A1 publication Critical patent/EP2321655A1/de
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/07Non contact-making probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06772High frequency probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/315Contactless testing by inductive methods

Definitions

  • the present invention relates to a contactless loop probe for contactless coupling out of an RF signal for a contactless measuring system having at least one coupling structure and at least one electrically connected to the coupling structure via a first transition first signal conductor, which via a second transition with an output for electrical connection to the Measuring system is electrically connected, according to the preamble of claim 1.
  • EMC electromagnetic compatibility
  • H. Whiteside, RWP King "The loop antenna as a probe”
  • IEEE Transaction on Antenna and Propagation Vol. No. 3, pp. 291-297, May 1964
  • M. Kanda "An electromagnetic near-field sensor for simultaneous electric and magnetic-field measurements”
  • IEEE Transaction on Electromagnetic Compatibility Vol. 26, No. 3, pp. 102-110, August 1984, or MEG Upton, AC Marvin, " Improvements to an electromagnetic near-field sensor for simultaneous electric and magnetic field measurements, "IEEE Transaction on Electromagnetic Compatibility, Vol. 35, No. 1, pp. 96-98, February 1993.
  • a directional coupler is a four-port, which usually consists of two interconnected lines. The directional coupler has the task of separating the waves running back and forth on a line.
  • a possible coupling structure for the separation of the incoming and outgoing waves is the loop-directional coupler, which PP Lombardini, RF Schwartz, PJ Kelly, "Criteria for the design of loop-type Directional couplers for the L band" IEEE Transaction on Microwave Theory and Techniques, Vol. 4, No. 4, pp. 234-239, October 1956, and B. Mower, "An L-band loop-type coupler” IEEE Transactions on Microwave Theory and Techniques, Vol. 9, No. 4, Pp. 362-363, July 1961.
  • a loop-wise coupler consists of a conductor loop which is positioned over or in a waveguide. In this case, any waveguide such as hollow lines, planar strip lines or coaxial cables can be used.
  • Schleifenrichtkopplers The application of a Schleifenrichtkopplers is varied. For example, F. De Groote et al. in 2005 (loc. cit.) and Yhland et al. 2006 (loc. Cit.) A loop-wise coupler as a component in a contactless measuring system.
  • Inductive and / or capacitive coupling structures are used to determine the scattering parameters of a test object (DUT) with a contactless, mostly vectorial measuring system.
  • the measuring probes are positioned in the electromagnetic near field above the signal lines of the test object.
  • these coupling structures either the current and / or the voltage of a signal line, which is connected directly to the test object, determined.
  • the waves traveling back and forth on the signal line are also measured, with directional couplers, in particular loop-wise couplers, being used as coupling structures for separating the two waves.
  • TRL GF Engen and CA Hoer, "Thru-reflect-line: An improved technique for calibrating the dual six-port automatic network analyzer, "IEEE Transaction on Microwave Theory and Techniques, Vol. 12, pp. 987-993, December 1979), as used in contact-based network analysis.
  • At least one measuring probe for example a conductor loop or two capacitive probes, is required for each test port of an unknown test object (DUT).
  • DUT unknown test object
  • contactless conductor loops made of coaxial semi-rigid leads are used (see F. De Groote, J. Verspecht, C. Tsironis, D. Barataud and J.-P. Teyssier, An improved coupling method for Time domain load-pull measurements ", European Microwave Conference, Volume 1, pp. 4 et seq., October 2005 and K. Yhland, J. Stenarson," Noncontacting Measurement of Power in Microstrip Circuits ", in 65th ARFTG, p. 205, June, 2006.
  • the invention has for its object to provide a contactless loop probe o.g. To improve the type of electrical properties.
  • the coupling structure is formed as an RF waveguide with at least one signal conductor and at least one reference conductor.
  • the contactless loop probe according to the invention is analytically better describable and the cutoff frequency is higher than non-impedance-controlled probes.
  • a controlled and, in particular, impedance-controlled propagation of electromagnetic high-frequency waves is available through the combination of signal conductor and reference conductor.
  • the coupling structure, the first transition, the first signal conductor, the second transition and the output are impedance-controlled in such a way that they have a coordinated impedance such that a high input reflection attenuation and a high directivity results.
  • the coupling structure is designed as a planar strip line or coplanar line, wherein the signal conductor is designed as a first planar conductor and the reference conductor as a second planar conductor.
