EP2040098A4 - APPARATUS AND METHOD FOR PRODUCING REFLECTIVE MIRROR - Google Patents

APPARATUS AND METHOD FOR PRODUCING REFLECTIVE MIRROR

Info

Publication number
EP2040098A4
EP2040098A4 EP07744858A EP07744858A EP2040098A4 EP 2040098 A4 EP2040098 A4 EP 2040098A4 EP 07744858 A EP07744858 A EP 07744858A EP 07744858 A EP07744858 A EP 07744858A EP 2040098 A4 EP2040098 A4 EP 2040098A4
Authority
EP
European Patent Office
Prior art keywords
reflector mirror
producing reflector
producing
mirror
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07744858A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2040098A1 (en
Inventor
Masayuki Iijima
Yosuke Kobayashi
Kouji Hirayama
Yusuke Hashimoto
Ryuji Hamada
Ken Momono
Atsushi Nakatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of EP2040098A1 publication Critical patent/EP2040098A1/en
Publication of EP2040098A4 publication Critical patent/EP2040098A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60Q—ARRANGEMENT OF SIGNALLING OR LIGHTING DEVICES, THE MOUNTING OR SUPPORTING THEREOF OR CIRCUITS THEREFOR, FOR VEHICLES IN GENERAL
    • B60Q1/00—Arrangement of optical signalling or lighting devices, the mounting or supporting thereof or circuits therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)
EP07744858A 2006-07-04 2007-06-07 APPARATUS AND METHOD FOR PRODUCING REFLECTIVE MIRROR Withdrawn EP2040098A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006184018 2006-07-04
PCT/JP2007/061528 WO2008004397A1 (fr) 2006-07-04 2007-06-07 Appareil et procédé pour produire un miroir réfléchissant

Publications (2)

Publication Number Publication Date
EP2040098A1 EP2040098A1 (en) 2009-03-25
EP2040098A4 true EP2040098A4 (en) 2011-03-23

Family

ID=38894370

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07744858A Withdrawn EP2040098A4 (en) 2006-07-04 2007-06-07 APPARATUS AND METHOD FOR PRODUCING REFLECTIVE MIRROR

Country Status (7)

Country Link
US (1) US8221551B2 (ko)
EP (1) EP2040098A4 (ko)
JP (1) JP5039697B2 (ko)
KR (1) KR101044358B1 (ko)
CN (1) CN101484830B (ko)
TW (1) TWI367349B (ko)
WO (1) WO2008004397A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016106A (zh) * 2008-04-25 2011-04-13 株式会社爱发科 成膜方法和成膜装置
KR101262872B1 (ko) * 2012-04-17 2013-05-09 (주)알텍테크놀로지스 리플렉터 제작 방법
US11118061B2 (en) * 2018-12-17 2021-09-14 Viavi Solutions Inc. Article including at least one metal portion
US11740532B2 (en) 2018-12-17 2023-08-29 Viavi Solutions Inc. Article including light valves
US11898248B2 (en) * 2019-12-18 2024-02-13 Jiangsu Favored Nanotechnology Co., Ltd. Coating apparatus and coating method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5215832A (en) * 1990-04-25 1993-06-01 Cardinal Ic Company Lead-free mirrors and environmentally safe manufacture thereof
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
US20020154407A1 (en) * 1999-02-08 2002-10-24 Robert L. Frazier Lamp reflector with a barrier coating of a plasma polymer
US20080164147A1 (en) * 2004-08-30 2008-07-10 Minoru Dogi Film Forming Apparatus

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565157A (en) * 1983-03-29 1986-01-21 Genus, Inc. Method and apparatus for deposition of tungsten silicides
EP0716160B1 (en) * 1989-11-13 2000-01-26 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
JPH05132770A (ja) * 1991-11-11 1993-05-28 Canon Inc スパツタ装置
JP3773320B2 (ja) * 1997-01-09 2006-05-10 新明和工業株式会社 成膜装置及び成膜方法
JP2000017457A (ja) * 1998-07-03 2000-01-18 Shincron:Kk 薄膜形成装置および薄膜形成方法
DE69913982T2 (de) * 1998-10-23 2004-12-09 Avery Dennison Corp., Pasadena Verfahren zur herstellung von metallplättchen
JP2000275422A (ja) * 1999-03-23 2000-10-06 Toray Ind Inc 液晶表示装置用基板およびこれを用いた液晶表示装置
JP2002363733A (ja) * 2001-06-04 2002-12-18 Nippon Sheet Glass Co Ltd 被膜の形成方法
JP3908036B2 (ja) 2002-01-10 2007-04-25 株式会社小糸製作所 反射鏡製造方法及び反射鏡製造装置
JP4580636B2 (ja) * 2003-12-11 2010-11-17 大日本印刷株式会社 成膜装置および成膜方法
JP2005310386A (ja) 2004-04-16 2005-11-04 Stanley Electric Co Ltd 車両用灯具の反射鏡

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
US5215832A (en) * 1990-04-25 1993-06-01 Cardinal Ic Company Lead-free mirrors and environmentally safe manufacture thereof
US20020154407A1 (en) * 1999-02-08 2002-10-24 Robert L. Frazier Lamp reflector with a barrier coating of a plasma polymer
US20080164147A1 (en) * 2004-08-30 2008-07-10 Minoru Dogi Film Forming Apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008004397A1 *

Also Published As

Publication number Publication date
WO2008004397A1 (fr) 2008-01-10
TW200807036A (en) 2008-02-01
EP2040098A1 (en) 2009-03-25
KR20090009983A (ko) 2009-01-23
CN101484830A (zh) 2009-07-15
CN101484830B (zh) 2010-12-01
JP5039697B2 (ja) 2012-10-03
KR101044358B1 (ko) 2011-06-29
JPWO2008004397A1 (ja) 2009-12-03
US8221551B2 (en) 2012-07-17
US20090208664A1 (en) 2009-08-20
TWI367349B (en) 2012-07-01

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