EP2031090B1 - Film de couverture en dur pour outil de découpe - Google Patents

Film de couverture en dur pour outil de découpe Download PDF

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Publication number
EP2031090B1
EP2031090B1 EP20080014911 EP08014911A EP2031090B1 EP 2031090 B1 EP2031090 B1 EP 2031090B1 EP 20080014911 EP20080014911 EP 20080014911 EP 08014911 A EP08014911 A EP 08014911A EP 2031090 B1 EP2031090 B1 EP 2031090B1
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Prior art keywords
covering film
film layer
layer
hard
covering
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German (de)
English (en)
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EP2031090A2 (fr
EP2031090A3 (fr
Inventor
Tetsutaro Ohori
Akira Sato
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Union Tool Co
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Union Tool Co
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Definitions

  • the present invention relates to a hard covering film for a cutting tool which covers cutting tools such as endmills, drills, or the like, and is used to improve the wear resistance.
  • TiN, TiCN, and TiAlN have been used as hard covering films for covering metal cutting tools.
  • the TiAlN covering films represented by Patent Documents 1 and 2 improve hardness and heat resistance by adding Al to TiN; because of good wear resistance, these alloys are widely used as hard covering films for cutting tools used to work iron and steel materials including tempered steel.
  • Patent Document 3 AlCrN covering films in which the heat resistance is improved beyond that of TiAlN covering films by using CrN as a base instead of TiN have been proposed in Patent Document 3.
  • AlCrN covering films have a better heat resistance than TiAlN covering films, the hardness is somewhat smaller; accordingly, the wear resistance against iron and steel materials is not regarded to be sufficient.
  • Document US 2005/170162 discloses a hard laminated film made by stacking alternating layers having different composition and crystal structure.
  • the problem solved in the document US 2005/170162 is to improve the corrosion and wear resistance of a coating system, in particular for cutting tools applications.
  • the proposed solution is based in the alternation of layers as described in the document wherein the combination of those layers provides an improved behaviour in wear and corrosion properties.
  • the present invention was devised in light of such conditions; as a result of research on covering film compositions and covering film constructions, the present inventors discovered that the abovementioned problems can be solved by improving the hardness and lubricating properties of the hard covering film.
  • the inventors thereby perfected the present invention.
  • the present invention provides a hard covering film for a cutting tool which is extremely superior in terms of practicality, and which makes it possible to improve the hardness and lubricating properties of the hard covering film, and to make a great improvement in wear resistance over that of a conventional AlCrN film.
  • a first aspect of the present invention relates to a hard covering film for a cutting tool formed on a cutting tool substrate, characterized in that: the hard covering film comprises a first multi-layer covering film layer formed by alternatingly layering two or more layers each of a first covering film layer and a second covering film layer; the first covering film layers have metal and semi-metal components that are expressed (in terms of at%) by Al (100-x-y-z) Cr (x) V (y) B (z) (where 20 ⁇ x ⁇ 40, 2 ⁇ y ⁇ 15, and 5 ⁇ z ⁇ 15), have N as a non-metallic element, and have unavoidable impurities; the second covering film layers have metal and semi-metal components that are expressed (in terms of at%) by Al (100-u-v-w) Cr (u) V (v) B (w) (where 20 ⁇ u ⁇ 40, 0 ⁇ v ⁇ 5, 0 ⁇ w ⁇ 5), have N as a non-metallic element
  • a second aspect of the present invention relates to the first aspect of the hard covering film for a cutting tool, and is characterized in that a third covering film layer is disposed between the first multi-layer covering film layer and the substrate; and the metallic elements and semi-metallic elements of the third covering film layer are the same as the metallic elements and semi-metallic elements of the second covering film layer.
  • a third aspect of the present invention relates to the first aspect of the hard covering film for a cutting tool, and is characterized in that a fourth covering film layer is disposed directly above the substrate; the fourth covering film layer is a nitride or carbide having Ti as a main component; and the fourth covering film layer has a thickness set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a fourth aspect of the present invention relates to the second aspect of the hard covering film for a cutting tool, and is characterized in that a fourth covering film layer is disposed directly above the substrate; the fourth covering film layer is a nitride or carbide having Ti as a main component; and the fourth covering film layer has a thickness set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a fifth aspect of the present invention relates to the first aspect of the hard covering film for a cutting tool, and is characterized in that a fourth covering film layer is disposed directly