EP2294317B1 - Durch einen polymerwandler angetriebene pumpe - Google Patents

Durch einen polymerwandler angetriebene pumpe Download PDF

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Publication number
EP2294317B1
EP2294317B1 EP09737757.6A EP09737757A EP2294317B1 EP 2294317 B1 EP2294317 B1 EP 2294317B1 EP 09737757 A EP09737757 A EP 09737757A EP 2294317 B1 EP2294317 B1 EP 2294317B1
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European Patent Office
Prior art keywords
pump
transducer
laminate
rolled
film
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Not-in-force
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EP09737757.6A
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English (en)
French (fr)
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EP2294317A1 (de
Inventor
Morten Kjaer Hansen
Benjamin Thomsen
Michael Tryson
Mohamed Benslimane
Yousef Iskandarani
Christopfer Mose
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Danfoss PolyPower AS
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Danfoss PolyPower AS
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (20)

  1. Fluidpumpe (1) zum Verdrängen eines Fluidmediums von einem Einlass (5, 12, 26, 43, 50, 55, 70, 79, 92, 94) zu einem Ausgang (6, 13, 27, 44, 51, 56, 71, 80, 93, 95), wobei die Pumpe (1) ein Gehäuse (2, 28, 45, 52, 69, 77), das einen Pfad zwischen dem Einlass und dem Ausgang bildet, und einen Wandler (9, 11, 21, 49, 66, 74, 75, 83) umfasst, der ein Laminat umfasst, wobei ein Film aus einem dielektrischen Polymermaterial so zwischen einer ersten und einer zweiten Schicht aus einem elektrisch leitenden Material angeordnet ist, dass er als Reaktion auf ein elektrisches Feld, das zwischen den Schichten angelegt wird, verlagerbar ist, wobei das Laminat so angeordnet ist, dass es bei Verlagerung des Films eine Pumptätigkeit verursacht, wobei der Film eine erste Fläche und eine entgegengesetzte zweite Fläche aufweist, wobei wenigstens die erste Fläche ein Oberflächenmuster aus erhöhten und vertieften Oberflächenabschnitten umfasst, dadurch gekennzeichnet, dass der Film zwei Arten von periodischen Veränderungen aufweist, ein Untermuster, das ein aufgedrucktes Oberflächenmuster aus Strukturen ist, die senkrecht zu dem Film geformt sind, und ein Übermuster, das durch wiederholte Untermuster gebildet ist.
  2. Pumpe (1) nach Anspruch 1, wobei das Laminat einen mehrschichtigen Aufbau mit wenigstens zwei Verbundstoffen umfasst, wobei jeder Verbundstoff Folgendes umfasst:
    - einen Film, der aus einem dielektrischen Polymermaterial besteht und eine Vorderfläche und eine Rückfläche aufweist, wobei die Vorderfläche ein Oberflächenmuster aus erhöhten und vertieften Oberflächenabschnitten umfasst, und
    - eine erste Schicht aus einem elektrisch leitenden Material, das auf dem Oberflächenmuster abgelagert ist, wobei die elektrisch leitende Schicht eine geriffelte Form aufweist, die durch das Oberflächenmuster des Films gebildet ist.
  3. Pumpe (1) nach einem der vorhergehenden Ansprüche, wobei das Laminat so zusammengerollt ist, dass es einen länglichen Wandler (9, 11, 21, 49, 66, 74, 75, 83) mit in der Achsenrichtung entgegengesetzten Endflächen und einem zylindrisch geformten Körperabschnitt zwischen den Endflächen bildet.
  4. Pumpe (1) nach Anspruch 3, wobei das zusammengerollte Laminat einen Trägheitsradius rg, der durch r g = I A
    Figure imgb0004
    gegeben ist, definiert, wobei I das Flächenträgheitsmoment des zusammengerollten Wandlers (9, 11, 21, 49, 66, 74, 75, 83) ist, und rg im Bereich von 5 mm bis 100 mm liegen kann.
