EP2192997A2 - Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer - Google Patents

Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer

Info

Publication number
EP2192997A2
EP2192997A2 EP08803783A EP08803783A EP2192997A2 EP 2192997 A2 EP2192997 A2 EP 2192997A2 EP 08803783 A EP08803783 A EP 08803783A EP 08803783 A EP08803783 A EP 08803783A EP 2192997 A2 EP2192997 A2 EP 2192997A2
Authority
EP
European Patent Office
Prior art keywords
fluorinated compound
fluorinated
plasma
compound
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08803783A
Other languages
English (en)
French (fr)
Inventor
François RENIERS
Nicolas Vandencasteele
Olivier Bury
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Libre de Bruxelles ULB
Original Assignee
Universite Libre de Bruxelles ULB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP08152409A external-priority patent/EP2098305A1/de
Application filed by Universite Libre de Bruxelles ULB filed Critical Universite Libre de Bruxelles ULB
Priority to EP08803783A priority Critical patent/EP2192997A2/de
Publication of EP2192997A2 publication Critical patent/EP2192997A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/62Plasma-deposition of organic layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers

Definitions

  • the invention relates to the deposition of thin layers of hydrophobic compounds on the surface of a substrate.
  • the present invention is intended to provide a method for depositing a fluorinated layer from a precursor monomer that avoids the disadvantages of existing processes. In particular, it tries to avoid the need to operate under reduced pressure. It also aims to allow the use of liquid monomers, easier to handle than gaseous monomers and often less toxicologically and environmentally controversial. Summary of the invention
  • the present invention relates to a method for depositing a fluorinated layer on a substrate, comprising injecting a gaseous mixture comprising a fluorinated compound and a carrier gas into a discharge or post-discharge zone of an atmospheric cold plasma at a pressure of between 0.8 and 1.2 bar, characterized in that said fluorinated compound has a boiling point at a pressure of 1 bar greater than 25 ° C.
  • Atmospheric plasma or “atmospheric cold plasma” or “non-thermal atmospheric plasma” means a partially or totally ionized gas which comprises electrons, ions (molecular or atomic), atoms or molecules, and radicals, out of thermodynamic equilibrium, whose electron temperature is significantly greater than that of ions and neutrals, and whose pressure is between about 1 mbar and about 1200 mbar, preferably between 800 and 1200 mbar.
  • the method comprises the steps of: bringing the carrier gas into contact with the liquid fluorinated compound; saturating said carrier gas with vapor of said fluorinated compound to form a gaseous mixture; bringing said gas mixture into the discharge zone of an atmospheric plasma; placing a substrate in the discharge or post-discharge zone of said atmospheric plasma.
  • said fluorinated compound does not comprise a hydrogen atom or an oxygen atom.
  • the method does not include post-treatment without plasma.
  • the fluorinated compound is a compound selected from the group consisting of CeF 4 , C 7 F 6 , C 8 F S, C 8 F 2 O and C 10 F 22, or a mixture thereof.
  • the fluorinated compound is perfluorohexane (CeFi 4 ).
  • the fluorinated compound is of the type: where R 1, R 2 and R 3 are perfluoroalkane groups of formula C n F 2n + 1, or a mixture of these compounds.
  • the fluorinated compound is perfluorotributylamine ((C 4 Fg) 3 N) (CAS No. 311-89-7).
  • the vapor pressure of said fluorinated compound at room temperature is between 1 mbar and 1 bar.
  • the partial pressure of said fluorinated compound in said carrier gas is regulated by controlling the temperature of a bath of said fluorinated compound in which the carrier gas is injected before injection into the plasma. .
  • the temperature of the bath is maintained at a temperature at which the vapor pressure of said compound is less than 10 mbar, preferably less than 2 mbar.
  • said fluorinated compound has a vapor pressure at 25 ° C of less than 10 mbar, preferably less than 2 mbar.
  • the atmospheric plasma is produced by a device of the dielectric barrier type.
  • the atmospheric plasma is produced by a device of the type using microwaves.
  • the carrier gas is a low-reactivity gas selected from the group consisting of: nitrogen and rare gas or mixtures thereof, preferably a rare gas or a mixture of rare gas, preferably Argon.
  • the substrate comprises a deposition surface comprising a polymer, in particular PVC or polyethylene.
  • the substrate comprises a deposition surface comprising a metal, or a metal alloy, in particular steel.
  • the substrate comprises a deposition surface comprising a glass, in particular a glass comprising amorphous silica.
  • Figure 1 General view of an atmospheric plasma deposition system
