EP1904861A2 - Ensemble carte a sondes comprenant un insert de sonde interchangeable - Google Patents

Ensemble carte a sondes comprenant un insert de sonde interchangeable

Info

Publication number
EP1904861A2
EP1904861A2 EP06774597A EP06774597A EP1904861A2 EP 1904861 A2 EP1904861 A2 EP 1904861A2 EP 06774597 A EP06774597 A EP 06774597A EP 06774597 A EP06774597 A EP 06774597A EP 1904861 A2 EP1904861 A2 EP 1904861A2
Authority
EP
European Patent Office
Prior art keywords
probe
probe card
insert
holder
card assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06774597A
Other languages
German (de)
English (en)
Other versions
EP1904861A4 (fr
Inventor
Benjamin N. Eldridge
Takao Saeki
Nobuhiro Kawamata
Carl V. Reynolds
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Priority claimed from PCT/US2006/026723 external-priority patent/WO2007008790A2/fr
Publication of EP1904861A2 publication Critical patent/EP1904861A2/fr
Publication of EP1904861A4 publication Critical patent/EP1904861A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

Definitions

  • Figure IA illustrates an exemplary prior art probing system used to test a device under test ("DUT") 112, which may be, for example, one or more dies (not shown) on a newly manufactured semiconductor wafer or other electronic devices (e.g., previously manufactured dies).
  • the probing system of Figure IA can include a test head 104 and a prober 102 (which is shown with a cut-away 126 to provide a partial view of the inside of the prober 102).
  • the DUT is placed on a moveable stage 106 as shown in Figure IA, and the stage 106 is moved such that input and/or output terminals of the DUT 112 are brought into contact with probes 124 of a probe card assembly 108, which as shown, is attached to a test head plate 121.
  • the probe card assembly 108 may be bolted or clamped to the test head plate 121 with the probe substrate 122 and probes 124 extending into the prober 102 through opening 132 (see Figure IB).
  • a cable 110 or other communication means connects a tester (not shown) with the test head 104.
  • the tester (not shown) generates test data to be written to the DUT 112, and the tester receives and evaluates response data generated by the DUT 112 in response to the test data.
  • the cable 110 can provide a plurality of communications channels (not shown) to and from the tester (not shown) for such test and response data.
  • the test head 104 and test head connectors 114 provide electrical connections that connect the tester channels (not shown) to the probe card assembly 108.
  • the probe card assembly 108 shown in Figure IA can include a wiring board 120 and a probe substrate 122.
  • the wiring board 120 provides electrical connections (not shown) from connectors 114 to a probe substrate 122, and the probe substrate provides electrical connections to the probes 124.
  • the probe card assembly 108 thus provides an interface that connects the tester communications channels (not shown) to the input and/or output terminals (not shown) of a DUT 112.
  • an insert holder can be configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested.
  • the insert holder can be attached to and detached from a probe card assembly, which provides an electrical interface to a tester that controls testing of the device. While attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. While detached from the probe card assembly, the insert holder can allow the probe insert to be removed and replaced with a new probe insert, which may be configured differently than the first probe insert.
  • the probe insert and probe holder can be integrally formed and comprise a single structure.
  • Figures IA and IB illustrate an exemplary prior art probing system for testing dies of a semiconductor wafer.
  • Figure 2 shows an exploded, perspective view of an exemplary probe card assembly according to some embodiments of the invention.
  • Figure 3A shows a top view of the probe card assembly of Figure 2 without the cover.
  • Figure 3B shows a bottom view of the probe card assembly of Figure 2.
  • Figure 3 C shows a side, cross-sectional view of the probe card assembly of Figure 2 without the cover.
  • Figure 4 illustrates exemplary adjustment of a planarity or orientation of the probes of the probe card assembly of Figure 2.
  • Figure 5 shows an exploded, perspective view of the probe head assembly of Figure 2.
  • Figure 6 A shows a top view of the probe head assembly of Figure 5.
  • Figure 6B shows a bottom view of the probe head assembly of Figure 5.
  • Figures 6C and 6D show side, cross-sectional views of the probe head assembly of Figure 5.
  • Figure 7 shows an exploded, perspective view of an attachment tool with a cover but without an insert holder according to some embodiments of the invention.
  • Figure 8 A shows a top view of the attachment tool of Figure 7 with an insert holder but without the cover.
  • Figure 8B shows a bottom view of the attachment tool of Figures 8A and 8B.
  • Figures 8C and 8D show side, cross-sectional views of the attachment tool of Figure 8A.
  • Figures 9 A, 9B, and 9C illustrate exemplary changing of an insert according to some embodiments of the invention.
  • Figure 10 illustrates an exemplary DUT in the form of a semiconductor die.
