EP2000003B1 - Infrared irradiation unit - Google Patents

Infrared irradiation unit Download PDF

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Publication number
EP2000003B1
EP2000003B1 EP07723672A EP07723672A EP2000003B1 EP 2000003 B1 EP2000003 B1 EP 2000003B1 EP 07723672 A EP07723672 A EP 07723672A EP 07723672 A EP07723672 A EP 07723672A EP 2000003 B1 EP2000003 B1 EP 2000003B1
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EP
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Prior art keywords
heat protection
module according
radiator module
encompasses
power
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EP07723672A
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German (de)
French (fr)
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EP2000003A1 (en
Inventor
Martin Klinecky
Jochen Simon
Sven Linow
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Heraeus Noblelight GmbH
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Heraeus Noblelight GmbH
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/0033Heating devices using lamps
    • H05B3/009Heating devices using lamps heating devices not specially adapted for a particular application
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/02Details
    • H05B3/06Heater elements structurally combined with coupling elements or holders

Definitions

  • the present invention relates to high power radiator modules, in particular NIR modules.
  • Such modules are surface radiators and usually contain at least two parallel juxtaposed infrared radiators, which have a simple round tube or a double tube.
  • air-cooled gold reflectors are suitable for focusing the radiation on the object to be irradiated.
  • Connected loads of 200 kW / m 2 and above can only be carried out with water-cooled reflectors, as the reflectors would otherwise be destroyed very quickly by overheating.
  • Such provided with an additional water cooling modules are from the DE 101 56 915 or from the DE 101 25 888 known.
  • ceramic fiber boards are disclosed as heat protection of the housing and as heat protection of a chamber in which the electrical leads and the cooling water hoses. These fiberboard protect the housing from stray radiation, which, despite the gold reflectors in the cooling channels, is still emitted in the direction of the module.
  • JP 07-198949 A and the JP 05-024853 A describe IR emitters, which are provided with a heat protection.
  • the object of the present invention is to provide high performance radiator modules with reduced hazard potential.
  • a heat protection which is inhomogeneous with respect to its optical density and consists of inorganic oxidic material is arranged between the radiator and the housing of a module.
  • the heat protection according to the invention enables connection surface powers of 200 kW / m 2 and more.
  • High-power radiators with the heat protection according to the invention are extremely robust and suitable for continuous operation, ie the radiator can be operated with complete equilibrium with the environment. This equilibrium state usually sets in after 5 to 15 minutes.
  • Fibers are no longer necessary for the heat protection according to the invention, which is why the danger potential emanating from fiber material is eliminated according to the invention.
  • monolithic sintered body which is suitable as heat protection, in particular one-piece heat protection or as a heat protection element
  • monolithic sintered bodies of slip such as. B. Quarzmehlschlicker, produced by sintering.
  • the decisive factor is that the optical density of the heat protection varies with respect to IR radiation and possibly with respect to UV radiation, in particular in the micro range is uneven. Have to Bubbles or doping proven.
  • the dimensions of these inclusions are less than 1 mm, preferably less than 100 ⁇ m, and more preferably less than 10 ⁇ m.
  • the heat protection which is optically inhomogeneous with respect to IR radiation consists of a material transparent to IR radiation, such as quartz glass or Al 2 O 3 ceramic.
  • a material transparent to IR radiation such as quartz glass or Al 2 O 3 ceramic.
  • variations in the optical density, in particular by different phases within the inorganic oxide material are formed so that these variations in the optical density of the material scatter substantial radiation components.
  • this invention according to the invention in its optical density with respect to IR radiation or possibly UV radiation non-uniform material in the wavelength range in which a very high transparency would be achieved in homogeneous and single-phase design of the material, not the energy transfer, which Damage the case.
  • this is the wavelength range from 180 nm to 5000 nm for quartz glass.
  • This property is achieved by an optical inhomogeneity of the quartz glass, such as by targeted and homogeneous introduction of bubbles and disturbances.
  • Alumina in pure form has a very good transmission of UV radiation to about 6000 nm out.
  • the said property is achieved by a suitable microcrystalline structure of the solid.
  • the shield is applicable under conditions that metallic reflectors can no longer withstand, although the shield absorbs more radiant energy or radiant power than reflectors, but not as it thereby loses its functionality. While metallic reflectors depend in their functionality on their surface and thus lose their functionality when damaged, the functionality of the heat protection according to the invention depends on its thickness, which in contrast to the known reflectors, the rusticity of the heat protection increases with the thickness thereof.
  • High-performance radiator modules which are distinguished by the fact that the heat protection arranged between radiator and housing has only one air cooling for its cooling, wherein in a preferred embodiment the air cooling additionally cools the radiator.
  • a simple air cooling whose energy consumption in relation to the radiator power is negligible, for example in the percent or per thousand range, are with the heat protection according to the invention robust high-power radiator modules with a pad power from 400 to 600 KW / m 2 feasible.
  • connection capacities of more than 600 KW / m 2 are possible, whereby even surface powers of more than 1 MW / m 2 can be realized.
  • a simple air cooling takes place for example by an air flow from a fan, a fan or a centrifugal compressor.
  • cooling with another process gas e.g. Nitrogen or argon included.
  • the invention also encompasses the cooling with a stream of compressed air or other suitable gas, which was not generated directly by means of a centrifugal compressor, a fan or a fan, but is taken indirectly from a pressure circuit or pressure vessels, as well as any other known to the expert variant the generation of a suitable gas stream.
