EP2110881A1 - Richtungsgabel auf der Basis von Speichern - Google Patents

Richtungsgabel auf der Basis von Speichern Download PDF

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Publication number
EP2110881A1
EP2110881A1 EP09157873A EP09157873A EP2110881A1 EP 2110881 A1 EP2110881 A1 EP 2110881A1 EP 09157873 A EP09157873 A EP 09157873A EP 09157873 A EP09157873 A EP 09157873A EP 2110881 A1 EP2110881 A1 EP 2110881A1
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EP
European Patent Office
Prior art keywords
signal
line
membrane
circulator
port
Prior art date
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Granted
Application number
EP09157873A
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English (en)
French (fr)
Other versions
EP2110881B1 (de
Inventor
Afshin Ziaei
Matthieu Le Baillif
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Thales SA
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Thales SA
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Publication of EP2110881A1 publication Critical patent/EP2110881A1/de
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/32—Non-reciprocal transmission devices
    • H01P1/38—Circulators
    • H01P1/383—Junction circulators, e.g. Y-circulators
    • H01P1/387—Strip line circulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches

Definitions

  • the field of the invention is that of RF radio frequency circulators and their applications in radiofrequency or microwave telecommunication systems such as radar systems, or wireless telephony systems.
  • An RF circulator is a n port device, allowing an RF signal to flow in a single direction.
  • a circulator with three ports p1, p2, p3.
  • a signal injected into a port p1 is transmitted to port p2 and isolated from port p3, while a signal entering via port p2 is transmitted to port p3 and isolated from port p1.
  • a corresponding symbolic illustration of such a circulator whose port p2 is connected to an antenna is given on the Figures 1a and 1b . If the circulator receives on impedance port p1 a radiofrequency signal, there is a path with low insertion losses in the direction of clockwise and we observe high losses in the opposite direction.
  • the power is directed almost without losses to the port p2 and radiated by the antenna. The same applies from port p2 to port p3, and port p3 to port p1.
  • the circulator thus has the essential qualities of transmitting without losses in a given direction and of attenuating very strongly the reflected waves.
  • Circulators are particularly used in telecommunication systems or radars, according to the principle illustrated on the figure 2 .
  • the figure 2 schematically an exemplary system for transmitting and receiving electromagnetic signals for applications including radar type, commonly referred to as the T / R module consisting essentially of three stages as described below.
  • the first stage the heart of the CA system is used to manage and process the signals received and transmitted.
  • the second stage is composed of the power amplifier elements. These elements are distributed in two functions, the high power amplifier commonly called HPA, 11 which is used to give power to the output signal of the first stage to be emitted by the antenna and the low noise power amplifier commonly called LNA , 16 which serves to amplify the power of the signal received by the antenna while limiting as much as possible the parasites. These two components are very sensitive to the power received by the antenna.
  • the LNA to the extent that the power that enters the latter must not exceed a certain threshold otherwise the component is damaged and destroyed.
  • the HPA which in so far as it is always connected with a feedback loop on the output must in no case receive power on its output if we do not want to degrade or destroy it. It is for this reason that there are in the third stage elements called limiters 12 and 15 which are electronic components whose function is to cut the microwave signal if the power thereof exceeds a certain threshold. There are also in this third stage elements called circulators 13 and 14. These are so-called active components that direct an incoming flow to an output specific to the input used. For example from port 1 to port 2, from port 2 to port 3 ... hence this name of circulator. This physically implies that regardless of the output circuit impedance, there is virtually no feedback on the circulator input. If there is reflection, the energy is considered as a flow entering through the first output and is therefore directed to the next output, isolating the input almost perfectly.
  • this type of transmission / reception chains comprises circulators based on ferromagnetic materials and diode-based limiters.
  • Circulators commonly used being ferrite-based components are by nature active components and consume energy, they are also very bulky (about 70% mass versus volume of the T / R module) and because of their difficulty of reproducibility are very expensive.
  • diodes As for the diodes, they are components with high costs and the losses generated by these components are of the order of 1 dB. In addition, diodes occupy an important part of the place in telecommunication systems and thus represent an additional brake on miniaturization.
  • microswitch microwaves also called RF MEMS switch.
  • the capacitive type micro-switches are particularly appreciated in microwave applications, especially for their low response times combined with low control voltages ranging from a few volts to a few tens of volts. They are advantageously very small, of millimeter size (2 to 10 mm 2 ), which is on average ten times smaller than a ferromagnetic circulator and much lighter. They consume very little. They are inexpensive to produce because they use the usual fabrication techniques in microelectronics, from a substrate generally silicon and are very easily reproducible. Their insertion losses are very low, generally of the order of 0.1 to 0.2 dB over a very wide frequency band, 18 to 19 GigaHertz.
  • series-type microswitches an input signal line and an output signal line in the extension of one another, separated by a switching zone, and isolated electrically, and above the switching zone, a flexible membrane, resting on pillars.
  • the switching zone is covered with a dielectric.
  • the membrane is either in the rest position, high, the capacity formed by the switching zone, the dielectric and the membrane having a low Coff value, so that the two signal lines are isolated, or in the low position so that the two line portions are capacitively coupled, the capacitance formed by the switching zone, the dielectric and the membrane having a high Con value, allowing the transmission of a radiofrequency or microwave signal.
