EP2252915A4 - Resistzusammensetzung und verfahren zur strukturformung damit - Google Patents
Resistzusammensetzung und verfahren zur strukturformung damitInfo
- Publication number
- EP2252915A4 EP2252915A4 EP09720706A EP09720706A EP2252915A4 EP 2252915 A4 EP2252915 A4 EP 2252915A4 EP 09720706 A EP09720706 A EP 09720706A EP 09720706 A EP09720706 A EP 09720706A EP 2252915 A4 EP2252915 A4 EP 2252915A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- same
- forming method
- pattern forming
- resist composition
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F12/02—Monomers containing only one unsaturated aliphatic radical
- C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
- C08F12/22—Oxygen
- C08F12/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
- C08F212/22—Oxygen
- C08F212/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/12—Hydrolysis
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D125/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Coating compositions based on derivatives of such polymers
- C09D125/02—Homopolymers or copolymers of hydrocarbons
- C09D125/04—Homopolymers or copolymers of styrene
- C09D125/08—Copolymers of styrene
- C09D125/14—Copolymers of styrene with unsaturated esters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Emergency Medicine (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Wood Science & Technology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008066746A JP4703674B2 (ja) | 2008-03-14 | 2008-03-14 | レジスト組成物及びそれを用いたパターン形成方法 |
PCT/JP2009/055543 WO2009113735A1 (en) | 2008-03-14 | 2009-03-13 | Resist composition and pattern forming method using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2252915A1 EP2252915A1 (de) | 2010-11-24 |
EP2252915A4 true EP2252915A4 (de) | 2012-10-17 |
Family
ID=41065381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09720706A Withdrawn EP2252915A4 (de) | 2008-03-14 | 2009-03-13 | Resistzusammensetzung und verfahren zur strukturformung damit |
Country Status (6)
Country | Link |
---|---|
US (1) | US8785104B2 (de) |
EP (1) | EP2252915A4 (de) |
JP (1) | JP4703674B2 (de) |
KR (1) | KR20100125320A (de) |
TW (1) | TWI438572B (de) |
WO (1) | WO2009113735A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5047030B2 (ja) * | 2008-03-26 | 2012-10-10 | 富士フイルム株式会社 | レジスト組成物及びそれを用いたパターン形成方法 |
JP5624922B2 (ja) * | 2010-04-28 | 2014-11-12 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、及びそれを用いたパターン形成方法 |
JP5307171B2 (ja) | 2011-02-28 | 2013-10-02 | 富士フイルム株式会社 | レジスト組成物、並びに、それを用いたレジスト膜及びネガ型パターン形成方法 |
JP5898985B2 (ja) | 2011-05-11 | 2016-04-06 | 東京応化工業株式会社 | レジストパターン形成方法 |
US8968990B2 (en) | 2011-09-15 | 2015-03-03 | Tokyo Ohka Kogyo Co., Ltd. | Method of forming resist pattern |
KR101936435B1 (ko) | 2011-09-22 | 2019-01-08 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물, 레지스트 패턴 형성 방법 |
KR101913865B1 (ko) * | 2011-09-22 | 2018-10-31 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물 및 레지스트 패턴 형성 방법 |
JP5933364B2 (ja) | 2011-11-09 | 2016-06-08 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
JP5820719B2 (ja) | 2011-12-21 | 2015-11-24 | 東京応化工業株式会社 | レジストパターン形成方法 |
JP5898962B2 (ja) | 2012-01-11 | 2016-04-06 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
JP6116358B2 (ja) * | 2013-05-16 | 2017-04-19 | 富士フイルム株式会社 | パターン形成方法及び電子デバイスの製造方法 |
WO2015099137A1 (ja) * | 2013-12-26 | 2015-07-02 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物及び感光性樹脂積層体 |
JP6146329B2 (ja) * | 2014-02-05 | 2017-06-14 | Jsr株式会社 | 感放射線性樹脂組成物、レジストパターン形成方法、感放射線性酸発生剤及び化合物 |
US10520813B2 (en) | 2016-12-15 | 2019-12-31 | Taiwan Semiconductor Manufacturing Co., Ltd | Extreme ultraviolet photoresist with high-efficiency electron transfer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6399272B1 (en) * | 1999-06-21 | 2002-06-04 | Hyundai Electronics Industries Co., Ltd. | Phenylenediamine derivative-type additive useful for a chemically amplified photoresist |
