EP2300721A1 - Dispositif de commande de vide - Google Patents

Dispositif de commande de vide

Info

Publication number
EP2300721A1
EP2300721A1 EP08875028A EP08875028A EP2300721A1 EP 2300721 A1 EP2300721 A1 EP 2300721A1 EP 08875028 A EP08875028 A EP 08875028A EP 08875028 A EP08875028 A EP 08875028A EP 2300721 A1 EP2300721 A1 EP 2300721A1
Authority
EP
European Patent Office
Prior art keywords
control device
vacuum
vacuum control
supply
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08875028A
Other languages
German (de)
English (en)
Other versions
EP2300721B1 (fr
Inventor
Yvonne Krehl
Wolfgang Hanold
Thorsten Canz
Dietmar Wagner
Armin Seitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP2300721A1 publication Critical patent/EP2300721A1/fr
Application granted granted Critical
Publication of EP2300721B1 publication Critical patent/EP2300721B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/466—Arrangements of nozzles with a plurality of nozzles arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F15B13/0839—Stacked plate type valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0864—Signalling means, e.g. LEDs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0867—Data bus systems

Definitions

  • the invention relates to a vacuum control device, comprising at least one base unit for delivering a vacuum to a vacuum consumer, wherein the base unit has a supply and working interface for supply and Häan gleichsch and supply and work connection means for mounting thereto, an exhaust port for a Abluftabriosaku and at least one AbluftabGermanaku for Mounted thereon, an exhaust control interface for a purge controller and at least one purge controller for mounting thereto, and a communication interface for communicating with an external electronic controller.
  • a vacuum control device of this type is known, for example, from DE 10 2004 031 924 B4, in which case a plurality of base units, each containing an ejector, which are combined to form an assembly, are seated on a common distributor plate designated as a receiving device.
  • the distributor plate has a single compressed air connection for connection to an external compressed air generator, whereby the compressed air is guided via an internal plate channel system to each of the base units, where a vacuum generation takes place by means of an integrated ejector.
  • Each of the base units is associated with a suction port or vacuum port, which is also located on the distributor plate. There NEN suction lines that lead to a vacuum consumer or vacuum consumers are connected directly.
  • the vacuum generator units is also associated with a control device which also sits on the distributor plate and controls the generation of vacuum in the individual vacuum generator units and the blow-out process for the purpose of throwing off an object sucked on the vacuum consumer.
  • an electric distribution strip is provided for electrically contacting the vacuum generator units.
  • the object of the invention is to provide a vacuum control device of the type mentioned above, which has over the aforementioned vacuum control device increased functionality and variability.
  • the vacuum control device is characterized in that the supply and work connection means have collecting connection means for mounting a plurality of base units and individual connection means, which are combined as an assembly, for mounting a single base unit.
  • the vacuum control device can be assembled individually from various components of a modular system. It is therefore not determined on the use of collective connection means or of individual connection means, but it is possible to select selectively or even in a module single and common terminal means to combine, since the Va zukuums horrungs worn both collecting and individual connection means belong.
  • the individual connection means are designed as a connection block with a supply and a working connection and / or as two individual line connection elements for connecting a supply line and a working line.
  • the vacuum control device expediently includes both at least one connection block and at least two power connection elements.
  • the Sammelan- closing means are formed by a terminal block, which has a supply port, which opens into a port distribution channel system with each of the base units is coupled, and has a plurality of, each one of the base units associated working ports.
  • the at least one base unit has an ejector for generating vacuum on board the vacuum control device.
  • the ejector can for example be integrated as part of an ejector in a simple manner and quickly exchangeable in the housing of the base unit. He produce compressed air by means of a compressed air flow through the suction nozzle, which generates negative pressure according to the Venturi principle.
  • the advantage of such ejectors is that they usually sit where the vacuum is needed. There are therefore no long vacuum channels required, which would have to be evacuated constantly, so that in the case of the use of ejectors, the negative pressure can be provided immediately.
  • the at least one base unit is designed such that operation takes place without internal vacuum generation, wherein an external vacuum generator, for example in the form of a vacuum pump, can be connected to the supply connection.