  • Figure 2 Sectional view of a cylindrical deposition system.
  • Figure 3 XPS Spectroscopy (X-ray P_hotoelectron Spectroscopy, in French, X-ray photoelectron spectroscopy) of the sample treated in Example 2
  • Figure 4 Detail of the XPS spectrum of the sample treated in Example 2, carbon peak Figure 5 shows the XPS spectrum of untreated PVC.
  • Figure 6 shows the XPS spectrum of untreated polyethylene.
  • Figure 7 shows the XPS spectrum of the sample processed in Example 4.
  • Figure 8 shows the XPS spectrum of the steel after cleaning, and before deposition.
  • Figure 9 shows the XPS spectrum of the sample treated in Example 6.
  • Figure 10 shows the XPS spectrum of the sample processed in Example 8.
  • Figure 11 shows the XPS spectrum of polytetrafluoroethylene (PTFE).
  • the present invention discloses a method of depositing a fluorinated polymeric layer by plasma technology operating at atmospheric pressure. It makes it possible to deposit a fluoropolymer layer via a fluorinated compound that is injected into the plasma, or into the post-discharge zone thereof.
  • the monomer is a liquid at room temperature
  • the plasma is generated in a dielectric barrier discharge, the sample to be treated being placed inside the discharge, or at the immediate exit thereof (post-discharge).
  • the partial pressure of fluorinated compound in the plasma is maintained at low values, preferably less than 10 mbar. This low pressure is obtained either by maintaining the fluorinated liquid at low temperature, or by selecting a fluorinated liquid having a vapor pressure of less than 10 mbar at room temperature.
  • the use of these low concentrations of fluorinated compounds in the plasma allows in particular the deposition of ultra-thin layers, which allows to obtain transparent layers. Moreover, the adhesive properties and wettability being essentially related to interactions at very short distances, the thinness of the deposit does not degrade these properties.
  • the present invention also has the advantage of allowing to treat any surface as far as the geometry of the discharge is adapted, and has the advantage of proceeding in a single step, simple and fast.
  • the fluorinated compound is of the type: where R 1, R 2 and R 3 are perfluoroalkane groups of formula C n F 2n + i •
  • R 1, R 2 and R 3 are perfluoroalkane groups of formula C n F 2n + i •
  • the advantage of this type of molecule lies in the weakness of the CN bond (2.8 eV of binding energy) relative to at the CC bond (4.9 eV of binding energy) favoring a fragmentation pattern of the precursor in the plasma producing radicals -Ri, -R 2 and -R 3 , and thus allowing better control of the nature reactive species within the plasma discharge and in the post-discharge zone thereof.
  • the use of this type of molecule induces the incorporation of a small amount of nitrogen into the deposited film.
  • the long fragments improve the properties of the deposited layers.
  • Perfluorotributylamine (C 4 F 9 ) 3 N) in particular has demonstrated excellent properties.
  • the substrate is made of PVC (polyvinyl chloride) film, PE (polyethylene), steel or glass, without this being limiting, being understood for the man of the art that this technology is immediately transferable to all types of substrate. Examples of realization
  • Example 1 shows a PVC perfluorohexane deposit produced in post-discharge under the following conditions:
  • a sample 3, in the form of a 4 cm by 4 cm PVC film, of the Solvay brand is cut, cleaned with methanol and isooctane and placed at the outlet (at 0.05 cm) from a cold plasma torch ( Figure 1) (Dielectric barrier discharge) operating at atmospheric pressure.
  • the fluorinated monomer (perfluorohexane) is placed in a glass bubbler (pyrex) immersed in a Dewar vessel containing a mixture of acetone and dry ice.
  • the temperature of the mixture, and therefore of the monomer is about -80 ° C.
  • the vapor pressure of the perfluorohexane at this temperature is about 1.2 mbar.
  • a stream of argon is then sent into the bubbler, with an overpressure of 1.375 bar at the start.
  • the argon / perfluorohexane gas mixture 1 is carried to the inside of the torch.
  • a plasma is initiated at a voltage of 3200 volts and a frequency of 16 kHz for 1 minute.
  • Example 2 shows a PVC perfluorohexane deposit produced in a dielectric barrier discharge under the following conditions
  • the sample is attached to the inside of the outer electrode 9 of a cylindrical dielectric barrier discharge.
  • the "hot” electrode 8 the one to which the voltage is applied, is the internal electrode, covered with a bucket of alumina.
  • the fluorinated monomer is introduced into the discharge as in Example 1.
  • a 1 minute treatment at a voltage of 3000 V and a frequency of 20 kHz is applied thereafter (treatment in discharge zone).
  • FIGS. 3 and 4 show a full survey and a magnification of the carbon zone.