  • the coupling structure is designed as a coaxial line with a signal conductor in the form of an inner conductor and a reference conductor in the form of an outer conductor, wherein the outer conductor has at least one opening through which the inner conductor is exposed.
  • the at least one opening comprises at least one rectangular opening, at least one oval opening and / or at least one circular opening.
  • the at least one opening is formed in such a way that the coupling structure, viewed in cross-section, has an outer conductor over at least part of the circumference.
  • the at least one opening comprises, for example, at least one rectangular opening, at least one oval opening or at least one circular opening.
  • the coupling structure is formed as a waveguide with a reference conductor in the form of an outer conductor and a signal conductor in the form of a cavity within the outer conductor, wherein the outer conductor has at least one opening through which the cavity is exposed.
  • the at least one first signal conductor is designed as an HF signal line, in particular as a coaxial line, planar strip line, coplanar line or waveguide
  • the first and / or second transition is / are the planar transition, coaxial transition, Coplanar transition, waveguide transition, planar coaxial transition, planar waveguide transition, coaxial waveguide transition, coplanar coaxial transition, coplanar waveguide transition or planar-coplanar transition formed.
  • the coupling structure has two ends, one end being electrically connected to the first signal conductor and the other end being electrically connected to a terminating resistor.
  • the coupling structure has two ends, each end being electrically connected to a signal conductor.
  • At least one output is designed as an HF signal line, in particular as a coaxial line, planar strip line, coplanar line or waveguide.
  • each two coupling structures are electrically connected to each other via a second signal line and respective first transitions.
  • At least one second signal line is designed as an HF signal line, in particular as a coaxial line, planar strip line, coplanar line or waveguide.
  • a device for determining a distance of the coupling structure from a conductor emitting a near field is additionally provided.
  • the device for determining the distance comprises an optical, electrical, mechanical and / or electromechanical distance sensor.
  • a device for determining a position of the loop probe in space is additionally provided.
  • the device for determining a position of the loop probe in space is an image sensor.
  • the loop probe has a housing, which is preferably sheathed with a ferrite material or an absorber material to avoid sheath waves.
  • a holder for fastening to the measuring system is additionally formed on the housing.
  • the housing is made of metal, plastic or an absorber material.
  • the first and / or the second junction is formed as a soldered, welded or glued electrical connection.
  • the loop probe additionally has a measuring amplifier for amplifying the coupled signals.
  • the loop probe additionally has a positioning device for positioning it in space, so that the loop probe is displaceable in at least one spatial direction.
  • the positioning device has, for example, at least one servomotor, in particular a stepping motor.
  • FIG. 1 shows a preferred embodiment of a contactless loop probe according to the invention in a perspective view
  • 2 shows the contactless loop probe according to FIG. 1 in a partially broken view
  • FIG. 1 shows a preferred embodiment of a contactless loop probe according to the invention in a perspective view
  • 2 shows the contactless loop probe according to FIG. 1 in a partially broken view
  • FIG. 1 shows a preferred embodiment of a contactless loop probe according to the invention in a perspective view
  • 2 shows the contactless loop probe according to FIG. 1 in a partially broken view
  • FIG. 3 is a coupling structure of the contactless loop probe of FIG. 1 in an enlarged view
  • FIG. 4 shows a schematic illustration of a first preferred embodiment of a coupling structure in the form of a planar conductor
  • FIG. 5 shows a schematic representation of a second preferred embodiment of a coupling structure in the form of a planar conductor
  • FIG. 6 shows a third preferred embodiment of a coupling structure in the form of a
  • FIG. 7 shows the third preferred embodiment of a coupling structure according to FIG. 6 in plan view
  • FIG. 8 shows the third preferred embodiment of a coupling structure according to FIG. 6 in a further side view
  • FIG. 9 shows a first preferred embodiment of an opening formed in an outer conductor of the coupling structure according to FIG. 6, FIG.
  • FIG. 10 shows a second preferred embodiment of an opening formed in an outer conductor of the coupling structure according to FIG. 6, FIG.
