EP2122704A1 - Utilisation de spinelles lacunaires a agregats tetraedriques d'element de transition du type am4x8 dans une memoire non volatile reinscriptible de donnees electroniques, et materiau correspondant. - Google Patents
Utilisation de spinelles lacunaires a agregats tetraedriques d'element de transition du type am4x8 dans une memoire non volatile reinscriptible de donnees electroniques, et materiau correspondant.Info
- Publication number
- EP2122704A1 EP2122704A1 EP08717713A EP08717713A EP2122704A1 EP 2122704 A1 EP2122704 A1 EP 2122704A1 EP 08717713 A EP08717713 A EP 08717713A EP 08717713 A EP08717713 A EP 08717713A EP 2122704 A1 EP2122704 A1 EP 2122704A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- spinels
- volatile memory
- electronic data
- tetrahedral
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8822—Sulfides, e.g. CuS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8825—Selenides, e.g. GeSe
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/31—Material having complex metal oxide, e.g. perovskite structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/32—Material having simple binary metal oxide structure
Definitions
- the field of the invention is that of non-volatile memories of electronic data. More specifically, the invention relates to a compound forming the active material of a rewritable non-volatile memory of electronic data, in particular for the storage of computer data.
- non-volatile memories are dominated by flash memories that are used in all consumer applications (digital cameras, USB sticks, etc.).
- RRAM Resistive Random Access Memory
- RRAMs equal flash memories in terms of density and cost, while being faster and consuming less.
- very short electrical pulses 100 ns
- RRAM Random Access Memory
- PCMO - PrCaMnO
- CMR Colossal Magnetic Resistance
- a TiO 2 layer is placed between two electrodes. Filaments are created in the material connecting the two electrodes and allow to conduct the current (low resistance). By applying a voltage on the positive side, a portion of the filaments is oxidized, which increases the strength of the material. Conversely, by Joule effect, we reduce the positive side of the filaments to reduce the resistance again.
- RRAMs have a very important potential for their applications in the field of computer data storage, but are currently only at the stage of laboratory prototypes and are therefore being tested.
- the object of the invention is notably to propose a new type of RRAM.
- the object of the invention is to propose a material that can be used as active material for a rewritable non-volatile memory of electronic and / or computer data, which presents real prospects for industrial exploitation.
- the object of the invention is notably to provide a material that makes it possible to: switch a logic element between two states of electrical resistance with low voltages, preferably less than 0.1 V; obtain switching times between two states lower than those of the "flash" memories of the prior art; - increase integration, that is, increase the amount of information stored per unit volume.
- A includes at least one of the following: Ga, Ge, Zn;
- M comprises at least one of V, Nb, Ta, Mo;
- X comprises at least one of S, Se.
- the Applicant has in fact surprisingly discovered the existence of a non-volatile resistive transition phenomenon induced by electrical pulses in the family of spinels. lacunae with tetrahedral elements of transition element AM 4 Xs. Monocrystals of these compounds have been synthesized and, after deposition of metal electrodes, the application of electrical pulses makes it possible to vary the resistance in a non-volatile and reversible manner of these materials: it is thus possible to cycle at room temperature between two states of high and low resistance. This cycle can be reproducibly repeated and this effect can be used to realize a rewritable non-volatile memory.
- a material used according to the invention has the advantages of: switching between two states of electrical resistance with low voltages, less than 0.1 V; to obtain switching times between two states which are lower than those of the "flash" type memories; - increase integration, that is, increase the amount of information stored per unit volume.
- active material in the context of the invention means a material capable of having two distinct states, in particular resistive states, under the application of electrical pulses.”
- said material is placed between two metal electrodes. said material between said two metal electrodes advantageously forming a bit information bit.
- Such a structure thus makes it possible to constitute an information bit having two states, one of high resistance and the other of low resistance, which can be considered as logical 0 and 1, thus making it possible to store the information in the binary logic conventionally used in the field of computer memories.
- such a structure contributes to increasing the amount of information stored per unit volume, the geometry of such a structure being considerably simpler than that used in the "flash" memories, which makes it possible to reduce the size of each bit.