  • the heat protection on the side of the case is coated with gold. This reduces the secondary radiation from the surface of a heated in operation heat protection. The radiation of the secondary radiation then takes place predominantly from the ungolded radiator-side surface.
  • the high-performance radiator modules equipped with the heat protection according to the invention show no deterioration of the efficiency with increasing operating time, as is known, for example, from high-power radiator modules with water-cooled reflectors.
  • the inorganic oxide material of the heat protection can be selected from high-temperature-stable glasses, in particular quartz glass, as well as from glass ceramics, aluminosilicate or ceramics, in particular aluminum oxide. Pure quartz glass and pure aluminum oxide ceramics have proven to be particularly suitable.
  • Invention vessel is provided a radiation protection, which returns much more power in the direction of the irradiating object of the radiation power directed at him, as he radiates on his back on the module and transmits. Another decisive factor is that the radiation protection does not heat up to self-destruction.
  • the radiation protection devices according to the invention it is possible for the first time to provide high-power radiator modules with a connection area power of 200 watts and far beyond that without water or liquid cooling.
  • the radiation protection according to the invention is also suitable for modules with a connected load between 100 and 200 watts / m 2 , in particular for the range of 150 to 200 watts / m 2 in which considerable efforts are made to get along without water cooling.
  • the radiation protection according to the invention furthermore makes it possible to further increase the connection area power of the order of magnitude of 1 MW / m 2 achievable so far with water-cooled reflectors, in particular in the case of water-cooled modules.
  • optical, inhomogeneous quartz glass has proven to be radiation protection, especially in a composite with gold, in which the optical, inhomogeneous quartz glass directed to the module front is, ie in the direction of the object to be irradiated and the gold is arranged as a layer facing back on the back of the module on the optical, inhomogeneous quartz glass.
  • quartz glass ceramics or ceramics glazed with quartz glass, in particular with a gold coating on the back can be used.
  • the back side is coated with gold or a gold reflector to spaced.
  • Air cooling has proved its worth by directing an air flow from the back of the module through openings in the radiation protection onto the radiators.
  • the emitters used according to the invention have a heating filament arranged in an envelope or a discharge space delimited in the envelope.
  • the envelope is preferably tubular or double-tube-shaped, wherein the tube ends are sealed vacuum-tight and have current feedthroughs.
  • the radiation maximum of the radiators is preferably in the NIR, in particular in the IR-A.
  • the heating filament preferably consists essentially of tungsten or carbon.
  • a heat protection according to the invention between the cladding tube of the radiator and the housing holding the radiator is advantageous, in particular when using a plurality of radiators in a module.
  • the heat protection 3 is made of an optical, inhomogeneous quartz glass according to the Heraeus brochure "Opaque Fused Material OFM 970".
  • a heat protection 3 made of optically inhomogeneous quartz glass according to Heraeus brochure "Opaque Fused Material OFM 970" is coated on the housing side with gold, as already done for gold-plated cladding of infrared radiators in a known manner.
  • FIG. 1 shows a module with a surface power of 400 kW / m 2 , in which 6 twin tube radiator (1) arranged parallel to each other and fixed by means of holding elements (2).
  • the heat protection elements (3) according to the invention made of optically inhomogeneous quartz glass are shaped as half shells and either fixed to the radiator tubes by glassblowing or correspondingly FIG. 1 by means of additional retaining elements (4). These half shells are arranged so that the individual emitters do not illuminate each other.
  • the actual module consists of a housing (11), an inlet opening for air (12) and a baffle plate (13) at which the incoming air flow is distributed in the module housing.
  • a diffuser plate 14
  • This sheet is firstly the mechanical support of emitter and reflector, which can also be held elsewhere in the module.
  • holes or slots are incorporated in this diffuser plate, which serve to optimally shape the cooling gas flow.
  • holes or slots in particular centrally behind the individual heat shields to be ordered.
  • additional plates from the heat shield material are arranged (15).
  • FIG. 2 is an enlarged view of a section of the FIG. 1 , Shells made of OMF 70 are used as the heat shield (according to the Heraeus brochure "Opaque Fused Material OFM 70"), whereby many other quartz glasses optically inhomogeneous to IR radiation can serve as the starting material.
  • the twin tube radiators arranged in parallel are held at their long, unheated ends and are arranged in front of a plate of optically inhomogeneous, gold-plated quartz glass.
  • This plate consists of several segments to keep production costs low. Holes are inserted into the segments at suitable positions, so that the gas made available in the module housing by means of suitable devices flows out through these holes in such a way that the emitters are effectively blown and convectively cooled, and secondly the still cold gas flow from the housing through the heat shield this cools.
  • the plates are made of OM100 (according to Heraeus brochure "OM 100 High purity opaque quartz glass"), although many other optically inhomogeneous quartz glasses can be used as starting material.
  • the twin tube radiators arranged in parallel are held at their long, unheated ends.
  • the rear heat shield consists of a plate transparent quartz glass, on which a sufficiently strong layer of optically inhomogeneous quartz was applied as a slip and subsequently sintered. This layer is aligned in the direction of the infrared radiator and gold plated the back quartz plate. Slots and holes for cooling the heat shield and the radiator are performed as in Embodiment 2, but the amount of air for cooling increased accordingly.

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Abstract

A high-power radiation module has thermal protection made of inorganic, oxidic material arranged between the radiator and housing. The thermal protection is made of an essentially fiber-free material that is optically inhomogeneous with respect to IR radiation and/or UV radiation The high-power radiation module has a power per unit contact area of at least 200 kW/m2. The use of a radiation module and a method for the production of a radiation module include radiators or radiation units connected electrically and held mechanically in a housing having an outlet opening for the emitted radiation.