  • Fig. 11 shows a third preferred embodiment of a in an outer conductor of
  • Coupling structure according to FIG. 6 formed opening
  • FIG. 12 shows a fourth preferred embodiment of a coupling structure in the form of a
  • Coaxial line in perspective view 13 is a fifth preferred embodiment of a coupling structure in the form of a coaxial line in perspective view and
  • FIG. 14 shows a sixth preferred embodiment of a coupling structure in the form of a coaxial line in a perspective view.
  • the exemplary embodiment of a contactless loop probe according to the invention for contactless coupling out of an RF signal from a signal conductor (not shown) for a contactless measuring system comprises a coupling structure 10, two first signal conductors 12, each with one end of the Coupling structure 10 are electrically connected, and two outputs 14, which are each electrically connected to one of the first signal conductor 12.
  • the two ends of the coupling structure 10 are hereinafter referred to as "first port 16" (FIGS. 4, 5) and “second port 18" (FIGS. 4, 5).
  • the coupling structure 10 is designed as an HF waveguide with at least one signal conductor 24 and at least one reference conductor 26.
  • the contactless loop probe according to the invention is impedance-controlled.
  • FIGS. 4 and 5 show two exemplary embodiments of the coupling structure in the form of a planar conductor.
  • the planar conductor comprises an inner conductor 24 and an outer conductor 26 which terminate at the first gate 16 and the second gate 18, respectively.
  • 6 to 8 show an alternative embodiment for the coupling structure 10. This is formed from a coaxial conductor with an inner conductor 30 and an outer conductor 32.
  • a rectangular opening 34 is formed as a coupling slot, so that the inner conductor 30 is exposed in the region of the opening 34.
  • 9 to 11 show different embodiments for the opening 34, this may be rectangular (FIG. 9) or oval (FIG. 10) and also comprise a plurality of individual openings, as in FIG. 11 using the example with a plurality of circular openings 34 shown.
  • FIGS. 12 to 14 show various embodiments of the coupling structure 10 in the form of a coaxial line with opening 34 in the outer conductor 32, which is arranged near a signal line 36 for coupling out a signal passing through the signal line 36.
  • the non-contact loop probe is used for non-contact measurement system applications such as contactless vector network analysis.
  • the loop probe is positioned in the electromagnetic near field of an electrical signal line 36 (FIGS. 12 to 14). It forms together with the signal line 36 a coupler. A portion of the electromagnetic field of the signal line 36 is coupled out through the loop probe and directed to the output ports 16, 18 of the loop probe.
  • the contactless loop probe according to the invention is impedance-controlled. Impedance controlled loop probes have some advantages over non-impedance controlled probes. U. a. a high directivity can be achieved, less sheath waves are generated, they are analytically better describable and the cut-off frequency is higher than in non-impedance-controlled probes.
  • Impedance-controlled means that the probes are optimized for low reflection and high directivity, ie an impedance-controlled loop probe has a low insertion loss.
  • the impedance-controlled coupling structure 10 can be shaped almost arbitrarily.
  • the coaxial, non-contact loop probe as shown in Figs. 6-14, is formed as a shielded, impedance-controlled coaxial near-field probe. This comprises the coaxial line 30, 32 with a defined coupling slot 34 or with defined coupling holes 34. Examples of different coupling geometries are shown in FIGS. 9 to 11.
  • the coaxial contactless loop probe is used as a coupler in the near field of the RF or microwave line 36.
  • the coupling opening 34 and the coupling openings 34 in combination with the inner conductor 30 of the coaxial line are dimensioned so that the coaxial, non-contact loop probe (probe) a high power transmission with a low reflection factor between Tor 1 16 and Tor 2 18, ie, the geometry of the inner conductor 30 may have a different geometry in the region of the coupling opening (s) 34, as in the remaining coaxial line.
  • the entire probe has inductive and capacitive coupling characteristics and acts as a loop coupler.
  • the coupling structure consists of one or two coaxial conductors with a continuous or connected inner conductor. So that a coupling can be made with a second line, the outer shield (outer conductor) of the coaxial line is completely removed. This leads to a wave jump in the line and thus to reflections.
  • the loop coupler according to FIGS. 6 to 8 only one window 34 is removed from the coaxial shield 32, so that only minor reflections result when feeding a wave into the first port 16 or the second port 18. By changing the inner conductor geometry, these reflections can be further minimized.
  • FIGS. 12 to 14 Various embodiments are shown in FIGS. 12 to 14.
