EP2171515A1 - Dispositif micromécanique et procédé de projection d'un rayonnement électromagnétique - Google Patents

Dispositif micromécanique et procédé de projection d'un rayonnement électromagnétique

Info

Publication number
EP2171515A1
EP2171515A1 EP08785024A EP08785024A EP2171515A1 EP 2171515 A1 EP2171515 A1 EP 2171515A1 EP 08785024 A EP08785024 A EP 08785024A EP 08785024 A EP08785024 A EP 08785024A EP 2171515 A1 EP2171515 A1 EP 2171515A1
Authority
EP
European Patent Office
Prior art keywords
radiation
intensity
source
radiation source
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08785024A
Other languages
German (de)
English (en)
Inventor
Hans-Joachim Quenzer
Ulrich Hofmann
Marten Oldsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP2171515A1 publication Critical patent/EP2171515A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Definitions

  • the invention relates to a micromechanical device with a movable element.
  • This device may be a device for projecting electromagnetic radiation, which has an intensity-modulated radiation source, wherein the movable element is then designed as a beam deflection unit.
  • the invention further relates to a corresponding method for projecting electromagnetic radiation according to the preamble of the independent claim.
  • Such a micromechanical device can be used for
  • Projecting electromagnetic radiation can be used by radiation emanating from the radiation source is deflected to a projection surface, wherein by a corresponding activation of the beam deflection unit, a time-dependent instantaneous project tion direction can be specified.
  • a time-dependent instantaneous project tion direction can be specified.
  • Electromagnetic radiation of the UV to IR wavelength range can be deflected specifically with moving reflectors or, alternatively, with moving refractive or diffractive elements.
  • a beam deflection is e.g. for the transmission of one- or multi-dimensional image information (display tasks, for example laser projection) or else for material-processing tasks (for example laser marking).
  • One or more sources of electromagnetic radiation which can be controlled in terms of time with respect to the output intensity, deliver one or more beams, which are guided over the surface to be irradiated with the aid of a single or multi-axis deflection system.
  • An example of this can be a modulatable red-green-blue light source consisting of three laser sources of different wavelengths, which is used for color image data projection and whose combined output beam is transmitted via a two-axis microscan mirror or alternatively via two uniaxial microscan arranged one behind the other.
  • Mirror is deflected horizontally and vertically so that the deflected beam sweeps over and illuminates a projection surface in the desired shape.
  • the beam deflection can, as described in the publications US Pat. No. 6140979 A and US Pat. No. 7,097,948 B2, be grid-shaped and generate a line-by-line image structure, or else circular or spiral, as described in the document US Pat. No. 6,147,822.
  • Document WO 03/032046 A1 a similar This system, which produces a lissajous-shaped image structure based on two resonant scanning devices whose scan frequencies always differ by less than an order of magnitude, describes a projection system.
  • the document WO 2006/063577 A1 describes an image projection device which can generate the image structure both via raster-shaped scanning and via any Lissajous figures based on arbitrary ratios of the scan frequencies of a biaxial beam deflection system.
  • the arbitrarily controlled beam deflection unit is continuously tracked by an observation laser beam which, after reflection at the beam deflection system, encounters a two-dimensional position-sensitive detector and read from the image memory as a function of a current XY position of the position corresponding to this position This value is controlled according to a light source.
  • Beam deflector time not irradiated with constant intensity Since the Strahlablenkvoiraum always absorbs a not infinitely small proportion of the incident radiation heats up the deflector depending on the intensity of the incoming beam. Due to the temporally changing irradiation intensity thus always varies the temperature of the beam deflecting device. However, the changing temperature of the beam deflection device has the consequence that the material that makes up the beam deflecting device has volume Change undergoes. This in turn means that the mechanical-dynamic properties of the beam deflecting device change at least slightly.
  • the beam deflecting device is resonantly operated torsion mirrors suspended from springs
  • the temperature-induced volume changes lead to changes in the spring constants and thus to changes in the resonant frequency of this deflecting device, but also to changes in the phase and amplitude of the mirror excursion.
  • the result of this may be that not all image information is projected to the correct location and the size of the projected image also changes. This results in unwanted distortions.