  • Figure 11 illustrates in schematic format an exemplary configuration of the probe card assembly of Figure 2 for testing the DUT of Figure 10 according to some embodiments of the invention.
  • Figure 12A illustrates a top view of a probe insert configured for testing the DUT of Figure 10 according to some embodiments of the invention.
  • Figure 12B illustrates a bottom view of the probe insert of Figure 12 A.
  • Figure 13 illustrates another exemplary DUT in the form of a semiconductor die.
  • Figure 14A illustrates a top view of a probe insert configured for testing the DUT of
  • FIG. 13 according to some embodiments of the invention.
  • Figure 14B illustrates a bottom view of the probe insert of Figure 14A.
  • Figure 15 illustrates in schematic format an exemplary reconfiguration of the probe card assembly of Figure 2 for testing the DUT of Figure 13 according to some embodiments of the invention.
  • Figure 16A illustrates a top view of another exemplary probe card assembly according to some embodiments of the invention.
  • Figure 16B illustrates a side, cross-sectional view of the probe card assembly of Figure 16A.
  • Figure 17A illustrates a top view of yet another exemplary probe card assembly according to some embodiments of the invention.
  • Figure 17B illustrates a side, cross-sectional view of the probe card assembly of Figure 17A.
  • Figure 18 illustrates a side, cross-sectional view of still another exemplary probe card assembly according to some embodiments of the invention.
  • Figure 19 illustrates a side, cross-sectional view of another exemplary probe card assembly according to some embodiments of the invention.
  • Figure 20 illustrates a side, cross-sectional view of still another exemplary probe card assembly according to some embodiments of the invention.
  • Figures 21-24 illustrate exemplary shielded signal traces according to some embodiments of the invention.
  • Figure 25 illustrate an exemplary shielded wire according to some embodiments of the invention.
  • Figures 2 and 3A-3C illustrate an exemplary probe card assembly 200 that may be used in a prober or other system for testing electronic devices according to some embodiments of the invention.
  • probe card assembly 200 may be used in place of probe card 108 in a test system that can include a prober like prober 102 of Figures IA and IB.
  • probe card assembly 200 will be discussed herein as used in prober 102.
  • Probe card assembly 200 may, however, be used in any prober for probing semiconductor wafers or singulated dies or any other system for probing a device to test, monitor, or otherwise operate the device.
  • Figure 2 shows an exploded, perspective view of the probe card assembly 200
  • Figure 3A shows a top view
  • Figure 3B shows a bottom view
  • Figure 3C shows a side cross-sectional view of probe card assembly 200.
  • the probe card assembly 200 can include a wiring substrate 202, a stiffener plate 204, and an adjustment plate 206 to which a probe head assembly 209 can be attached.
  • the probe card assembly 200 may also include a cover 282, which is shown in Figure 2 but, for purposes of clarity and ease of illustration, is not shown in Figures 3A-3C.
  • the cover 282 can be fastened to the wiring substrate 202 with screws 240 that pass through holes 272 in cover 282 and thread into spacers 242 and with screws 246 that pass through holes 280 in the wiring substrate 202 and also thread into spacers 242.
  • one function of the probe card assembly 200 can be to provide an electrical interface between communications channels to and from the tester and the input and/or output terminals (not shown) of a DUT such as 112 in Figure IA.
  • the term "DUT" can be one or more dies of an unsingulated semiconductor wafer, one or more semiconductor dies singulated from a wafer (packaged or unpackaged), one or more dies of an array of singulated semiconductor dies disposed in a carrier or other holding device, one or more multi-die electronics modules, one or more printed circuit boards, and/or any other type of electronic device or devices.
  • the tester (not shown) can be configured to generate test data to be written to the DUT 112 and to receive and evaluate response data generated by the DUT 112 in response to the test data.
  • Wiring substrate 202 can include channel connectors 208 for making electrical connections with the communications channels to and from the tester (not shown).
  • channel connectors 208 may be configured to make electrical connections with the test head 104 of Figures IA and IB, which in turn can be connected to a tester (not shown) through cable 110.
  • the cable 110 and test head 104 provide communications channels (not shown) to and from the tester (not shown) for test data, response data, power, ground, and/or other electrical signals.
  • the channel connectors 208 shown in Figures 2, 3A and 3C may be zero-insertion- force ("ZIF") connectors that include multiple pin-type connectors (not shown) such that each channel connector 208 connects electrically to multiple tester channels.
  • ZIF zero-insertion- force
  • each channel connector 208 can be connected to four tester channels (not shown), and each of those four electrical connections can be in turn connected to one of four electrically conductive traces 210..