Description

Die vorliegende Erfindung betrifft Hochleistungsstrahlermodule, insbesondere NIR-Module. Derartige Module sind Flächenstrahler und enthalten üblicherweise mindestens zwei parallel nebeneinander angeordnete Infrarotstrahler, die ein einfaches Rundrohr oder ein Doppelrohr aufweisen. Bei Modulen mit einer Flächenleistung bis 150 kW/m2 eignen sich luftgekühlte Goldreflektoren, um die Strahlung auf das zu bestrahlende Objekt zu fokussieren. Anschlussleistungen von 200 kW/m2 und darüber können nur mit wassergekühlten Reflektoren ausgeführt werden, da die Reflektoren andernfalls durch Überhitzung sehr schnell zerstört würden. Solche mit einer zusätzlichen Wasserkühlung versehenen Module sind aus der DE 101 56 915 oder aus der DE 101 25 888 bekannt.The present invention relates to high power radiator modules, in particular NIR modules. Such modules are surface radiators and usually contain at least two parallel juxtaposed infrared radiators, which have a simple round tube or a double tube. For modules with a surface power of up to 150 kW / m 2 , air-cooled gold reflectors are suitable for focusing the radiation on the object to be irradiated. Connected loads of 200 kW / m 2 and above can only be carried out with water-cooled reflectors, as the reflectors would otherwise be destroyed very quickly by overheating. Such provided with an additional water cooling modules are from the DE 101 56 915 or from the DE 101 25 888 known.

Aufwändige Wasserkühlung ist in elektrischen Anlagen nicht erwünscht. Erstens aufgrund der zusätzlichen Kosten und zweitens, da stets die Gefahr von Wasseraustritt besteht. Wasseraustritt kann zum einen die zu bestrahlenden Produkte schädigen und zum anderen verheerende Auswirkungen für die elektrischen Einrichtungen oder die heißen Teile der Anlage haben. Wasser ist daher unter dem Gesichtspunkt der Betriebssicherheit ein äußerst unerwünschtes Medium.Elaborate water cooling is not desirable in electrical systems. Firstly, because of the additional costs and secondly because there is always the risk of water leakage. Water leakage can both damage the products to be irradiated and have disastrous consequences for the electrical equipment or the hot parts of the system. Water is therefore an extremely undesirable medium from the point of view of operational safety.

In der DE 101 56 915 werden zudem keramische Faserplatten als Hitzeschutz des Gehäuses und als Hitzeschutz einer Kammer in der die elektrischen Zuführungen und die Kühlwasserschläuche offenbart. Diese Faserplatten schützen das Gehäuse vor Streustrahlung, die trotz der Goldreflektoren in den Kühlkanälen noch in Richtung des Moduls ausgesendet wird.In the DE 101 56 915 In addition, ceramic fiber boards are disclosed as heat protection of the housing and as heat protection of a chamber in which the electrical leads and the cooling water hoses. These fiberboard protect the housing from stray radiation, which, despite the gold reflectors in the cooling channels, is still emitted in the direction of the module.

Auch die JP 07-198949 A und die JP 05-024853 A beschreiben IR-Strahler, welche mit einem Hitzeschutz versehen sind.Also the JP 07-198949 A and the JP 05-024853 A describe IR emitters, which are provided with a heat protection.

Die Aufgabe der vorliegenden Erfindung besteht darin, Hochleistungsstrahlermodule mit verringertem Gefahrenpotential bereit zu stellen.The object of the present invention is to provide high performance radiator modules with reduced hazard potential.

Lösungen der Aufgabe erfolgen nach den unabhängigen Ansprüchen. Bevorzugte Ausführungen sind in den abhängigen Ansprüchen beschrieben.Solutions to the problem are made according to the independent claims. Preferred embodiments are described in the dependent claims.

Erfindungsgemäß wird ein bezüglich seiner optischen Dichte inhomogener, aus anorganischem oxidischen Material bestehender Hitzeschutz zwischen Strahler und Gehäuse eines Moduls angeordnet. Der erfindungsgemäße Hitzeschutz ermöglicht Anschlussflächenleistungen von 200 kW/m2 und mehr. Hochleistungsstrahler mit dem erfindungsgemäßen Hitzeschutz sind äußerst robust und für den Dauerbetrieb geeignet, d.h. der Strahler kann beim vollständigen Erreichen des Gleichgewichts mit der Umgebung betrieben werden. Dieser Gleichgewichtszustand stellt sich üblicherweise nach 5 bis 15 Minuten ein.According to the invention, a heat protection which is inhomogeneous with respect to its optical density and consists of inorganic oxidic material is arranged between the radiator and the housing of a module. The heat protection according to the invention enables connection surface powers of 200 kW / m 2 and more. High-power radiators with the heat protection according to the invention are extremely robust and suitable for continuous operation, ie the radiator can be operated with complete equilibrium with the environment. This equilibrium state usually sets in after 5 to 15 minutes.

Fasern sind für den erfindungsgemäßen Hitzeschutz nicht mehr nötig, weshalb das von Fasermaterial ausgehende Gefahrenpotential erfindungsgemäß eliminiert wird.Fibers are no longer necessary for the heat protection according to the invention, which is why the danger potential emanating from fiber material is eliminated according to the invention.

Zur Herstellung eines Körpers, insbesondere monolithischen Sinterkörpers, der als Hitzeschutz, insbesondere einstückiger Hitzeschutz oder als Hitzeschutzelement geeignet ist, eignen sich die in EP 1 159 227 beschriebenen Verfahren. Grundsätzlich sind monolithische Sinterkörper aus Schlicker, wie z. B. Quarzmehlschlicker, durch Sintern herstellbar.For producing a body, in particular monolithic sintered body, which is suitable as heat protection, in particular one-piece heat protection or as a heat protection element, the in EP 1 159 227 described method. Basically, monolithic sintered bodies of slip, such as. B. Quarzmehlschlicker, produced by sintering.

Es hat sich bewährt, wenn pro Strahler oder Doppelrohrstrahler je ein Hitzeschutzelement oder ein einstückiger Hitzeschutz für alle Strahler eines Moduls verwendet wird.It has proven to be useful if one heat protection element or one integral heat protection is used per radiator or double-tube radiator for all radiators of a module.