- FIGS. 1 and 2 are each a view of an electrical connection diagram to the sources of currents and voltmeters of single crystals of a material according to the invention, respectively in "two-contact” and “four-contact”mode;
- FIG. 3 is a schematic representation of a component forming an information bit and including an active material according to the invention;
- Figure 4 is an illustration of the protocol used to switch a material according to the invention;
- FIG. 5 is a graph of the measurement curves obtained with the protocol illustrated in FIG. 4;
- FIG. 6 is a graph of measurement curves made on a material according to the invention, illustrating a cycling between the initial and transited states of the material;
- FIG. 1 and 2 are each a view of an electrical connection diagram to the sources of currents and voltmeters of single crystals of a material according to the invention, respectively in "two-contact” and "four-contact”mode;
- FIG. 3 is a schematic representation of a component forming an information bit and including an active material according to the invention;
- FIG. 7 is a graph of measurement curves made on a material according to the invention, illustrating various low resistance states measured after application of different electrical pulses;
- Fig. 8 is a modeling graph of the measurements of Fig. 7;
- Fig. 9 is a schematic representation of a two-conductance model used to model the measurements illustrated in Fig. 8;
- FIGS. 10 to 16 are graphs of non-volatile Colossal Electro-Resistance (CER) effect measurements made on various materials according to the invention.
- CER Colossal Electro-Resistance
- the principle of the invention lies in the use of a material belonging to the family of lacunary spinels with tetrahedral elements of transition element AM 4 Xs as active material of a rewritable non-volatile memory of electronic data.
- A, M and X are characterized as follows:
- A includes at least one of the following: Ga, Ge,
- M comprises at least one of V, Nb, Ta, Mo;
- X comprises at least one of S, Se.
- Electrodes of silver, gold or carbon 2 were then placed on these single crystals 1 in order to make electrical connections to a current source and a voltmeter.
- the device thus obtained operates in "two-contact” mode (FIG. 1).
- the "four-contact” mode (FIG. 2) was also performed to verify that the switching property is intrinsic to the material and not related to an interface effect between the electrodes and the material.
- a preferred variant for the application of the invention to the field of microelectronics relates to the deposition in a thin layer (whose thickness is of the order of a few hundred nm) of AM 4 Xs materials.
- a relevant geometry is of type "MIM" (metal-insulator-metal) in which the material
- AM 4 X 8 is sandwiched between two metal electrodes 3 (FIG. 3).
- the component can advantageously constitute an information bit having two states, one of high resistance and the other of low resistance can be considered as logical 0 and 1, thus allowing to store the information in binary logic.
- the purpose of this protocol is to switch the sample from a high resistance state ( ⁇ 30 M ⁇ ) to a low resistance state ( ⁇ 3 k ⁇ ).
- FIG. 5 is a measurement survey of the electrical resistance of the sample as a function of the temperature in the high resistance initial state and in the low resistance transient state.
- the electrical resistance of GaV 4 S 8 measured after pulse drops sharply to 3 k ⁇ .
- the transited state of low resistance is non-volatile and keeps its properties over several hours: it has indeed been observed that the resistance curve of the transited state was reproducible at the rise and fall in temperature.
- Figures 15 and 16 show the non-volatile behavior of these materials.
- A Gai_ x _ y Ge x Zn y , where O ⁇ x + y ⁇ 1, with 0 ⁇ x ⁇ and 0
- Figure 6 shows that it is possible to cycle at room temperature between high and low resistance states. After dropping the electrical resistance of a sample of
- GaV 4 SeS under the effect of pulses of increasing intensity (between 10 and 24 mA), the direction of the current of the following pulses has been reversed (between -10 and -17 mA). The electrical resistance then rises to return to the high initial resistance.
- the "transited" state of low resistance has a different nature from the initial state of high strength.
- the temperature dependence of the resistance in the initial state is characteristic of an insulator with activation energies of about 0.1 eV.
- This model consists of a parallel circuit composed on the one hand of an insulating resistance type R 1 and on the other hand a granular metal type resistor R gm .
