EP2235491A1 - Capteur de pression micromécanique - Google Patents

Capteur de pression micromécanique

Info

Publication number
EP2235491A1
EP2235491A1 EP08869465A EP08869465A EP2235491A1 EP 2235491 A1 EP2235491 A1 EP 2235491A1 EP 08869465 A EP08869465 A EP 08869465A EP 08869465 A EP08869465 A EP 08869465A EP 2235491 A1 EP2235491 A1 EP 2235491A1
Authority
EP
European Patent Office
Prior art keywords
membrane
pressure sensor
reinforcements
frame
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08869465A
Other languages
German (de)
English (en)
Inventor
Geert Brokmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cis Forschungsinstitut fur Mikrosensorik und Photovoltaik
Original Assignee
Cis Forschungsinstitut fur Mikrosensorik und Photovoltaik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cis Forschungsinstitut fur Mikrosensorik und Photovoltaik filed Critical Cis Forschungsinstitut fur Mikrosensorik und Photovoltaik
Publication of EP2235491A1 publication Critical patent/EP2235491A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Definitions

  • the invention relates to a micromechanical pressure sensor with a substrate and a membrane, on which piezoelectric sensor elements are located.
  • the invention can preferably be used for pressure measurements with frequently changing loads.
  • JP 61-82130 for example, a pressure sensor device is described, which detects pressure fluctuations of a gas or a liquid and converts it into electrical signals.
  • a device is used which detects fluctuations in the applied pressure as changes in the oscillation frequency of a sensor part.
  • DE 11 2004 002 281 T5 specifies an arrangement for pressure measurement, in which a sensor substrate contains on its lower surface a surface acoustic wave element for detecting pressure, which is fastened on a carrier substrate.
  • the surface acoustic wave element is hermetically sealed in the sealed space for pressure detection.
  • the invention has for its object to provide a pressure sensor of the type mentioned, which has small dimensions and are largely avoided in the Torsionsbe screw.
  • the invention also relates to combinations of features in which the individual features specified in the description and / or in the claims are combined with one another as desired.
  • the pressure sensor has a substrate with a frame on which the membrane is arranged. At the bottom of the membrane is a centrally located mass element. This allows small dimensions of the arrangement.
  • the strip-shaped sections of the membrane, which are located between frame and mass element, are each provided with two partial reinforcements. This achieves both a high level of safety against torsional stresses and also reduces nonlinearities of the pressure-deflection dependence.
  • the piezoelectric sensors are located in the reinforcements.
  • An advantageous embodiment provides that the reinforcements are mounted symmetrically in each case to the right and left of the middle of the strip-shaped sections.
  • the strip-shaped reinforcements are arranged at the corners of the mass element.
  • a further advantageous embodiment results from the fact that the piezoelectric zones in the membrane are connected to a Wheatstone measuring bridge, with which the pressure-dependent deflection of the membrane is detected.
  • the double arrangement of the stiffeners allows the piezoelectric zones in the membrane to be connected to two Wheatstone bridges. This can also be compensated for temperature differences in the measurement.
  • FIG. 1 shows a perspective view of a detail of an arrangement with eccentric reinforcement of the membrane
  • FIG. 2 shows a perspective view of a detail of an arrangement with reinforcement of the membrane at the corners
  • Figure 3 is a schematic representation of a measuring bridge circuit.
  • the arrangement shown in Figure 1 consists of a substrate which includes a rectangular frame 1, on the upper side of a membrane 2 is arranged. At the bottom of the membrane 2 is a centrally disposed mass element 3 with a rectangular cross-section.
  • the membrane 2 is provided with piezoelectric sensor elements. These are diffused in the edge region of the membrane 2 in this.
  • the strip-shaped sections of the membrane 2, which are located between the frame and mass element 3, are provided with two partial reinforcements 2.1 and 2.2. These reinforcements 2.1, 2.5 or 2.2 and 2.6 or 2.3 and 2.7 or 2.4 and 2.8 are mounted symmetrically to the right and left of the middle of the strip-shaped sections.
  • a measuring bridge circuit is shown schematically.
  • Each of the eight reinforcements 2.1 ... 2.8 contains piezoelectric sensor elements.
  • a piezoelectric sensor element of a reinforcement 2.1, 2.2, 2.3 and 2.4 located in a strip forms a resistance element of a measuring bridge.
  • a second measuring bridge can be formed from the piezoelectric sensor elements located in the gains 2.5, 2.6, 2.7 and 2.8.
  • Both Measuring bridges each contain a resistance element which is assigned to one of the four strip-shaped membrane sections.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La présente invention concerne un capteur de pression micromécanique comprenant un substrat et une membrane sur laquelle sont disposés des éléments piézoélectriques. L'objet de l'invention est de fabriquer un capteur de pression de faibles dimensions et pouvant être largement évité en cas de sollicitations de torsion de la membrane. Selon l'invention, le substrat comprend un cadre (1) sur lequel est disposée la membrane (2), un élément de masse (3) étant disposé de manière centrale sur la partie inférieure de la membrane (2), et la membrane (2) comprenant deux renforcements partiels (2.1, 2.2) sur des sections formant des stries, lesdites sections se trouvant entre le cadre (1) et l'élément de masse (3).
EP08869465A 2008-01-09 2008-12-22 Capteur de pression micromécanique Withdrawn EP2235491A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008003716A DE102008003716A1 (de) 2008-01-09 2008-01-09 Mikromechanischer Drucksensor
PCT/EP2008/068146 WO2009087055A1 (fr) 2008-01-09 2008-12-22 Capteur de pression micromécanique

