EP2137499B1 - Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur - Google Patents

Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur Download PDF

Info

Publication number
EP2137499B1
EP2137499B1 EP07856150.3A EP07856150A EP2137499B1 EP 2137499 B1 EP2137499 B1 EP 2137499B1 EP 07856150 A EP07856150 A EP 07856150A EP 2137499 B1 EP2137499 B1 EP 2137499B1
Authority
EP
European Patent Office
Prior art keywords
sensor
foil
coil
permeability
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP07856150.3A
Other languages
German (de)
English (en)
Other versions
EP2137499A2 (fr
Inventor
Vladislav Mednikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
Original Assignee
Micro Epsilon Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Messtechnik GmbH and Co KG filed Critical Micro Epsilon Messtechnik GmbH and Co KG
Publication of EP2137499A2 publication Critical patent/EP2137499A2/fr
Application granted granted Critical
Publication of EP2137499B1 publication Critical patent/EP2137499B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2033—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G01D5/2241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/9505—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/952—Proximity switches using a magnetic detector using inductive coils

Definitions

  • the invention relates to a method for determining the position and / or position change of a measurement object relative to a sensor, wherein the sensor preferably has an applied with alternating current sensor coil. Furthermore, the invention relates to a corresponding sensor arrangement.
  • Electromagnetic sensors are widely used in the art. They are used for example for monitoring the distance between a sensor and a measurement object, for measuring rotational or valve lift movements, for determining the position of a piston or for detecting conductive objects. This non-exhaustive list shows the extensive application possibilities of this sensor type.
  • A1 known displacement sensor is used as a measuring object, a permanent magnet which is movable along a soft magnetic core. Around the core, two oppositely applied exciting coils and a secondary coil are wound. Depending on the position of the measurement object with respect to the sensor, a virtual air gap is generated at a location of the soft magnetic core, with the result that the voltage induced in the secondary coil changes with the position of the measurement object. The voltage is proportional to the position of the DUT relative to the sensor.
  • a displacement measuring system which comprises an inductive sensor, a transmitter and an evaluation unit.
  • a magnet is used as the encoder whose position can vary relative to the sensor.
  • the magnetic field of the magnet brings the soft magnetic material of the sensor into saturation.
  • the inductance of the measuring coil of the sensor which is coupled to an oscillator whose frequency or amplitude changes is detected changes.
  • a magnetically actuated transducer with a magnetic field sensor and along a line of movement movable magnets known. Parallel to the line of movement, a rod made of soft magnetic material is arranged, from the front side of the magnetic field sensor is arranged with its sensor direction pointing to the front side. The length of the rod and the width of the magnet determine the measuring range of the transducer.
  • magnetoelectric transducers For the contactless detection of a rotational movement of a pole wheel sensors are used with magnetoelectric transducers. Examples of this are from the US 4,926,122 A . EP 0 729 589 B1 or DE 30 41 041 C2 known. In practice, these transducers are positioned very close to the object to be measured in order to ensure high immunity to interference. At these small distances (often in the order of 1 mm), the sensor, in particular under real operating conditions, can be damaged. It is particularly important in dynamic operation to achieve a reliable detection of the rotational movement with a relatively large base distance.
  • the invention is therefore based on the object of specifying a method with which a position or a change in position of a test object relative to a sensor can be measured both in static and in dynamic operation with high resolution. Furthermore, a corresponding device should be specified with the simplest possible construction.
  • the above object is achieved by the features of claim 1.
  • the method according to the invention is characterized in that by a magnet associated with the measurement object in a soft magnetic Film whose permeability changes under the influence of a magnetic field as a function of the field strength of the magnetic field and which is arranged in the influence of the sensor, a change in the permeability of the film is caused, that the change in the permeability of the film from their reaction to the sensor and therefrom the position and / or position change of the measurement object relative to the sensor is determined, and that a DC coil generates a magnetic field by means of which the permeability of the film or parts of the film is influenced.
  • the determination of a position or position change is equated with the determination of an angle, an angle change or a rotational speed measurement.
  • the above object is achieved by the features of claim 8.
  • the sensor arrangement according to the invention is characterized in that in the influence of the sensor, a film of soft magnetic material is arranged, wherein the permeability of the film under the influence of a magnetic field as a function of the field strength of the magnetic field changes and that an evaluation circuit is provided by means of the change the permeability of the film is determined from its reaction to the sensor and is closed to the position and / or position change of the measurement object relative to the sensor and that a DC-excited compensation coil is provided, with which the permeability of the film or a part of the film is affected ,
  • the determination of a position or position change is equated the determination of an angle, an angle change or a speed measurement.
  • the sensor arrangement according to the invention is characterized in that in the influence of the sensor, a film of soft magnetic material is arranged, wherein the permeability of the film under the influence of a magnetic field as a function of the field strength of the magnetic field changes and wherein a movement of the measurement object substantially in directions parallel to an extension direction of the film, whereby in the film, a region of high permeability, a region of reduced permeability and a transition region arises between the two areas that, depending on the distance between the sensor and the object to be measured, the transitional area is shifted along the film and that the change of the permeability of the film from its reaction to the sensor and, therefrom, the position and / or positional change of the object to be measured relative to the sensor is closed.
  • the determination of a position or position change is equated the determination of an angle, an angle change or a speed measurement.
  • this method is characterized in that caused by a magnet associated with the target in a soft magnetic film whose permeability changes under the influence of a magnetic field as a function of the field strength of the magnetic field and which is arranged in the sphere of influence of the sensor, a change in the permeability of the film is formed, whereby in the film, a region of high permeability, a region of reduced permeability and a transition region between the two areas is formed, that is shifted depending on the distance between the sensor and the measurement object, the transition region along the film and that the change in the permeability of the film of the Reaction to the sensor and from the position and / or position change of the measurement object is determined relative to the sensor
  • This property can be used in a sensor arrangement.
  • a magnet is assigned to a measurement object whose position is to be detected relative to the sensor.
  • the magnetic field strength in the region of the soft magnetic material increases as the object to be measured approaches the sensor or as the sensor approaches the object to be measured.
  • Suitable measuring elements are, for example, magnetic field sensors such as Hall sensors, AMR and GMR sensors, or inductive sensors such as coils of an inductive sensor or an eddy current sensor or any other measuring element that is sensitive to changes in permeability.
  • an improvement in the sensitivity of the sensor arrangement can be achieved by virtue of the fact that the soft magnetic material is formed only as a thin film.
  • the emergence of volume effects is largely avoided, which for changes in permeability lower field strengths are necessary and can run in a shorter time.
  • This has a favorable effect on the sensitivity and dynamics of the sensor arrangement.
  • this leads to the fact that the magnetic field of the magnet associated with the measurement object influences the permeability of the film in a relatively wide measuring range.
