CN102084133A - 由聚合物换能器提供动力的泵 - Google Patents

由聚合物换能器提供动力的泵 Download PDF

Info

Publication number
CN102084133A
CN102084133A CN2009801254445A CN200980125444A CN102084133A CN 102084133 A CN102084133 A CN 102084133A CN 2009801254445 A CN2009801254445 A CN 2009801254445A CN 200980125444 A CN200980125444 A CN 200980125444A CN 102084133 A CN102084133 A CN 102084133A
Authority
CN
China
Prior art keywords
pump
transducer
laminate
film
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009801254445A
Other languages
English (en)
Chinese (zh)
Inventor
M·K·汉森
B·汤森
M·特里森
M·本斯利马内
Y·伊斯坎达拉尼
C·莫塞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Publication of CN102084133A publication Critical patent/CN102084133A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN2009801254445A 2008-04-30 2009-04-30 由聚合物换能器提供动力的泵 Pending CN102084133A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200800619 2008-04-30
DKPA200800619 2008-04-30
PCT/DK2009/000098 WO2009132651A1 (en) 2008-04-30 2009-04-30 A pump powered by a polymer transducer

Publications (1)

Publication Number Publication Date
CN102084133A true CN102084133A (zh) 2011-06-01

Family

ID=40793295

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801254445A Pending CN102084133A (zh) 2008-04-30 2009-04-30 由聚合物换能器提供动力的泵

Country Status (4)

Country Link
US (1) US20110189027A1 (de)
EP (1) EP2294317B1 (de)
CN (1) CN102084133A (de)
WO (1) WO2009132651A1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104763620A (zh) * 2014-10-31 2015-07-08 浙江大学 柔性蠕动泵
CN107420291A (zh) * 2017-07-13 2017-12-01 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN108223339A (zh) * 2016-12-14 2018-06-29 德尔格制造股份两合公司 腔室泵和用于运行腔室泵的方法
CN112081723A (zh) * 2020-08-18 2020-12-15 华南农业大学 一种基于谐振差分位移放大压电泵
CN113482893A (zh) * 2021-06-10 2021-10-08 浙江大学 一种基于介电弹性材料的柔性泵
CN116971970A (zh) * 2023-09-22 2023-10-31 哈尔滨工业大学 基于缩放结构的电驱动多线程柔性电流体泵及其制备方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013044195A2 (en) * 2011-09-22 2013-03-28 Parker-Hannifin Corporation Selp pumping and sensing hose utilizing electroactive polymer strips
US10105504B2 (en) 2012-12-18 2018-10-23 Koninklijke Philips N.V. EAP-driven air pump for patient interfaces
DE102014224697A1 (de) 2014-12-03 2016-06-09 Zf Friedrichshafen Ag Gangwähler für ein Getriebe
US10119532B2 (en) 2015-02-16 2018-11-06 Hamilton Sundstrand Corporation System and method for cooling electrical components using an electroactive polymer actuator
DE102016014831A1 (de) * 2016-12-14 2018-06-14 Drägerwerk AG & Co. KGaA Schlauchpumpe und Verfahren zum Betrieb einer Schlauchpumpe

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362559B1 (en) * 1999-02-12 2002-03-26 Face International Corp. Piezoelectric transformer with segmented electrodes
US20030006669A1 (en) * 2001-05-22 2003-01-09 Sri International Rolled electroactive polymers
WO2004031582A1 (en) * 2002-10-02 2004-04-15 Scimed Life Systems, Inc. Electroactive polymer actuated heart-lung bypass pumps
US20050113892A1 (en) * 2003-11-26 2005-05-26 Sproul Michael E. Surgical tool with an electroactive polymer for use in a body
WO2006012826A1 (de) * 2004-08-02 2006-02-09 Siemens Aktiengesellschaft Fluid-transport-vorrichtung, sensor-anordnung, fluid-misch-vorrichtung und verfahren zum herstellen einer fluid-transport-vorrichtung
CN1901351A (zh) * 2001-12-25 2007-01-24 松下电工株式会社 电活化聚合体激励器和包含它的隔膜泵
CN1916411A (zh) * 2005-07-28 2007-02-21 伊西康内外科公司 基于电活性聚合物的泵
US20070128059A1 (en) * 2005-12-01 2007-06-07 Schlumberger Technology Corporation Electroactive Polymer Pumping System