  • the membrane control is a voltage control suitably applied in the switching zone, the membrane being brought to a reference potential (electrical ground) by the pillars.
  • the switching performance depend in particular on the Con on Coff report which must be as high as possible.
  • the circulator includes at least first and second contact pads for applying on or off control voltages to at least one of the control electrode portions of the first micro-switch and the second micro-switch.
  • the activation voltages are of the order of volts to a few tens of volts.
  • the microswitches can be simultaneously controlled in the off state, or one in the on state and the other in the off state.
  • the present invention proposes a new type of circulator comprising self-actuated components.
  • the main signal line is a discontinuous line.
  • the secondary signal line is a continuous line.
  • the secondary line comprises a ground element separated by a distance of the order of a quarter of the wavelength corresponding to the frequency of the signal.
  • the main and secondary lines are made of gold and / or copper and / or titanium / tungsten alloy.
  • the main and secondary lines further comprise an upper layer of insulating material at the level of refined parts located under the membranes.
  • the insulating material is PZT or ZrO 2 or Si 3 N 4 or any other dielectric whose relative permittivity will be adapted to the working frequency of the element
  • the subject of the invention is also a module for transmitting / receiving microwave signals comprising an antenna, a first stage for processing the microwave signals transmitted and received, a second stage for amplifying said signals and an intermediate stage comprising at least one circulator according to the invention.
  • the intermediate stage further comprises at least one power limiter.
  • the transmission / reception module comprises a power limiter on the output port towards the receiver or the load and / or a second power limiter on the antenna port.
  • the power limiter or limiters comprise a main line with an input for receiving an incident power and an output, their main line comprising a condenser-type electrostatic actuation microswitch comprising two armatures, the first of which is a flexible membrane and the second comprises at least one zone of the main line, the two armatures being separated by a thickness of vacuum or gas, said micro-switch further comprising two ground planes connected by said membrane.
  • the microswitch of the limiter or limiters is self-actuating by an incident power greater than a threshold value so as to bring the said zone of the main line into contact with the two ground planes and thus block the microwave signal.
  • the figure 3 represents a top view of an example of a circulator according to the invention.
  • a RF main line, Lp has the output port p3 to a receiver or load and the port antenna p2 towards a transmitting / receiving antenna.
  • This main line, Lp forms a cross with a discontinuous secondary line Rf Ls, said secondary line having the input port p1 capable of receiving a radio frequency signal.
  • a first micro-switch MEMS1 is located at the intersection of the main and secondary lines, allowing when the membrane is lowered to bring into contact the two discontinuous elements of the secondary line.
  • a second micro-switch MEMS2 is also positioned at the main line towards the port p3 and makes it possible to short-circuit said main line in the lowered position of the membrane of said second micro-switch.
  • ground plans PM1 and PM2 are located on either side of the secondary line.
  • the two microswitches are separated by a distance equal to a quarter of the wavelength ⁇ corresponding to the frequency of the operating signal of said circulator and the secondary line further comprises an EM mass element (for electromagnetic masses, similar to a mass for the direct current, these masses EM correspond to a reference potential for the central line) situated at a distance equal to also a quarter of the wavelength ⁇ .
  • an EM mass element for electromagnetic masses, similar to a mass for the direct current, these masses EM correspond to a reference potential for the central line
  • a signal received from the antenna can propagate along the main line towards port p3 and not flow towards ports p1. and the EM mass element.
  • the MEMS2 is in position to short circuit the signal, the signal travels a go on a distance of ⁇ / 4 and a return in phase opposition of said forward signal.
  • the signal portion towards the ground element EM also travels a distance to a distance of ⁇ / 4 in phase opposition with a return signal on said same branch of the cross.
  • the great advantage of this type of circulator is that it operates thanks to the presence of two micro-switches self-actuating and therefore without operating voltage to consume.
  • any radio frequency signal has an associated power which is equivalent to a voltage and an effective intensity. If the effective signal voltage exceeds a certain threshold, there is a phenomenon of self-activation of the membrane which bypasses the microwave signal to ground, protecting the downstream components.
  • V r 2 ⁇ k ⁇ boy Wut 0 - t d ⁇ t d 2 ⁇ ' ⁇ ⁇ 0 ⁇ wW ⁇ ⁇ r 2
  • t d is the dielectric thickness separating the line of the membrane and ⁇ r the permittivity of the dielectric.
  • the figure 6 illustrates the intermediate stage of a transmission / reception chain comprising power limiters and a circulator according to the invention, such a chain can typically be that illustrated in FIG. figure 2 .
  • the third stage of this transmission / reception chain comprises, at the output of the amplifier of the transmission signal 11, a circulator composed of the two micro-switches MEMS1 and MEMS2 according to the invention, this third stage also comprises for the microwave reception signal a first limiter 12 between the circulator and the antenna port p2 and a second limiter 15 whose main line is connected at the input to the circulator comprising the two micro-switches MEMS1 and MEMS2 and output to an amplifier 16, LNA.
  • circulators and limiters based on RF MEMS switches do not consume or very little energy in self-operating mode, they are very small so allow a gain of space and mass very important , circulator and limiters based on RF MEMS switches are also very easily reproducible and therefore very expensive.