above the substrate; the fourth covering film layer is a nitride or carbide having Cr as a main component; and the fourth covering film layer has a thickness set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a sixth aspect of the present invention relates to the second aspect of the hard covering film for a cutting tool, characterized in that a fourth covering film layer is disposed directly above the substrate; the fourth covering film layer having Cr as a main component; and the fourth covering film layer has a thickness set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a seventh aspect of the present invention relates to any of the first through sixth aspects of the hard covering film for a cutting tool, and is characterized in that a second multi-layer covering film layer formed by alternatingly layering two or more layers each of a fifth covering film layer and a sixth covering film layer is disposed on a surface layer side of the first multi-layer covering film layer; metallic elements, semi-metallic elements, and non-metallic elements of the fifth covering film layer are the same as metallic elements, semi-metallic elements, and non-metallic elements of the first covering film layer; the sixth covering film layer has metallic elements and semi-metallic elements expressed (in terms of at%) by Si (100-t) M (t) (where 0 ⁇ t ⁇ 30, and M indicates one or more elements of group 4a, 5a, 6a, or 3b of the periodic table), has N as a non-metallic element, and has unavoidable impurities; the fifth covering film layer has a thickness set at 40 nm or less; the sixth covering film layer has a thickness set at
  • An eighth aspect of the present invention relates to the seventh aspect of the hard covering film for a cutting tool, and is characterized in that the first multi-layer covering film layer has an NaCl crystal structure.
  • a ninth aspect of the present invention relates to the eighth aspect of the hard covering film for a cutting tool, and is characterized in that the substrate is made of a super-hard metal alloy composed of hard particles having WC as a main component, and a binder having Co as a main component, the mean particle size of the WC particles is set at 0.1 ⁇ m to 2 ⁇ m, and the Co content is set at 5 to 15% in terms of percentage by weight.
  • the present invention is constructed as described above, a hard covering film for a cutting tool which is extremely superior in terms of practicality is obtained, in which the hardness and lubricating properties of the hard covering film are improved, and the wear resistance is improved far beyond that of a conventional AlCrN film.
  • the lubricating properties are improved by adding V, and the hardness is improved by adding B. Accordingly, the lubricating properties and hardness are improved far beyond those of a conventional AlCrN covering film.
  • both hardness and toughness are obtained by alternatingly layering first covering film layers with second covering film layers having a B content that is at least 5 at% (at%) less than that of the first covering film layers, thereby minimizing the drop in toughness.
  • the first covering film layers which have a high B content act mainly to improve the hardness
  • the second covering film layers which have a low B content between these first covering film layers act mainly to improve the toughness.
  • the V content of the second covering film layers may be the same as that of the first covering film layers; however, since the B content is smaller and the hardness is slightly lower, it is desirable that the V content be lower than that of the first covering film layers, so that the hardness will not become excessively low.
  • the present example is a hard covering film for a cutting tool formed on a cutting tool substrate, characterized in that: the hard covering film comprises a first multi-layer covering film layer formed by alternatingly layering two or more layers each of a first covering film layer and a second covering film layer; the first covering film layers have metal and semi-metal components that are expressed (in terms of at%) by Al (100-x-y-z) Cr (x) V (y) B (z) (where 20 ⁇ x ⁇ 40, 2 ⁇ y ⁇ 15, and 5 ⁇ z ⁇ 15), have N as a non-metallic element, and have unavoidable impurities; the second covering film layers have metal and semi-metal components that are expressed (in terms of at%) by Al (100-u-v-w) Cr (u) V (v) B (w) (where 20 ⁇ u ⁇ 40, 0 ⁇ v ⁇ 5, 0 ⁇ w ⁇ 5), have N as a non-metallic element, and have unavoid
  • the substrate used is made of a super-hard metal alloy composed of hard particles whose main component is WC (tungsten carbide) and a binder whose main component is Co (cobalt).
  • WC tungsten carbide
  • Co cobalt
  • the mean particle size of the WC particles is set at 0.1 ⁇ m to 2 ⁇ m
  • the Co content is set at 5 to 15% in terms of percentage by weight.
  • a fourth covering film layer comprising a nitride or carbide whose main component is Ti (titanium) is disposed directly on top of this substrate.
  • the film thickness of this fourth covering film layer is set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a nitride or carbide whose main component is Cr (chromium) may also be used as the fourth covering film layer. In this case as well, it is advisable that the film thickness be set at 0.01 ⁇ m to 0.5 ⁇ m.
  • a third covering film layer is disposed on top of this fourth covering film layer.