Family Cites Families (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130532A (en) * 1933-01-16 1938-09-20 Dubilier Condenser Corp Electrical condenser
US2716708A (en) * 1950-11-17 1955-08-30 Nat Res Dev Apparatus for launching ultrasonic waves
US3109202A (en) * 1952-10-09 1963-11-05 Continental Gummi Werke Ag Mold for use in connection with the casting of transmission belts
BE642434A (de) * 1958-06-04
US3544733A (en) * 1967-06-15 1970-12-01 Minnesota Mining & Mfg Electrostatic acoustic transducer
US3565195A (en) * 1969-04-16 1971-02-23 Sibany Mfg Corp Electrical weighing apparatus using capacitive flexible mat
US3753294A (en) * 1970-02-27 1973-08-21 Schlumberger Technology Corp Method and apparatus for measuring depth
US3912830A (en) * 1971-10-13 1975-10-14 Kureha Chemical Ind Co Ltd Method of producing a piezoelectric or pyroelectric element
US3831629A (en) * 1972-01-24 1974-08-27 Halkey Roberts Corp Check valve
US3898722A (en) * 1973-04-02 1975-08-12 Xerox Corp Process for forming an electrode
US3875481A (en) * 1973-10-10 1975-04-01 Uniroyal Inc Capacitive weighing mat
US3898585A (en) * 1974-01-14 1975-08-05 Ibm Leaky corrugated optical waveguide device
CH609774A5 (de) * 1977-01-21 1979-03-15 Semperit Ag
JPS5411173U (de) * 1977-06-24 1979-01-24
FR2409654B1 (fr) * 1977-11-17 1985-10-04 Thomson Csf Dispositif transducteur piezoelectrique et son procede de fabrication
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4322877A (en) * 1978-09-20 1982-04-06 Minnesota Mining And Manufacturing Company Method of making piezoelectric polymeric acoustic transducer
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
US4386386A (en) * 1980-04-22 1983-05-31 Nippon Soken, Inc. Capacitor type sensor for detecting displacement or load
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4431882A (en) * 1982-08-12 1984-02-14 W. H. Brady Co. Transparent capacitance membrane switch
EP0107898B1 (de) * 1982-09-29 1987-07-08 EMI Limited Berührungsmatrixsensor
US4654834A (en) * 1983-05-19 1987-03-31 Dorr John A Weatherproofed ultrasonic transducer assembly and systems incorporating same
US4584625A (en) * 1984-09-11 1986-04-22 Kellogg Nelson R Capacitive tactile sensor
US4654546A (en) * 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
US4634917A (en) * 1984-12-26 1987-01-06 Battelle Memorial Institute Active multi-layer piezoelectric tactile sensor apparatus and method
US4640137A (en) * 1985-05-31 1987-02-03 Lord Corporation Tactile sensor
US4852443A (en) * 1986-03-24 1989-08-01 Key Concepts, Inc. Capacitive pressure-sensing method and apparatus
US5319153A (en) * 1986-04-28 1994-06-07 Lawrence Fishman Musical instrument transducer assembly having a piezoelectric sheet
DE3642780A1 (de) * 1986-05-05 1987-11-12 Siemens Ag Detektormatte und verfahren zu ihrer herstellung
GB8619800D0 (en) * 1986-08-14 1986-09-24 Microelectronics Applic Resear Tactile sensor device
DE3634855C1 (de) * 1986-10-13 1988-03-31 Peter Seitz Kapazitive Messanordnung zur Bestimmung von Kraeften und/oder Druecken
GB8625686D0 (en) * 1986-10-27 1986-11-26 Ministry Of Agriculture Fisher Assessing processing strains
US5048536A (en) * 1987-04-03 1991-09-17 Mcewen James A Tourniquet for regulating applied pressures
US4786837A (en) * 1987-05-05 1988-11-22 Hoechst Celanese Corporation Composite conformable sheet electrodes
US4825116A (en) * 1987-05-07 1989-04-25 Yokogawa Electric Corporation Transmitter-receiver of ultrasonic distance measuring device
FR2615941B1 (fr) * 1987-05-25 1991-12-06 Sfena Dispositif de detection de position d'un organe de commande sur une tablette tactile
US4879698A (en) * 1988-11-03 1989-11-07 Sensor Electronics, Inc. Piezopolymer actuators
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (Fh), 8999 Maierhoefen, De
US5090248A (en) * 1989-01-23 1992-02-25 The University Of Melbourne Electronic transducer
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
US5173162A (en) * 1989-07-05 1992-12-22 Mitsui Toatsu Chemicals, Inc. Multi-layered electrostrictive effect element
JP3039971B2 (ja) * 1989-09-19 2000-05-08 株式会社日立製作所 接合型圧電装置及び製造方法並びに接合型圧電素子
US5060527A (en) * 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5425275A (en) * 1990-06-01 1995-06-20 Lockshaw; James Hull monitoring apparatus and method
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE4027753C2 (de) * 1990-09-01 1994-06-09 Karlheinz Dr Ziegler Kapazitiver Kraftsensor
US5090246A (en) * 1990-09-19 1992-02-25 Johnson Service Corp. Elastomer type low pressure sensor
FR2667256A1 (fr) * 1990-10-02 1992-04-03 Thomson Csf Dispositif pour eliminer le givre forme en surface d'une paroi, notamment d'une fenetre optique ou radioelectrique.
US5259099A (en) * 1990-11-30 1993-11-09 Ngk Spark Plug Co., Ltd. Method for manufacturing low noise piezoelectric transducer
JPH04253382A (ja) * 1991-01-30 1992-09-09 Nec Corp 電歪効果素子
US5115680A (en) * 1991-03-04 1992-05-26 Lew Hyok S Displacement sensor with mechanical preamplification means
US5225959A (en) * 1991-10-15 1993-07-06 Xerox Corporation Capacitive tactile sensor array and method for sensing pressure with the array