Insbesondere

  • ist der Hitzeschutz oder sind die Hitzeschutzelemente ein oder jeweils ein Sinterkörper;
  • weist der Hitzeschutz oder weisen die Hitzeschutzelemente Material mit einer Körnung im Nanometer- oder Mikrometerbereich auf;
  • ist der Hitzeschutz oder sind die Hitzeschutzelemente ein oder jeweils ein Monolith;
  • weist das Material des Hitzeschutzes oder der Hitzeschutzelemente Einschlüsse im Nanometer- oder Mikrometerbereich auf, beispielsweise Hohlräume oder Kristalle.
Especially
  • is the heat protection or are the heat protection elements one or each a sintered body;
  • the heat protection or the heat protection elements have material with a grain size in the nanometer or micrometer range;
  • is the heat protection or are the heat protection elements one or a monolith;
  • The material of the heat protection or the heat protection elements has inclusions in the nanometer or micrometer range, for example cavities or crystals.

Maßgeblich ist, dass die optische Dichte des Hitzeschutzes hinsichtlich IR-Strahlung und ggf. bezüglich UV-Strahlung schwankt, insbesondere im Mikrobereich uneinheitlich ist. Hierzu haben sich Bläschen oder Dotierungen bewährt. Insbesondere sind die Dimensionen dieser Einschlüsse kleiner als 1 mm, vorzugsweise kleiner als 100 µm und besonders bevorzugt kleiner als 10 µm.The decisive factor is that the optical density of the heat protection varies with respect to IR radiation and possibly with respect to UV radiation, in particular in the micro range is uneven. Have to Bubbles or doping proven. In particular, the dimensions of these inclusions are less than 1 mm, preferably less than 100 μm, and more preferably less than 10 μm.

In bevorzugter Ausführung besteht der bezüglich IR-Strahlung optisch inhomogene Hitzeschutz aus einem an sich für IR-Strahlung transparentem Material, wie Quarzglas oder Al2O3-Keramik. Es werden jedoch Schwankungen in der optischen Dichte, insbesondere durch unterschiedliche Phasen innerhalb des anorganischen oxidischen Materials gebildet, so dass diese Schwankungen bezüglich der optischen Dichte des Materials wesentliche Strahlungsanteile streuen. Aufgrund seiner speziellen Struktur weist dieses erfindungsgemäß in seiner optischen Dichte bezüglich IR-Strahlung oder ggf. UV-Strahlung uneinheitliche Material in dem Wellenlängenbereich, in dem bei homogener und einphasiger Ausführung des Materials eine sehr hohe Transparenz erreicht würde, nicht die Energieübertragung auf, die das Gehäuse beschädigen würde. Dies ist für Quarzglas je nach Zusammensetzung und Anteil an Spurenverunreinigungen der Wellenlängebereich von 180 nm bis 5000 nm. Dabei ist der Bereich von 180 bis 400 nm, insbesondere 200 nm bis 380 nm für UV-Strahler maßgeblich und der Bereich von 760 bis 5000 nm, insbesondere 780 bis 4000 nm, für IR-Strahler maßgeblich. Erreicht wird diese Eigenschaft durch eine optische Inhomogenität des Quarzglases, wie z.B. durch gezieltes und homogenes Einbringen von Blasen und Störungen. Aluminiumoxid in reiner Form weist eine sehr gute Transmission von UV-Strahlung bis etwa 6000 nm hin auf. Hier wird die genannte Eigenschaft durch eine geeignete mikrokristalline Struktur des Festkörpers erreicht. Überraschend ist, dass der Schutzschild unter Bedingungen anwendbar ist, denen metallische Reflektoren nicht mehr standhalten können, obwohl der Schutzschild mehr Strahlungsenergie bzw. Strahlungsleistung absorbiert als Reflektoren, aber nicht wie diese dadurch seine Funktionalität verliert. Während metallische Reflektoren in ihrer Funktionalität von ihrer Oberfläche abhängen und bei deren Beschädigung somit auch ihre Funktionalität verlieren, ist die Funktionalität des erfindungsgemäßen Hitzeschutzes von dessen Dicke abhängig, wobei im weiteren Gegensatz zu den bekannten Reflektoren die Rustikalität des Hitzeschutzes mit dessen Dicke zunimmt.In a preferred embodiment, the heat protection which is optically inhomogeneous with respect to IR radiation consists of a material transparent to IR radiation, such as quartz glass or Al 2 O 3 ceramic. However, variations in the optical density, in particular by different phases within the inorganic oxide material, are formed so that these variations in the optical density of the material scatter substantial radiation components. Due to its special structure, this invention according to the invention in its optical density with respect to IR radiation or possibly UV radiation non-uniform material in the wavelength range in which a very high transparency would be achieved in homogeneous and single-phase design of the material, not the energy transfer, which Damage the case. Depending on the composition and proportion of trace impurities, this is the wavelength range from 180 nm to 5000 nm for quartz glass. The range from 180 to 400 nm, in particular 200 nm to 380 nm, is decisive for UV radiators and the range from 760 to 5000 nm. especially 780 to 4000 nm, relevant for IR emitters. This property is achieved by an optical inhomogeneity of the quartz glass, such as by targeted and homogeneous introduction of bubbles and disturbances. Alumina in pure form has a very good transmission of UV radiation to about 6000 nm out. Here, the said property is achieved by a suitable microcrystalline structure of the solid. It is surprising that the shield is applicable under conditions that metallic reflectors can no longer withstand, although the shield absorbs more radiant energy or radiant power than reflectors, but not as it thereby loses its functionality. While metallic reflectors depend in their functionality on their surface and thus lose their functionality when damaged, the functionality of the heat protection according to the invention depends on its thickness, which in contrast to the known reflectors, the rusticity of the heat protection increases with the thickness thereof.