  • a region of high permeability, a region of reduced permeability and a transition region between the two regions arise in the film.
  • the transition region is moved along the film as a function of the distance between the sensor and the object to be measured.
  • the magnetic field direction of the magnet of the measurement object lies along an axis of "heavy" magnetization of the film.
  • the magnetic field of the magnet has a coupling only small area of the end face of the film. It is also advantageous if the unsaturated region of the film can be used effectively.
  • the resolution and accuracy of the sensor arrangements according to the invention is dependent on the electromagnetic and mechanical properties of the film.
  • films of M-metal, Vitrovac or ferrite can be used.
  • the described effects can be used according to the invention by the embodiments described below.
  • the aim of these embodiments is to provide a sensor with the largest possible detection range and to achieve the highest possible sensitivity of the sensor.
  • a film of soft magnetic material is used whose permeability change affects a sensor coil.
  • the change in permeability produces a detectable reaction to the coil, which is usually reflected in a change in the impedance of the coil.
  • the impedance or the impedance change of the coil can be measured in the usual way, for example, by the sensor coil is subjected to alternating current.
  • the permeability change can also be detected with other inductive or magnetic-field-sensitive measuring elements.
  • a compensation coil is arranged in the vicinity of the soft magnetic film in addition to the applied with an alternating current sensor coil, which is energized with direct current.
  • the permeability can be influenced in a more or less large area of the film. This can be used to specifically create particularly favorable conditions for the detection of the DUT. Is the measurement object in a relatively large Distance, so the magnetic field of the magnet associated with the measurement object will only have little influence on the film, since the sensitivity of the sensor arrangement is in an unfavorable range.
  • the compensation coil By applying a direct current to the compensation coil, it is possible to achieve a shift in the sensitivity characteristic and to increase the sensitivity at a certain part of the measuring range in a targeted manner.
  • the field strength could have already assumed too high values, for example if the measurement object is located very close to the sensor.
  • the compensation coil By the compensation coil, the field strength can then be selectively reduced, so that the sensor assembly is again in a more favorable operating condition. In this way, depending on the polarity and strength of the DC current, the measuring range can be considerably extended and the sensitivity can be improved over the measuring range.
  • the magnetic field of the compensation coil installation tolerances or slowly varying disturbances, such as temperature drift or aging can be compensated or compensated.
  • the senor is subjected to a calibration, in particular before the first startup.
  • the following steps are preferably carried out.
  • the measurement object is at a plurality of Positions h positioned relative to the sensor.
  • the individual positions h have a step size ⁇ h.
  • the individual positions are arranged such that they are located substantially on a common line.
  • an alternating current is fed to the sensor coil.
  • the sensor coil generates an electromagnetic alternating field, which is influenced by the soft magnetic film.
  • the impedance Z and / or the relative change in impedance is determined ⁇ Z / Z of the coil.
  • various methods are known in practice. From the values thus determined, a characteristic curve is determined which describes a relationship between the relative sensitivity S of the sensor coil and the position h of the test object relative to the sensor coil.
  • a position h 0 is determined at which the relative sensitivity S assumes a maximum value.
  • the value Z 0 of the complex impedance corresponding to this position h 0 is stored in a non-volatile memory. With these steps, the characteristic curve of the sensor was determined.
  • the dependence of the measurement results on the strength of the direct current is determined.
  • a direct current is first fed into the compensation coil. Again, the measured object is placed at different positions h and the impedance Z and / or relative change in impedance determined ⁇ Z / Z of the coil at each position h. The overlay of the magnetic fields of the sensor coil, the compensation coil and the magnet of the test object acts on the foil.
  • the intensity of the direct current is varied in the measuring range ⁇ ⁇ h . This is repeated until a predetermined and stored reference value of the impedance is reached. From the values thus determined, the dependence of the direct current on the change in position of the DUT is determined. It has been shown that in the range ⁇ ⁇ h a substantially linear relationship between the position h, and the direct current is given by the compensation coil. Therefore, it can be sufficient in many applications, only to determine and store the proportionality factor between position change and DC.
  • the predetermined setpoint value of the complex impedance is determined at a basic distance between the object to be measured and the sensor, at which the position changes of the measurement object leads to maximum impedance changes of the coil system.
  • the measurement of the permeability could in principle also be determined in another way.
  • the measurement of the impedance can be direct or indirect. For example, when a known current is impressed, the voltage drop across the coil can be measured, and the impedance can be determined by dividing the voltage by the current.
  • the impedance could also be extended by a parallel-connected capacitance to a free-running oscillator, which is driven for example via a PLL (Phase Locked Loop) circuit. From the output signal of the PLL circuit can be closed to the impedance of the sensor coil.
  • PLL Phase Locked Loop
  • the real part Re ⁇ Z ⁇ and the imaginary part Im ⁇ Z ⁇ can be determined.
  • the determination of the real and imaginary part can be analog or digital.
  • Corresponding methods are well known in practice.
  • the magnitude of the direct current through the compensation coil in a tracking control is adjusted by means of a closed loop.
  • the quotient D can serve as a setpoint for the control loop, whereby D could be kept constant. From the imaginary part in ⁇ Z ⁇ , the position or position change of the measurement object relative to the sensor could be determined. Additionally or alternatively, the strength could of the direct current through the compensation coil then be used for position determination.
  • the regulation takes place in such a way that a maximum relative sensitivity S of the sensor over the entire measuring range or at least a part thereof is kept constant.
  • the information obtained from a calibration could be used.
  • Maximum sensitivity is at the position h 0 , which can be shifted by selecting a DC current through the compensation coil.
  • the direct current could be adjusted manually.
  • the control could not react quickly enough to changes.
  • a manual adjustment of the direct current can be realized in various ways.
  • the strength of the DC current could be entered via keys or a keyboard.
  • analog or digital rotary or slider controllers could be used.
  • the magnetic fields of the sensor coil, the compensation coil and the magnet of the measurement object will be superimposed to form a resulting magnetic field.
  • the directions and polarity of the individual magnetic fields will generally be different.
  • the magnetic field of the sensor coil is due to the supply of an alternating current an alternating field and thus changes with the double frequency of the alternating current its polarity.
  • the magnetic field of the compensation coil is adjusted in dependence on the position of the measurement object relative to the sensor via a control or manually. In this case, the polarity of the direct current exciting the compensation coil can be chosen such that the static field component of the magnetic field is increased or decreased.
  • the magnetic field of the magnet associated with the measurement object will generally be an inhomogeneous magnetic field and depend on the distance between the sensor and the measurement object.
  • the sensor coil and the compensation coil could be galvanically isolated from each other. As a result, the two coils can be acted upon completely independently of each other with currents. It should be noted, however, that the two coils could also be combined into a single coil or one of the two coils can be configured by a septabgriff as a section of the other coil. When configured by a single coil, a shifted by a Gleitstromanteil alternating current was fed into the coil. The offset could be adjusted by means of a control loop or manually as well as in galvanically separated embodiment of the two coils.
  • the magnet of the test object is preferably a permanent magnet.