US5341062A (en) * 1991-11-12 1994-08-23 The Whitaker Corporation Piezoelectric energy generator
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5449002A (en) * 1992-07-01 1995-09-12 Goldman; Robert J. Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation
JP3270527B2 (ja) * 1992-07-08 2002-04-02 呉羽化学工業株式会社 筒状ないし曲面化圧電素子
US5260095A (en) * 1992-08-21 1993-11-09 Battelle Memorial Institute Vacuum deposition and curing of liquid monomers
US5321332A (en) * 1992-11-12 1994-06-14 The Whitaker Corporation Wideband ultrasonic transducer
US5760530A (en) * 1992-12-22 1998-06-02 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectric tactile sensor
US6282956B1 (en) * 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
US5515341A (en) * 1993-09-14 1996-05-07 The Whitaker Corporation Proximity sensor utilizing polymer piezoelectric film
US5494090A (en) * 1994-01-07 1996-02-27 Electrion, Inc. Lightweight pressure-airless tire construction
US5520630A (en) * 1994-02-14 1996-05-28 Daneshvar; Yousef E-Z leg supports
SE503018C2 (sv) * 1994-03-17 1996-03-11 Ffv Aerotech Ab Anordning för att utöva tryck på människokropp
US5556700A (en) * 1994-03-25 1996-09-17 Trustees Of The University Of Pennsylvania Conductive polyaniline laminates
US5559387A (en) * 1994-05-13 1996-09-24 Beurrier; Henry R. Piezoelectric actuators
WO1996000364A1 (en) * 1994-06-24 1996-01-04 United Technologies Corporation Pilot injector for gas turbine engines
US5604314A (en) * 1994-10-26 1997-02-18 Bonneville Scientific Incorporated Triaxial normal and shear force sensor
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5977685A (en) * 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator
JPH09223943A (ja) * 1996-02-19 1997-08-26 Nec Corp 弾性表面波デバイス
US5817099A (en) * 1996-06-06 1998-10-06 Skolik; Stephanie A. Universal port/seal device for ocular surgery
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US5891065A (en) * 1996-07-31 1999-04-06 Spinal Cord Society Mobile extremity pumping apparatus
DE19631188A1 (de) * 1996-08-02 1998-02-05 Heraeus Kulzer Gmbh Entladungslampenanordnung
FR2755006B1 (fr) * 1996-10-25 1998-12-18 Couzan Serge Bas de contention pour la pratique du sport
US6108175A (en) * 1996-12-16 2000-08-22 Seagate Technology, Inc. Bimorph piezoelectric microactuator head and flexure assembly
JPH10247474A (ja) * 1997-01-06 1998-09-14 Sony Corp 平面照明灯及びその製造方法
US6008582A (en) * 1997-01-27 1999-12-28 Dai Nippon Printing Co., Ltd. Plasma display device with auxiliary partition walls, corrugated, tiered and pigmented walls
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
JP4388603B2 (ja) * 1997-02-07 2009-12-24 エス アール アイ・インターナショナル 弾性誘電体ポリマフィルム音波アクチュエータ
US5841143A (en) * 1997-07-11 1998-11-24 The United States Of America As Represented By Administrator Of The National Aeronautics And Space Administration Integrated fluorescene
US6210514B1 (en) * 1998-02-11 2001-04-03 Xerox Corporation Thin film structure machining and attachment
US6123681A (en) * 1998-03-31 2000-09-26 Global Vascular Concepts, Inc. Anti-embolism stocking device
JPH11299273A (ja) * 1998-04-15 1999-10-29 Minolta Co Ltd 圧電変換素子及び圧電変換素子を使用したアクチエ−タ
US6184608B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
US6664718B2 (en) * 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US6222305B1 (en) * 1999-08-27 2001-04-24 Product Systems Incorporated Chemically inert megasonic transducer system
US6911764B2 (en) * 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
WO2001065615A2 (en) * 2000-02-23 2001-09-07 Sri International Biologically powered electroactive polymer generators
US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
DE10049288B4 (de) * 2000-10-04 2004-07-15 Infineon Technologies Ag Elektronische Bauteile und eine Folienband zum Verpacken von Bonddrahtverbindungen elektronischer Bauteile sowie deren Herstellungsverfahren
US6511709B1 (en) * 2001-08-15 2003-01-28 Lexmark, International, Inc. Method of dip coating fuser belt using alcohol as a co-solvent
US8718313B2 (en) * 2007-11-09 2014-05-06 Personics Holdings, LLC. Electroactive polymer systems
EP2161758A1 (de) * 2008-09-05 2010-03-10 Flexucell ApS Solarzelle und Verfahren zu dessen Herstellung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362559B1 (en) * 1999-02-12 2002-03-26 Face International Corp. Piezoelectric transformer with segmented electrodes
US20030006669A1 (en) * 2001-05-22 2003-01-09 Sri International Rolled electroactive polymers
CN1901351A (zh) * 2001-12-25 2007-01-24 松下电工株式会社 电活化聚合体激励器和包含它的隔膜泵
WO2004031582A1 (en) * 2002-10-02 2004-04-15 Scimed Life Systems, Inc. Electroactive polymer actuated heart-lung bypass pumps
US20050113892A1 (en) * 2003-11-26 2005-05-26 Sproul Michael E. Surgical tool with an electroactive polymer for use in a body
WO2006012826A1 (de) * 2004-08-02 2006-02-09 Siemens Aktiengesellschaft Fluid-transport-vorrichtung, sensor-anordnung, fluid-misch-vorrichtung und verfahren zum herstellen einer fluid-transport-vorrichtung
CN1916411A (zh) * 2005-07-28 2007-02-21 伊西康内外科公司 基于电活性聚合物的泵
US20070128059A1 (en) * 2005-12-01 2007-06-07 Schlumberger Technology Corporation Electroactive Polymer Pumping System