Bewährt haben sich Hochleistungsstrahlermodule, die sich dadurch auszeichnen, dass der zwischen Strahler und Gehäuse angeordnete Hitzeschutz zu seiner Kühlung nur eine Luftkühlung aufweist, wobei in einer bevorzugten Ausführung die Luftkühlung zusätzlich den Strahler kühlt. Mit einer einfachen Luftkühlung, deren Energieverbrauch im Verhältnis zur Strahlerleistung vernachlässigbar gering ausfällt, beispielsweise im Prozent- oder Promille-Bereich, sind mit dem erfindungsgemäßen Hitzeschutz robuste Hochleistungsstrahlermodule mit einer Anschlussflächenleistung von 400 bis 600 KW/m2 realisierbar. Mit aufwendigeren Kühlsystemen werden Anschlussleistungen von über 600 KW/ m2 ermöglicht, wobei sogar Anschlussflächenleistungen von über 1 MW/ m2 realisierbar sind. Eine einfache Luftkühlung erfolgt beispielsweise durch einen Luftstrom aus einem Ventilator, einem Lüfter oder einem Radialverdichter.High-performance radiator modules, which are distinguished by the fact that the heat protection arranged between radiator and housing has only one air cooling for its cooling, wherein in a preferred embodiment the air cooling additionally cools the radiator. With a simple air cooling, whose energy consumption in relation to the radiator power is negligible, for example in the percent or per thousand range, are with the heat protection according to the invention robust high-power radiator modules with a pad power from 400 to 600 KW / m 2 feasible. With more complex cooling systems, connection capacities of more than 600 KW / m 2 are possible, whereby even surface powers of more than 1 MW / m 2 can be realized. A simple air cooling takes place for example by an air flow from a fan, a fan or a centrifugal compressor.

Erfindungsgemäß ist auch die Kühlung mit einem anderen Prozessgas, wie z.B. Stickstoff oder Argon eingeschlossen. Weiter umschließt die Erfindung auch die Kühlung mit einem Strom aus Druckluft oder einem anderen geeigneten Gas, welcher nicht mittels eines Radialverdichters, eines Lüfters oder eines Ventilators direkt erzeugt wurde, sondern mittelbar aus einem Druckkreislauf oder Druckbehältern entnommen wird, sowie jede weitere dem Fachmann bekannte Variante der Erzeugung eines geeigneten Gasstromes.According to the invention, cooling with another process gas, e.g. Nitrogen or argon included. Further, the invention also encompasses the cooling with a stream of compressed air or other suitable gas, which was not generated directly by means of a centrifugal compressor, a fan or a fan, but is taken indirectly from a pressure circuit or pressure vessels, as well as any other known to the expert variant the generation of a suitable gas stream.

In einer erfinderischen Weiterbildung ist der Hitzeschutz auf der Gehäuseseite mit Gold beschichtet. Dies reduziert die Sekundärstrahlung von der Oberfläche eines im Betrieb aufgeheizten Hitzeschutzes. Die Abstrahlung der Sekundärstrahlung erfolgt dann überwiegend von der unvergoldeten strahlerseitigen Oberfläche aus.In an inventive development of the heat protection on the side of the case is coated with gold. This reduces the secondary radiation from the surface of a heated in operation heat protection. The radiation of the secondary radiation then takes place predominantly from the ungolded radiator-side surface.

Die mit dem efindungsgemäßen Hitzeschutz ausgestatteten Hochleistungsstrahlermodule zeigen keine Verschlechterung des Wirkungsgrades mit zunehmender Betriebsdauer, wie dies beispielsweise von Hochleistungsstrahlermodulen mit wassergekühlten Reflektoren her bekannt ist.The high-performance radiator modules equipped with the heat protection according to the invention show no deterioration of the efficiency with increasing operating time, as is known, for example, from high-power radiator modules with water-cooled reflectors.

Das anorganisch oxidische Material des Hitzeschutzes ist aus hochtemperaturstabilen Gläsern, insbesondere Quarzglas sowie aus Glaskeramiken, Aluminosilikat oder Keramiken, insbesondere Aluminiumoxid auswählbar. Besonders bewährt haben sich reines Quarzglas sowie reine Aluminiumoxidkeramik.The inorganic oxide material of the heat protection can be selected from high-temperature-stable glasses, in particular quartz glass, as well as from glass ceramics, aluminosilicate or ceramics, in particular aluminum oxide. Pure quartz glass and pure aluminum oxide ceramics have proven to be particularly suitable.

Erfindungsgefäß wird ein Strahlungsschutz bereitgestellt, der von der auf ihn gerichteten Strahlungsleistung wesentlich mehr Leistung in Richtung des bestrahlenden Objektes zurückführt, als er auf seiner Rückseite auf das Modul abstrahlt und transmittiert. Weiter maßgeblich ist, dass der Strahlungsschutz sich nicht bis zur Selbstzerstörung erhitzt. Mit den erfindungsgemäßen Strahlungsschutzeinrichtungen wird es erstmals ermöglicht, Hochleistungsstrahlermodule mit einer Anschlussflächenleistung von 200 Watt und weit darüber hinaus ohne Wasser- bzw. Flüssigkeitskühlung bereit zu stellen.Invention vessel is provided a radiation protection, which returns much more power in the direction of the irradiating object of the radiation power directed at him, as he radiates on his back on the module and transmits. Another decisive factor is that the radiation protection does not heat up to self-destruction. With the radiation protection devices according to the invention, it is possible for the first time to provide high-power radiator modules with a connection area power of 200 watts and far beyond that without water or liquid cooling.

Efindungsgemäß wird also das leidige Sicherheitsrisiko bezüglich der Wasserkühlung ausgeräumt und der bislang betriebene enorme Aufwand zur Minimierung des Risikos bezüglich der Wasserkühlung erübrigt sich.According to the invention, therefore, the tiresome security risk with regard to water cooling is eliminated, and the hitherto required enormous effort to minimize the risk with regard to water cooling is superfluous.

