EP1999802A1 - Actionneurs multicouches avec électrodes interdigitales - Google Patents

Actionneurs multicouches avec électrodes interdigitales

Info

Publication number
EP1999802A1
EP1999802A1 EP07726934A EP07726934A EP1999802A1 EP 1999802 A1 EP1999802 A1 EP 1999802A1 EP 07726934 A EP07726934 A EP 07726934A EP 07726934 A EP07726934 A EP 07726934A EP 1999802 A1 EP1999802 A1 EP 1999802A1
Authority
EP
European Patent Office
Prior art keywords
multilayer actuator
active
electrodes
films
internal electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07726934A
Other languages
German (de)
English (en)
Inventor
Hans-Jürgen SCHREINER
Jürgen Schmidt
Reiner Bindig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ceramtec GmbH
Original Assignee
Ceramtec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceramtec GmbH filed Critical Ceramtec GmbH
Publication of EP1999802A1 publication Critical patent/EP1999802A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Definitions

  • the invention relates to a method for producing a monolithic Dahlschich- actuator according to the preamble of claim 1 and a multilayer actuator according to the preamble of claim 2.
  • Monolithic multilayer actuators (hereafter also referred to generally as actuators) of the prior art typically consist of stacked thin layers 2 of active material, e.g. a piezoceramic or electrostrictive materials, each with interposed conductive internal electrodes 4.
  • Active material e.g. a piezoceramic or electrostrictive materials
  • Controllerelekt- roden 3 connect these internal electrodes 4 alternately.
  • the internal electrodes 4 are electrically connected in parallel and combined into two groups, which represent the two terminal poles of the actuator (see Fig. 1).
  • the described effect is also called a 33-effect, since the electric field is applied in the direction of polarization (spatial direction: first index 3) and the mechanical effects occurring in the same direction (spatial direction: second index 3) are used.
  • the 31 effect used in many bending elements characterizes the application of the electric field in the direction of polarization (spatial direction first index 3) and the use of the mechanical effects at right angles thereto (spatial direction of the second index 1).
  • the polarization direction 6 and the movement direction 7 of the actuator must run in the same direction, normally in the direction of the actuator longitudinal axis 5. This means that, as shown in Fig. 1, the individual layers 2 and inner electrodes 4 are at right angles to the Aktorlticiansachse 5 and the layering direction 8 is parallel to the Aktorlticiansachse 5.
  • the invention is based on the object to improve a method for producing a multilayer actuator according to the preamble of claim 1 so that the known and commercially available technology for the stacking and laminating can be used.
  • a multilayer actuator is to be specified according to the preamble of claim 2, which can have a large height in a very small footprint and in particular was prepared by the method just mentioned.
  • the layering direction 8 of all active foils is arranged at right angles to the longitudinal axis of the multilayer actuator and the foils are sintered together with the inner electrodes in a cofiring process, can be known and commercially available Technology can be used for the stacking and laminating machines.
  • the cofiring process is understood to mean that the internal electrodes are completely laminated and sintered together with the ceramic.
  • the cofiring process is thus the simultaneous sintering of the internal electrodes together with the ceramic foils in one step.
  • the object is achieved with respect to the multilayer actuator by the features of claim 2.
  • multilayer actuators 33- Actuators are easily manufactured with a high level, which are needed for example for valve actuators.
  • the internal electrodes are no longer completely incorporated as a metal layer in the actuators, but as interconnects with the finest possible conductors. It is therefore only a fraction of the very expensive, noble metal-containing internal electrode material needed.
  • the inventive method leads to a simpler and less complicated process, to save precious metal-containing inner electrode and thus to significantly lower manufacturing costs for actuators and flexures.
  • An embodiment of the invention is characterized in that the inner electrodes of both polarities are comb-like, each having a base conductor and of this substantially perpendicular outgoing comb conductors, wherein the comb conductors of both polarities engage each other so that except for the edge region of the films each Kammleiterbahn one polarity is arranged between two comb conductors of the other polarity.
  • These comb-shaped interlocking internal electrodes are also referred to below as interdigital electrodes.
  • the base conductor tracks are preferably arranged adjacent to opposite sides of the film.
  • the thickness of the films is 10 ⁇ m to 300 ⁇ m, preferably 30 ⁇ m to 100 ⁇ m.
  • the width of the conductor tracks of the internal electrodes is 0.05 to 0.5 mm, preferably 0.1 to 0.2 mm.
  • the distance between the conductor tracks of the internal electrodes is selected so that a field strength of 0.5 to 5 kV / mm, preferably 1, 5 to 2.5 kV / mm is established at a desired operating voltage.
  • the multilayer actuator also contains inactive films without internal electrodes in addition to the active films, so that one or more active zones and one or more inactive zones are formed and the multilayer actuator can bend during operation.
  • foils with a full-area inner electrode not electrically contacted by the outer electrode are arranged between the active zones and the inactive zones.
  • a low sintering piezoceramic material is used for the ceramic. Such a piezoceramic material is described, for example, in DE 198 40 488 A1.
  • Figure 1 shows a monolithic 33-actuator 1, carried out according to the prior art.
  • the polarization direction 6, the direction of movement 7 and the layering direction 8 extend in the direction of the actuator longitudinal axis 5 (see also the introduction to the description). Full-surface internal electrodes are used here.
  • Monolithic 33-actuators for bending elements can not be made according to the prior art by a stack / lamination method, but are sawed off from larger, already sintered and electro-33 actuators as thin slices.
  • 33-bend reactors can not be made by stacking / lamination processes, but must be joined by gluing from sintered and electroded part actuators.
  • FIG. 2 shows a monolithic 33-actuator (multilayer actuator) according to the invention. It should be emphasized that the polarization direction 6 and the direction of movement 7 extend in the direction of the actuator longitudinal axis 5. The direction of the stratification 8, however, is at right angles to it.
  • the interdigital electrodes 9 are electrically connected laterally by external electrodes 3. Only one of the outer electrodes 3 is shown, the other outer electrode is on the opposite side.
  • FIG. 3 shows the plan view of a monolithic 33 actuator according to the invention with interdigitated interdigital electrodes 9.
  • FIG. 4 shows a section through the monolithic 33 actuator shown in FIG. 3 along the section line A-B.
  • FIG. 5 shows a section (as in FIG. 4) through a monolithic 33-bend reactor, carried out by the method according to the invention.
  • an inactive zone 12 is formed.
  • the remaining actuator package 10 or the active zone bends the structure downward when it expands in the direction of movement 7.
  • Full-surface applied, electrically non-contacted internal electrodes 13 prevent any cracks resulting from the bend grow into the passive zone.
  • Figure 6 shows a section through a monolithic 33-bending reactor, carried out according to the inventive method.
  • an inactive zone 12 is formed.
  • the remaining actuator packages 10, 11 deform the structure upwards or downwards if they expand alternately.
  • Internal electrodes 13 which are applied over the entire surface and are not electrically contacted prevent bending due to the bending Growing cracks grow into the inactive zone 12.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un procédé de fabrication d'un actionneur multicouche (1) monolithique constitué d'un empilement de feuilles actives minces (2) de piézocéramique avec des électrodes internes métalliques intégrées qui sortent alternativement de l'empilement et sont électriquement connectées en parallèle via des électrodes externes (3). Du fait que sur chaque feuille active (2) sont disposées les électrodes internes (9) des deux polarités en tant que pistes conductives, que la direction de stratification (8) de toutes les feuilles actives (2) est établie à angle droit par rapport à l'axe longitudinal (5) de l'actionneur multicouche (1) et que les feuilles (2) avec les électrodes internes (9) sont frittées ensemble dans un processus de cocuisson, une technique connue et courante du marché peut être mise en œuvre pour les machines d'empilement et de stratification.
EP07726934A 2006-03-16 2007-03-15 Actionneurs multicouches avec électrodes interdigitales Withdrawn EP1999802A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006012588 2006-03-16
DE102006051080A DE102006051080A1 (de) 2006-03-16 2006-10-25 Vielschichtaktoren mit Interdigitalelektroden
PCT/EP2007/052444 WO2007104784A1 (fr) 2006-03-16 2007-03-15 Actionneurs multicouches avec électrodes interdigitales