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MOHANED BENSLIMANE, ET AL.: "Mechanical properties of Dielectric Elastomer Actuators with smart metallic compliant electrodes", 《PROCEEDINGS OF SPIE》 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104763620A (zh) * 2014-10-31 2015-07-08 浙江大学 柔性蠕动泵
CN108223339A (zh) * 2016-12-14 2018-06-29 德尔格制造股份两合公司 腔室泵和用于运行腔室泵的方法
CN107420291A (zh) * 2017-07-13 2017-12-01 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN107420291B (zh) * 2017-07-13 2019-04-23 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN112081723A (zh) * 2020-08-18 2020-12-15 华南农业大学 一种基于谐振差分位移放大压电泵
CN112081723B (zh) * 2020-08-18 2021-12-14 华南农业大学 一种基于谐振差分位移放大压电泵
CN113482893A (zh) * 2021-06-10 2021-10-08 浙江大学 一种基于介电弹性材料的柔性泵
CN113482893B (zh) * 2021-06-10 2022-04-01 浙江大学 一种基于介电弹性材料的柔性泵
CN116971970A (zh) * 2023-09-22 2023-10-31 哈尔滨工业大学 基于缩放结构的电驱动多线程柔性电流体泵及其制备方法
CN116971970B (zh) * 2023-09-22 2023-12-22 哈尔滨工业大学 基于缩放结构的电驱动多线程柔性电流体泵及其制备方法