Der erfindungsgemäße Strahlungsschutz eignet sich auch für Module mit einer Anschlussleistung zwischen 100 und 200 Watt/m2, insbesondere für den Bereich von 150 bis 200 Watt/m2 in dem erhebliche Anstrengungen gemacht werden, um ohne Wasserkühlung auszukommen.The radiation protection according to the invention is also suitable for modules with a connected load between 100 and 200 watts / m 2 , in particular for the range of 150 to 200 watts / m 2 in which considerable efforts are made to get along without water cooling.

Der erfindungsgemäße Strahlungsschutz ermöglicht es weiterhin, die bisher mit wassergekühlten Reflektoren erreichbare Anschlussflächenleistung in der Größenordnung von 1 MW/m2 weiter zu steigern, insbesondere bei wassergekühlten Modulen.The radiation protection according to the invention furthermore makes it possible to further increase the connection area power of the order of magnitude of 1 MW / m 2 achievable so far with water-cooled reflectors, in particular in the case of water-cooled modules.

Für Höchstleistungsanwendungen, beispielsweise luftgekühlten Modulen mit Flächenleistungen ab 400 Watt/m2, insbesondere ab 600 Watt/m2, hat sich optisches, inhomogenes Quarzglas als Strahlungsschutz bewährt, insbesondere in einem Verbund mit Gold, bei dem das optische, inhomogene Quarzglas zur Modulvorderseite gerichtet ist, d.h. in Richtung des zu bestrahlenden Objekts und das Gold als Schicht rückseitig zur Modulrückseite weisend auf dem optischen, inhomogenen Quarzglas angeordnet ist. Alternativ bieten sich Quarzglaskeramiken oder mit Quarzglas glasierte Keramiken, insbesondere mit einer rückseitigen Gold-Beschichtung an.For high-performance applications, such as air-cooled modules with surface power from 400 watts / m 2 , especially from 600 watts / m 2 , optical, inhomogeneous quartz glass has proven to be radiation protection, especially in a composite with gold, in which the optical, inhomogeneous quartz glass directed to the module front is, ie in the direction of the object to be irradiated and the gold is arranged as a layer facing back on the back of the module on the optical, inhomogeneous quartz glass. Alternatively, quartz glass ceramics or ceramics glazed with quartz glass, in particular with a gold coating on the back, can be used.

Für weniger extreme Anwendungen, beispielsweise luftgekühlte Module mit einer Anschlussflächenleistung von 100 bis 300 Watt/m2, insbesondere 150 bis 250 Watt/m2, eignen sich bereits hochtemperaturstabile optische, inhomogene Gläser, beispielsweise Alumino-Silikat-Gläser, Borat-Silikat-Gläser, Alumino-Silikat-Borat-Gläser. In vorteilhafter Ausführung ist deren Rückseite mit Gold beschichtet oder ein Goldreflektor dazu beabstandet.For less extreme applications, such as air-cooled modules with a pad power of 100 to 300 watts / m 2 , in particular 150 to 250 watts / m 2 , are already high temperature stable optical, inhomogeneous glasses, such as alumino-silicate glasses, borate-silicate glasses , Alumino silicate borate glasses. In an advantageous embodiment, the back side is coated with gold or a gold reflector to spaced.

Bewährt hat sich eine Luftkühlung, bei der ein Luftstrom von der Rückseite des Moduls durch Öffnungen im Strahlungsschutz auf die Strahler gerichtet wird.Air cooling has proved its worth by directing an air flow from the back of the module through openings in the radiation protection onto the radiators.

Die erfindungsgemäß angewendeten Strahler weisen ein in einer Umhüllung angeordnetes Heizfilament oder einen in der Umhüllung begrenzten Entladungsraum auf. Die Umhüllung ist vorzugsweise rohrförmig oder doppelrohrförmig ausgebildet, wobei die Rohrenden vakuumdicht verschlossen sind und Stromdurchführungen aufweisen. Das Strahlungsmaximum der Strahler liegt vorzugsweise im NIR, insbesondere im IR-A. Das Heizfilament besteht vorzugsweise im Wesentlichen aus Wolfram oder Kohlenstoff.The emitters used according to the invention have a heating filament arranged in an envelope or a discharge space delimited in the envelope. The envelope is preferably tubular or double-tube-shaped, wherein the tube ends are sealed vacuum-tight and have current feedthroughs. The radiation maximum of the radiators is preferably in the NIR, in particular in the IR-A. The heating filament preferably consists essentially of tungsten or carbon.

Zum Betreiben von Hochleistungs-Heizfilamenten auf Wolframbasis mit Emittertemperaturen von über 2500 K, insbesondere über 3000 K, ist ein erfindungsgemäßer Hitzeschutz zwischen dem Hüllrohr des Strahlers und dem den Strahler haltenden Gehäuse vorteilhaft, insbesondere bei Anwendung mehrerer Strahler in einem Modul.For operating high-performance tungsten-based heating filaments with emitter temperatures of more than 2500 K, in particular more than 3000 K, a heat protection according to the invention between the cladding tube of the radiator and the housing holding the radiator is advantageous, in particular when using a plurality of radiators in a module.

Im Folgenden wird die Erfindung anhand von Beispielen mit Bezug auf Figuren verdeutlicht.