  • the metallic elements and semi-metallic elements of this third covering film layer are the same as the metallic elements and semi-metallic elements of the second covering film layer.
  • a first multi-layer covering film layer formed by alternatingly layering the first and second covering film layers is disposed on top of this third covering film layer.
  • the first multi-layer covering film layer has a construction which has an NaCl crystal structure.
  • a second multi-layer covering film layer formed by layering two or more layers each of a fifth covering film layer and a sixth covering film layer is disposed on the surface layer side of this first multi-layer covering film layer.
  • the metallic elements, semi-metallic elements, and non-metallic elements of the fifth covering film layer are the same as the metallic elements, semi-metallic elements, and non-metallic elements of the first covering film layer.
  • the metallic elements and semi-metallic elements in the sixth covering film layer are expressed (in terms of at%) by Si 100 - t ⁇ M t (where 0 ⁇ t ⁇ 30, and M indicates one or more elements of group 4a, 5a, 6a, or 3b of the periodic table), N is included as a non-metallic element, and unavoidable impurities are included.
  • the film thickness of the fifth covering film layer is set at 0.8 nm to 40 nm
  • the film thickness of the sixth covering film layer is set at 0.2 nm to 4 nm
  • the film thicknesses of the fifth covering film layer and sixth covering film layer are set so that the fifth covering film layer is four times thicker than the sixth covering film layer or greater.
  • the reason for setting the covering film construction as described above will be described.
  • the composition of the first covering film layer will be described.
  • the present inventors studied covering films in which various third elements were added to AlCrN, and discovered that the wear resistance with respect to iron and steel materials can be improved by adding specified amounts of V (vanadium) and B (boron). It appears that this is due to the fact that the hardness and lubricating properties of the covering film are improved.
  • the lubricating properties of the covering film are improved.
  • the amount of V is less than 2% in terms of the at% of metals and semi-metals alone, the effect is small; however, at 2% or greater, a lubrication improving effect appears, and it was confirmed that the wear resistance with respect to iron and steel materials of tools covered by the covering film is improved.
  • the V content is increased to an excessive amount, the hardness of the covering film drops, and the wear resistance with respect to iron and steel materials drops.
  • V is a much more expensive element than Al and Cr; accordingly, considering the lubricating properties and hardness of the covering film, and the cost, the amount of V was set at 2% to 15% in terms of the at% of the metals and semi-metals alone as the composition range of the first covering film layer.
  • a second covering film layer in which the drop in toughness was suppressed by reducing the B content by 5 at% or greater compared to the first covering film layer, and a method was devised in which both hardness and toughness were obtained by alternatingly layering two or more layers each of a first covering film layer and a second covering film layer (in a first multi-layer covering film layer).
  • the V content of the second covering film layer may be the same as that of the first covering film layer; however, since the B content is small and the hardness is somewhat low, it is desirable to reduce the V content to a value less than that of the first covering film layer so that the hardness is prevented from becoming too low.
  • the crystal structure of the first multi-layer covering film layer will be described.
  • the crystal structure and hardness were examined by forming films under various film forming conditions, which showed that there are cases in which an NaCl crystal structure and cases in which a wurtzite crystal structure is adopted depending on the film formation conditions together with the first covering film layer and second covering film layer.
  • the hardness values are compared, the hardness of the latter is much lower than the hardness of the former. Accordingly, it is desirable that the crystal structure of the first multi-layer covering film layer be formed as an NaCl crystal structure.
  • a cutting tool that is prepared by forming a first covering film layer directly on top of a substrate, it was also ascertained that there are cases in which microscopic peeling of the covering film occurs during cutting. Accordingly, a third covering film layer constructed from the same element components as the second covering film layer was formed directly on top of the substrate, and a cutting tool was prepared by forming a first multi-layer covering film layer on top of this. When a cutting test was performed, microscopic peeling of the covering film during cutting was reduced, and more stable cutting was possible.