Also Published As

Publication number Publication date
WO2009132651A1 (en) 2009-11-05
US20110189027A1 (en) 2011-08-04
EP2294317B1 (de) 2013-04-17
EP2294317A1 (de) 2011-03-16

Similar Documents

Publication Publication Date Title
CN102084133A (zh) 由聚合物换能器提供动力的泵
US7732999B2 (en) Direct acting capacitive transducer
US7898096B1 (en) Method and apparatus for energy harvesting using microfluidics
US7518284B2 (en) Dielectric composite and a method of manufacturing a dielectric composite
Pelrine et al. Electrostriction of polymer films for microactuators
US8181338B2 (en) Method of making a multilayer composite
US20110123724A1 (en) Dielectric composite and a method of manufacturing a dielectric composite
KR100510224B1 (ko) 전기 활성 폴리머 액츄에이터 및 이를 이용한 다이아프램펌프
EP2498311A2 (de) Kapazitativer Wandler mit Direktwirkung
KR0119362B1 (ko) 초소형 정전 구동 격판 마이크로펌프
EP3345228B1 (de) Aktuatorvorrichtung auf basis eines elektroaktiven oder photoaktiven polymers
Sideris et al. Pumps operated by solid-state electromechanical smart material actuators-A review
US20100194236A1 (en) Capacitive Electric Current Generator
US20210172460A1 (en) High Strain Peano Hydraulically Amplified Self-Healing Electrostatic (HASEL) Transducers
Park et al. Resonantly driven piezoelectric micropump: Fabrication of a micropump having high power density
US20150221851A1 (en) Electrical interconnect terminals for rolled dielectric elastomer transducers
US4917579A (en) Transporter pump
JP2008141944A (ja) 誘電複合体および誘電複合体の製造方法
WO2008052560A1 (en) A multilayer composite and a method of making such
US20210041310A1 (en) Dielectric elastomer transducer and corresponding fabrication process
US20110186759A1 (en) Power actuated valve
Loew et al. Development of a nonintrusive pressure sensor for polymer tubes based on dielectric elastomer membranes
JP5443496B2 (ja) 可撓性誘電体を有する可変静電容量システム
JP2009219302A (ja) アクチュエータ
US20070140875A1 (en) Piezoelectric pump

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
AD01 Patent right deemed abandoned

Effective date of abandoning: 20110601

C20 Patent right or utility model deemed to be abandoned or is abandoned