  • the measured object can be used independently of any further energy supply.
  • the magnet could also be formed by an electromagnet. This could further influence the measurement. For example, if the measurement object is comparatively close to the sensor, the magnetic field of the magnet could be reduced by reducing the exciter current. Likewise, with a large distance between the object to be measured and the sensor, the exciting current could be increased. Both embodiments of the magnet could also be used in combination.
  • the film is capacitively coupled to the sensor coil.
  • the foil has an electrical contact which is connected to an oscillator.
  • the other pole of the oscillator is connected to one of the terminals of the sensor coil. In this way, the energy would be capacitively coupled into the sensor coil.
  • the two terminals of the sensor coil are connected to the inputs of an amplifier, which amplifies the voltage drop across the sensor coil.
  • the amplifier is part of the evaluation circuit, by means of which the change in the permeability of the film is determined.
  • the voltage drop across the coil is amplified by the amplifier and output as amplified signal U 2 .
  • This signal U 2 is proportional to the relative change in impedance ⁇ Z / Z.
  • the oscillator could be connected directly to the sensor coil.
  • the alternating current would therefore be coupled directly into the coil become.
  • the film could then be connected to ground, for example.
  • the voltage drop across the sensor coil voltage would be amplified and a signal proportional to the relative change in impedance ⁇ Z / Z signal U 2 are output.
  • an electronic arrangement could be provided which forms two orthogonal voltage components from the voltage signal U 2 .
  • the two components are then proportional to the real part Re ⁇ Z ⁇ and imaginary parts Im ⁇ Z ⁇ of the complex impedance Z of the sensor coil.
  • the electronic device would output voltage signals U 3 and U 4 representing the two orthogonal voltage components.
  • the signal U 4 could be used to synchronize the oscillator, while the signal U 3 is used to control the voltage source, which feeds the compensation coil with a sliding current.
  • the electronic device could be implemented by a variety of arrangements known in the art.
  • the analysis of the amplified voltage is digital.
  • the electronic device would then comprise an A / D converter, a processor and a memory.
  • an optocoupler could additionally be provided, via which the control information is transferred galvanically decoupled to the power source.
  • the magnet could also be realized by a permanent magnet or an electromagnet.
  • an electromagnet When configured by an electromagnet could in turn on the measurement behavior of the sensor - as previously described - influence are taken.
  • a calibration of the sensor arrangement could be performed.
  • the previously described steps for determining the characteristic of the sensor would be carried out accordingly.
  • the design of the evaluation circuit would be done in a similar manner as in the embodiment with compensation coil.
  • An oscillator could feed a voltage signal directly into a contact of the foil.
  • the voltage could then be capacitively coupled into the sensor coil.
  • the voltage generated at the coil could in turn be amplified by an amplifier and fed to an electronic device for determining the real and the imaginary part. From a the imaginary part proportional voltage signal U 4 , a synchronization of the oscillator could be brought about.
  • the oscillator could be connected directly to the sensor coil and the voltage drop across the coil can be amplified via an amplifier.
  • the amplified signal could be applied to an electronic device to extract the real and imaginary parts from the amplified signal.
  • the sensor arrangement with or without compensation coil-the sensor could be formed in different ways.
  • the sensor could be applied in a round or in some other way three-dimensionally pronounced carrier.
  • the sensor coil, the film and possibly the compensation coil could be wound, glued or applied in any other way.
  • the senor could be designed flat.
  • the sensor is preferably applied to a planar carrier.
  • the carrier could also be curved and adapted to specific work environments. After appropriate calibration measures such sensors can be used easily.
  • the thickness of the film could be adapted to the penetration depth of the electromagnetic field generated by the sensor coil.
  • the electromagnetic field generated by the sensor coil is preferably high-frequency.
  • ⁇ 2 ⁇ f with f as the frequency of the alternating field and ⁇ is the conductivity and ⁇ is the permeability of the film.
  • ⁇ is inversely proportional to the root of the permeability ⁇ of the film.
  • the electromagnetic field penetrates through the film in areas of low permeability.
  • This effect can be further used to increase the sensitivity. It could namely be arranged on the sensor coil side facing away from the film, a conductive surface.
  • this conductive surface preferably has a much higher conductivity compared to the soft magnetic film. As a result, eddy currents would be induced to a greater extent in the conductive surface than in the soft magnetic film.
  • the soft magnetic film releases the underlying conductive surface depending on the position of the measurement object.
  • a zone of reduced permeability of different widths would allow the soft magnetic film for the electromagnetic field of the sensor coil to become permeable. (This can be clearly presented in such a way that the film releases a differently sized part of a window opening, similar to a venetian blind.) This would induce eddy currents in the conductive surface to varying degrees depending on the position of the measurement object. These cause a stronger influence on the impedance of the sensor coil than the induced eddy currents in the soft magnetic film, which in turn has a positive effect on the sensitivity of the sensor arrangement.
  • the sensor coil is fed with an alternating current at high frequency.
  • the dynamics of the sensor is very high.
  • the penetration depth of the eddy currents in conductive materials is low due to the high frequency, this is sufficient for thin films (for example 20 ⁇ m). It is recognizable, that a volumetric effect is not necessary or even not desirable: in the case of a voluminous soft magnetic material, the eddy current would also flow only in a thin layer, so that the measuring effect in relation to the volume is small.
  • the zone of permeability change is dependent on the magnetic field strength.
  • the sensor can measure its position at a relatively large distance (eg 30 ... 50 mm) with a very high resolution (a few ⁇ m) by placing the highest sensitivity zone in a suitable arrangement so that the operating point at the predetermined base distance of the magnet is relative to the sensor.
  • a so-called redundancy factor of typical order of magnitude 3 can be achieved. This means that the distance of the movement of the measurement object by a factor of 3 is greater than the change in the distribution of the permeability in the film. The length of the film is thus shortened by the redundancy factor compared to the path of the movement. This is particularly advantageous because it allows a short and compact design of such sensors.
  • the magnet can be firmly connected to the sensor.
  • the measurement object In order to obtain a magnetic field which varies from the position of the measurement object at the location of the sensor coil, the measurement object must be made of a material which influences magnetic fields. This may be, for example, a ferromagnetic material.
  • Fig. 1 shows a schematic diagram of a block diagram of a sensor arrangement 1 according to the invention for detecting the position h and / or position change of a measuring object 2 relative to an electromagnetic sensor 3.
  • the measuring object 2 is associated with a magnet 4 in the form of a permanent magnet, which in the illustrated embodiment of the Measuring object 2 is enclosed to almost all sides.
  • the sensor 3 has a coil system 5, which consists of a sensor coil 6 and a compensation coil 7. In the sphere of influence of the coil system 5, a foil 8 made of soft magnetic material is arranged.
  • the sensor coil 6 has two terminals K 1 and K 2 .
  • the terminal K 1 is connected to the synchronizable oscillator 10, the terminal K 2 is connected to the input of an evaluation circuit 11 and the electrical contact 9 of the film.
  • the oscillator 10 feeds the sensor coil 6 with an AC voltage of fixed frequency and amplitude.
  • an electromagnetic alternating field is generated by the sensor coil 6, which induces eddy currents in the film 8.
  • the electromagnetic properties such as the electrical conductivity ⁇ and the magnetic permeability ⁇ of the material of the film 8, influence the character and the retroactivity of the eddy currents on the alternating field.
  • the magnetic permeability ⁇ of the film 8 changes, which leads to the change of the alternating field in the coil system 5.