  • electrically conductive wires 398 provide electrical connections from the traces 210 to conductive pins 220, which as will be seen, can be electrically connected to probes 236. (Only two wires 398 are shown in Figures 3A and 3C for simplicity and ease of illustration. Depending on the application, a sufficient number of wires 398 would typically be used to electrically connect most or all of the traces 210 to most or all of the pins 220.) Opening 216 in the adjustment plate 206 provides access to pins 220.
  • ZIF connectors 208 is optional, and indeed, any type structure for making electrical connections may be used.
  • channel connectors 208 may be conductive pads or terminals configured to engage electrically conductive pogo pins from the test head 104.
  • the composition of the wiring substrate 202 is not important and any substrate material may be used.
  • the wiring substrate 202 may be a printed circuit board.
  • the wiring substrate 202 may comprise a ceramic material, which may provide greater strength and resistance to bending or warping than one or more printed circuit board materials.
  • the wiring substrate 202 may be configured to attach to prober 102.
  • the wiring substrate 202 may be configured to be bolted or clamped to the test head plate 121 of prober 102 (see Figures IA and IB).
  • the wiring substrate 202 may include holes (not shown) along its periphery that correspond to holes 134 of the test head plate 121. Those holes may receive bolts (not shown) that bolt the wiring substrate 202 to the test head plate 121.
  • the stiffener can be configured to provide mechanical strength to the probe card assembly 200.
  • mechanical strength may be utilized to resist bending, warping, or other movement (e.g., horizontal or radial expansion or contraction) of the wiring substrate 202 and/or other parts of the probe card assembly 200 that may be caused by mechanical loads, thermal gradients, etc.
  • Such bending, warping, or other movement may move the probes 236 from their intended positions, which may cause one or more of the probes to press with too much force against the DUT 112, which may damage the probes 236 and/or the DUT 112.
  • the stiffener 204 may be composed of any material or materials that are sturdy and/or provide the needed mechanical strength for a particular application of the probe card assembly 200.
  • the stiffener 204 may be a metal plate.
  • Thermal gradients across the probe card assembly 200 may arise while a DUT 112 is tested at lowered or elevated temperatures.
  • stage 106 cools or heats the DUT 112 during testing.
  • Such cooling or heating of the DUT 112 can cause thermal gradients across the probe card assembly 200 in which the temperature on the probe-side of the probe card assembly 200 is cooler or hotter than the temperature on the channel- connector (208) side of the probe card assembly 200.
  • the stiffener plate 204 as well as the use of a ceramic wiring substrate 202 are examples of techniques that may be used to counteract the effects of such thermally induced bending or warping.
  • the exemplary stiffener 204 can be attached to the wiring substrate 202 and provides mechanical strength directly to the wiring substrate 202.
  • the stiffener 204 rather than the wiring substrate 202 — may be configured to be attached to the test head plate 121 of prober 102, in which case the stiffener 204 may be attached directly to the test head plate 121 using any of the means discussed above for attaching the wiring substrate 202 to the test head plate 121.
  • An example of a stiffener 204 configured to be attached to a test head plate 121 of a prober 102 is disclosed and discussed in U.S. Provisional Patent Application 60/594,562, which was filed on April 21, 2005 with a docket no. P226-PRV. Turning now to the adjustment plate 206, in the probe card assembly 200 shown in
  • the wiring substrate 202 and/or stiffener plate 204 as well as the probe head assembly 209 can be attached to the adjustment plate 206, which may be made of any sturdy material.
  • the adjustment plate 206 may be metal, ceramic, etc. If the adjustment plate 206 is made of metal or other materials that resist bending or warping, attaching the probe head assembly 209 — and thus the probes 236 — directly to the adjustment plate helps keep the probes 236 in position even if mechanical loads or thermal gradients cause bending or warping of the wiring substrate 202 or other parts of the probe card assembly 200, as discussed above.
  • the adjustment plate 206 also can allow a planarity or orientation of the probes 236 to be adjusted.
  • probe head assembly 209 a primary purpose of which can be to hold a probe insert 238 (which is not visible in Figures 2 and 3 A but is visible in Figures 3B and 3C) that has electrically conductive probes 236 for contacting and making electrical connections with input and/or output terminals (not shown) of a DUT 112 (see Figure IA), which as discussed above, may be one or more dies of an unsingulated semiconductor wafer, one or more singulated dies (packaged or unpackaged), an electronics module, or any other electronics device or other device to be tested.
  • the probe head assembly 209 can be disposed within an opening 256 in the wiring substrate 202 and a similar opening 254 in the stiffener 204 and attached to the adjustment plate 206 by bolts 232 and nuts 290. As shown, bolts 232 extend from the top of the probe head assembly 209, pass through holes 298 in the adjustment plate 206, and thread into nuts 290. In the exemplary embodiment shown in Figures 2 and 3A-3C, the probe head assembly 209 can be attached directly to the adjustment plate 206 rather than the stiffener 204 or wiring substrate 202. As discussed above, attaching the probe head assembly 209 directly to the adjustment plate 206 may provide greater mechanical strength and stability to the probe head assembly 209 than could be achieved if the probe head assembly 209 were attached directly to the wiring substrate 202.