  • the covering film As a separate approach for reducing film peeling and microscopic failure of the covering film, it is also possible to form a Ti or Cr nitride or carbide (fourth covering film layer) which is superior in terms of adhesion to the substrate directly on top of the substrate. Even if a fourth covering film layer is formed directly on top of the substrate, and a first multi-layer covering film layer is formed on top of this, film peeling and microscopic failure of the covering film are greatly reduced. In an even more preferable covering film construction, it is preferable to form a fourth covering film layer directly on top of the substrate, to form a third covering film layer on top of this, and to form a first multi-layer covering film layer on top of this.
  • the present inventors studied the structure of AlCrVBN, and discovered that layering an extremely thin covering film (sixth covering film layer) of an Si (silicon) nitride with an AlCrVBN covering film (fifth covering film layer) causes the structure of the AlCrVBN covering film to change from a columnar structure to a so-called nano-composite structure in which very fine crystals of 50 nm or less (NaCl crystal structure) are mixed with amorphous parts.
  • an Si nitride covering film comprises a substance that is readily converted into an amorphous substance
  • the BN inside the AlCrVBN film is converted into an amorphous substance by layering so that a thin AlCrVBN film (fifth covering film layer) is sandwiched between extremely thin amorphous covering films (sixth covering film layers), thus forming a nano-composite structure.
  • These sixth covering film layers may also be SiN films; in cases where an SiN film is formed by DC type arc ion plating or sputtering, an Si target is used as an evaporation source.
  • a small amount of a metallic element M may be added in order to raise the conductivity of the target material, and facilitate the stabilization of film formation.
  • SiN is easily converted into an amorphous substance. Accordingly, in order to ensure a large amorphous region, it is desirable that the proportion of M in the metallic elements and semi-metallic elements of the sixth covering film layers be lowered to 30% or less in terms of at%.
  • elements M used are one or more types from groups 4a, 5a, 6a, or 3b of the periodic table.
  • One element or two or more elements among the Al, Cr, V and B included in the fifth covering film layer may be used as elements M.
  • a covering film having a nano-composite structure has a higher hardness than a covering film having a columnar structure. If the fifth covering film layer is too thick, conversion to a nano-composite structure becomes difficult; accordingly, it is desirable that the thickness be set at 40 nm or less. Furthermore, if the sixth covering film layer is too thin, it becomes difficult to change the fifth covering film layer to a nano-composite layer, and if this layer is too thick, the second multi-layer covering film layer becomes brittle; accordingly, it is desirable to set the thickness of this layer at 0.2 nm to 4 nm.
  • the object of forming the second multi-layer covering film layer with a layered structure is to convert the AlCrVBN covering film into a nano-composite structure; accordingly, it is desirable to set the thickness of the fifth covering film layer at a thickness that is four times the thickness of the sixth covering film layer or greater so that the volumetric proportion of the fifth covering film layer in the second multi-layer covering film layer is 80% or greater.
  • the hard covering film of the present example was invented for cutting tools used for iron and steel materials.
  • the super-hard alloy composed of hard particles whose main component is WC and the binder whose main component is Co be a material in which hardness and toughness are balanced as a cutting tool for iron and steel materials. If the mean particle size of the WC particles is set at too small a value, it becomes difficult to uniformly disperse the WC particles in the binder, and this tends to cause a drop in the bending resistance of the super-hard alloy. On the other hand, if the WC particles are too large, the hardness of the super-hard alloy drops.
  • the Co content is too small, the bending resistance of the super-hard alloy drops; conversely, if the Co content is too large, the hardness of the super-hard alloy drops. Accordingly, it is desirable that a super-hard alloy in which the mean particle size of the WC particles is 0.1 ⁇ m to 2 ⁇ m, and the Co content is 5 to 15% in terms of wt%, be used for the substrate.
  • the lubricating properties are improved by the addition of V; furthermore, the hardness is improved by the addition of B. Accordingly, the lubricating properties and hardness can be improved beyond those of a conventional AlCrN covering film.
  • both hardness and toughness are obtained by alternatingly layering the first covering film layers with second covering film layers having a B content that is at least 5 at% less than that of the first covering film layers, thereby minimizing the drop in toughness.
  • a hard covering film with a strong viscosity is obtained by causing the first covering film layer which has a large B content to have mainly an effect in improving the hardness, and causing the second covering film layer which has a smaller B content than this first covering film layer to have mainly an effect in improving toughness.
  • a covering film with a superior wear resistance which tends not to show any chipping is obtained.
  • the V content of the second covering film layer may be the same as that of the first covering film layer; however, since the B content is small, and the hardness drops somewhat, it is desirable that the V content be set at a value that is smaller than that of the first covering film layer, so that the hardness is not too low.