  • the voltage drop between the terminals K 1 and K 2 is amplified by a differential amplifier 12, wherein the voltage U 2 at the output of the amplifier 12 is proportional to the impedance Z of the sensor coil 6.
  • a differential amplifier 12 To the voltage U 2 13 two orthogonal components U 3 and U 4 are determined by an electronic device.
  • the voltage U 3 is used to control a controllable voltage source 14 which supplies the compensation coil 7 of the coil system 5 with a direct current I _.
  • a constant magnetic field is generated by the compensation coil 7, which forms a resultant magnetic field together with the magnetic field of the permanent magnet 4 and the alternating field of the sensor coil 6.
  • the Size of DC I_ is measured by the voltage drop across a stable resistor 15 using an integrator 16.
  • the signal at the output "out1" of the integrator 16 is used to determine the changes in distance between the measurement object 2 and the sensor 3.
  • the controllable voltage source 14 may be formed in various ways. It can be used a D / A converter or a digital potentiometer, which are controlled by the signal U 3 .
  • One possible embodiment is in Fig. 8 and will be described in more detail below.
  • the second voltage component U 4 which is generated by the electronic arrangement of the voltage U 2 , is used for the synchronization of the oscillator 10. As a result, the output by the oscillator voltage U 1 and the voltage U 4 are synchronous.
  • the sensor arrangement 1 could be used in a closed loop, wherein the signal U 3 is a manipulated variable, which is determined as the difference between a desired value in the memory of the electronic device 13 and the voltage U 2 .
  • the signal U 3 is interrupted and the voltage source 14 manually, for example via a keyboard, controlled to reach a certain value of the DC current I _.
  • the output signal is generated from "out2" of the electronic device 13.
  • the film 8 consists of a nanocrystalline material and is applied to a carrier 17, which consists for example of ceramic.
  • a carrier 17 which consists for example of ceramic.
  • the significance of the redundancy factor can also be recognized: If the position of the measurement object changes from distance h 1 to h 4 , the distribution of the permeability in the film only changes by the distance from ab to gh. This distance is shortened by the redundancy factor with respect to the distance traveled h of the object to be measured, the redundancy factor having the value 3, for example.
  • Fig. 2 (A) shows an arrangement which consists of a deposited on a support 17 film 8 and with which the distribution of the magnetic field generated by a permanent magnet 4 along the film 8 can be determined indirectly.
  • a plurality of impedance profiles are shown in the diagram, which result at different positions h of the measurement object 2 relative to the film 8.
  • FIG. 2 (C) schematically shows the area of the film in which sets a maximum slope of the impedance characteristic and thus a maximum sensitivity of a sensor using the soft magnetic film.
  • Fig. 3 the relative sensitivity S is shown in more detail as a function of the position h of the measuring object 2.
  • ⁇ Z / Z is the relative impedance change of the sensor coil (7)
  • ⁇ h is the step size between the individual positions h . It can be clearly seen that the relative sensitivity S at the position h 0 assumes maximum values. In In a range ⁇ ⁇ h around the position h 0 , the relative sensitivity S still remains at significant values and is then significantly reduced.
  • Fig. 4 shows a diagram of the DC waveforms, depending on the change in position ⁇ ⁇ h of a measured object relative to the basic position h 0 .
  • the diagram shows that between the DC current I _ and the position changes of the permanent magnet ⁇ ⁇ h a linear function could be inserted.
  • Fig. 5 shows a first embodiment of a sensor arrangement according to the invention, which consists of a measuring object 2 and a sensor 3.
  • a permanent magnet 4 is installed in a housing of the measurement object 2 such that the magnetic field direction coincides with the movement axis of the measurement object 2.
  • the sensor 3 has a planar design and contains a carrier 17 on which two planar coils 6 and 7 are arranged on both sides.
  • a carrier 17 a printed circuit board or a ceramic substrate could be used and the coils 6 and 7 could be produced inexpensively by known methods, for example by screen printing on the carrier 17 printed or glued to this.
  • the carrier 17 with the coils 6 and 7 is covered with two plates 19, 20 of electrically conductive material, preferably aluminum or copper.
  • the width " ⁇ " of the coils 6 and 7 is only about 25% of the length "I" of the film 8, which is adhered to one side of the plate 20.
  • the coil 6 is fed with high-frequency AC voltage and serves as a measuring coil.
  • the compensation coil 7 consists of several layers and is fed with direct current.
  • Fig. 6 shows a second embodiment of a sensor according to the invention.
  • the sensor 3 consists of a round carrier 17, which is made for example of a plastic.
  • a film 8 of nanocrystalline or amorphous material is glued inside a tube 21.
  • the transmitter 24 is installed in a housing 25, which should be connected for EMC reasons with the tube 21 and the film 8.
  • the advantage of this embodiment is that the sensor 3 is completely encapsulated and shielded and, for example, directly without additional pressure tube in a pressure chamber, such as a hydraulic or pneumatic cylinder can be installed.
  • Fig. 7 shows a third embodiment of a sensor 3, in which a permanent magnet 4 is arranged at a certain fixed distance D to the coil system 5 of the sensor 3 and does not move with the measuring object 2.
  • the measuring object 2 consists of a ferromagnetic steel and is arranged at a basic distance h to the surface of the sensor 3 and movable.
  • the permanent magnet 4 is arranged on the side of the coil system 5 facing away from the measurement object 2. This arrangement is particularly advantageous if with a sensor 3 of small size, for example a diameter of 10 mm, relatively large measuring ranges, for example 15 mm, are measured with a good linearity.
  • the permanent magnet 4 is arranged between the measurement object 2 and the coil system 5.
  • This variant can be used advantageously when small position changes ⁇ h at a relatively large base distance h should be measured, for example, 25 ... 30 mm and the diameter of the sensor is, for example, only 10 mm.
  • the coil system 5 of the sensor 3 which consists of two coils 6 and 7, wound concentrically on a support 17. Between the coils 6 and 7, a film 8 of soft magnetic material is arranged, which comprises the coil 7.
  • the coil 6 serves as a measuring coil whose impedance or the imaginary part Im Z depends on the impedance h and is measured.
  • the coil 7 is supplied with direct current and serves as a compensation coil.
  • a tube 26 made of a material with good electrical conductivity, for example aluminum or copper.
  • the housing 25 could be inexpensively made of non-conductive material, such as plastic.
  • the DC current could be readjusted (or adjusted) so that the impedance or Im Z remains constant in the case of changes in position ⁇ h between the sensor 3 and the measurement object 2.
  • the magnitude of the DC current is proportional to position changes ⁇ h.
  • the measurement object could also have a profiled surface, for example a gear wheel or a pole wheel, as a result of which rotational speeds and / or angles can also be measured with the sensor.
  • Fig. 8 shows a schematic circuit of a controllable DC power source for driving the compensation coil of the device according to Fig. 1 ,
  • the DC power source has an electronically adjustable digital potentiometer 27, which is controlled via a drive line 28 by a tracking control or a keyboard.
  • the digital potentiometer 27 is fed by two operational amplifiers 29, 30 symmetrically with a DC voltage, wherein between the non-inverting inputs of the operational amplifier 29, 30 a reference voltage U Ref is applied.
  • the wiper 31 of the digital potentiometer 27 is connected to the non-inverting input of another operational amplifier 32.
  • a coil 33 is arranged, via which a direct current I _ flows.
  • the coil 33 is here in accordance with the compensation coil 7 of the circuit Fig. 1 educated.
  • the magnitude of the DC current I _ is determined by a resistor 34 in response to the voltage at the output of the operational amplifier 32, which in turn depends on the position of the grinder 31 of the digital potentiometer.
  • the circuit is dimensioned in this way, that at the center position of the grinder 31, the current I _ is equal to zero.
  • a positive or a negative current can be output.
  • the polarity and the height of the direct current I _ is set such that in the range ⁇ ⁇ h a constant sensitivity of the sensor is achieved.
  • the voltage drop across the resistor 34 is measured by an integrator consisting of an operational amplifier 35, a resistor 36 and a capacitor 37.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Geophysics And Detection Of Objects (AREA)