  5. Pumpe (1) nach Anspruch 3 oder 4, wobei das zusammengerollte Laminat ein durch λ = L/rg gegebenes Schlankheitsverhältnis λ definieren kann, wobei L eine axiale Länge des zusammengerollten Laminats ist, und λ kleiner als 20 ist.
  6. Pumpe (1) nach einem der vorhergehenden Ansprüche, wobei die erste elektrisch leitende Schicht auf dem Oberflächenmuster abgelagert ist und eine Form aus erhöhten und vertieften Oberflächenabschnitten aufweist, die durch das Oberflächenmuster gebildet ist.
  7. Pumpe (1) nach Anspruch 6, wobei das Oberflächenmuster Wellen umfasst, die Wellentäler und Wellenkämme bilden, welche sich in im Wesentlichen eine gemeinsame Richtung erstrecken, und wobei jede Welle eine Höhe definiert, die ein kürzester Abstand zwischen einem Wellenkamm und benachbarten Wellentälern ist, wobei ein Durchschnitt der Höhen der Wellen zwischen 1/3 und 20 µm liegt.
  8. Pumpe (1) nach einem der Ansprüche 6 und 7, wobei die zweite Fläche im Wesentlichen flach ist.
  9. Pumpe (1) nach einem der vorhergehenden Ansprüche, wobei wenigstens ein Abschnitt des Pfads in einem Körper aus einem elastisch verformbaren Material bereitgestellt ist, wobei der Wandler (9, 11, 21, 49, 66, 74, 75, 83) so angeordnet ist, dass er den Körper bei einer Verlagerung des Films verlagert, wodurch der Pfad sein Volumen verändert.
  10. Pumpe (1) nach Anspruch 9, wobei der Körper eine eingebaute Spannung aufweist, die den Pfad in eine neutrale Gestaltung presst, aus der er durch den Wandler (9, 11, 21, 49, 66, 74, 75, 83) gegen die eingebaute Spannung in eine aktivierte Gestaltung geschoben werden kann.
  11. Pumpe (1) nach Anspruch 10, wobei die neutrale Gestaltung einen niedrigeren Fließwiderstand in dem Pfad bereitstellt, als die aktivierte Gestaltung.
  12. Pumpe (1) nach Anspruch 10, wobei die neutrale Gestaltung einen höheren Fließwiderstand in dem Pfad bereitstellt, als die aktivierte Gestaltung.
  13. Pumpe (1) nach einem der Ansprüche 9 bis 12, wobei der Körper zylindrisch geformt und hohl ist und einen Teil des Pfads bildet.
  14. Pumpe (1) nach Anspruch 13, wobei das Laminat so in Bezug auf ein Oberflächenmuster von wenigstens einer der Schichten zusammengerollt ist, dass die Verlagerung des Films eine radiale Ausdehnung des Wandlers (9, 11, 21, 49, 66, 74, 75, 83) verursacht.
  15. Pumpe (1) nach Anspruch 13, wobei das Laminat so in Bezug auf ein Oberflächenmuster von wenigstens einer der Schichten zusammengerollt ist, dass die Verlagerung des Films eine axiale Ausdehnung des Wandlers (9, 11, 21, 49, 66, 74, 75, 83) verursacht.
  16. Pumpe (1) nach einem der vorhergehenden Ansprüche, umfassend einen Balg mit einem Innenraum, wobei der Wandler (9, 11, 21, 49, 66, 74, 75, 83) dazu eingerichtet ist, den Balg zu verlagern und dadurch in dem Raum ein veränderliches Volumen bereitzustellen.
  17. Pumpe (1) nach einem der vorhergehenden Ansprüche, umfassend einen Zylinder, der einen Teil des Pfads bildet und mit zwei Rückschlagventilen versehen ist, die dazu eingerichtet sind, einen unidirektionalen Fluss von dem Einlass (5, 12, 26, 43, 50, 55, 70, 79, 92, 94) durch den Zylinder zu dem Ausgang (6, 13, 27, 44, 51, 56, 71, 80, 93, 95) zu verursachen, und einen Kolben, der in einem Zylinder beweglich ist, wobei der Wandler (9, 11, 21, 49, 66, 74, 75, 83) dazu eingerichtet ist, den Kolben in Bezug auf den Zylinder zu bewegen.