  • the coaxial line is surrounded by an absorber housing.
  • Coupling structure 10 as a planar, impedance-controlled two-wire loop, with an impedance controlled transition to two planar Koplanar ein, in turn, by means of an impedance controlled transition with two coaxial 12th are connected, trained.
  • the shape of the two-wire loop 10 can be arbitrary. Examples of two different forms are given in FIGS. 4 and 5.
  • the coupling structure is designed such that a coupling out of an electromagnetic wave from a waveguide 36 (supply of a DUT) is possible.
  • the coupling structure 10 has at least two further waveguides 12, which are connected to the coupling structure 10.
  • the waveguides 12 connected to the coupling structure 10 are generally equipped with a wave transition 14 for connecting the probe to a measuring system or complex terminating impedances.
  • the probe shown by way of example therefore essentially comprises at least one coupling structure 10 with at least two waveguides 12 and transitions 14, wherein all components are designed to be impedance-controlled together. Impedanzkontrolliert means that at a power supply in any waveguide of the coupling structure 10 is reflected only very little power and a high directivity is achieved when all other waveguides are closed impedance controlled.
  • the coupling structure 10 can also be connected to a plurality of waveguides 12 with impedance control, ie. H. the grinding probe can have more than two outputs 14.
  • the measuring probe has only one output 14, in which case the coupling structure 10 or one of the gates 16, 18 is terminated controlled impedance within the measuring probe housing 28.
  • the loop probe can also have more than one impedance-controlled coupling structure 10.
  • the individual coupling structures 10 are then connected to one another via an impedance-controlled waveguide or second signal conductor.
  • the probes may include a device (sensor) for distance control.
  • a device for distance control.
  • Various sensors are conceivable: optical, electrical, mechanical, electromechanical, etc.
  • the distance information can be communicated to the measuring system electrically, mechanically, visually or acoustically.
  • the impedance-controlled, non-contact loop probe optionally includes additional sensors with which it is possible to obtain an exact three-dimensional spatial
  • These sensors include, for example
  • Pattern recognition methods By means of the probes is an automated
  • the outer housing u. a. coated with ferrite and / or absorber materials.
  • the impedance-controlled, non-contact loop probe can be arbitrarily shaped and made of different waveguides such.
  • waveguides coaxial conductors, planar lines exist.
  • the coupling geometry is optimized for low reflection (impedance controlled) and a high directivity when coupling a loop probes with another waveguide such.
  • the geometry of the housing 28 may be designed arbitrarily shaped.
  • the individual planar lines are electrically connected, for example, to (bonding) wires.
  • the application of the impedance-controlled loop probe is preferably carried out in the field of measurement technology and E MV technology, as well as for the realization of directional couplers.
  • the measuring probe housing 28 may have a holder for mounting the measuring probe to / in a measuring system, as shown in FIGS. 1 and 2.
  • the first transition 20 between the coupling structure 10 and the waveguides 12 may be arbitrary, this being impedance-controlled in each case.
  • the transition is for example soldered, welded or glued.
  • the coupled signals are amplified by means of a measuring amplifier.
  • an amplifier is implemented in the impedance-controlled loop probe, for example in the individual waveguides 12 connected to the coupling structure 10.
  • This amplifier is also impedance controlled, i. its impedance is matched to the input impedance of the probe, so that low input reflections and a high directivity are present. This is then an active measuring probe.
  • the contactless loop probe is combined with a position device, so that the probe can be moved in all dimensions or only in one or two, etc.
  • the position device may be integrated in a probe holder or the housing 28 or connected via a holder with the loop probe or the housing 28.
  • the position device can be manually operated and / or motorized. So it can be active or passive. For example, the distance of the probe to the measuring substrate is adjusted or readjusted with the position device.
  • the positioner may include a control line for control.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
EP09777210A 2008-08-07 2009-07-15 Kontaktlose schleifensonde Ceased EP2321655A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202008010533U DE202008010533U1 (de) 2008-08-07 2008-08-07 Kontaktlose Schleifensonde
PCT/EP2009/005144 WO2010015315A1 (de) 2008-08-07 2009-07-15 Kontaktlose schleifensonde