  • an external vacuum generator for example in the form of a vacuum pump
  • an embodiment is conceivable in which a plurality of base units are combined to form an assembly and are mounted on collecting connection means, the base units each having ejectors, so that vacuum generation takes place independently of the other base units in each base unit.
  • the at least one Abluftabloomica is designed as a muffler.
  • At least one exhaust air removal unit can be designed as an exhaust air connection for an exhaust air line. So it can be provided so-called exhausted air. It is conceivable, for example, to form at least one of the base units with a silencer and at least one of the base units with ducted exhaust air in the case of a plurality of base units combined to form a module.
  • the vacuum control device has both at least one silencer and at least one exhaust air connection, so that it is also possible to selectively combine it here.
  • the at least one Ausblas tenuously is designed as a blow-off, which is switchable between a suction operation of the vacuum control device associated first switching position and a blow-out associated, 2o compressed air to the associated working port passing second switching position.
  • At least one Ausblas askTER is designed as a blow-out with associated Ausblashuntventil, the Ausblashunt
  • blow-out chamber i. if necessary, to enlarge or reduce. This can be done, for example, by arranging the blow-out chamber in a working cylinder with a piston which is displaceably mounted therein.
  • the vacuum control device has both at least one blow-off valve and at least one blow-out chamber, so that a targeted selection or combination is possible, whereby the variability of the vacuum control device is further increased.
  • the Ausblashuntventil is designed as a shuttle valve, which is switched by the vacuum generated in the Ausblashunt closing first switching position and upon removal of the vacuum by the pressure prevailing in the Ausblashunt in the second switching position.
  • the puffing chamber prefferably located in a blow-off container separate from the base unit and mountable to the base unit at the blow-off interface.
  • an all-base unit in particular the spanning, strip-like or plate-like contacting unit, which is connected to a first contact.
  • tismesflache arranged connection contacts is connected directly to the base units and on which the communication interface is formed on a second contacting surface.
  • an internal control electronics is respectively located in the base units 5 or, in the case of an assembly, an electronic control unit activating several base units is provided.
  • the contacting unit minimizes the number of data lines which have to be fed to the vacuum control device, since it now suffices for an external electronic device
  • Control device to introduce a single data line to the communication interface and not to connect each of the base units via a separate data line with the external electronic control device.
  • the contacting unit expediently has a display / evaluation device for displaying different operating states of the vacuum control device or optionally manual value input.
  • the communication interface is designed as a link and / or bus interface.
  • an IO-Link interface is provided as the link interface.
  • FIG. 1 shows a schematic, morphological illustration of the vacuum control device according to the invention with the various interfaces and the selection of the components which can be attached to these interfaces
  • FIG. 2 is a perspective view of a first embodiment of the vacuum control device according to the invention
  • FIG. 3 shows a perspective illustration of a second exemplary embodiment of the vacuum control device according to the invention
  • FIG. 4 shows a side view of a third exemplary embodiment of the vacuum control device according to the invention
  • Figure 5 is a perspective view of a fourth embodiment of the vacuum control device according to the invention.
  • FIG. 6 shows a perspective view of a fifth embodiment of the vacuum control device according to the invention.
  • FIG. 1 illustrates by way of example a plate-shaped product 12 as an object.
  • the vacuum control device contains at least one base unit 13 for delivering a vacuum to a vacuum consumer, for example a suction gripper 14.
  • the base unit 13 has a supply and working interface 15 for supply and work connection means in the form of individual connection means 15 and group connection means 16, the latter also belonging to the vacuum control device 11.
  • the collective connection means 16 are formed by at least one connection strip, which has an upper mounting surface 17, which is compatible with the supply and operating interface 20 on the base unit 13.
  • the terminal block further has a supply terminal 19, which opens into a terminal distribution channel system 21, which is coupled to each of the base units 13, and a plurality of, in each case one of the base units 13 associated working ports 22 has.
  • the connection bar is also shown explicitly once again in FIG.
  • the vacuum control device also has individual connection means 15, which may be present in two variants.