  • the presence of fluorine CF 2 groups is clearly identified via the peak of fluorine located at 689 eV and the position of the peak of carbon, 291.5 eV corresponds well to carbon -CF 2 -.
  • Example 3 is identical to Example 1, except for the substrate, which in this example is polyethylene.
  • Example 4 is identical to Example 1, except for the substrate, which in this example is polyethylene.
  • Example 4 is identical to Example 2, except for the substrate, which in this example is polyethylene.
  • the spectrum of a PE sample ( Figure 6) contains a main peak around 285eV. It corresponds to carbon
  • Example 5 a deposition of a fluorinated layer on a steel substrate was made according to the same deposition protocol as for Examples 1 and 3, except that the monomer is this time perfluortributylamine, the temperature is maintained at 25 ° C. The vapor pressure of perfluorotributylamine at 25 ° C is 1.75 mbar.
  • Example 6
  • Example 6 a deposition of a fluorinated layer on a steel substrate was made following the same deposition protocol as for Examples 2 and 4, except that the monomer is this time perfluortributylamine, which the temperature is maintained at 25 ° C.
  • the vapor pressure of perfluorotributylamine at 25 ° C. is 1.75 mbar, which makes it possible to use it at ambient temperature.
  • XPS X-ray photoelectron spectroscopy
  • the main components are 689.7 eV (Fis) and 292.1 eV (CIs), type CF 2 .
  • the new component is around 400 eV and corresponds to nitrogen (NIs).
  • the calculated composition is 62.2% of fluorine, 33.3% of carbon and 4.5% of nitrogen.
  • the nitrogen component is present only when using the nitrogen-containing monomer (Ci 2 F 27 N).
  • Example 7 a deposition of a fluorinated layer on a glass substrate was made following the same deposition protocol as for Example 5.
  • Example 8 a deposition of a fluorinated layer on a glass substrate was made following the same deposition protocol as for Example 5.
  • Example 8 a deposition of a fluorinated layer on a glass substrate was made according to the same deposition protocol as for Example 6.
  • the main components are 689.7 eV (Fis) and 292.1 eV (CIs), type CF2.
  • the new component is around 400 eV and corresponds to nitrogen (NIs).
  • the calculated composition is 63.0% fluorine, 32.8% carbon and 4.2% nitrogen.
  • a sample prepared according to Example 2 was subjected to one week aging in the atmosphere at room temperature.
  • EXAMPLE 10 (Comparative) A sample of PVC was exposed to an atmospheric argon plasma, in the post-discharge zone, according to the same experimental scheme as in Example 1, in the absence of the fluorinated monomer.
  • Example 11 (Comparative) A PVC sample was exposed to an atmospheric argon plasma, in a discharge zone, according to the same experimental scheme as in Example 2, in the absence of the fluorinated monomer.
  • the peak energy as well as the surface composition obtained after treatment are very close to the values obtained for a sample of PTFE.
  • the PTFE spectra (FIG. 11) presented in the literature also include 2 peaks. One at 689.7 eV corresponding to fluorine and the other at 292.5 eV corresponding to carbon (CIs).
  • the surface composition is 66.6% fluorine and 33.4% carbon. Table 1 shows the contact angles of the water on the surfaces of the various examples and on the surfaces of the untreated substrates.
  • the deposited polymer layers are perfectly transparent and invisible to the naked eye.
  • the method can be applied to all cold atmospheric plasmas, whatever the mode of injection of energy (not only DBD, but RF, microwave, ).
  • the process can be applied to all surfaces to be covered by a fluoride layer: glass, steel, polymer, ceramic, paint, metal, metal oxide, mixed, gel.
  • a hydrophobic layer may be deposited only if the starting monomer does not contain oxygen or hydrogen. Indeed, on the one hand, the presence in the plasma discharge, or in the zone of postdischarge of oxygen radicals induces in a direct way the incorporation of hydrophilic oxygen function in the deposited layer, on the other hand, the presence of hydrogenated radicals generally induces their recombination with residual oxygen or moisture, giving rise to the appearance of OH-radicals, very hydrophilic.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Surface Treatment Of Glass (AREA)
EP08803783A 2007-09-06 2008-09-05 Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer Withdrawn EP2192997A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP08803783A EP2192997A2 (de) 2007-09-06 2008-09-05 Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP07115864 2007-09-06
EP08152409A EP2098305A1 (de) 2008-03-06 2008-03-06 Verfahren zur Aufbringung einer Fluorschicht mit Hilfe eines Vorläufermonomers
PCT/EP2008/061814 WO2009030763A2 (fr) 2007-09-06 2008-09-05 Procédé pour déposer une couche fluorée à partir d'un monomère précurseur
EP08803783A EP2192997A2 (de) 2007-09-06 2008-09-05 Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer

Publications (1)

Publication Number Publication Date
EP2192997A2 true EP2192997A2 (de) 2010-06-09

Family

ID=40043028

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08803783A Withdrawn EP2192997A2 (de) 2007-09-06 2008-09-05 Verfahren zum auftragen einer fluorierten schicht aus einem vorläufermonomer

Country Status (6)

Country Link
US (1) US20110014395A1 (de)
EP (1) EP2192997A2 (de)
JP (1) JP2010538161A (de)
CN (1) CN101821020A (de)
CA (1) CA2698629A1 (de)
WO (1) WO2009030763A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2966382B1 (fr) * 2010-10-26 2012-12-14 Oberthur Technologies Procede de traitement de surface d'un document de securite, document et machine correspondants
CN103825033B (zh) * 2014-03-13 2016-09-07 大连融科储能技术发展有限公司 一种液流电池用电极材料处理方法
WO2015148743A1 (en) * 2014-03-26 2015-10-01 The Procter & Gamble Company Perfume systems
FR3043679B1 (fr) * 2015-11-12 2021-07-23 Aptar Stelmi Sas Procede de traitement d'un element de conditionnement en elastomere, et element de conditionnement ainsi traite.
CN108080228B (zh) * 2017-10-26 2021-06-01 中国船舶重工集团公司第七二五研究所 一种线路板防水防腐涂层及其制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2990608B2 (ja) * 1989-12-13 1999-12-13 株式会社ブリヂストン 表面処理方法
JPH05148377A (ja) * 1991-11-28 1993-06-15 Nissan Motor Co Ltd 表面が硬化された透明樹脂基板
BR9707477A (pt) * 1996-02-06 1999-04-06 Du Pont Método para tratar a superfície de materiais particulados método para preparar uma composição colorida composição colorida aperfeiçoamento em aparelho para tratamento subatmosférico de superfícies de partícula e módulo para dispersar partículas
JP3190886B2 (ja) * 1998-06-17 2001-07-23 日本電気株式会社 高分子膜の成長方法
GB9816077D0 (en) * 1998-07-24 1998-09-23 Secr Defence Surface coatings
US7557019B2 (en) * 1999-02-01 2009-07-07 Sigma Laboratories Of Arizona, Llc Electromagnetic treatment in atmospheric-plasma coating process
DK1326718T3 (da) * 2000-10-04 2004-04-13 Dow Corning Ireland Ltd Fremgangsmåde og apparat til dannelse af en belægning
US6685793B2 (en) * 2001-05-21 2004-02-03 3M Innovative Properties Company Fluoropolymer bonding composition and method
WO2004108984A1 (ja) * 2003-06-06 2004-12-16 Konica Minolta Holdings, Inc. 薄膜形成方法および薄膜形成体
GB2434368B (en) * 2006-01-20 2010-08-25 P2I Ltd Plasma coated laboratory consumables
US20070172666A1 (en) * 2006-01-24 2007-07-26 Denes Ferencz S RF plasma-enhanced deposition of fluorinated films
FR2902422B1 (fr) * 2006-06-16 2008-07-25 Saint Gobain Procede de depot par plasma atmopherique d'un revetement hydrophobe/oleophobe a durabilite amelioree