Publications (1)

Publication Number Publication Date
EP2321655A1 true EP2321655A1 (de) 2011-05-18

Family

ID=39917805

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09777210A Ceased EP2321655A1 (de) 2008-08-07 2009-07-15 Kontaktlose schleifensonde

Country Status (8)

Country Link
US (1) US8963570B2 (zh)
EP (1) EP2321655A1 (zh)
CN (1) CN102112884B (zh)
CA (1) CA2732189C (zh)
DE (1) DE202008010533U1 (zh)
HK (1) HK1157018A1 (zh)
TW (1) TWM370067U (zh)
WO (1) WO2010015315A1 (zh)

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Publication number Priority date Publication date Assignee Title
DE102014117300B4 (de) * 2014-11-26 2019-04-04 Technische Universität Dresden Anordnung und Verfahren zur Vermessung einer elektronischen Struktur
US11047951B2 (en) 2015-12-17 2021-06-29 Waymo Llc Surface mount assembled waveguide transition
WO2018049286A1 (en) * 2016-09-09 2018-03-15 Quality Vision International, Inc. Articulated head with multiple sensors for measuring machine
US11041880B2 (en) * 2017-12-01 2021-06-22 Tektronix, Inc. Contactless coupling between test and measurement system and a device under test
CN109884561B (zh) * 2019-03-29 2021-04-20 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) 磁场检测模块及磁场探头
JP7387285B2 (ja) * 2019-04-26 2023-11-28 日置電機株式会社 プローブ装置
US11747301B2 (en) 2020-12-22 2023-09-05 Industrial Technology Research Institute Magnetic field structure
US12044726B2 (en) * 2021-04-30 2024-07-23 Xcerra Corporation Calibration system

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US4894612A (en) * 1987-08-13 1990-01-16 Hypres, Incorporated Soft probe for providing high speed on-wafer connections to a circuit
US4829242A (en) * 1987-12-07 1989-05-09 Microelectronics And Computer Technology Corporation Multigigahertz probe
US4849689A (en) * 1988-11-04 1989-07-18 Cascade Microtech, Inc. Microwave wafer probe having replaceable probe tip
FR2681946A1 (fr) * 1991-09-27 1993-04-02 Thomson Csf Dispositif pour tests hyperfrequences a large bande realises in situ.
US5539323A (en) * 1993-05-07 1996-07-23 Brooks Automation, Inc. Sensor for articles such as wafers on end effector
US5867020A (en) * 1996-10-31 1999-02-02 Sematech, Inc. Capacitively coupled RF voltage probe having optimized flux linkage
JPH1123615A (ja) * 1997-05-09 1999-01-29 Hitachi Ltd 接続装置および検査システム
DE19945178C2 (de) * 1999-09-21 2003-05-28 Rosenberger Hochfrequenztech Meßspitze zur Hochfrequenzmessung und Verfahren zu deren Herstellung
US7091915B1 (en) * 2001-09-24 2006-08-15 Pctel Antenna Products Group, Inc. Glass-mounted coupler and passive glass-mounted antenna for satellite radio applications
EP1316806A1 (en) * 2001-11-28 2003-06-04 SP Sveriges Provnings- & Forskningsinstitut Non-contact measuring probe device for directional detection of an electromagnetic wave and measuring method
FR2871951B1 (fr) * 2004-06-17 2006-09-08 Cnes Epic Dispositif de transition rntre un guide d'ondes et deux circuits redondants chacun couple a une ligne coplanaire
US7482814B2 (en) * 2004-08-27 2009-01-27 The Board of Regents University Community College System of Nevada on Behalf of the University of Nevada-Las Vegas Electric/magnetic field sensor
US7501833B2 (en) * 2004-10-20 2009-03-10 Wright State University Evanescent microwave microscopy probe and methodology
GB0505646D0 (en) * 2005-03-18 2005-04-27 Oxborrow Mark Solid-state maser oscillator of high frequency stability and low phase noise
DE202007010784U1 (de) * 2007-08-03 2007-10-04 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Kontaktloses Messsystem

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Also Published As

Publication number Publication date
WO2010015315A1 (de) 2010-02-11
US20110267088A1 (en) 2011-11-03
HK1157018A1 (en) 2012-06-22
DE202008010533U1 (de) 2008-10-30
CA2732189A1 (en) 2010-02-11
CA2732189C (en) 2017-07-04
TWM370067U (en) 2009-12-01
CN102112884A (zh) 2011-06-29
US8963570B2 (en) 2015-02-24
CN102112884B (zh) 2013-08-14

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