  18. Pumpe (1) nach einem der vorhergehenden Ansprüche, und umfassend ein Steuersystem, das dazu geeignet ist, zwischen den Schichten eine bekannte Vorspannung anzulegen und gleichzeitig ein Maß zu bestimmen, das für eine Kapazität des Laminats bezeichnend ist.
  19. Pumpe (1) nach Anspruch 18, wobei der Wandler (9, 11, 21, 49, 66, 74, 75, 83) dazu eingerichtet ist, eine Verlagerung einer Kammer mit veränderlichem Volumen bereitzustellen.
  20. Steuersystem mit einer Pumpe (1) nach einem der Ansprüche 1 bis 19, wobei das Steuersystem dazu geeignet ist, zwischen den Schichten eine bekannte Vorspannung anzulegen und gleichzeitig eine Kapazität eines Laminats der Pumpe (1) zu bestimmen.
EP09737757.6A 2008-04-30 2009-04-30 Durch einen polymerwandler angetriebene pumpe Not-in-force EP2294317B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DKPA200800619 2008-04-30
PCT/DK2009/000098 WO2009132651A1 (en) 2008-04-30 2009-04-30 A pump powered by a polymer transducer

Publications (2)

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EP2294317A1 EP2294317A1 (de) 2011-03-16
EP2294317B1 true EP2294317B1 (de) 2013-04-17

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US (1) US20110189027A1 (de)
EP (1) EP2294317B1 (de)
CN (1) CN102084133A (de)
WO (1) WO2009132651A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014224697A1 (de) 2014-12-03 2016-06-09 Zf Friedrichshafen Ag Gangwähler für ein Getriebe
DE102016014832A1 (de) * 2016-12-14 2018-06-14 Drägerwerk AG & Co. KGaA Kammerpumpe und Verfahren zum Betrieb einer Kammerpumpe
DE102016014831A1 (de) * 2016-12-14 2018-06-14 Drägerwerk AG & Co. KGaA Schlauchpumpe und Verfahren zum Betrieb einer Schlauchpumpe

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013044195A2 (en) * 2011-09-22 2013-03-28 Parker-Hannifin Corporation Selp pumping and sensing hose utilizing electroactive polymer strips
WO2014097119A2 (en) * 2012-12-18 2014-06-26 Koninklijke Philips N.V. Eap-driven airpump for patient interfaces
CN104763620B (zh) * 2014-10-31 2016-01-27 浙江大学 柔性蠕动泵
US10119532B2 (en) * 2015-02-16 2018-11-06 Hamilton Sundstrand Corporation System and method for cooling electrical components using an electroactive polymer actuator
CN107420291B (zh) * 2017-07-13 2019-04-23 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN112081723B (zh) * 2020-08-18 2021-12-14 华南农业大学 一种基于谐振差分位移放大压电泵
CN113482893B (zh) * 2021-06-10 2022-04-01 浙江大学 一种基于介电弹性材料的柔性泵
CN116971970B (zh) * 2023-09-22 2023-12-22 哈尔滨工业大学 基于缩放结构的电驱动多线程柔性电流体泵及其制备方法

Family Cites Families (106)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130532A (en) * 1933-01-16 1938-09-20 Dubilier Condenser Corp Electrical condenser
US2716708A (en) * 1950-11-17 1955-08-30 Nat Res Dev Apparatus for launching ultrasonic waves
US3109202A (en) * 1952-10-09 1963-11-05 Continental Gummi Werke Ag Mold for use in connection with the casting of transmission belts
BE642434A (de) * 1958-06-04
US3544733A (en) * 1967-06-15 1970-12-01 Minnesota Mining & Mfg Electrostatic acoustic transducer
US3565195A (en) * 1969-04-16 1971-02-23 Sibany Mfg Corp Electrical weighing apparatus using capacitive flexible mat
US3753294A (en) * 1970-02-27 1973-08-21 Schlumberger Technology Corp Method and apparatus for measuring depth
US3912830A (en) * 1971-10-13 1975-10-14 Kureha Chemical Ind Co Ltd Method of producing a piezoelectric or pyroelectric element
US3831629A (en) * 1972-01-24 1974-08-27 Halkey Roberts Corp Check valve
US3898722A (en) * 1973-04-02 1975-08-12 Xerox Corp Process for forming an electrode
US3875481A (en) * 1973-10-10 1975-04-01 Uniroyal Inc Capacitive weighing mat