  • a fourth covering film layer, third covering film layer, first multi-layer covering film layer, and second multi-layer covering film layer are successively layered on top of the substrate, and covering film layers having specified characteristics are further respectively disposed on the substrate side and surface layer side of the first multi-layer covering film layer.
  • a covering film layer which is superior in terms of toughness is disposed on the substrate side of a covering film with a large film stress
  • a covering film layer which is superior in terms of hardness is disposed on the surface layer side contacting the object that is being cut, so that the covering film tends not to peel from the substrate, the surface layer tends not to wear, and chipping is very unlikely to occur.
  • the hardness and lubricating properties of the covering film are improved by adding V and B to an AlCrN covering film, and the manner of layering is devised so that a high toughness can be ensured while a high hardness and lubricating properties are maintained, thus producing a hard covering film for a cutting tool which demonstrates exceptional performance showing improved wear resistance with respect to iron and steel materials.
  • a composite film forming apparatus respectively having two arc discharge ion plating evaporation sources and sputtering evaporation sources was used as a film forming apparatus.
  • the four evaporation sources were disposed inside the apparatus at 90-degree intervals in the following order: arc discharge ion plating evaporation source (evaporation source A), sputtering evaporation source (evaporation source B), arc discharge ion plating evaporation source (evaporation source C), and sputtering evaporation source (evaporation source D).
  • a rotary stage was disposed in the central part inside the apparatus; a film forming substrate was set on this stage, and this stage was caused to rotate while a bias voltage was applied.
  • Targets of various compositions were attached inside the film forming apparatus as evaporation sources of metal and semi-metal components; furthermore, at least one gas selected from a group consisting of N 2 gas, CH 4 gas, and Ar gas was introduced into the film forming apparatus as a reaction gas, and a specified covering film was formed using a two-blade ball endmill (external diameter 2 mm) formed from an ultrahard alloy as a film forming substrate.
  • at least one gas selected from a group consisting of N 2 gas, CH 4 gas, and Ar gas was introduced into the film forming apparatus as a reaction gas, and a specified covering film was formed using a two-blade ball endmill (external diameter 2 mm) formed from an ultrahard alloy as a film forming substrate.
  • the evaporation source D (sputtering evaporation source) was used to form the fourth covering film layer
  • the evaporation source A and evaporation source C (arc discharge ion plating evaporation sources) were used to form the third covering film layer and first multi-layer covering film layer
  • the evaporation source A (arc discharge ion plating evaporation source) and evaporation source B (sputtering evaporation source) were used to form the second multi-layer covering film layer.
  • Ar gas was introduced into the film forming apparatus in the proportion of 1/2 of the total gas flow rate; during the formation of the third covering film layer and first multi-layer covering film layer, no Ar gas was introduced.
  • film formation was performed with the arc discharge current set at 100 A, and the sputtering power set at 1.5 kW.
  • the super-hard alloy of the substrate comprised hard particles whose main component was WC, and a binder whose main component was Co.
  • the mean particle size of the WC particles was 1 ⁇ m, and the Co content was 8 wt%.
  • films were formed on the substrate endmill in the order fourth covering film layer, third covering film layer, first multi-layer covering film layer, and second multi-layer covering film layer so that the overall covering film thickness was 2.0 to 2.8 ⁇ m.
  • a cutting experiment was performed under the following cutting conditions using an endmill covered with a specified covering film, and the wear width of the endmill relief surface was measured.
  • the material that was cut was an SKD61 tempered material (52 HRC), and cutting was performed under wet conditions.
  • An endmill with an external diameter of 2 mm was caused to rotate at a speed of 24600 min -1 ; the feeding speed was set at 1480 mm/min, the cutting depth Ad was set at 0.16 mm, Pf was set at 0.7 mm, and the experiment was performed using a water-soluble cutting oil as a coolant.
  • Table 1 The results of the cutting experiment are shown in Table 1.
  • the amount of C in the part directly above the substrate was set at 0, i.e., the composition of this part was set as TiN, and film formation was performed while gradually increasing the amount of C toward the surface layer part.
  • the amount of C in the part directly above the substrate was set at 0, i.e., the composition of this part was set as CrN, and film formation was performed while gradually increasing the amount of C toward the surface layer part.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)