  • the problem described occurs in particular when using uniaxial or multiaxial torsion microscan mirrors made of silicon, as described, for example, in DE 19941363 A1 or US Pat. No. 6595055 B1, since the usually very thin spring suspensions do not permit sufficiently rapid heat removal.
  • WO 2005/015903 A1 proposes to solve the described temperature problem by inserting a shading element between the intensity-modulated light source and the projection or processing surface in such a way that it serves to block out the light beam during certain time intervals within the total duration of the projection , The time intervals during which the light beam passes over the
  • Shading element is hidden, are each available for temperature compensation.
  • a control unit and a control program control the modulation device in such a way that an average intensity of the light beam which is at least approximately constant over the entire projection period is obtained. gives.
  • a projection display for image reproduction must have shading elements which are located at the edges of the image area and not in the middle of the image area.
  • the intended process for temperature compensation is limited in each case to the areas of the reversal points of the deflection device.
  • a temperature stabilization results only as averaging over a comparatively very long time interval.
  • Large means that very much image information (pixels) can be projected between two shading intervals. For example, with a VGA resolution image projection, at least 480 pixels, or even a maximum of 640 pixels, are projected in one piece, without the proposed method being temporarily limited to any intensification. fluctuations in these projected pixels.
  • the present invention is therefore based on the object of developing a micromechanical device with which precision problems due to thermal influences on mechanical properties of moving parts can be avoided.
  • the invention is in particular also the object of developing a device for projecting electromagnetic radiation, which avoids the disadvantages described ZUVO ⁇ with little effort.
  • the device should permit a projection of given patterns with high precision.
  • the invention is further based on the object of developing a corresponding precise method for projecting electromagnetic radiation.
  • the device comprises a controllable heating device for a defined heat input into the movable element, wherein the device further comprises a control unit which is adapted to control the heating device in dependence on a current temperature and / or of a momentary other heat input into the movable element.
  • a uniform temperature of the movable element can be achieved, which advantageously avoids that mechanical properties of the movable element, for example resonance display shafts, change due to temperature fluctuations.
  • the other heat input may be e.g. be caused by a radiation power of a directed to the movable element radiation source, in particular, if the device is to serve for the projection of electromagnetic radiation. Unless the
  • Heating device is controlled in response to a temperature, which may be a temperature of the movable element itself or an ambient temperature, may be provided for the measurement of a sensor.
  • the movable element will typically be a microactuator or a micromechanical resonator, the advantages being of particular advantage in the case of a vacuum-encapsulated element, for example in the form of a micromirror, is. In this case, thermal influences are particularly significant, unless compensated with the features of the present invention.
  • the movable element can also serve, for example, as a sensor element of an inertial sensor. In this case, a deflection of the movable element can for example be detected capacitively or optically. Typically, however, the movable element forms a beam deflection unit for a projection device. The following statements relate mostly to this case, but the features described in this context are not limited to this application.
  • control unit may preferably be arranged to control the heating device by means of a control circuit so that a temperature of the movable element is maintained at a predetermined and / or constant value.
  • the proposed device can, as already indicated, form a device for projecting electromagnetic radiation, which has an intensity-modulatable radiation source, wherein the movable element is designed as a beam deflecting unit for deflecting radiation emitted by the radiation source onto a projection surface and wherein the beam deflection Unit can be controlled to specify a time-dependent current projection direction.
  • the control unit is preferably set up to drive the heating device as a function of a momentary radiation intensity of the radiation source.
  • the heating device can be provided by an electrical conductor which is arranged on the movable element or in the vicinity of the movable element and can be acted upon by a heating current which can be controlled by the control device.
  • This conductor may for example be provided in a conductor track plane on the movable element, if this is formed by a correspondingly structured semiconductor substrate.
  • the heating device is provided by an intensity modulatable secondary source for irradiating the movable element, the control unit then being arranged to control a radiation intensity of the secondary source.
  • the device also has an intensity-modulatable secondary source for irradiating the beam deflecting unit, wherein a control unit for controlling a radiation intensity of the secondary source in dependence on a momentary radiation intensity of the radiation source is also provided
  • the beam deflecting unit can intervene despite time-varying irradiation largely constant energy input into the beam deflecting unit can be achieved.
  • temperature fluctuations in the beam deflection unit can be avoided, which would otherwise affect their mechanical properties at the expense of precision.
