EP1962054A1 - Gyroscope microélectromécanique avec un dispositif de détection à boucle d'asservissement ouverte et procédé de contrôle de gyroscope microélectromécanique - Google Patents

Gyroscope microélectromécanique avec un dispositif de détection à boucle d'asservissement ouverte et procédé de contrôle de gyroscope microélectromécanique Download PDF

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Publication number
EP1962054A1
EP1962054A1 EP07425075A EP07425075A EP1962054A1 EP 1962054 A1 EP1962054 A1 EP 1962054A1 EP 07425075 A EP07425075 A EP 07425075A EP 07425075 A EP07425075 A EP 07425075A EP 1962054 A1 EP1962054 A1 EP 1962054A1
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EP
European Patent Office
Prior art keywords
mass
gyroscope
inertial sensor
read signal
resonance frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07425075A
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German (de)
English (en)
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EP1962054B1 (fr
Inventor
Carlo Caminada
Luciano Prandi
Ernesto Lasalandra
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STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
SGS Thomson Microelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to EP07425075A priority Critical patent/EP1962054B1/fr
Priority to US12/030,747 priority patent/US8037756B2/en
Publication of EP1962054A1 publication Critical patent/EP1962054A1/fr
Application granted granted Critical
Publication of EP1962054B1 publication Critical patent/EP1962054B1/fr
Priority to US13/242,769 priority patent/US8800369B2/en
Priority to US14/332,211 priority patent/US9217641B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Definitions

  • the present invention relates to a microelectromechanical gyroscope with open-loop reading device and a control method for a microelectromechanical gyroscope.
  • MEMS microelectromechanical systems
  • MEMS of the above type are usually based upon microelectromechanical structures that comprise at least one mass, which is connected to a fixed body (stator) by springs and is movable with respect to the stator according to pre-determined degrees of freedom.
  • the movable mass and the stator are capacitively coupled through a plurality of respective comb-fingered and mutually facing electrodes so as to form capacitors.
  • the movement of the movable mass with respect to the stator modifies the capacitance of the capacitors, whence it is possible to trace back to the relative displacement of the movable mass with respect to the fixed body and hence to the applied force.
  • FIGS. 1 and 2 show the plot of the magnitude and phase of the transfer function between the force applied on the movable mass and its displacement with respect to the stator, in an inertial MEMS structure.
  • MEMS gyroscopes have a more complex electromechanical structure, which comprises two masses that are movable with respect to the stator and coupled to one another so as to have a relative degree of freedom.
  • the two movable masses are both capacitively coupled to the stator.
  • One of the masses is dedicated to driving and is kept in oscillation at the resonance frequency.
  • the other mass is drawn along in oscillating motion and, in the case of rotation of the microstructure with respect to a pre-determined gyroscopic axis with an angular velocity, is subjected to a Coriolis force proportional to the angular velocity itself.
  • the driven mass operates as an accelerometer that enables detection of the Coriolis force and acceleration and hence makes it possible to trace back to the angular velocity.
  • a MEMS gyroscope requires, in addition to the microstructure, a driving device, which has the task of maintaining the movable mass in oscillation at the resonance frequency, and a device for reading the displacements of the driven mass, according to the relative degree of freedom of the driving mass. Said displacements, in fact, are indicative of the Coriolis force and consequently of the angular velocity, and are detectable through electrical read signals correlated to the variations of the capacitive coupling between the driven mass and the stator.
  • the read signals determined by the rotation of the gyroscope and correlated to the angular velocity, are in the form of dual-side-band - suppressed-carrier (DSB-SC) signals; the carrier is in this case the velocity of oscillation of the driving mass and has the same frequency as the mechanical resonance frequency.
  • DSB-SC dual-side-band - suppressed-carrier
  • Known reading devices detect the read signals at terminals coupled to the driven mass, and demodulate them downstream of the sensing point to bring them back into base band. It is hence necessary to include purposely provided devices, among which at least one demodulator and a synchronisation device, such as for example a PLL circuit, which generates a demodulation signal starting from actuation signals for the driving mass.
  • a synchronisation device such as for example a PLL circuit
  • the need to include these devices entails, however, disadvantages, principally because it causes a greater encumbrance and increases the power consumption, which, as is known, is extremely important in modern electronic devices.
  • the synchronisation devices must be specifically designed for generating also a highfrequency clock signal for the demodulator and are thus particularly complex.
  • the aim of the present invention is to provide a microelectromechanical gyroscope and a method for controlling a microelectromechanical gyroscope that will be free from the limitations described.