Claims (17)

  1. Procédé de détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur (2), le détecteur (2) présentant une bobine de détecteur (7) alimentée en courant alternatif,
    caractérisé en ce qu'un aimant (5) affecté à l'objet mesuré (1), placé dans un film (4) magnétique doux dont la perméabilité varie sous l'influence d'un champ magnétique en fonction de l'intensité de champ du champ magnétique et qui est disposé dans la zone d'influence du détecteur (2), suscite une variation de la perméabilité du film (4), en ce que la variation de la perméabilité du film (4) est définie à partir de sa rétroaction sur le détecteur (2), ce qui permet de définir la position et/ou la modification de la position de l'objet mesuré (1) par rapport au détecteur (2), et en ce qu'une bobine de compensation (8) excitée par un courant continu produit un champ magnétique au moyen duquel la perméabilité du film (4) ou de parties du film (4) est influencée.
  2. Procédé selon la revendication 1, caractérisé en ce que le courant continu est réglé de telle sorte qu'un champ magnétique essentiellement constant de la bobine de détecteur (7) est obtenu.
  3. Procédé selon la revendication 1 ou 2, caractérisé en ce que les étapes suivantes sont effectuées pour l'étalonnage du détecteur (2) :
    positionnement de l'objet mesuré (1) dans une multiplicité de positions h par rapport au détecteur (2) avec un incrément δh,
    injection d'un courant alternatif dans la bobine de détecteur (7),
    définition de l'impédance Z et/ou de la variation d'impédance relative ΔZ/Z de la bobine de détecteur (7) dans chacune des positions,
    définition d'une courbe caractéristique qui décrit une dépendance de la sensibilité relative S de la bobine de détecteur (7) vis-à-vis de la position h de l'objet mesuré (1), où S = Δ Z Z / δh
    Figure imgb0007
    définition d'une position h o dans la courbe caractéristique, pour laquelle la sensibilité relative S adopte des valeurs maximales,
    enregistrement dans une mémoire non volatile de la valeur de l'impédance complexe Z 0 qui correspond à la position h 0 ,
    injection d'un courant continu dans la bobine de compensation (8),
    définition de l'impédance Z et/ou de la variation d'impédance relative ΔZ/Z de la bobine de détecteur (7) dans chaque position h, les champs magnétiques de la bobine de détecteur (7), de la bobine de compensation (8) et de l'aimant (5) agissant sur le film (4),
    modification du courant continu dans la plage de mesure ±Δh jusqu'à l'obtention d'une valeur de consigne enregistrée de l'impédance,
    détermination de la dépendance du courant continu vis-à-vis de la modification de position de l'objet mesuré (1).
  4. Procédé selon l'une des revendications 1 à 3, caractérisé en ce que, pour la détection de la rétroaction suscitée sur la bobine de détecteur (7) par la variation de la perméabilité du film (4), une définition de l'impédance ou respectivement de sa modification est effectuée.
  5. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que la grandeur du courant continu à travers la bobine de compensation (8) est réglée dans une commande d'asservissement par un circuit de régulation fermé,
    le quotient D = Re{Z}/Im{Z} issu de la partie réelle Re{Z} et de la partie imaginaire IM{Z} de l'impédance complexe Z de la bobine de détecteur (7) pouvant être utilisé en tant que valeur de consigne pour le circuit de régulation.
  6. Procédé selon la revendication 5, caractérisé en ce que la partie imaginaire Im{Z} est utilisée pour la détermination de la modification de position entre l'objet mesuré (1) et le détecteur (2), D étant maintenu constant, ou en ce que l'intensité du courant continu qui traverse la bobine de compensation (8) est utilisée pour la définition de la position.
  7. Procédé selon la revendication 5 ou 6, caractérisé en ce que la régulation maintient constante une sensibilité relative maximale S du détecteur (2) sur toute la plage de mesure ou sur une partie de celle-ci.
  8. Dispositif de détecteur pour la définition de la position et/ou de la modification de la position d'un objet mesuré (1) par rapport à un détecteur (2), un aimant (5) étant de préférence affecté à l'objet mesuré (1), et le détecteur (2) présentant de préférence une bobine de détecteur (7) alimentée en courant alternatif,
    caractérisé en ce qu'un film (4) en matériau magnétique doux est disposé dans la zone d'influence du détecteur (2), la perméabilité du film (4) variant sous l'influence d'un champ magnétique en fonction de l'intensité de champ du champ magnétique, et en ce qu'il est prévu un circuit d'analyse (10) au moyen duquel la variation de la perméabilité du film (4) est définie à partir de sa rétroaction sur le détecteur (2), et la position et/ou la modification de la position de l'objet mesuré (1) par rapport au détecteur (2) est déduite, et en ce qu'il est prévu une bobine de compensation (8) excitée avec du courant continu avec laquelle la perméabilité du film (4) ou d'une partie du film (4) est influencée.
  9. Dispositif de détecteur selon la revendication 8, caractérisé en ce que le film (4) est couplé par voie capacitive à la bobine de détecteur (7) et présente un contact (6) électrique,
    un oscillateur (14) peut être connecté entre le contact (6) du film (4) et une connexion (17) de la bobine de détecteur (7).