  • thermal stabilization of the beam deflecting unit serving as a beam deflection system can be achieved, while a complex correction of the control of the radiation source itself and / or of the beam deflecting unit is unnecessary.
  • Realizable by the invention thus an instantaneous temperature approximation.
  • the proposed device and the corresponding method is in preferred embodiments in a position to respond with a correspondingly low delay already on the difference of the intensities of only two adjacent pixels.
  • the above-described temperature problem is thus solved without impairing the quality of the projection task, because the radiation source provided for projecting can be controlled without compensation for thermal effects thanks to a compensation of intensity changes by the secondary source.
  • a device of a proposed type can be used depending on the design and need for image generation or material processing on a workpiece surface forming the projection surface.
  • the control unit is typically program-programmed so that the radiation intensity of the secondary source increases as the radiation intensity of the beam deflection unit by the radiation source decreases, and vice versa, to achieve the desired effect.
  • the beam deflection unit is now heated with an intensity-modulatable heating device that it is controlled that a heating power of the heating device decreases when an increasing radiation intensity of the radiation source and / or a frequency change of the radiation emanating from the radiation source leads to an increased heat input into the beam deflection unit, and vice versa.
  • the beam deflecting unit may e.g. are irradiated with an intensity-modulatable secondary source, which is controlled such that a radiation intensity of the secondary source decreases when an increasing radiation intensity of the radiation source and / or a frequency change of the radiation emanating from the radiation source leads to increased heat input into the beam deflection unit , and vice versa.
  • an electrical conductor can be used as a heating device, which is acted upon by a correspondingly controlled heating current.
  • the secondary source is controlled so that the radiation source and the secondary source together cause a temporally constant heat input into the beam deflecting unit by the secondary source is synchronized intensity modulated with the radiation source.
  • the radiation source and / or the secondary source may be a light source radiating in a wavelength range between ultraviolet and infrared. It can be advantageous if the secondary source is a source of light or heat radiation radiating in a non-visible wavelength range so that radiation emitted by the secondary source can not disturb a generated image.
  • the radiation source can be intensity modulatable directly or indirectly by means of a downstream modulation unit. It may in particular comprise a laser diode or an RGB laser light source or an infrared laser.
  • the secondary source should be intensity modulatable with a maximum frequency that is at least as high as a maximum modulation frequency of the radiation source, so that changing radiation intensities can be compensated by the radiation source without loss of time.
  • the secondary source may in particular comprise an infrared laser diode or a near-infrared laser diode.
  • the beam deflecting unit may also be given by a refractive element, in typical embodiments of the invention it will be reflective.
  • the beam deflecting unit comprises a tiltable about one or two axes mirror.
  • the beam deflecting unit may comprise e.g. Silicon-based micromirror comprise and, for example, form a micromirror scanner.
  • the secondary source is preferably arranged that it irradiates the beam deflection unit from a rear side, so that radiation emitted by the secondary source is not reflected onto the projection surface.
  • the secondary source may also irradiate the beam deflecting unit in other ways such that radiation emanating from the secondary source and deflected by the beam deflecting unit does not fall on the projection surface. This can be achieved, for example, by the secondary source irradiating the beam deflecting unit from a direction deviating from an irradiation direction through the radiation source by a sufficiently large angle, for example by at least 20 °.
  • the time-dependent radiation intensity of the secondary source can be defined in a simple manner by subtracting a momentary intensity value of the radiation source from a nominal value, weighting a resulting difference value with a weighting factor, and using a control signal thus obtained to drive the secondary source.
  • the control unit of the device can be set up according to the program. If the radiation source comprises a plurality of light sources, for example for producing different color components, the said intensity value of the radiation source can be determined by weighting each individual intensity of the light sources contained in the radiation source with a color-specific weighting factor and adding the individual intensities weighted in this way , As a result, frequency-dependent absorption properties of the beam deflecting unit can be taken into account.
  • FIG. 1 is a schematic representation of an embodiment of the invention
  • FIG. 2 also schematically but in more detail a device in an embodiment of the invention
  • Figure 3 shows another embodiment of the invention in the figure 2 corresponding representation
  • FIG. 4 shows in a comparable representation a further embodiment of the invention
  • Figure 5 is a corresponding representation of a modification of the embodiment of Figure 4.