  • a microelectromechanical gyroscope and a method for controlling a microelectromechanical gyroscope are provided, as defined in Claim 1 and Claim 14, respectively.
  • a microelectromechanical gyroscope 100 illustrated in a simplified way in the block diagram of Figure 3 , comprises a microstructure 102, made by MEMS technology, a driving device 103 and a reading device 104, housed on a support 101.
  • the microstructure 102 for example of the type described in EP-A-1 253 399 , filed in the name of the present applicant, is provided with an actuation system 5 and an inertial sensor 6, including respective movable masses made of semiconductor material. More precisely, the actuation system 5 comprises a driving mass 107, oscillating about a resting position according to a degree of freedom, in particular along a first axis X.
  • the actuation system 5 is moreover provided with read outputs 5a (defined by two stator terminals), for detecting displacements of the driving mass 107 along the first axis X, and with actuation inputs 5b (defined by two further stator terminals), for issuing actuation signals and maintaining the driving mass 107 in oscillation at the resonance frequency ⁇ R , in a known way.
  • the read outputs 5a and the actuation inputs 5b are capacitively coupled to the driving mass 107 in a known way, by comb-fingered electrodes (not illustrated herein).
  • the inertial sensor 6 has a detection axis having the same direction as a second axis Y perpendicular to the first axis X and comprises a detection mass 108, mechanically connected to the driving mass 107 by springs (not illustrated herein) so as to be drawn along the first axis X when the driving mass 107 is excited.
  • the detection mass 108 is relatively movable with respect to the driving mass 107 in the direction of the second axis Y and hence has a further degree of freedom.
  • a first terminal 6a (directly connected to the detection mass 108) and two second (stator) terminals 6b of the inertial sensor 6 enable, respectively, issuing of a read signal V S to the detection mass 108 and detection of the displacements thereof.
  • the first terminal 6a is directly connected to the detection masses 108, whereas the second terminals 6b are capacitively coupled thereto in a known way, through comb-fingered electrodes (not illustrated herein).
  • the driving device 103 is connected to the microstructure 102 so as to form a driving feedback loop 105, including the driving mass 107.
  • the driving device 103 exploits the driving feedback loop 105 to maintain the driving mass 107 in self-oscillation along the first axis X at its mechanical resonance frequency ⁇ R (for example, 25 krad/s).
  • the reading device 104 is of the open-loop type and, in the embodiment described herein, is configured for executing a so-called "double-ended" reading of the displacements of the detection mass 108 along the second axis Y.
  • the reading device 104 has: a first input 104a, connected to the driving device 103 for acquiring a demodulation signal V DEM (in this case a voltage); second inputs, connected to respective second terminals 6b of the inertial sensor 6; a first output, connected to the first terminal 6a of the inertial sensor 6 and issuing the read signal V S ; and a second output 104b, which supplies an output signal S OUT , correlated to the angular velocity ⁇ of the microstructure 102.
  • V DEM in this case a voltage
  • V DEM in this case a voltage
  • second inputs connected to respective second terminals 6b of the inertial sensor 6
  • a first output connected to the first terminal 6a of the inertial sensor 6 and issuing the read signal
  • the gyroscope 100 operates in the way hereinafter described.
  • the driving mass 107 is set in oscillation along the first axis X by the driving device 103.
  • the driving device 103 is coupled to the read outputs 5a of the actuation system 5 for receiving detection currents I RD1 , I RD2 , which are correlated to the linear velocity of oscillation of the driving mass 107 along the first axis X.
  • the driving device 103 On the basis of the detection currents I RD1, I RD2 the driving device 103 generates feedback driving voltages V FBD1 , V FBD2 having amplitude and phase such as to ensure the conditions of oscillation of the driving feedback loop 105 (unit loop gain and substantially zero phase).
  • the detection mass 108 is drawn in motion along the first axis X by the driving mass 107. Consequently, when the microstructure 102 rotates about a gyroscopic axis perpendicular to the plane of the axes X, Y with a given instantaneous angular velocity, the detection mass 108 is subjected to a Coriolis force, which is parallel to the second axis Y and is proportional to the instantaneous angular velocity of the microstructure 102 and to the linear velocity of the two masses 107, 108 along the first axis X.
  • the detection signals determined by the rotation of the gyroscope and correlated to the angular velocity, are in the form of dual-side-band - suppressed-carrier (DSB-SC) signals; the carrier is in this case the oscillation velocity of the driving mass and has a frequency equal to the mechanical resonance frequency ⁇ R .