Claims (9)

  1. Film de couverture en dur pour outil de découpe formé sur un substrat d'outil de découpe, caractérisé en ce que :
    le film de couverture en dur comprend une première couche de film de couverture multicouche formée en appliquant en alternance deux couches ou plus, chacune formée d'une première couche de film de couverture et d'une deuxième couche de film de couverture ;
    les premières couches de film de couverture ont des composants métalliques et semi-métalliques qui sont exprimés (en termes de % at) par

            Al(100-x-y-z)Cr(x)V(y)B(z)

    (où 20 ≤ x ≤ 40, 2 ≤ y ≤ 15, et 5 ≤ z ≤ 15), ont N comme élément non métallique et ont des impuretés inévitables ;
    les deuxièmes couches de film de couverture ont des composants métalliques et semi-métalliques qui sont exprimés (en % at) par

            Al(100-u-v-w)Cr(u)V(v)B(w)

    (où 20 ≤ u ≤ 40, 0 ≤ v ≤ 5, 0 ≤ w ≤ 5), ont N comme élément non métallique et ont des impuretés inévitables ;
    la proportion y de la teneur en V de la première couche de film de couverture et la proportion v de la teneur en V de la deuxième couche de film de couverture répondent à la relation y ≥ v ; et
    la proportion z de la teneur en B de la première couche de film de couverture et la proportion w de la teneur en B de la deuxième couche de film de couverture répondent à la relation z - 5 ≥ w.
  2. Film de couverture en dur pour un outil de découpe selon la revendication 1, caractérisé en ce que :
    un troisième couche de film de couverture est disposée entre la première couche de film de couverture multicouche et le substrat ; et
    les éléments métalliques et les éléments semi-métalliques de la troisième couche de film de couverture sont identiques aux éléments métalliques et aux éléments semi-métalliques de la deuxième couche de film de couverture.
  3. Film de couverture en dur pour un outil de découpe
    selon la revendication 1, caractérisé en ce que :
    une quatrième couche de film de couverture est disposée directement au-dessus du substrat ;
    la quatrième couche de film de couverture est un nitrure ou un carbure ayant du Ti comme composant principal ; et
    la quatrième couche de film de couverture a une épaisseur réglée à une valeur de 0,01 µm à 0,5 µm.
  4. Film de couverture en dur pour un outil de découple selon la revendication 2, caractérisé en ce que :
    une quatrième couche de film de couverture est disposée directement au-dessus du substrat ;
    la quatrième couche de film de couverture est un nitrure ou un carbure ayant du Ti comme composant principal ; et
    la quatrième couche de film de couverture a une épaisseur réglée à une valeur de 0,01 µm à 0,5 µm.
  5. Film de couverture en dur pour un outil de découpe selon la revendication 1, caractérisé en ce que :
    une quatrième couche de film de couverture est disposée directement au-dessus du substrat ;
    la quatrième couche de film de couverture est un nitrure ou un carbure ayant du Cr comme composant principal ; et
    la quatrième couche de film de couverture a une épaisseur réglée à une valeur de 0,01 µm à 0,5 µm.
  6. Film de couverture en dur pour un outil de découpe selon la revendication 2, caractérisé en ce que :
    une quatrième couche de film de couverture est disposée directement au-dessus du substrat ;
    la quatrième couche de film de couverture ayant du Cr comme composant principal ; et
    la quatrième couche de film de couverture a une épaisseur réglée à une valeur de 0,01 µm à 0,5 µm.
  7. Film de couverture en dur pour un outil en découpe selon l'une quelconque des revendications 1 à 6, caractérisé en ce que :
    une deuxième couche de film de couverture multicouche formée en appliquant en alternance deux couches ou plus, chacune d'une cinquième couche de film de couverture et d'une sixième couche de film de couverture est disposée sur une face d'une couche de surface de la couche de film de couverture multicouche ;
    des éléments métalliques, des éléments semi-métalliques et des éléments non métalliques de la cinquième couche de film de couverture sont identiques aux éléments métalliques, aux éléments semi-métalliques et aux éléments non métalliques de la première couche de film de couverture ;
    la sixième couche de film de couverture a des éléments métalliques et des éléments semi-métalliques exprimés (en termes de % at) par