  • the device shown in FIG. 1 forms a projection apparatus for solving the problem described above and provides a radiation source 1 which comprises one or more primary sources of electromagnetic radiation which can be specifically modulated with regard to their output power.
  • a radiation source 1 which comprises one or more primary sources of electromagnetic radiation which can be specifically modulated with regard to their output power.
  • This can in each case be a directly modulatable source, such as a laser diode controllable by the current, or else a CW source
  • Output radiation is intensity-modulated by a downstream modulator.
  • a primary source is the RGB laser light source a full-color laser video projector, or even an infrared laser used for inscription purposes.
  • a suitable beam shaping unit optically shaping the radiation emitted by the radiation source 1 or the primary source (s) in a desired manner (for example by collimation of a divergent radiation source).
  • a beam deflection unit 2 is provided in the apparatus to allow one or more dimensional deflection of the intensity modulated radiation.
  • this may be a biaxial beam deflection system, e.g. consists of two consecutively connected uniaxial movable deflecting mirrors.
  • it can just as well be a single mirror that can be moved by two or more axes or else another deflection apparatus that allows the output beam of the primary source or the primary sources to be deflected in a targeted manner at least vertically and horizontally.
  • another type of beam deflection for example only uniaxial (line projection), may be desired without restriction.
  • the deflected by the beam deflecting unit 2 radiation is projected directly onto a projection surface 3.
  • the projection surface may be designed differently, for example, in the case of a projection-projecting or backprojecting laser projection method, as a reflecting or transmissive projection screen, which as a rule also diffuses.
  • the projection surface 3 can be a variety of other materials and surfaces, which is to be processed by the deflected radiation.
  • At least one secondary source 4 is provided in the apparatus proposed here, which can also be specifically modulated with regard to the output intensity, namely with a maximum frequency which is preferably at least as high as the highest for the projection task used modulation frequency of the radiation source 1.
  • a maximum frequency which is preferably at least as high as the highest for the projection task used modulation frequency of the radiation source 1.
  • B VGA resolution requires a modulation frequency of a few MHz.
  • the secondary source 4 does not have to be involved in the projection task (image projection or material processing, etc.). In preferred embodiments of
  • the radiation emitted by the secondary source 4 is not projected onto the projection surface 3.
  • a control unit 5 receives (in the figure 1 illustrated by an arrow from below) projection data, which may be, for example, sequential RGB video data or, for example, also a or multi-dimensional data for material processing. As a rule, it is intensity information, depending on which the radiation source 1 is driven.
  • the task of the control unit 5 is to temporarily store the data and, in the evaluation of this data, synchronized with the beam deflecting unit 2, the beams are emitted. 1). While a control signal for the radiation source 1 is generated in the control unit 5 from the input data, the same control unit 5 also calculates a momentary drive signal value for driving the secondary source 4 based on the same instantaneous input data. This drive signal value for the secondary source 104 becomes in the simplest case calculated as follows:
  • Step 1 If the radiation source 1 consists of several independently controlled individual sources, as in the case of a white light laser source of a video laser projection system consisting of a red, a green and a blue light source, then the instantaneous intensity value first becomes of each of these different primary source channels multiplied by a weighting factor.
  • This weighting factor can result from experimentally obtained data and, for example, take into account the spectrally different absorption properties of the beam deflecting system, that is to say the beam deflection unit 2. For example, short-wave blue light is more strongly absorbed by an aluminum reflection layer than green or red light.
  • the instantaneous intensity values for a blue primary source would have to be weighted more heavily than those for green and red.
  • the weighting can also take into account further experimentally recognized influences.
  • Step 2 In the case that the radiation source 1 consists of several individual sources, the weighted instantaneous individual intensity values are added up to a current overall intensity value.
  • Step 3 The determined total intensity value is subtracted from a predetermined setpoint. This setpoint value is at least as high as the sum of the weighted maximum intensity values of all the individual sources from the radiation source 1.
  • Step 4 The instantaneous value thus calculated always behaves proportionally to the energy input into the beam deflecting unit 2, which is missing in order to keep the beam deflecting unit 2 permanently at a constant temperature.
  • the difference value thus determined is also multiplied by a weighting factor.