  • DSB-SC dual-side-band - suppressed-carrier
  • the driving mass 107 is subjected to a Coriolis force; however, this force is countered by the constraints that impose upon the driving mass 107 movement exclusively along the first axis X.
  • the Coriolis force and acceleration, which the detection mass 108 is subjected to, are read through the inertial sensor 6.
  • the inertial sensor 6 issues differential detection charge packets Q RS1 , Q RS2 , which are proportional to the capacitive unbalancing caused by the displacement of the detection mass 108 along the second axis Y.
  • the detection charge packets Q RS1 , Q RS2 are hence correlated to the Coriolis force (and acceleration) and to the instantaneous angular velocity ⁇ of the microstructure 102.
  • the charge transferred with the detection charge packets Q RS1 , Q RS2 in successive reading cycles is amplitude modulated in a way proportional to the instantaneous angular velocity ⁇ of the microstructure 102.
  • the frequency band associated to the modulating quantity, i.e., the instantaneous angular velocity, is, however, far lower than the resonance frequency ⁇ R (for example, approximately 30 rad/s).
  • the detection charge packets Q RS1 , Q RS2 are converted and processed by the reading device 104, which generates the output signal S OUT , as explained hereinafter.
  • Figure 4 shows a more detailed diagram of the microstructure 102, of the driving device 103, and of the reading device 104.
  • Figure 4 shows: first differential detection capacitances 120 present between the driving mass 107 and respective read outputs 5a of the actuation system 5; actuation capacitances 121, which are present between the driving mass 107 and respective actuation inputs 5b of the actuation system 5; and second detection capacitances 122, which are present between the detection mass 108 and the second terminals 6b of the inertial sensor 6. More precisely, the first differential detection capacitances 120 and the differential actuation capacitances 121 have respective terminals connected to a same actuation node 125, which is in turn coupled to the actuation mass 108.
  • the driving device 103 comprises a transimpedance amplifier 110, a feedback stage 111, in itself known, and a subtractor circuit 112.
  • the transimpedance amplifier 110 is of a fully-differential type and has a pair of inputs connected to the read outputs 5a of the actuation system 5 for receiving the detection currents I RD1 , I RD2 , which are correlated to the linear velocity of oscillation of the driving mass 107 along the first axis X.
  • detection voltages V RD1 , V RD2 are hence present, which are also indicative of the linear velocity of oscillation of the driving mass 107 along the first axis X.
  • the detection voltages V RD1 , V RD2 are sinusoidal, oscillate at the resonance frequency ⁇ R have equal amplitude and are 180° out of phase.
  • the conditions of resonance are ensured by the feedback stage 111, which generates the feedback driving voltages V FBD1 , V FBD2 so that the gain of the driving feedback loop 105 is a unit gain and its phase is zero.
  • the subtractor circuit 112 has inputs connected to the outputs of the transimpedance amplifier 110, for receiving the detection voltages V RD1 , V RD2 .
  • the output of the subtractor circuit 112 is connected to the first input 104a of the reading device 104 and supplies the demodulation signal V DEM (see also Figure 5 ).
  • the demodulation signal V DEM is sinusoidal and oscillates at the resonance frequency ⁇ R , because it is generated as difference between the detection voltages V RD1 , V RD2 .
  • the detection voltages V RD1 , V RD2 are differential voltages 180° out of phase, the demodulation voltage V DEM has a higher absolute value as compared to that of said detection voltages.
  • the reading device 104 comprises a read signal generator 130, a phase generator 131 and, moreover, a fully differential processing line 132 including a charge amplifier 133, a preamplifier 134, and a sampler 135.
  • the read signal generator 130 is a sampler and has a clock input, connected to the phase generator 131 for receiving a clock signal CK (with clock period T CK ), and an input forming the first input 104a of the reading circuit 104.
  • the clock signal CK is asynchronous with respect to the oscillation of the driving mass 107 (in practice, the clock frequency 2 ⁇ /T C is not correlated to the resonance frequency ( ⁇ R ). Also the sampling carried out by the read signal generator 130 is hence asynchronous with respect to the resonance frequency ⁇ R .
  • the output of the read signal generator 130 is connected to a first terminal 6a of the inertial sensor 6 and supplies the read signal V S .
  • the charge amplifier 133 has inputs connected to respective second terminals 6b of the inertial sensor 6 for receiving the detection charge packets Q RS1 , Q RS2 produced by the inertial sensor 6 in response to the read signal V s and to the rotation of the gyroscope 100.