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  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
EP09157873.2A 2008-04-18 2009-04-14 Richtungsgabel auf der Basis von Speichern Active EP2110881B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0802175A FR2930374B1 (fr) 2008-04-18 2008-04-18 Circulateur radiofrequence a base de mems.

Publications (2)

Publication Number Publication Date
EP2110881A1 true EP2110881A1 (de) 2009-10-21
EP2110881B1 EP2110881B1 (de) 2018-08-22

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Family Applications (1)

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EP09157873.2A Active EP2110881B1 (de) 2008-04-18 2009-04-14 Richtungsgabel auf der Basis von Speichern

Country Status (3)

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US (1) US8155602B2 (de)
EP (1) EP2110881B1 (de)
FR (1) FR2930374B1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2506282A1 (de) * 2011-03-28 2012-10-03 Delfmems RF-MEMS-Kreuzpunktschalter und Kreuzpunktschaltermatrix mit RF-MEMS-Kreuzpunktschaltern
EP2648335A2 (de) 2012-04-05 2013-10-09 Thales Hyperfrequenz-Leistungsbegrenzer mit kapazitiven Funkfrequenz-MEMS-Schaltern
FR2993713A1 (fr) * 2012-07-23 2014-01-24 Thales Sa Composants micro-electroniques, aptes a laisser circuler un signal radiofrequence ou hyperfrequence selon une seule direction
CN114976562A (zh) * 2021-07-23 2022-08-30 苏州华勤源微电子科技有限公司 一种基于mems工艺的硅基微带环形器及其应用