  • the weighting factor results, for example, from data obtained experimentally on the absorption property of the beam deflecting system upon irradiation with radiation of the secondary source 4.
  • Step 5 Finally, based on the instantaneous value thus obtained, a drive signal for the secondary source 4 is generated and the beam deflection system accordingly active and thus not only averaged over long periods of time but also on the time scale of pixel exposure times. kept at a constant temperature.
  • the device shown in Figure 2 forms an RGB laser display based on an RGB primary source
  • the deflected light from the radiation source 1 strikes the projection surface 3.
  • the secondary source 4, preferably a near-infrared laser diode (with a wavelength between 700 nm and 800 nm) is directed onto an uncoated back side of the silicon micromirror, which forms the beam deflection unit 2.
  • the apparatus shown in FIG. 3 is another RGB laser display based on an RGB primary source as the radiation source 1 and a biaxial micro mirror scanner made of silicon as the beam deflecting unit 2.
  • the deflected light of FIG. 3 is another RGB laser display based on an RGB primary source as the radiation source 1 and a biaxial micro mirror scanner made of silicon as the beam deflecting unit 2.
  • the deflected light of FIG. 3 is another RGB laser display based on an RGB primary source as the radiation source 1 and a biaxial micro mirror scanner made of silicon as the beam deflecting unit 2.
  • Radiation source 1 impinges on the projection surface 3.
  • the secondary source 4 preferably a near-infrared laser diode with a wavelength between 700 nm and 800 nm is also directed to the mirrored front side of the silicon micromirror 2 here.
  • the efficiency of the radiant heater is significantly lower than in the arrangement of FIG. 2.
  • the secondary source 4 is an emitter of a non-visible near-infrared wavelength, its radiation could be emitted without disturbing the contrast of the laser image. Projection are deflected onto the screen 3. This would be the case with a differently inclined impact of this radiation on the mirror.
  • the device shown in FIG. 4 also forms an RGB laser display based on an RGB primary source as the radiation source 1 and a biaxial micro-mirror scanner made of silicon as a beam deflection system or beam deflection system. Unit 2.
  • the deflected light of the given by the radiation source 1 primary source impinges on the projection surface 3.
  • the secondary source 4 preferably a near-infrared laser diode (ie again with a wavelength between 700 nm and 800 nm radiating) is on the non-mirrored Rear side of the silicon micromirror directed, which forms the beam deflection unit 2.
  • the silicon micromirror scanner shown here is hermetically packaged and vacuum-encapsulated, for which it is surrounded on both sides by glass surfaces 6 and 7, which must be irradiated.
  • the exemplary embodiments may also have, in any combination, all other features explained in the general description part.
  • an apparatus arrangement and a method for one-dimensional or multi-dimensional projection is electromagnetic
  • the relevant wavelength and power ranges for which the invention can be used include at least all wavelengths and powers which can be suitably deflected by metallic or dielectric mirrors without destroying the deflecting mirror or the deflecting mirrors.
  • the arrangement comprises at least two or even several sources, namely at least the radiation source 1 and the secondary source 4, whose emitted electromagnetic radiation can be modulated in intensity either directly or indirectly via a downstream unit.
  • the intensity modulation is controlled by one, two or more electronic control units 5 in accordance with a supplied one-dimensional or multi-dimensional image data information.
  • the intensity-modulated beam of at least one of these sources can be deflected in a controlled manner by means of a single- or multi-axis deflection unit, here referred to as beam deflection unit 2, and either directed directly onto the intended projection surface 3 or indirectly via a downstream imaging device (eg objective). projected onto the projection surface 3.
  • a single- or multi-axis deflection unit here referred to as beam deflection unit 2
  • a downstream imaging device eg objective
  • At least one of the intensity-modulatable sources of electromagnetic radiation is not or at least not primarily used for the projection task (eg image projection or material processing), but is intended to transmit, by absorption, energy to the one or more deflection units.
  • the temperature of the one or more deflection units can be kept constant, not only on the scale of whole images or whole lines, but also much more precisely, on the scale of elementary constituents of lines, namely pixels.