  • the individual connection means can be configured as a terminal block, which, like the terminal block, has an upper mounting surface 26 for mounting a single base unit 13. Furthermore, a supply connection 19 and a working connection 22 are still located on the connection block 25.
  • Another embodiment of the individual connection means is in the form of two individual line connection elements for connecting a supply line and a working line.
  • the line connection elements may be, for example, fittings or screwed connections which can be docked to corresponding bores in the housing 27 of the base unit, for example screwed on.
  • connection block 25 The individual connection means in the form of the connection block 25 and in the form of the two line connection Elements 28a, 28b are shown in FIGS. 3 and 4.
  • the vacuum control device 11 thus has at least one connection strip, at least one connection block and at least two line connection elements, so that selectively selected from the abovementioned connection means at the supply and operating interface 20 or, in the case of an assembly comprising a plurality of base units, also different connection means are combined in succession can.
  • the vacuum control device 11 also has an ejector 23, which is part of an ejector cartridge.
  • the ejector cartridge can be integrated interchangeably into the base unit by way of an example of a horizontally aligned ejector housing 24 in the housing 27 of the associated base unit 13.
  • the ejector 23 has at least one venturi nozzle (not shown), whose inlet is connected to an external source of compressed air via an air supply duct and the supply connection 19, which is now designed as a compressed air supply connection.
  • an external vacuum generator for example in the form of a vacuum pump.
  • a suction line leading to the external vacuum generator can be connected to the supply connection 19 of the connection block and / or the connection strip and / or one of the line connection elements 28a.
  • the vacuum control device 11 also has at least one exhaust air discharge unit in the form of a silencer, which can be attached to the exhaust air interface 30. As shown in particular in FIG. 2, the silencer 29 is preferably located. tgue at the output of the ejector and protrudes from the housing 27 of a respective base unit 13. Expediently, in addition to the at least one silencer, the vacuum control device 11 has at least one exhaust air removal unit in the form of an exhaust air connection 31, to which an exhaust air line can be connected. The exhaust air can therefore be removed as so-called exhaust air.
  • the vacuum controller 11 further has at least one purge control device in the form of a purge valve 32 attachable to the purge control interface 40.
  • the purge valve 31 has a 2/2 -Wege- functionality and locks in the suction operation of the vacuum control device 11 from the air in the case of the use of ejectors 23 from an external compressed air source via the supply port supplied compressed air via a corresponding channel branching within the housing 27th the base unit 13 is present.
  • the blow-off valve 32 By switching the blow-off valve 32 in the open position, the blow-out is initiated, whereby the upcoming compressed air is provided at the Häan- connection 22 as a blow-out pulse, resulting in the ejection of the sucked on the associated vacuum consumer object.
  • compressed air is made available via a further compressed air connection, that is not via the supply connection 19, since the external vacuum generator is connected here.
  • At least one blow-out control device in the form of a blow-out chamber 33 can be provided, which in turn is provided with an associated blow-out chamber. can be equipped.
  • the blow-out chamber can be filled in the suction operation by pending compressed air, which is provided in the blow-out by switching the blow-off chamber valve from a first to a second position at the 5 working port as a blow-out.
  • the blow-out chamber 33 is filled in the suction operation via the above-mentioned further compressed-air connection, so that here too a blow-out pulse lo is available at the working connection in the blow-out mode.
  • the blow-off chamber valve is expediently designed as a shuttle valve 34 that can be switched into the second switching position by the vacuum generated in the first blow-off chamber closing the blow-off chamber 33 and when the vacuum is removed by the pressure prevailing in the blow-off chamber 33, in which then the blow-out chamber can emit stored air.
  • the vacuum control device 11 further has a control valve 35, which in the case of the use of ejectors 23 in the
  • the control valve 35 suitably has a 2/2 -way functionality. As a result, it can optionally block the passage of air through the air supply channel or release it.
  • the Ej ector gate 23 also has a suction side or suction port, which is connected via a suction channel to the working port 22, what then vacuum for the connected vacuum consumer, such as suction pad 14, is provided.
  • a check valve may be turned on. It is then used when the vacuum control device 11 is equipped with an air-saving function.
  • the check valve is oriented so that it allows air flow from the vacuum consumer, so for example, suction pad towards the ejector 23, but prevented in the opposite direction.