  • the preamplifier 134 and the sampler 135 are cascaded to the charge amplifier 133, for processing the detection charge packets Q RS1 , Q RS2 (converted into voltage by the charge amplifier 133) and generating the output signal S OUT .
  • the detection charge packets Q RS1 , Q RS2 are generated by the inertial sensor 6 in response to the excitation of the detection mass 108 by the read signal V S and are proportional to the capacitive unbalancing of the second detection capacitances 122. This capacitive unbalancing is determined also by the amplitude of the read signal V S , as well as by the forces acting on the detection mass 108. Consequently, the charge transferred with the detection charge packets Q RS1 , Q RS2 is correlated, in particular proportionally, to the amplitude of the read signal V S , which varies at the resonance frequency ⁇ R .
  • demodulation is not to be performed by the processing line 132, which is thus simple to design and, moreover, requires fewer components with respect to the processing lines necessary in conventional gyroscopes. Both the overall encumbrance and the power consumption are thus improved.
  • a demodulator stage and complex auxiliary circuits such as phase-locked-loop (PLL) circuits that would otherwise be indispensable for synchronizing the operation of demodulation with the carrier frequency, i.e., the resonance frequency ⁇ R .
  • PLL phase-locked-loop
  • the invention is advantageous also in the case where a PLL circuit is in any case included in the feedback stage 111 of the driving circuit.
  • a PLL circuit that is to drive a demodulator stage is complex because demodulator stages require not only for synchronisation at the resonance frequency ⁇ R , but also other clock signals at higher frequencies, but in any case controlled on the basis of the resonance frequency ⁇ R .
  • the advantage is obviously more considerable if the driving circuit does not comprise a PLL stage, but is, for example, based upon a simpler peak detector.
  • FIG. 6 shows a gyroscope 100' according to a second embodiment of the invention.
  • the gyroscope 100' comprises the microstructure 102, a driving device 103' and a reading device 104'.
  • the driving device 103' is substantially identical to the driving device 103 already described with reference to Figures 3 and 4 , except that in this case the subtractor circuit 112 is not present.
  • the driving device 103' is connected to the microstructure 102 so as to form a driving feedback loop 105, including the driving mass 107.
  • the driving device 103' exploits the driving feedback loop 105 to maintain the driving mass 107 in self-oscillation along the first axis X at its resonance frequency ⁇ R .
  • the reading device 104' is of the open-loop type and is configured for executing a so-called "single-ended" reading of the displacements of the detection mass 108 along the second axis Y.
  • the detection mass 108 is excited by two read signals V S1 , V s2 180° out of phase with respect to one another (see also Figures 7a, 7b ), which are supplied to respective second terminals 6b of the inertial sensor 6.
  • the inertial sensor 6 In response to the read signals V S1 , V S2 , the inertial sensor 6 generates detection charge packets Q RS , which are supplied on the first terminal 6a.
  • the detection charge packets Q RS are proportional to the capacitive unbalancing of the second detection capacitances 122, caused by the displacement of the detection mass 108 along the second axis Y.
  • the reading device 104 has two first inputs 104a', connected to the driving device 104 for acquiring respective demodulation signals V DEM1 , V DEM2 ; a second input, connected to the first terminal 6a of the inertial sensor 6, for receiving the detection charge packets Q RS ; first outputs, connected to respective second terminals 6b of the inertial sensor 6 and issuing the read signals V S1 , V S2 ; and a second output 104b', which supplies an output signal S OUT , correlated to the angular velocity ⁇ of the microstructure 102.
  • the demodulation signals V DEM1 , V DEM2 are voltages, which coincide with detection voltages V RD1 , V RD2 present on the outputs of the transimpedance amplifier 110.
  • the detection voltages V RD1 , V RD2 are sinusoidal, oscillate at the resonance frequency ⁇ R , have equal amplitude and are 180° out of phase.
  • the reading device 104' further comprises a read signal generator 130', the phase generator 131, and a processing line 132', including a charge amplifier 133', a preamplifier 134' and a sampler 135'.
  • a processing line 132' including a charge amplifier 133', a preamplifier 134' and a sampler 135'.
  • the components that form the processing line 132' are of the one-input/one-output type.
  • the read signal generator 130' is a sampler and has a clock input, connected to the phase generator 131 for receiving the clock signal CK (with clock period T CK ), and inputs forming respective first inputs 104a' of the reading circuit 104'. In practice, then, the inputs are connected to the outputs of the transimpedance amplifier 110 of the driving device 103 and receive respective demodulation signals V DEM1 , V DEM2 . Outputs of the read signal generator 130' are connected to respective second terminals 6b of the inertial sensor 6 and supply respective read signals V S1 , V S2 .