  10. Dispositif de détecteur selon la revendication 9, caractérisé en ce qu'une deuxième connexion (18) de la bobine de détecteur (7) est raccordée à une entrée d'un amplificateur (11) du circuit d'analyse (10), un signal U 2 délivré par l'amplificateur (11) étant proportionnel à la variation d'impédance relative ΔZ/Z de la bobine de détecteur (7).
  11. Dispositif de détecteur selon la revendication 10, caractérisé en ce qu'il est prévu un dispositif électronique (12) pour la détermination de deux composantes orthogonales de la tension U 2, une des deux composantes étant proportionnelle à la partie réelle Re{Z}, et l' autre composante étant proportionnelle à la partie imaginaire Im{Z} de l'impédance complexe Z de la bobine de détecteur (7), et
    en ce que le dispositif électronique (12) produit éventuellement des signaux U 3 et U 4, l'oscillateur (14) étant synchronisé par le signal U 4, et le signal U 3 étant utilisé pour la commande de la source de tension (13).
  12. Dispositif de détecteur pour la définition de la position et/ou de la modification de la position d'un objet mesuré (1) par rapport à un détecteur (2), un aimant (5) étant affecté à l'objet mesuré (1), et le détecteur (2) présentant une bobine de détecteur (7) alimentée en courant alternatif,
    caractérisé en ce que, dans la zone d'influence du détecteur (2), il est disposé un film (4) en matériau magnétique doux, la perméabilité du film (4) variant sous l'influence d'un champ magnétique en fonction de l'intensité de champ du champ magnétique, et un mouvement de l'objet mesuré (1) s'effectuant essentiellement dans des directions parallèles à une direction d'extension du film (4), ce qui produit dans le film une zone de perméabilité élevée, une zone de perméabilité réduite et une zone de transition entre les deux zones,
    en ce que la zone de transition est déplacée le long du film (4) en fonction de la distance entre le détecteur (2) et l'objet mesuré (1), et
    en ce que la variation de la perméabilité du film (4) est déduite à partir de sa rétroaction sur le détecteur (2) et, à partir de là, la position et/ou la modification de la position de l'objet mesuré (1) par rapport au détecteur (2) est déduite.
  13. Dispositif de détecteur selon la revendication 12, caractérisé en ce que le film (4) est couplé par voie capacitive à la bobine de détecteur (7) et présente un contact (6) électrique,
    un oscillateur (14) étant connecté entre le contact (6) du film (4) et une connexion (17) de la bobine de détecteur (7).
  14. Dispositif de détecteur selon la revendication 13, caractérisé en ce qu'une deuxième connexion (18) de la bobine de détecteur (7) est raccordée à un amplificateur (11) du circuit d'analyse (10), un signal U2 à la sortie de l'amplificateur (11) étant proportionnel à la variation d'impédance ΔZ/Z de la bobine de détecteur (7).
  15. Dispositif de détecteur selon l'une des revendications 8 à 14, caractérisé en ce que le détecteur (17) est mis en place sur un support (21) rond ou en ce que le détecteur (34) est constitué à plat et est mis en place sur un support de préférence plan.
  16. Dispositif de détecteur selon l'une des revendications 8 à 15, caractérisé en ce que, du fait de la variation de la perméabilité du film, la profondeur de pénétration du champ électromagnétique produit par la bobine de détecteur (7) augmente, et en ce que le film (4) est dimensionné quant à son épaisseur de telle sorte que le champ électromagnétique peut traverser le film (4) dans des zones de faible perméabilité, et/ou
    en ce qu'il est prévu une surface conductrice qui est disposée près du film (4) et sur le côté éloigné de la bobine de détecteur (7),
    le champ électromagnétique traversant le film (4) pouvant induire des courants de Foucault dans la surface conductrice.
  17. Procédé de définition de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur (2), le mouvement de l'objet mesuré (1) s'effectuant essentiellement dans des directions parallèles à une direction d'extension du film (4), et le détecteur (2) présentant une bobine de détecteur (7) alimentée en courant alternatif, caractérisé en ce qu'un aimant (5), affecté à l'objet mesuré (1) et placé dans un film (4) magnétique doux dont la perméabilité varie sous l'influence d'un champ magnétique en fonction de l'intensité de champ du champ magnétique et qui est disposé dans la zone d'influence du détecteur (2), suscite une variation de la perméabilité du film (4), ce qui produit dans le film une zone de perméabilité élevée, une zone de perméabilité réduite et une zone de transition entre les deux zones,
    en ce que la zone de transition est déplacée le long du film (4) en fonction de la distance entre le détecteur (2) et l'objet mesuré (1), et
    en ce que la variation de la perméabilité du film (4) est définie à partir de sa rétroaction sur le détecteur (2) et, à partir de là, la position et/ou la modification de la position de l'objet mesuré (1) par rapport au détecteur (2) est définie.
EP07856150.3A 2006-12-21 2007-12-21 Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur Active EP2137499B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006061845 2006-12-21
PCT/DE2007/002308 WO2008074317A2 (fr) 2006-12-21 2007-12-21 Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur

Publications (2)

Publication Number Publication Date
EP2137499A2 EP2137499A2 (fr) 2009-12-30
EP2137499B1 true EP2137499B1 (fr) 2017-03-15

Family

ID=39496138

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07856150.3A Active EP2137499B1 (fr) 2006-12-21 2007-12-21 Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur

Country Status (6)

Country Link
US (1) US8476896B2 (fr)
EP (1) EP2137499B1 (fr)
CN (1) CN101563585B (fr)
DE (1) DE112007003357A5 (fr)
RU (1) RU2460044C2 (fr)
WO (1) WO2008074317A2 (fr)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101563585B (zh) * 2006-12-21 2013-03-20 微-埃普西龙测量技术有限两合公司 被测物相对于传感器的位置和/或位置变化的测定方法及测定用的传感器装置
CN101751719B (zh) * 2008-12-03 2011-12-28 国民技术股份有限公司 用温度补偿提高交易系统通信距离准确性的方法和装置
DE102008063527A1 (de) 2008-12-18 2010-07-01 Micro-Epsilon Messtechnik Gmbh & Co. Kg Schaltungsanordnung und Verfahren zum Auswerten eines Sensors
DE102009032897B4 (de) * 2009-07-10 2013-09-19 Stabilus Gmbh Kolben-Zylinderaggregat
DE102010011849A1 (de) 2009-09-30 2011-04-07 Micro-Epsilon Messtechnik Gmbh & Co. Kg Vorrichtung und Verfahren zum Erfassen der Bewegung eines dünnen Körpers
DE202010013721U1 (de) 2009-09-30 2011-04-28 Micro-Epsilon Messtechnik Gmbh & Co. Kg Vorrichtung zum Erfassen der Bewegung eines dünnen Körpers
DE102009055104A1 (de) * 2009-12-21 2011-06-22 Robert Bosch GmbH, 70469 Magnetfeldsensoranordnung zur Wegerfassung an beweglichen Bauteilen
DE102010027017A1 (de) * 2010-07-08 2012-01-12 Siemens Aktiengesellschaft Induktive Sensoreinrichtung sowie induktiver Näherungssensor mit einer induktiven Sensoreinrichtung
CN101915592A (zh) * 2010-07-15 2010-12-15 常州华辉电子设备有限公司 基于电磁感应的高精度定位系统
EP2525193B1 (fr) * 2011-05-17 2016-03-02 Sensata Technologies, Inc. Capteur de proximité magnétique
DE102011079631A1 (de) * 2011-07-22 2013-01-24 Robert Bosch Gmbh Vorrichtung zur Ermittlung von Bewegungsparametern
DE102011086773A1 (de) * 2011-11-22 2013-05-23 Robert Bosch Gmbh Metallsensor
RU2487314C1 (ru) * 2011-12-23 2013-07-10 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Вихретоковый преобразователь перемещений
WO2013142388A1 (fr) * 2012-03-23 2013-09-26 Northeastern University Dispositif pour mesure directe par micro-ondes d'une perméabilité en fonction d'une tension continue élevée
CN104781637B (zh) * 2012-11-19 2016-10-26 贝尔-赫拉恒温控制有限公司 用于检测两个相邻物体的相对运动的容性传感器
CN104487809B (zh) * 2012-12-11 2016-09-07 三菱电机株式会社 电磁致动器的可动元件位置检测装置和方法
KR102044354B1 (ko) * 2012-12-20 2019-11-13 삼성전자주식회사 데이터베이스 구축을 위한 자기장 맵을 생성하는 방법 및 장치
DE102014201975A1 (de) * 2013-08-28 2015-03-05 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensor mit einem Sensorelement und Verfahren zur Herstellung des Sensorelements
CN104458901A (zh) * 2013-10-10 2015-03-25 上海宝信软件股份有限公司 旋转前进涡流检测用探头定位机械接触式表面形态跟踪架
CN104667427B (zh) * 2013-11-29 2019-02-01 上海联影医疗科技有限公司 多叶光栅的叶片位置监测装置、多叶光栅、放疗设备
DE102014213221A1 (de) * 2014-07-08 2016-01-14 Continental Teves Ag & Co. Ohg Wegmessung basierend auf Wirbelströmen und eine Abschirmung aufhebenden Geberelement
CA2965662C (fr) * 2014-10-24 2023-08-29 Moog Inc. Assemblage de capteur de position comprenant un element mobile, pieces electroniques de conditionnement de signaux, excitation de circuit integre, demodulation et etalonnage
US10627199B1 (en) 2014-10-29 2020-04-21 Moog Inc. Active cooling system for electronics on a missile
DE102014223884A1 (de) 2014-11-24 2016-05-25 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensoranordnung und Verfahren zum Bestimmen einer Position und/oder einer Positionsänderungeines Messobjekts
JP6533004B2 (ja) 2015-07-08 2019-06-19 エーエスエムエル ネザーランズ ビー．ブイ． 測定システム、リソグラフィ装置、デバイス製造方法、および測定方法
US9733061B2 (en) * 2015-07-29 2017-08-15 Texas Instruments Incorporated Distance determination based on reflected admittance
US10914566B2 (en) 2016-07-22 2021-02-09 Regents Of The University Of Minnesota Position sensing system with an electromagnet
US10837802B2 (en) 2016-07-22 2020-11-17 Regents Of The University Of Minnesota Position sensing system with an electromagnet
DE102017212052A1 (de) * 2017-07-13 2019-01-17 Zf Friedrichshafen Ag Induktive Positionsbestimmung
DE102017128472A1 (de) * 2017-11-30 2019-06-06 Pepperl + Fuchs Gmbh Induktiver Näherungsschalter und Verfahren zum Betreiben eines induktiven Näherungsschalters
DE102017128471A1 (de) * 2017-11-30 2019-06-06 Pepperl + Fuchs Gmbh Induktiver Näherungsschalter und Verfahren zum Betreiben eines induktiven Näherungsschalters
CN110207583A (zh) * 2019-07-02 2019-09-06 唐山迪安自动化设备有限公司 酸槽内钢带位置测量传感器
US11573277B2 (en) 2019-12-18 2023-02-07 Industrial Technology Research Institute Electromagnetic property measuring device, electromagnetic property measuring system and electromagnetic property measuring method
US10847017B1 (en) * 2020-03-17 2020-11-24 Discovery Democracy LLC Electronic face mask
US20210369145A1 (en) * 2020-05-27 2021-12-02 Pablo Hugo Marcos Bracelet and necklace savior
CN114473843B (zh) * 2021-12-30 2022-12-13 清华大学 一种金属膜厚测量方法和化学机械抛光设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007003357A5 (de) * 2006-12-21 2009-12-03 Micro-Epsilon Messtechnik Gmbh & Co. Kg Verfahren und Sensoranordnung zum Bestimmen der Position und/oder Positionsänderung eines Messobjekts relativ zu einem Sensor