US3898585A (en) * 1974-01-14 1975-08-05 Ibm Leaky corrugated optical waveguide device
CH609774A5 (de) * 1977-01-21 1979-03-15 Semperit Ag
JPS5411173U (de) * 1977-06-24 1979-01-24
FR2409654B1 (fr) * 1977-11-17 1985-10-04 Thomson Csf Dispositif transducteur piezoelectrique et son procede de fabrication
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4322877A (en) * 1978-09-20 1982-04-06 Minnesota Mining And Manufacturing Company Method of making piezoelectric polymeric acoustic transducer
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
US4386386A (en) * 1980-04-22 1983-05-31 Nippon Soken, Inc. Capacitor type sensor for detecting displacement or load
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4431882A (en) * 1982-08-12 1984-02-14 W. H. Brady Co. Transparent capacitance membrane switch
DE3372407D1 (en) * 1982-09-29 1987-08-13 Emi Ltd A tactile array sensor
US4654834A (en) * 1983-05-19 1987-03-31 Dorr John A Weatherproofed ultrasonic transducer assembly and systems incorporating same
US4584625A (en) * 1984-09-11 1986-04-22 Kellogg Nelson R Capacitive tactile sensor
US4654546A (en) * 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
US4634917A (en) * 1984-12-26 1987-01-06 Battelle Memorial Institute Active multi-layer piezoelectric tactile sensor apparatus and method
US4640137A (en) * 1985-05-31 1987-02-03 Lord Corporation Tactile sensor
US4852443A (en) * 1986-03-24 1989-08-01 Key Concepts, Inc. Capacitive pressure-sensing method and apparatus
US5319153A (en) * 1986-04-28 1994-06-07 Lawrence Fishman Musical instrument transducer assembly having a piezoelectric sheet
DE3642780A1 (de) * 1986-05-05 1987-11-12 Siemens Ag Detektormatte und verfahren zu ihrer herstellung
GB8619800D0 (en) * 1986-08-14 1986-09-24 Microelectronics Applic Resear Tactile sensor device
DE3634855C1 (de) * 1986-10-13 1988-03-31 Peter Seitz Kapazitive Messanordnung zur Bestimmung von Kraeften und/oder Druecken
GB8625686D0 (en) * 1986-10-27 1986-11-26 Ministry Of Agriculture Fisher Assessing processing strains
US5048536A (en) * 1987-04-03 1991-09-17 Mcewen James A Tourniquet for regulating applied pressures
US4786837A (en) * 1987-05-05 1988-11-22 Hoechst Celanese Corporation Composite conformable sheet electrodes
US4825116A (en) * 1987-05-07 1989-04-25 Yokogawa Electric Corporation Transmitter-receiver of ultrasonic distance measuring device
FR2615941B1 (fr) * 1987-05-25 1991-12-06 Sfena Dispositif de detection de position d'un organe de commande sur une tablette tactile
US4879698A (en) * 1988-11-03 1989-11-07 Sensor Electronics, Inc. Piezopolymer actuators
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (Fh), 8999 Maierhoefen, De
JP3156053B2 (ja) * 1989-01-23 2001-04-16 ザ・ユニヴァーシテイ・オブ・メルボルン 電子変換器
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
US5173162A (en) * 1989-07-05 1992-12-22 Mitsui Toatsu Chemicals, Inc. Multi-layered electrostrictive effect element
JP3039971B2 (ja) * 1989-09-19 2000-05-08 株式会社日立製作所 接合型圧電装置及び製造方法並びに接合型圧電素子
US5060527A (en) * 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5425275A (en) * 1990-06-01 1995-06-20 Lockshaw; James Hull monitoring apparatus and method
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE4027753C2 (de) * 1990-09-01 1994-06-09 Karlheinz Dr Ziegler Kapazitiver Kraftsensor
US5090246A (en) * 1990-09-19 1992-02-25 Johnson Service Corp. Elastomer type low pressure sensor
FR2667256A1 (fr) * 1990-10-02 1992-04-03 Thomson Csf Dispositif pour eliminer le givre forme en surface d'une paroi, notamment d'une fenetre optique ou radioelectrique.