  • Figur 1 zeigt einen Querschnitt durch ein Hochleistungsmodut.
  • Figur 2 zeigt einen Querschnitt einer Strahleranordnung des Moduls aus Figur 1.
In the following the invention will be clarified by means of examples with reference to figures.
  • FIG. 1 shows a cross section through a high-power module.
  • FIG. 2 shows a cross section of a radiator arrangement of the module FIG. 1 ,

Der Hitzeschutz 3 wird aus einem optischen, inhomogenen Quarzglas gemäß Heraeus-Broschüre "Opaque Fused Material OFM 970" gefertigt.The heat protection 3 is made of an optical, inhomogeneous quartz glass according to the Heraeus brochure "Opaque Fused Material OFM 970".

Ein Hitzeschutz 3 aus optisch inhomogenem Quarzglas gemäß Heraeus-Broschüre "Opaque Fused Material OFM 970" wird gehäuseseitig mit Gold beschichtet, wie dies bereits für vergoldete Hüllrohre von Infrarotstrahlern in bekannter Weise ausgeführt wird.A heat protection 3 made of optically inhomogeneous quartz glass according to Heraeus brochure "Opaque Fused Material OFM 970" is coated on the housing side with gold, as already done for gold-plated cladding of infrared radiators in a known manner.

Ausführungsbeispiel 1Embodiment 1

Die Figur 1 zeigt ein Modul mit einer Flächenleistung von 400 kW/m2, in dem 6 Zwillingsrohrstrahler (1) parallel nebeneinander angeordnet und mittels Halteelementen (2) fixiert sind. Die erfindungsgemäßen Hitzeschutzelemente (3) aus optisch inhomogenem Quarzglas sind als Halbschalen ausgeformt und entweder glasbläserisch an den Strahlerrohren fixiert oder entsprechend Figur 1 mittels zusätzlicher Halteelemente (4). Diese Halbschalen sind so angeordnet, dass die einzelnen Emitter sich nicht gegenseitig anstrahlen.The FIG. 1 shows a module with a surface power of 400 kW / m 2 , in which 6 twin tube radiator (1) arranged parallel to each other and fixed by means of holding elements (2). The heat protection elements (3) according to the invention made of optically inhomogeneous quartz glass are shaped as half shells and either fixed to the radiator tubes by glassblowing or correspondingly FIG. 1 by means of additional retaining elements (4). These half shells are arranged so that the individual emitters do not illuminate each other.

Das eigentliche Modul besteht aus einem Gehäuse (11), einer Einlassöffnung für Luft (12) und einer Prallplatte (13), an der der eintretende Luftstrom im Modulgehäuse verteilt wird. Zwischen dem Modulinnenraum und der Strahler/Hitzeschildanordnung befindet sich ein Diffusorblech (14). Dieses Blech dient erstens der mechanischen Halterung von Strahler und Reflektor, wobei diese auch an anderer Stelle im Modul gehalten werden können. Zweitens sind in dieses Diffusorblech Löcher oder Schlitze eingearbeitet, die zur optimalen Formung des Kühlgasstromes dienen. Hierzu können Löcher oder Schlitze insbesondere zentral hinter den einzelnen Hitzeschilden angeordnet werden. Als Begrenzung des Strahlerfeldes werden zusätzliche Platten aus dem Hitzeschutzschildmaterial angeordnet (15).The actual module consists of a housing (11), an inlet opening for air (12) and a baffle plate (13) at which the incoming air flow is distributed in the module housing. Between the module interior and the radiator / heat shield assembly is a diffuser plate (14). This sheet is firstly the mechanical support of emitter and reflector, which can also be held elsewhere in the module. Second, holes or slots are incorporated in this diffuser plate, which serve to optimally shape the cooling gas flow. For this purpose, holes or slots in particular centrally behind the individual heat shields to be ordered. As a limitation of the radiator field additional plates from the heat shield material are arranged (15).

Die Figur 2 ist eine vergrößerte Darstellung eines Ausschnittes aus der Figur 1. Als Hitzeschutzschild werden Halbschalen, geschnitten aus Rohren aus OMF 70 eingesetzt (gemäß Heraeus-Broschüre "Opaque Fused Material OFM 70"), wobei hier viele andere für IR-Strahlung optisch inhomogene Quarzgläser als Ausgangsmaterial dienen können.The FIG. 2 is an enlarged view of a section of the FIG. 1 , Shells made of OMF 70 are used as the heat shield (according to the Heraeus brochure "Opaque Fused Material OFM 70"), whereby many other quartz glasses optically inhomogeneous to IR radiation can serve as the starting material.

Ausführungsbeispiel 2Embodiment 2

In einem zweiten Ausführungsbeispiel mit einer Flächenleistung von 550 kW/m2 werden die parallel angeordneten Zwillingsrohrstrahler an ihren langen unbeheizten Enden gehalten und sind vor einer Platte aus optisch inhomogem, rückseitig vergoldetem Quarzglas angeordnet. Diese Platte besteht aus mehreren Segmenten, um die Produktionskosten gering zu halten. In die Segmente sind an geeigneten Positionen Löcher eingebracht, so dass das mittels geeigneter Vorrichtungen im Modulgehäuse zur Verfügung gestellte Gas so über diese Löcher abfließt, dass zum einen die Strahler effektiv angeblasen und so konvektiv gekühlt werden und zum zweiten der noch kalte Gasstrom aus dem Gehäuse durch das Hitzeschild dieses kühlt. Die Platten werden aus OM100 gefertigt (gemäß Heraeus-Broschüre "OM 100 High purity opaque quartz glass"), wobei alternativ viele andere optisch inhomogene Quarzgläser als Ausgangsmaterial verwendbar sind.In a second exemplary embodiment with a surface power of 550 kW / m 2 , the twin tube radiators arranged in parallel are held at their long, unheated ends and are arranged in front of a plate of optically inhomogeneous, gold-plated quartz glass. This plate consists of several segments to keep production costs low. Holes are inserted into the segments at suitable positions, so that the gas made available in the module housing by means of suitable devices flows out through these holes in such a way that the emitters are effectively blown and convectively cooled, and secondly the still cold gas flow from the housing through the heat shield this cools. The plates are made of OM100 (according to Heraeus brochure "OM 100 High purity opaque quartz glass"), although many other optically inhomogeneous quartz glasses can be used as starting material.