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3041041C2 (de) 1980-10-31 1983-06-23 Krauss-Maffei AG, 8000 München Magneto-elektrischer Wegaufnehmer
DE3610479A1 (de) 1986-03-27 1987-10-01 Vacuumschmelze Gmbh Magnetischer wegsensor
DE3803293A1 (de) 1988-02-04 1989-08-17 Turck Werner Kg Magnetisch betaetigter analoger elektrischer wegaufnehmer fuer geradlinige bewegungen
DE3803253A1 (de) 1988-02-04 1989-08-17 Niederberg Chemie Duennwandige sammlerrohre, insbesondere aus kunststoff, fuer deponien
US4926122A (en) 1988-08-08 1990-05-15 General Motors Corporation High sensitivity magnetic circuit
FR2718250B1 (fr) 1994-03-31 1996-06-07 Setid Procédé de sondage d'un canal.
DE4425904A1 (de) * 1994-07-21 1996-01-25 Vacuumschmelze Gmbh Magnetischer Wegsensor
EP1173721A1 (fr) * 1999-04-23 2002-01-23 Scientific Generics Limited Capteur de position
US6605939B1 (en) 1999-09-08 2003-08-12 Siemens Vdo Automotive Corporation Inductive magnetic saturation displacement sensor
DE10025661A1 (de) 2000-05-24 2001-12-06 Balluff Gebhard Feinmech Wegmeßsystem
US6633160B2 (en) * 2001-04-19 2003-10-14 Hoton How Fluxgate signal detection employing high-order waveform autocorrelation
US6828780B2 (en) * 2001-05-01 2004-12-07 Balluff Gmbh Position measuring system having an inductive element arranged on a flexible support
GB2377497B (en) * 2001-07-11 2003-07-23 Elliott Ind Ltd Inductive position detectors
DE20307652U1 (de) 2003-05-16 2004-09-16 Werner Turck Gmbh & Co. Kg Magnetisch betätigbarer Wegaufnehmer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007003357A5 (de) * 2006-12-21 2009-12-03 Micro-Epsilon Messtechnik Gmbh & Co. Kg Verfahren und Sensoranordnung zum Bestimmen der Position und/oder Positionsänderung eines Messobjekts relativ zu einem Sensor

Also Published As

Publication number Publication date
CN101563585A (zh) 2009-10-21
DE112007003357A5 (de) 2009-12-03
WO2008074317A3 (fr) 2008-09-18
US20100090688A1 (en) 2010-04-15
US8476896B2 (en) 2013-07-02
WO2008074317A2 (fr) 2008-06-26
RU2460044C2 (ru) 2012-08-27
EP2137499A2 (fr) 2009-12-30
CN101563585B (zh) 2013-03-20
RU2009128061A (ru) 2011-01-27

Similar Documents

Publication Publication Date Title
EP2137499B1 (fr) Procédé et système de détecteur pour la détermination de la position et/ou de la modification de la position d'un objet mesuré par rapport à un détecteur
DE19732616C2 (de) Magnetfeld-Messgerät zur Messung der Drehung eines sich drehenden Körpers
EP1847810B1 (fr) Procédé et dispositif destinés à la détection de position
EP3563116B1 (fr) Capteur de distance
EP0654140B1 (fr) Systeme de mesure de deplacement fonctionnant sans contact et procede de mesure de deplacement sans contact
DE102007062862A1 (de) Verfahren und Sensoranordnung zum Bestimmen der Position und/oder Positionsänderung eines Messobjekts relativ zu einem Sensor
EP2564164B1 (fr) Système de mesure de longueur magnétique, procédé de mesure de longueur ainsi que procédé de fabrication d'un système de mesure de longueur magnétique
EP2521894B1 (fr) Procédé et dispositif pour détecter des champs magnétiques
DE60100915T2 (de) Magnetfeldsensor und Positionsdetektor
EP1295089A1 (fr) Dispositif pour mesurer le deplacement sans contact, notamment pour saisir la position et le mouvement
EP2159546A2 (fr) Procédé de mesure destiné à la détermination sans contact de mouvements relatifs linéaires entre un agencement de capteur et un aimant permanent
DE10044839B4 (de) Induktiver Positionssensor
EP0108950B1 (fr) Dispositif pour déterminer la vitesse de rotation d'une pièce tournante
EP3830560B1 (fr) Analyse inductive d'objets métalliques
EP3108210B1 (fr) Dispositif de détection et procédé de détermination d'une position et/ou d'un changement de position d'un objet à mesurer
EP1723393B1 (fr) Systeme de mesure de deplacement fonctionnant sans contact
DE202014105652U1 (de) Magnetanordnung für magnetischen Positionssensor und entsprechende Positionssensoreinrichtung
EP0595117A1 (fr) Appareil pour l'examen non-destructif avec résolution spatiale des paramètres magnétiques
EP2066997A1 (fr) Mesure de distance par champ magnétique commandé
DE3019540C2 (de) Einrichtung zur Messung der Dicke von festen Überzügen auf einem Grundmaterial
EP3417244B1 (fr) Capteur
DE102007032300A1 (de) Stromsensor zur Gleich- oder Wechselstrommessung
EP3824323B1 (fr) Détecteur servant à détecter du matériau électriquement conducteur
EP3495765B1 (fr) Procédé et dispositif de mesure de l'épaisseur des couches non magnétisables sur un matériau de base magnétisable
DE19803018C2 (de) Magnetischer Meßwertaufnehmer

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20081203

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20121113

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20160404

GRAJ Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deleted

Free format text: ORIGINAL CODE: EPIDOSDIGR1

INTC Intention to grant announced (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20160929

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 876045

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170415

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502007015520

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20170315

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170616

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170615

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170717

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170715

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502007015520

Country of ref document: DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 11

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

26N No opposition filed

Effective date: 20171218

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171221

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20171231

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171231

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171231

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171231

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 876045

Country of ref document: AT

Kind code of ref document: T

Effective date: 20171221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20171221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20071221

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170315

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170315

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20211220

Year of fee payment: 15

Ref country code: GB

Payment date: 20211222

Year of fee payment: 15

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20221221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221221

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221231

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240227

Year of fee payment: 17