- This model indicates that the electrical pulses generate an electronic phase separation with creation / reorganization of metal islands bathed in an insulating matrix.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Semiconductor Memories (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0701819A FR2913806B1 (fr) | 2007-03-14 | 2007-03-14 | Utilisation de spinelles lacunaires a clusters tetraedriques d'element de transition du type am4x8 dans une memoire non volatile reinscriptible de donnees electroniques,et materiau correspondant. |
| PCT/EP2008/052968 WO2008113734A1 (fr) | 2007-03-14 | 2008-03-12 | Utilisation de spinelles lacunaires a agregats tetraedriques d'element de transition du type am4x8 dans une memoire non volatile reinscriptible de donnees electroniques, et materiau correspondant. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP2122704A1 true EP2122704A1 (fr) | 2009-11-25 |
| EP2122704B1 EP2122704B1 (fr) | 2010-11-24 |
Family
ID=38561171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP08717713A Active EP2122704B1 (fr) | 2007-03-14 | 2008-03-12 | Utilisation de spinelles lacunaires a agregats tetraedriques d'element de transition du type am4x8 dans une memoire non volatile reinscriptible de donnees electroniques, et materiau correspondant. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8305794B2 (fr) |
| EP (1) | EP2122704B1 (fr) |
| JP (1) | JP5265582B2 (fr) |
| KR (1) | KR101416725B1 (fr) |
| AT (1) | ATE489735T1 (fr) |
| DE (1) | DE602008003676D1 (fr) |
| FR (1) | FR2913806B1 (fr) |
| WO (1) | WO2008113734A1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2943340B1 (fr) * | 2009-03-18 | 2011-04-22 | Centre Nat Rech Scient | Procede de preparation d'une couche mince de thiospinelles |
| US10840259B2 (en) | 2018-08-13 | 2020-11-17 | Sandisk Technologies Llc | Three-dimensional memory device including liner free molybdenum word lines and methods of making the same |
| RU2745973C1 (ru) * | 2020-10-07 | 2021-04-05 | Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) | Способ синтеза шпинели GaNb4Se8 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2624846B1 (fr) * | 1987-12-16 | 1990-05-04 | Atochem | Composition a base d'un oxyde de structure spinelle, son application comme catalyseur et procede pour l'obtenir |
| US6420725B1 (en) * | 1995-06-07 | 2002-07-16 | Micron Technology, Inc. | Method and apparatus for forming an integrated circuit electrode having a reduced contact area |
| JP4792108B2 (ja) | 2007-03-30 | 2011-10-12 | 株式会社東芝 | 情報記録再生装置 |
| JP2008251108A (ja) | 2007-03-30 | 2008-10-16 | Toshiba Corp | 情報記録再生装置 |
| JP2008251107A (ja) | 2007-03-30 | 2008-10-16 | Toshiba Corp | 情報記録再生装置 |
| FR2943340B1 (fr) * | 2009-03-18 | 2011-04-22 | Centre Nat Rech Scient | Procede de preparation d'une couche mince de thiospinelles |
-
2007
- 2007-03-14 FR FR0701819A patent/FR2913806B1/fr not_active Expired - Fee Related
-
2008
- 2008-03-12 US US12/526,984 patent/US8305794B2/en active Active
- 2008-03-12 JP JP2009553141A patent/JP5265582B2/ja active Active
- 2008-03-12 AT AT08717713T patent/ATE489735T1/de not_active IP Right Cessation
- 2008-03-12 DE DE602008003676T patent/DE602008003676D1/de active Active
- 2008-03-12 KR KR1020097017087A patent/KR101416725B1/ko active Active
- 2008-03-12 WO PCT/EP2008/052968 patent/WO2008113734A1/fr not_active Ceased
- 2008-03-12 EP EP08717713A patent/EP2122704B1/fr active Active
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2008113734A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2913806A1 (fr) | 2008-09-19 |
| JP2010521069A (ja) | 2010-06-17 |
| WO2008113734A1 (fr) | 2008-09-25 |
| JP5265582B2 (ja) | 2013-08-14 |
| US20100133494A1 (en) | 2010-06-03 |
| DE602008003676D1 (de) | 2011-01-05 |
| ATE489735T1 (de) | 2010-12-15 |
| KR20100014796A (ko) | 2010-02-11 |
| FR2913806B1 (fr) | 2009-05-29 |
| KR101416725B1 (ko) | 2014-07-09 |
| US8305794B2 (en) | 2012-11-06 |
| EP2122704B1 (fr) | 2010-11-24 |
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