Seitlich sind zum Schutz des Modules zusätzliche Platten aus OM100 angeordnet, die rückseitig konvektiv gekühlt werden.On the side, additional panels made of OM100 are arranged to protect the module, which are convection cooled on the back.

Ausführungsbeispiel 3Embodiment 3

In einem dritten Ausführungsbeispiel mit einer Flächenleistung von 600 kW/m2 werden die parallel angeordneten Zwillingsrohrstrahler an ihren langen unbeheizten Enden gehalten. Anordnung wie im Ausführungsbeispiel 2, jedoch besteht der rückseitige Hitzeschutz aus einer Platte transparenten Quarzglases, auf das eine ausreichend starke Schicht aus optisch inhomogenem Quarz als Schlicker aufgebracht und nachträglich aufgesintert wurde. Diese Schicht wird in Richtung der Infrarotstrahler ausgerichtet und die rückseitige Quarzplatte vergoldet. Schlitze und Löcher zur Kühlung des Hitzeschildes und der Strahler werden wie bei Ausführungsbeispiel 2 ausgeführt, jedoch die Luftmenge zur Kühlung entsprechend erhöht.In a third exemplary embodiment with a surface power of 600 kW / m 2 , the twin tube radiators arranged in parallel are held at their long, unheated ends. Arrangement as in Embodiment 2, but the rear heat shield consists of a plate transparent quartz glass, on which a sufficiently strong layer of optically inhomogeneous quartz was applied as a slip and subsequently sintered. This layer is aligned in the direction of the infrared radiator and gold plated the back quartz plate. Slots and holes for cooling the heat shield and the radiator are performed as in Embodiment 2, but the amount of air for cooling increased accordingly.

Claims (13)

  1. A high-power radiator module, in the case of which a heat protection (3) of inorganic oxidic material is arranged between radiator (1) and housing (11), characterized in that the heat protection (3) consists of a material, which is substantially free of fibres and which is optically inhomogeneous for IR radiation and the high-power radiator module (1) encompasses a connection output per unit area of at least 200 kW/m2 and the heat protection (3) is so thick that it encompasses an IR transmission of less than 10% in response to a temperature of between 0 to 1000°C.
  2. The high-power radiator module according to claim 1, characterized in that the heat protection (3) encompasses only an air cooling for cooling it.
  3. The high-power radiator module according to any one of claims 1 or 2, characterized in that the optically inhomogeneous oxidic material encompasses quartz glass, high-temperature stable glass, glass ceramics, aluminosilicates, ceramics.
  4. The high-power radiator module according to any one of claims 1 to 3, characterized in that a cooling air stream is guided to the radiators (1) via heat protection shields.
  5. The high-power radiator module according to any one of claims 1 to 4, characterized in that the heat protection (3) encompasses openings, through which the cooling air can be guided to the radiators (1).
  6. The high-power radiator module according to any one of claims 1 to 5, characterized in that the material of the heat protection (3) encompasses inclusions.
  7. The high-power radiator module according to any one of claims 1 to 6, characterized in that the heat protection (3) thereof encompasses material with a grain size in the nanometre or micrometre range.
  8. The high-power radiator module according to any one of claims 1 to 7, characterized in that the heat protection (3) is a sinter body or encompasses a sinter body for each radiator.
  9. The high-power radiator module according to any one of claims 1 to 8, characterized in that the heat protection (3) is a monolith or encompasses a monolith for each radiator.
  10. A use of a radiator module according to claim 1 as water-cooled high-power radiator module comprising a connection output per unit area of at least 600 KW/m2, in particular of at least 1 megawatt/m2.
  11. A method for producing a radiator module according to claim 1, in the case of which a plurality of radiators (1) or radiator units (1) are electrically connected and held mechanically in a housing (11) comprising an outlet opening for the emitted radiation, characterized in that a heat protection (3) of inorganic oxidic material is arranged on the side of the radiators, which face away from the outlet opening, characterized in that the heat protection (3) is optically inhomogeneous and substantially free of fibres.
  12. The method for producing a radiator module according to claim 11, characterized in that a gold layer is arranged between the heat protection (3) and the housing (11), in particular by coating the heat protection with gold on the housing side.
  13. A use of an inorganic oxidic heat protection (3) for a high-power radiator module according to claim 1, in particular comprising a connection output per unit area of at least 200 kW/m2, characterized in that the heat protection (3) is optically inhomogeneous and substantially free of fibres.
EP07723672A 2006-03-28 2007-03-27 Infrared irradiation unit Not-in-force EP2000003B1 (en)

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DE102006014689A DE102006014689A1 (en) 2006-03-28 2006-03-28 Infrared radiation unit
PCT/EP2007/002726 WO2007112896A1 (en) 2006-03-28 2007-03-27 Infrared irradiation unit

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EP2000003A1 EP2000003A1 (en) 2008-12-10
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DE3540388A1 (en) * 1985-11-14 1987-05-21 Santrade Ltd METHOD AND DEVICE FOR PRODUCING FIBER STRAP REINFORCED PLASTIC LAMINATES
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JPH07198949A (en) 1993-12-28 1995-08-01 Bridgestone Corp Optical scattering material
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US6437290B1 (en) * 2000-08-17 2002-08-20 Tokyo Electron Limited Heat treatment apparatus having a thin light-transmitting window
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DE10156915B4 (en) * 2001-11-21 2007-11-29 Heraeus Noblelight Gmbh Apparatus for homogeneous heating of substrates or surfaces and their use
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DE502007007128D1 (en) 2011-06-16
ATE508612T1 (en) 2011-05-15

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