  • the read signals V S1 , V S2 are generated by sampling and amplification of respective demodulation signals V DEM1 , V DEM2 and hence have the form of square-wave signals of amplitude that varies in a sinusoidal way at the resonance frequency ⁇ R , with a mutual phase offset of 180°, as illustrated in Figures 7a, 7b .
  • the demodulation is performed directly during excitation of the detection mass 108, by supplying read signals V S1 , V s2 of variable amplitude in a sinusoidal way at the resonance frequency ⁇ R .
  • the charge transferred with the detection charge packets Q RS is in fact proportional to the difference V S1 -V S2 between the read signals V S1 , V s2 , which is in turn a sinusoidal signal of frequency equal to the resonance frequency ⁇ R .
  • Signals derived from the voltage conversion of the detection charge packets Q RS are hence translated into base band as a result of the form of the read signals V S1 , V S2 applied to the detection mass 108. Consequently, it is not necessary to include circuits dedicated to the demodulation in the processing line 132'.
  • FIG. 8 A portion of a system 200 according to an embodiment of the present invention is illustrated in Figure 8 .
  • the system 200 can be used in devices, such as, for example, a palmtop computer (personal digital assistant, PDA), a laptop or portable computer, possibly with wireless capability, a cellphone, a messaging device, a digital music reader, a digital camera or other devices designed to process, store, transmit or receive information.
  • PDA personal digital assistant
  • the gyroscope 100 can be used in a digital camera for detecting movements and carrying out image stabilization.
  • the gyroscope 100 is included in a portable computer, a PDA, or a cellphone for detecting a free fall condition and activating a safety configuration.
  • the gyroscope 100 is included in a user interface activated by movement for computers or videogame consoles.
  • the system 200 may comprise a controller 210, an input/output (I/O) device 220 (for example, a keyboard or a screen), the gyroscope 100, a wireless interface 240 and a memory 260, either of a volatile or nonvolatile type, coupled to one another through a bus 250.
  • I/O input/output
  • a battery 280 can be used for supplying the system 200. It is to be noted that the scope of the present invention is not limited to embodiments having necessarily one or all of the devices listed.
  • the controller 210 may comprise, for example, one or more microprocessors, microcontrollers and the like.
  • the I/O device 220 may be used for generating a message.
  • the system 200 may use the wireless interface 240 for transmitting and receiving messages to and from a wireless-communication network with a radiofrequency (RF) signal.
  • wireless interface may comprise an antenna, a wireless transceiver, such as a dipole antenna, even though the scope of the present invention is not limited from this standpoint.
  • the I/O device 220 may supply a voltage that represents what is stored either in the form of digital outputs (if digital information has been stored) or in the form of analog information (if analog information has been stored).

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
EP07425075A 2007-02-13 2007-02-13 Gyroscope microélectromécanique avec un dispositif de détection à boucle d'asservissement ouverte et procédé de contrôle de gyroscope microélectromécanique Active EP1962054B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP07425075A EP1962054B1 (fr) 2007-02-13 2007-02-13 Gyroscope microélectromécanique avec un dispositif de détection à boucle d'asservissement ouverte et procédé de contrôle de gyroscope microélectromécanique
US12/030,747 US8037756B2 (en) 2007-02-13 2008-02-13 Microelectromechanical gyroscope with open loop reading device and control method
US13/242,769 US8800369B2 (en) 2007-02-13 2011-09-23 Microelectromechanical gyroscope with open loop reading device and control method
US14/332,211 US9217641B2 (en) 2007-02-13 2014-07-15 Microelectromechanical gyroscope with open loop reading device and control method

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Application Number Priority Date Filing Date Title
EP07425075A EP1962054B1 (fr) 2007-02-13 2007-02-13 Gyroscope microélectromécanique avec un dispositif de détection à boucle d'asservissement ouverte et procédé de contrôle de gyroscope microélectromécanique

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EP1962054A1 true EP1962054A1 (fr) 2008-08-27
EP1962054B1 EP1962054B1 (fr) 2011-07-20

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USRE45792E1 (en) 2007-09-11 2015-11-03 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with driving motion
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US20080190200A1 (en) 2008-08-14
US20120006114A1 (en) 2012-01-12
EP1962054B1 (fr) 2011-07-20
US8037756B2 (en) 2011-10-18
US20150308829A1 (en) 2015-10-29
US8800369B2 (en) 2014-08-12

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