US5259099A (en) * 1990-11-30 1993-11-09 Ngk Spark Plug Co., Ltd. Method for manufacturing low noise piezoelectric transducer
JPH04253382A (ja) * 1991-01-30 1992-09-09 Nec Corp 電歪効果素子
US5115680A (en) * 1991-03-04 1992-05-26 Lew Hyok S Displacement sensor with mechanical preamplification means
US5225959A (en) * 1991-10-15 1993-07-06 Xerox Corporation Capacitive tactile sensor array and method for sensing pressure with the array
US5341062A (en) * 1991-11-12 1994-08-23 The Whitaker Corporation Piezoelectric energy generator
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5449002A (en) * 1992-07-01 1995-09-12 Goldman; Robert J. Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation
JP3270527B2 (ja) * 1992-07-08 2002-04-02 呉羽化学工業株式会社 筒状ないし曲面化圧電素子
US5260095A (en) * 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers
US5321332A (en) * 1992-11-12 1994-06-14 The Whitaker Corporation Wideband ultrasonic transducer
US5760530A (en) * 1992-12-22 1998-06-02 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectric tactile sensor
US6282956B1 (en) * 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
US5515341A (en) * 1993-09-14 1996-05-07 The Whitaker Corporation Proximity sensor utilizing polymer piezoelectric film
US5494090A (en) * 1994-01-07 1996-02-27 Electrion, Inc. Lightweight pressure-airless tire construction
US5520630A (en) * 1994-02-14 1996-05-28 Daneshvar; Yousef E-Z leg supports
SE503018C2 (sv) * 1994-03-17 1996-03-11 Ffv Aerotech Ab Anordning för att utöva tryck på människokropp
US5556700A (en) * 1994-03-25 1996-09-17 Trustees Of The University Of Pennsylvania Conductive polyaniline laminates
US5559387A (en) * 1994-05-13 1996-09-24 Beurrier; Henry R. Piezoelectric actuators
EP0765453B1 (de) * 1994-06-24 2001-01-10 United Technologies Corporation Voreinspritzung für gasturbinenanlagen
US5604314A (en) * 1994-10-26 1997-02-18 Bonneville Scientific Incorporated Triaxial normal and shear force sensor
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5977685A (en) * 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator
JPH09223943A (ja) * 1996-02-19 1997-08-26 Nec Corp 弾性表面波デバイス
US5817099A (en) * 1996-06-06 1998-10-06 Skolik; Stephanie A. Universal port/seal device for ocular surgery
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US5891065A (en) * 1996-07-31 1999-04-06 Spinal Cord Society Mobile extremity pumping apparatus
DE19631188A1 (de) * 1996-08-02 1998-02-05 Heraeus Kulzer Gmbh Entladungslampenanordnung
FR2755006B1 (fr) * 1996-10-25 1998-12-18 Couzan Serge Bas de contention pour la pratique du sport
WO1998027547A1 (en) * 1996-12-16 1998-06-25 Seagate Technology, Inc. Bimorph piezoelectric microactuator head and flexure assembly
JPH10247474A (ja) * 1997-01-06 1998-09-14 Sony Corp 平面照明灯及びその製造方法
US6008582A (en) * 1997-01-27 1999-12-28 Dai Nippon Printing Co., Ltd. Plasma display device with auxiliary partition walls, corrugated, tiered and pigmented walls
US6891317B2 (en) * 2001-05-22 2005-05-10 Sri International Rolled electroactive polymers
WO1998035529A2 (en) * 1997-02-07 1998-08-13 Sri International Elastomeric dielectric polymer film sonic actuator