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2952048B1 (fr) * 2009-11-03 2011-11-18 Thales Sa Micro-commutateur capacitif comportant un drain de charges a base de nanotubes orientes sur l'electrode basse et procede de fabrication
US10090585B2 (en) 2015-08-23 2018-10-02 The Trustees Of Columbia University In The City Of New York Circuits and methods for antenna-based self-interference cancellation
US9887862B2 (en) 2015-12-07 2018-02-06 The Trustees Of Columbia University In The City Of New York Circuits and methods for performing self-interference cancelation in full-duplex transceivers
US10581135B2 (en) 2015-12-07 2020-03-03 The Trustees Of Columbia University In The City Of New York Circuits and methods for non-reciprocal circulators and transceivers using same
US11031665B2 (en) 2016-07-21 2021-06-08 The Trustees Of Columbia University In The City Of New York Magnetic-free non-reciprocal circuits based on sub-harmonic spatio-temporal conductance modulation
CN114976607B (zh) 2021-02-24 2024-03-12 北京京东方技术开发有限公司 天线和通信设备
CN115037322B (zh) * 2022-03-28 2023-11-28 深圳市国电科技通信有限公司 射频能量收集装置和方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186508A (ja) 1995-12-27 1997-07-15 Fujitsu Ltd ストリップライン回路構造
US6043727A (en) * 1998-05-15 2000-03-28 Hughes Electronics Corporation Reconfigurable millimeterwave filter using stubs and stub extensions selectively coupled using voltage actuated micro-electro-mechanical switches
US6580337B1 (en) * 1999-07-19 2003-06-17 California Institute Of Technology MEMS switch
US6624720B1 (en) * 2002-08-15 2003-09-23 Raytheon Company Micro electro-mechanical system (MEMS) transfer switch for wideband device
US7297571B2 (en) * 2002-09-27 2007-11-20 Thales Electrostatically actuated low response time power commutation micro-switches
FR2901917A1 (fr) 2006-05-31 2007-12-07 Thales Sa Circulateur radiofrequence ou hyperfrequence

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2841389B1 (fr) 2002-06-21 2004-09-24 Thales Sa Cellule dephaseuse pour reseau reflecteur d'antenne
US6992629B2 (en) * 2003-09-03 2006-01-31 Raytheon Company Embedded RF vertical interconnect for flexible conformal antenna
KR100684148B1 (ko) * 2005-11-03 2007-02-20 한국전자통신연구원 디지털 방식으로 제어되는 서큘레이터 및 그를 구비하는무선주파수 식별 리더

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186508A (ja) 1995-12-27 1997-07-15 Fujitsu Ltd ストリップライン回路構造
US6043727A (en) * 1998-05-15 2000-03-28 Hughes Electronics Corporation Reconfigurable millimeterwave filter using stubs and stub extensions selectively coupled using voltage actuated micro-electro-mechanical switches
US6580337B1 (en) * 1999-07-19 2003-06-17 California Institute Of Technology MEMS switch
US6624720B1 (en) * 2002-08-15 2003-09-23 Raytheon Company Micro electro-mechanical system (MEMS) transfer switch for wideband device
US7297571B2 (en) * 2002-09-27 2007-11-20 Thales Electrostatically actuated low response time power commutation micro-switches
FR2901917A1 (fr) 2006-05-31 2007-12-07 Thales Sa Circulateur radiofrequence ou hyperfrequence

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2506282A1 (de) * 2011-03-28 2012-10-03 Delfmems RF-MEMS-Kreuzpunktschalter und Kreuzpunktschaltermatrix mit RF-MEMS-Kreuzpunktschaltern
WO2012130664A1 (en) * 2011-03-28 2012-10-04 Delfmems Rf mems crosspoint switch and crosspoint switch matrix comprising rf mems crosspoint switches
US9048523B2 (en) 2011-03-28 2015-06-02 Delfmems RF mems crosspoint switch and crosspoint switch matrix comprising RF mems crosspoint switches
EP2648335A2 (de) 2012-04-05 2013-10-09 Thales Hyperfrequenz-Leistungsbegrenzer mit kapazitiven Funkfrequenz-MEMS-Schaltern
FR2993713A1 (fr) * 2012-07-23 2014-01-24 Thales Sa Composants micro-electroniques, aptes a laisser circuler un signal radiofrequence ou hyperfrequence selon une seule direction
WO2014016285A3 (fr) * 2012-07-23 2014-04-10 Thales Composants micro-electroniques passifs, aptes a laisser circuler un signal radiofrequence ou hyperfrequence selon une seule direction
US9819065B2 (en) 2012-07-23 2017-11-14 Thales Passive microelectronic components, capable of allowing a radio-frequency or hyper-frequency signal to travel in a single direction
CN114976562A (zh) * 2021-07-23 2022-08-30 苏州华勤源微电子科技有限公司 一种基于mems工艺的硅基微带环形器及其应用
CN114976562B (zh) * 2021-07-23 2024-04-16 苏州华勤源微电子科技有限公司 一种基于mems工艺的硅基微带环形器及其应用

Also Published As

Publication number Publication date
FR2930374A1 (fr) 2009-10-23
EP2110881B1 (de) 2018-08-22
US20090286491A1 (en) 2009-11-19
US8155602B2 (en) 2012-04-10
FR2930374B1 (fr) 2011-08-26

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