EP1231205A1 (de) * | 1999-11-15 | 2002-08-14 | JSR Corporation | Vinylphenylpropionsäure-derivate, verfahren zu deren herstellung, daraus hergestellte polymere und strahlungsempfindliche harzzusammensetzung |
US6514665B1 (en) * | 1999-08-31 | 2003-02-04 | Hyundai Electronics Co., Ltd. | Additives for improving post exposure delay stability of photoresist |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03200968A (ja) | 1989-12-28 | 1991-09-02 | Oki Electric Ind Co Ltd | ポジ型感光性樹脂組成物 |
DE4222968A1 (de) | 1992-07-13 | 1994-01-20 | Hoechst Ag | Positiv-arbeitendes strahlungsempfindliches Gemisch und damit hergestelltes Aufzeichnungsmaterial |
JPH0792680A (ja) | 1993-06-29 | 1995-04-07 | Nippon Zeon Co Ltd | レジスト組成物 |
TW546540B (en) | 1997-04-30 | 2003-08-11 | Wako Pure Chem Ind Ltd | An agent for reducing the substrate dependence of resist and a resist composition |
JP4048600B2 (ja) | 1997-04-30 | 2008-02-20 | 和光純薬工業株式会社 | レジストの基板依存性改善剤 |
JP3414197B2 (ja) | 1997-05-26 | 2003-06-09 | 住友化学工業株式会社 | フォトレジスト組成物 |
JP3546927B2 (ja) * | 1997-06-26 | 2004-07-28 | 信越化学工業株式会社 | レジスト材料 |
TW526390B (en) | 1997-06-26 | 2003-04-01 | Shinetsu Chemical Co | Resist compositions |
DE59808434D1 (de) | 1997-11-28 | 2003-06-26 | Infineon Technologies Ag | Chemisch verstärkter Resist für die Elektronenstrahllithographie |
JP2000181065A (ja) | 1998-12-11 | 2000-06-30 | Matsushita Electric Ind Co Ltd | パターン形成材料及びパターン形成方法 |
JP4157645B2 (ja) * | 1999-03-25 | 2008-10-01 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 感放射線性樹脂組成物 |
CA2428255C (en) * | 2000-12-04 | 2010-01-05 | Ciba Specialty Chemicals Holding Inc. | Onium salts and the use therof as latent acids |
US7192681B2 (en) | 2001-07-05 | 2007-03-20 | Fuji Photo Film Co., Ltd. | Positive photosensitive composition |
JP4313965B2 (ja) | 2001-09-20 | 2009-08-12 | 富士フイルム株式会社 | ポジ型感光性組成物 |
JP4337389B2 (ja) * | 2002-04-26 | 2009-09-30 | 東レ株式会社 | 耐熱性樹脂前駆体組成物の製造方法 |
JP4502715B2 (ja) * | 2004-03-05 | 2010-07-14 | 東京応化工業株式会社 | 液浸露光用ポジ型レジスト組成物およびレジストパターンの形成方法 |
JP4724465B2 (ja) * | 2005-05-23 | 2011-07-13 | 富士フイルム株式会社 | 感光性組成物及び該感光性組成物を用いたパターン形成方法 |
EP2333609A3 (de) * | 2005-07-05 | 2013-03-27 | Hitachi Chemical Company, Ltd. | Lichtempfindliche Haftzusammensetzung und damit erzeugter Haftfilm, Haftfolie, Halbleiterwafer mit Haftschicht, Halbleiterbauelement und elektronisches Bauteil |
JP4652197B2 (ja) * | 2005-09-29 | 2011-03-16 | 富士フイルム株式会社 | 染料含有ネガ型硬化性組成物、カラーフィルタ及びその製造方法 |
-
2008
- 2008-03-14 JP JP2008066746A patent/JP4703674B2/ja active Active
-
2009
- 2009-03-13 WO PCT/JP2009/055543 patent/WO2009113735A1/en active Application Filing
- 2009-03-13 KR KR1020107020574A patent/KR20100125320A/ko not_active Application Discontinuation
- 2009-03-13 EP EP09720706A patent/EP2252915A4/de not_active Withdrawn
- 2009-03-13 US US12/921,354 patent/US8785104B2/en not_active Expired - Fee Related
- 2009-03-13 TW TW098108115A patent/TWI438572B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6399272B1 (en) * | 1999-06-21 | 2002-06-04 | Hyundai Electronics Industries Co., Ltd. | Phenylenediamine derivative-type additive useful for a chemically amplified photoresist |
US6514665B1 (en) * | 1999-08-31 | 2003-02-04 | Hyundai Electronics Co., Ltd. | Additives for improving post exposure delay stability of photoresist |
EP1231205A1 (de) * | 1999-11-15 | 2002-08-14 | JSR Corporation | Vinylphenylpropionsäure-derivate, verfahren zu deren herstellung, daraus hergestellte polymere und strahlungsempfindliche harzzusammensetzung |
Non-Patent Citations (1)
Title |
---|
See also references of WO2009113735A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20110014570A1 (en) | 2011-01-20 |
WO2009113735A1 (en) | 2009-09-17 |
TW200941142A (en) | 2009-10-01 |
KR20100125320A (ko) | 2010-11-30 |
JP4703674B2 (ja) | 2011-06-15 |
TWI438572B (zh) | 2014-05-21 |
US8785104B2 (en) | 2014-07-22 |
EP2252915A1 (de) | 2010-11-24 |
JP2009222939A (ja) | 2009-10-01 |
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