  • the vacuum control device 11 further has a pressure detection device, which allows detection of the pressure prevailing in the suction channel and consequently also the negative pressure prevailing therein.
  • the pressure detection device is, in particular, a pressure sensor 36 which converts the pneumatic pressure into electrical pressure signals and feeds them to the control valve 35 via an internal electronic control device (not shown) called control electronics or alternatively external control device.
  • the control electronics thus provide the actuation signals for the control valve 35 and expediently also for the blow-off valve 32.
  • the vacuum control device 11 further has a communication interface 50 for communicating with the external control device and expediently also for supplying voltage to the associated base unit 13. If internal control electronics are provided, the communication interface 50 also serves to supply it with power.
  • the communication interface 50 may have at least one, in particular 4- or 5-pin plug connection, which is designed for example as a 5-pin M12 plug connection. It consists of a plug and a plug-in receptacle.
  • the connection cable is designed as a 4- or 5-pole cable.
  • the communication interface can also be designed as a link or bus interface.
  • a link interface in the form of an IO-Link interface can be provided.
  • the connection cable formed between the external electronic control device and the communication interface can also be designed as a bus line or contain bus lines. For example, two bus lines can simultaneously serve as voltage supply lines, wherein the control signals and optionally feedback and diagnostic signals are then modulated.
  • a plate-like contacting unit 37 which is associated with all the base units 13 and which is connected directly to the base units via a first contacting area 38 on a second contacting surface 39, the communication interface 50 is formed. It is expedient to use a contacting unit 37 which, as shown in FIG. 2, covers the upper side of the base units 13, which are combined to form an assembly, in a hat-like manner.
  • the communication interface can then be provided, for example, on the side surface of this contacting unit 37, while a display and evaluation unit 41 for displaying various operating states can be formed on the upper side.
  • the display and evaluation unit 41 may further comprise, for example, for manual adjustment or programming of the internal control electronics, a display and, for example, formed as a keyboard input means. Of course, such input or programming can also be handled by the external electronic er worn off. Furthermore, the display device may also have differently colored LED's 43 or other lighting means, with which a certain operating state is displayed.
  • the internal control electronics can also be accommodated in the contacting unit 37.
  • FIGS. 2 to 6 now show various embodiments of the vacuum control device 11 according to the invention, in each of which a specific combination of components is selectively attached to the corresponding interfaces.
  • Figure 2 shows the use of a terminal block on which a plurality of combined into a module base units 13 are mounted.
  • the base units each have an ejector 23 which is supplied with compressed air via an external compressed air source and the compressed air supply connection 19 arranged in the connection strip.
  • Each of the base units 13 is associated with a separate working port 22, is provided at the negative pressure for a downstream vacuum consumer, such as suction pad 14, available.
  • a muffler 29 is seated at the exhaust air interface 30 of the respective base units 13.
  • Also attached to the purge control interface 40 is a purge valve 32 which controls the purging operation.
  • the communication interface 50 is formed on a hat-type contacting unit 37. Furthermore, several differently colored LED's 43 are provided here at the top of this contacting 37, which serve to display the operating state and / or switching state of the control and blow-out.
  • FIG. 3 shows a further exemplary embodiment of the vacuum control device 11, in which a single base unit 13 is mounted on a connection block 25. Again, An ejector 23 is therefore inserted, so that compressed air passes via the supply connection of the connection block 25 to the ejector 23. At the working port 22 can then vacuum for the vacuum consumers, such as suction pad 14, are tapped. At the exhaust air interface 30 is in turn a
  • Silencer 29 arranged.
  • a purge valve 32 is provided.
  • the communication interface 50 plug connections for connecting a power supply line and a data line.
  • a contacting unit which has a display and evaluation unit 41 in the form of an LCD display and input means in the form of keys.
  • the fifth exemplary embodiment shown in FIG. 6 differs from the previously described fourth exemplary embodiment in that the display and evaluation unit 41 has only LEDs.
  • the vacuum control device has various interfaces which, depending on requirements, can be equipped with different interface components, so that completely different, tailored to the individual requirements.
  • right cut vacuum control devices 11 can be realized.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