Publications (1)

Publication Number Publication Date
EP1999802A1 true EP1999802A1 (fr) 2008-12-10

Family

ID=38179582

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07726934A Withdrawn EP1999802A1 (fr) 2006-03-16 2007-03-15 Actionneurs multicouches avec électrodes interdigitales

Country Status (5)

Country Link
US (1) US20090243437A1 (fr)
EP (1) EP1999802A1 (fr)
JP (1) JP2009530799A (fr)
DE (1) DE102006051080A1 (fr)
WO (1) WO2007104784A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008031641B4 (de) * 2008-07-04 2017-11-09 Epcos Ag Piezoaktor in Vielschichtbauweise
ITMO20080197A1 (it) * 2008-07-21 2010-01-22 Univ Degli Studi Modena E Reggio Emilia Trasduttore piezoelettrico torsionale
DE102008042866A1 (de) 2008-10-15 2010-04-22 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102011001359A1 (de) 2011-03-17 2012-09-20 Gottfried Wilhelm Leibniz Universität Hannover Verfahren und Vorrichtung zur Herstellung einer Piezoaktorenkomponente
FR3131088A1 (fr) * 2021-12-17 2023-06-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Structure capacitive piezoelectrique

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0394487A (ja) * 1989-09-06 1991-04-19 Murata Mfg Co Ltd 圧電アクチュエータ
JPH0555657A (ja) * 1991-08-23 1993-03-05 Tokin Corp 積層型圧電アクチユエータおよびその製造方法
JP3116176B2 (ja) * 1991-11-05 2000-12-11 株式会社トーキン 積層型圧電アクチュエータ
US5315205A (en) * 1991-09-25 1994-05-24 Tokin Corporation Piezoelectric vibrator capable of reliably preventing dielectric breakdown and a method of manufacturing the same
DE4443365A1 (de) * 1994-12-06 1996-06-13 Philips Patentverwaltung Brenn- und Sinterverfahren für ein keramisches elektronisches Bauteil
JPH08204498A (ja) * 1995-01-24 1996-08-09 Murata Mfg Co Ltd 端面反射型表面波装置
JP2842382B2 (ja) * 1996-06-11 1999-01-06 日本電気株式会社 積層型圧電トランスおよびその製造方法
DE19936713C2 (de) * 1999-08-06 2001-08-23 Bosch Gmbh Robert Piezokeramischer Aktor sowie Verfahren zu seiner Herstellung
JP3733860B2 (ja) * 2000-02-01 2006-01-11 株式会社村田製作所 圧電素子およびその製造方法
US6342753B1 (en) * 2000-09-25 2002-01-29 Rockwell Technologies, Llc Piezoelectric transformer and operating method
US7385337B2 (en) * 2004-06-18 2008-06-10 Tdk Corporation Multilayer piezoelectric element
DE102006040316B4 (de) * 2006-08-29 2012-07-05 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezokeramischer Flächenaktuator und Verfahren zur Herstellung eines solchen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2007104784A1 *

Also Published As

Publication number Publication date
DE102006051080A1 (de) 2007-10-04
US20090243437A1 (en) 2009-10-01
JP2009530799A (ja) 2009-08-27
WO2007104784A1 (fr) 2007-09-20

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