Publications (1)

Publication Number Publication Date
EP2235491A1 true EP2235491A1 (fr) 2010-10-06

Family

ID=40490591

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08869465A Withdrawn EP2235491A1 (fr) 2008-01-09 2008-12-22 Capteur de pression micromécanique

Country Status (3)

Country Link
EP (1) EP2235491A1 (fr)
DE (1) DE102008003716A1 (fr)
WO (1) WO2009087055A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102947216B (zh) 2010-03-26 2015-12-16 艾尔默斯半导体股份公司 微机电装置及其应用
DE102011077499A1 (de) * 2011-06-14 2012-12-20 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Interferometrische Druckmesszelle
AT520304B1 (de) * 2018-03-21 2019-03-15 Piezocryst Advanced Sensorics Drucksensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4021424A1 (de) * 1989-07-11 1991-01-24 Teltov Geraete Regler Drucksensor fuer kleine druecke
US5068203A (en) * 1990-09-04 1991-11-26 Delco Electronics Corporation Method for forming thin silicon membrane or beam
US6255728B1 (en) * 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
WO2007073994A1 (fr) * 2005-12-22 2007-07-05 Robert Bosch Gmbh Element de detection micromecanique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
JPS6182130A (ja) 1984-09-28 1986-04-25 Shimadzu Corp 表面弾性波圧力センサ
DD267107A1 (de) * 1987-12-23 1989-04-19 Teltov Geraete Regler Drucksensor fuer kleine nenndruecke
WO2005052533A1 (fr) 2003-11-27 2005-06-09 Kyocera Corporation Dispositif detecteur de pression

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4021424A1 (de) * 1989-07-11 1991-01-24 Teltov Geraete Regler Drucksensor fuer kleine druecke
US5068203A (en) * 1990-09-04 1991-11-26 Delco Electronics Corporation Method for forming thin silicon membrane or beam
US6255728B1 (en) * 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
WO2007073994A1 (fr) * 2005-12-22 2007-07-05 Robert Bosch Gmbh Element de detection micromecanique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009087055A1 *

Also Published As

Publication number Publication date
DE102008003716A1 (de) 2009-07-30
WO2009087055A1 (fr) 2009-07-16

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