L'invention concerne un dispositif de commande de vide, comprenant au moins une unité de base (13) pour fournir un vide à un consommateur de vide. L'unité de base (13) comprend une interface d'alimentation et de travail (20) pour des moyens de raccordement d'alimentation et de travail ainsi que des moyens de raccordement et d'alimentation (15, 16, 28a, 28b) à monter dessus, une interface de désaération (30) pour une unité de désaération (29, 31) ainsi qu'une unité de désaération (29, 31) à monter dessus, une interface de commande de soufflage (40) pour un appareil de commande de soufflage (32, 33) ainsi qu'un appareil de commande de soufflage (32, 33) à monter dessus et une interface de communication (50) pour la communication avec un dispositif de commande électronique externe. Les moyens de raccordement d'alimentation et de travail comportent des moyens de raccordement communs (16) pour le montage de plusieurs unités de base (13) regroupées en un module et un moyen de raccordement individuel (15) pour le montage d'une unité de base individuelle (13).
EP08875028.6A 2008-11-21 2008-11-21 Dispositif de commande de vide Active EP2300721B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/009904 WO2010057507A1 (fr) 2008-11-21 2008-11-21 Dispositif de commande de vide

Publications (2)

Publication Number Publication Date
EP2300721A1 true EP2300721A1 (fr) 2011-03-30
EP2300721B1 EP2300721B1 (fr) 2017-04-12

Family

ID=40886095

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08875028.6A Active EP2300721B1 (fr) 2008-11-21 2008-11-21 Dispositif de commande de vide

Country Status (4)

Country Link
EP (1) EP2300721B1 (fr)
KR (1) KR101672560B1 (fr)
CN (1) CN102089528B (fr)
WO (1) WO2010057507A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118173B4 (de) * 2011-11-10 2015-10-08 Festo Ag & Co. Kg Verfahren zum Betreiben einer Vakuumgreifeinrichtung, Vakuumsteuereinrichtung und Manipulator
CN103379740B (zh) * 2012-04-13 2014-11-05 深圳市腾世机电有限公司 一种贴片机的真空切换装置
DE102015206717B3 (de) * 2015-04-15 2016-08-18 Festo Ag & Co. Kg Vakuumerzeugervorrichtung
DE102016110904A1 (de) * 2016-06-14 2017-12-14 Bürkert Werke GmbH Ventilbaugruppe
GB202006660D0 (en) * 2020-05-05 2020-06-17 Brillopak Ltd Vacuum suction apparatus
KR102225162B1 (ko) * 2020-06-19 2021-03-09 (주)브이텍 진공 시스템용 에어-밸브 유닛
DE102022110636A1 (de) 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0353039Y2 (fr) * 1987-05-30 1991-11-19
WO1993005326A1 (fr) * 1991-09-10 1993-03-18 Smc Kabushiki Kaisha Machine fonctionnant avec la pression
US5617898A (en) * 1991-09-10 1997-04-08 Smc Kabushiki Kaisha Fluid pressure apparatus
DE19904042A1 (de) * 1999-02-02 2000-09-21 Schmalz J Gmbh Ejektor
DE20011839U1 (de) * 2000-07-07 2000-12-14 Festo AG & Co, 73734 Esslingen Vakuumerzeugervorrichtung
DE102004031924B4 (de) * 2004-06-23 2006-05-04 J. Schmalz Gmbh Vorrichtung zum Erzeugen eines Unterdrucks

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010057507A1 *

Also Published As

Publication number Publication date
CN102089528B (zh) 2015-01-14
EP2300721B1 (fr) 2017-04-12
KR101672560B1 (ko) 2016-11-03
CN102089528A (zh) 2011-06-08
KR20110089250A (ko) 2011-08-05
WO2010057507A1 (fr) 2010-05-27

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