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009030763A2 *

Also Published As

Publication number Publication date
WO2009030763A2 (fr) 2009-03-12
CA2698629A1 (en) 2009-03-12
JP2010538161A (ja) 2010-12-09
WO2009030763A3 (fr) 2009-06-04
CN101821020A (zh) 2010-09-01
US20110014395A1 (en) 2011-01-20

Similar Documents

Publication Publication Date Title
Vandencasteele et al. XPS and contact angle study of N2 and O2 plasma‐modified PTFE, PVDF and PVF surfaces
BE1019991A3 (fr) Procede de depot de couches sur un substrat verrier par pecvd a faible pression.
WO2009030763A2 (fr) Procédé pour déposer une couche fluorée à partir d'un monomère précurseur
US7998536B2 (en) Silicon precursors to make ultra low-K films of K<2.2 with high mechanical properties by plasma enhanced chemical vapor deposition
US20090017231A1 (en) Novel silicon precursors to make ultra low-k films with high mechanical properties by plasma enhanced chemical vapor deposition
Li et al. Fourier transform infrared spectroscopy study of molecular structure formation in thin films during hexamethyldisiloxane decomposition in low pressure rf discharge
Zettsu et al. Surface functionalization of PTFE sheet through atmospheric pressure plasma liquid deposition approach
EP0780485B1 (de) Verfahren und Vorrichtung zum Reinigen eines Metallsubstrats
Weber et al. Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology
WO2006070136A1 (fr) Procede de traitement d'un materiau polymere, dispositif pour ia mise en œuvre de ce procede et utilisation de ce dispositif au traitement de corps creux
US20130158189A1 (en) Method for Polymer Plasma Deposition
WO2006064161A1 (fr) Procede et installation pour le traitement d'un substrat verrier incorporant une ligne magnetron et un dispositif generant un plasma a pression atmospherique.
Zettsu et al. Plasma-chemical surface functionalization of flexible substrates at atmospheric pressure
Chen et al. Fabrication and characterization of fluorine-containing films using plasma polymerization of octafluorotoluene
EP1660695B1 (de) Verfahren zur abscheidung einer hauptsächlich aus fluor und kohlenstoff bestehenden amorphen schicht und hierfür geeignete vorrichtung
WO2023280887A1 (fr) Elément optique transparent pour véhicule
EP2098305A1 (de) Verfahren zur Aufbringung einer Fluorschicht mit Hilfe eines Vorläufermonomers
WO1994018355A1 (fr) Procede pour deposer une couche mince sur un substrat par plasma froid differe d'azote
d’Agostino et al. The chemistry of etching and deposition processes
FR2683230A1 (fr) Procede de revetement d'un produit metallurgique, produit ainsi obtenu et dispositif pour sa fabrication.
Elam Atmospheric pressure-plasma enhanced chemical vapour deposition of silica: characterisation and control of porosity in multi-layer encapsulation films
Kodaira et al. Thin films growth by PIIID technique from hexamethyldisilazane/argon mixture
Holländer et al. The reaction of nitrogen traces in plasmas with polymer surfaces
Zou et al. Modification of Si (100) surface by plasma-enhanced graft polymerization of allylpentafluorobenzene
EP0658637B1 (de) Verfahren und Vorrichtung zur Trockenbehandlung von metallischen Oberflächen

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100309

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA MK RS

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20150401