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US5841143A (en) * 1997-07-11 1998-11-24 The United States Of America As Represented By Administrator Of The National Aeronautics And Space Administration Integrated fluorescene
US6210514B1 (en) * 1998-02-11 2001-04-03 Xerox Corporation Thin film structure machining and attachment
US6123681A (en) * 1998-03-31 2000-09-26 Global Vascular Concepts, Inc. Anti-embolism stocking device
JPH11299273A (ja) * 1998-04-15 1999-10-29 Minolta Co Ltd 圧電変換素子及び圧電変換素子を使用したアクチエ−タ
US6184608B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
US6362559B1 (en) * 1999-02-12 2002-03-26 Face International Corp. Piezoelectric transformer with segmented electrodes
US6664718B2 (en) * 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US6222305B1 (en) * 1999-08-27 2001-04-24 Product Systems Incorporated Chemically inert megasonic transducer system
US6911764B2 (en) * 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
AU2001268027A1 (en) * 2000-02-23 2001-09-12 Sri International Biologically powered electroactive polymer generators
US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
DE10049288B4 (de) * 2000-10-04 2004-07-15 Infineon Technologies Ag Elektronische Bauteile und eine Folienband zum Verpacken von Bonddrahtverbindungen elektronischer Bauteile sowie deren Herstellungsverfahren
US6511709B1 (en) * 2001-08-15 2003-01-28 Lexmark, International, Inc. Method of dip coating fuser belt using alcohol as a co-solvent
JP3832338B2 (ja) 2001-12-25 2006-10-11 松下電工株式会社 電歪ポリマーアクチュエータ
US7371223B2 (en) 2002-10-02 2008-05-13 Boston Scientific Scimed, Inc. Electroactive polymer actuated heart-lung bypass pumps
US20050113892A1 (en) 2003-11-26 2005-05-26 Sproul Michael E. Surgical tool with an electroactive polymer for use in a body
DE102004037348A1 (de) 2004-08-02 2006-03-16 Infineon Technologies Ag Fluid-Transport-Vorrichtung, Sensor-Anordnung, Fluid-Misch-Vorrichtung und Verfahren zum Herstellen einer Fluid-Transport-Vorrichtung
US7353747B2 (en) 2005-07-28 2008-04-08 Ethicon Endo-Surgery, Inc. Electroactive polymer-based pump
US7352111B2 (en) 2005-12-01 2008-04-01 Schlumberger Technology Corporation Electroactive polymer pumping system
WO2009062167A1 (en) * 2007-11-09 2009-05-14 Personics Holdings Inc. Electroactive polymer systems
EP2161758A1 (de) * 2008-09-05 2010-03-10 Flexucell ApS Solarzelle und Verfahren zu dessen Herstellung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014224697A1 (de) 2014-12-03 2016-06-09 Zf Friedrichshafen Ag Gangwähler für ein Getriebe
DE102016014832A1 (de) * 2016-12-14 2018-06-14 Drägerwerk AG & Co. KGaA Kammerpumpe und Verfahren zum Betrieb einer Kammerpumpe
DE102016014831A1 (de) * 2016-12-14 2018-06-14 Drägerwerk AG & Co. KGaA Schlauchpumpe und Verfahren zum Betrieb einer Schlauchpumpe

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EP2294317A1 (de) 2011-03-16
CN102084133A (zh) 2011-06-01
WO2009132651A1 (en) 2009-11-05
US20110189027A1 (en) 2011-08-04

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