  • Figure 5 shows a modification of the embodiment of Figure 4 instead of the secondary source 4, which serves as a heating device in the embodiments described above, here another Schuvor- direction is provided, in which an electrical conductor 8 is disposed on the beam deflecting unit 2, the by applying a correspondingly controlled voltage U with a heating current is acted upon, wherein a control device not shown here (corresponding to the control device 5 of Figure 1) the heating device - as in the other embodiments, the secondary source 4 - so by means of a control circuit so controls, a temperature of the beam deflecting unit 2 is kept constant at a predetermined value.
  • the - typically- wise pixel-wise changing - current intensity of the irradiation by the radiation source 1 and the associated heat input is taken into account and compensated by a corresponding heating power of the Schuvor- direction.
  • the serving as a heating wire e- lectric conductor 8 is realized by a corresponding structuring of a conductor track level 9.
  • This conductor track plane 9 is arranged on a semiconductor substrate, on the basis of which and by the structuring of which the beam deflection unit 2 is formed.
  • a respective beam deflection unit 2 is shown as a movable element of a micromechanical device serving for projecting electromagnetic radiation.
  • other movable elements may be replaced by corresponding heaters and correspondingly controlled control devices at a constant rate
  • the movable elements are in each case mechanical microactuators and / or resonators, wherein temperature, frequency and phase stabilization can be achieved by the compensation of thermal influences proposed here.
  • FIG. 6 shows a last exemplary embodiment, which forms an inertia sensor, wherein the movable element is formed by a sensor element 10 which is formed on the basis of a semiconductor substrate and elastically suspended, whereby acceleration-related deflections of the sensor element 10 can be detected optically or capacitively. Also provided here is a temperature sensor 11, with the temperature changes of the sensor element 10 can be detected directly.
  • a control device 5 controls the secondary source 4 corresponding to the exemplary embodiments from FIGS. 1 to 4 and serving as heating device by means of a control loop so that the temperature of the sensor element 10 is kept constant at least in a time average.
  • the temperature stabilization of micromechanical elements by means of heating devices which, depending on a temperature, for example measured, and / or on a heat input caused by other measures, are controlled in such a way that influences which would otherwise lead to a temperature change. be compensated.
  • the invention is particularly applicable to vacuum-packaged micro-oscillator and / or micromechanical resonators, which may be, for example, deflectable micromirrors. In this case, if a secondary source is used as the heating device, then this is in any case not comparable with a radiation source which may be provided in order to project electromagnetic radiation cooperatively with the micromirror.
  • the secondary source is preferably arranged so that it starts from de radiation, if it is reflected at the movable element, at least is thrown in a clearly different direction than the radiation emanating from the actual radiation source.
  • the secondary source can also work in a significantly different wavelength range than the radiation source used to generate the projected radiation.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un dispositif micromécanique muni d'un élément mobile qui comprend un dispositif de chauffage commandable pour une charge thermique définie dans l'élément mobile. Selon l'invention, le dispositif présente en plus une unité de commande (5) qui est configurée pour commander le dispositif de chauffage en fonction d'une température momentanée et/ou d'une charge thermique momentanée. Le dispositif peut être configuré, par exemple, pour projeter un rayonnement électromagnétique lorsque l'élément mobile est réalisé sous la forme d'une unité de déviation du rayonnement (2) destiné à dévier le rayonnement provenant d'une source de rayonnement (1) sur une surface de projection (3). L'invention concerne finalement aussi un procédé correspondant de projection d'un rayonnement électromagnétique.
EP08785024A 2007-07-10 2008-07-10 Dispositif micromécanique et procédé de projection d'un rayonnement électromagnétique Withdrawn EP2171515A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007032801A DE102007032801A1 (de) 2007-07-10 2007-07-10 Vorrichtung und Verfahren zum Projizieren elektromagnetischer Strahlung
PCT/EP2008/006071 WO2009007139A1 (fr) 2007-07-10 2008-07-10 Dispositif micromécanique et procédé de projection d'un rayonnement électromagnétique

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EP2171515A1 true EP2171515A1 (fr) 2010-04-07

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US (1) US20100277782A1 (fr)
EP (1) EP2171515A1 (fr)
JP (1) JP2010532882A (fr)
DE (1) DE102007032801A1 (fr)
WO (1) WO2009007139A1 (fr)

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US20100277782A1 (en) 2010-11-04
DE102007032801A1 (de) 2009-01-15
WO2009007139A1 (fr) 2009-01-15

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