            Si(100-t)M(t)

    (où 0 ≤ t ≤ 30, et M indique un ou plusieurs éléments du groupe 4a, 5a, 6a, ou 3b du tableau périodique), a N comme élément non métallique et a des impuretés inévitables ;
    la cinquième couche de film de couverture a une épaisseur réglée à 40 nm ou moins ;
    la sixième couche de film de couverture a une épaisseur réglée à une valeur de 0,2 à 4 nm ; et les épaisseurs de la cinquième couche de film de couverture et de la sixième couche de film de couverture sont réglées de sorte que la cinquième couche de film de couverture soit quatre fois plus épaisse ou plus que la sixième couche de film de couverture.
  8. Film de couverture en dur pour un outil de découpe selon la revendication 7, caractérisé en ce que la première couche de film de couverture multicouche a une structure cristalline de NaCl.
  9. Film de couverture en dur pour un outil de découpe selon la revendication 8, caractérisé en ce que :
    le substrat est fabriqué en alliage de métal super dur composé de particules dures ayant du WC comme composant principal et un liant ayant du Co comme composant principal ;
    la taille particulaire moyenne des particules de WC est réglée à une valeur de 0,1 µm à 2 µm ; et
    la teneur en Co est réglée à une valeur de 5 à 15 % en termes de pourcentage en poids.
EP20080014911 2007-08-31 2008-08-22 Film de couverture en dur pour outil de découpe Active EP2031090B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007225987A JP4413958B2 (ja) 2007-08-31 2007-08-31 切削工具用硬質皮膜

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EP2031090A2 EP2031090A2 (fr) 2009-03-04
EP2031090A3 EP2031090A3 (fr) 2010-08-04
EP2031090B1 true EP2031090B1 (fr) 2011-08-17

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WO2010150411A1 (fr) * 2009-06-26 2010-12-29 オーエスジー株式会社 Film de revêtement dur et outil revêtu d'un film de revêtement dur
JP5010707B2 (ja) * 2010-04-13 2012-08-29 ユニオンツール株式会社 切削工具用硬質皮膜
CN102443772A (zh) * 2010-09-30 2012-05-09 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
US9604275B2 (en) 2011-09-28 2017-03-28 Hitachi Metals, Ltd. Covering member with excellent sliding properties
CN104508171B (zh) * 2012-04-16 2016-10-19 欧瑞康表面解决方案股份公司，普费菲孔 涂层系统、涂覆的基体和用涂层系统涂覆基体表面的方法
CN107779862A (zh) * 2017-11-09 2018-03-09 贵州西南工具(集团)有限公司 一种激光熔覆AlCrN复合涂层硬质合金铣刀的制备工艺

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JPS59101759A (ja) 1982-12-02 1984-06-12 Matsushita Electronics Corp 高圧ナトリウムランプ
JPS6256565A (ja) 1985-09-06 1987-03-12 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆硬質部材
JPH02194159A (ja) 1988-03-24 1990-07-31 Kobe Steel Ltd 耐摩耗性皮膜形成方法
DE10262174B4 (de) * 2001-07-23 2007-03-15 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
JP4062583B2 (ja) * 2001-07-23 2008-03-19 株式会社神戸製鋼所 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット
US7195817B2 (en) * 2003-09-29 2007-03-27 General Motors Corporation Diamond coated article and method of its production
CN100419117C (zh) * 2004-02-02 2008-09-17 株式会社神户制钢所 硬质叠层被膜、其制造方法及成膜装置
SE528108C2 (sv) * 2004-07-13 2006-09-05 Sandvik Intellectual Property Belagt hårdmetallskär, speciellt för svarvning av stål, samt sätt att tillverka detsamma
JP2006082207A (ja) * 2004-09-17 2006-03-30 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
JP2006334738A (ja) * 2005-06-03 2006-12-14 Mitsubishi Materials Corp 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具

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EP2031090A2 (fr) 2009-03-04
CN101376178B (zh) 2012-09-05
EP2031090A3 (fr) 2010-08-04
CN101376178A (zh) 2009-03-04
JP4413958B2 (ja) 2010-02-10

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