  • jacking screws 276 can thread into adjustment plate 206 and abut against stiffener 204.
  • rotating a jacking screw 276 in one direction can cause jacking screw 276 to advance toward stiffener 204 and push stiffener 204 away from adjustment plate 206.
  • Rotating jacking screw 276 in the opposite direction can retract jacking screw 276 away from stiffener 204, allowing stiffener 206 to move toward adjustment plate 206.
  • Locking screws 214 pass through holes 274 in adjustment plate 206 and thread into stiffener 204. While locking screws 214 are sufficiently loosened, jacking screws 214 may be advanced toward stiffener 204 or retracted away from stiffener 204 as discussed above.
  • Tightening locking screws 214 that is, threading locking screws 214 into stiffener 204 — however, pulls stiffener 204 as close to adjustment plate 206 as jacking screws 276 allow and holds stiffener 204 in that position with respect to adjustment plate 206.
  • Jacking screws 276 and locking screws 214 thus provide the ability to adjust the planarity or orientation of the adjustment plate 206 with respect to the wiring substrate 204.
  • Holes 248 in cover 282 provide access to the jacking screws 276 and locking screws 214.
  • four pairs of jacking screws 276 and locking screws 214 are shown in the probe card assembly 200 (see Figures 2 and 3A), fewer or more jacking screws 276 and locking screws 214 may be used.
  • FIG 4 which shows a simplified block diagram of probe card assembly 200 attached to prober head plate 121 of the prober 102 of Figures IA and IB
  • the probe insert which is not separately shown in Figure 4 but, as discussed above, can be part of the probe head assembly 209 with probes 236 is attached to the adjustment plate 206
  • adjusting the planarity or orientation of the adjustment plate 206 e.g., from orientation 290 to 290' in Figure 4
  • the planarity or orientation of the probes 236 e.g., from orientation 292 to 292' in Figure 4
  • the planarity or orientation of the probes 236 may be adjusted to correspond to the planarity or orientation of the DUT (e.g., DUT 112 disposed on stage 106 in Figure IA).
  • Figures 5 and 6A-6D show details of an exemplary implementation of the probe head assembly 209 according to some embodiments of the invention. (The depiction shown in Figures 5 and 6A-6D may not necessarily be to scale.)
  • Figure 5 shows an exploded, perspective view
  • Figure 6A shows a top view
  • Figure 6B shows a bottom view
  • Figures 6C and 6D show side, cross-sectional views of probe head assembly 209.
  • the probe head assembly 209 can include an insert holder 230 that holds a probe insert 238 with probes 236 for contacting the input and/or output terminals (including power and ground terminals) of the DUT 112, a pin holder 218, and a spacer 252.
  • the insert holder 230 can include a graduated opening 234 with ledges 306.
  • the probe insert 238 can fit into a top of opening 234 and rest on ledges 306, and the probes 236 attached to the insert 238 can extend through a bottom of opening 234, as shown most clearly in Figures 6C and 6D.
  • Insert holder 230 can also include recesses 237, which as shown in Figures 6B and 6C, provide access to set screws 239.
  • set screws 239 thread through the insert holder 230 into the opening 234 and against the probe insert 238. Rotating set screws 239 in one direction tightens screws 239 against probe insert 238, which holds probe insert 238 in place within insert holder 230.
  • Insert holder 230 may be formed of any suitable material, including without limitation metal, ceramic, etc.
  • Probe insert 238 can include probes 236 attached to one side. Insert 238 can also include electrically conductive pads 602 disposed on the opposite side from the probes 236. Electrical connections (not shown) connect ones of the pads 602 with ones of the probes 236.
  • the insert 238 may comprise any suitable material, including without limitation ceramic, printed circuit board material, etc.
  • Probes 236 may be resilient, conductive structures.
  • suitable probes 236 include composite structures formed of a core wire bonded to a conductive terminal (not shown) on probe insert 238 that can be over coated with a resilient material as described in U.S. Patent No. 5,476,211, U.S. Patent No. 5,917,707, and U.S. Patent No. 6,336,269.
  • Probes 236 may alternatively be lithographically formed structures, such as the spring elements disclosed in U.S. Patent No. 5,994,152, U.S. Patent No. 6,033,935, U.S. Patent No. 6,255,126, U.S. Patent Application Publication No. 2001/0044225, and U.S. Patent Application Publication No. 2001/0012739.
  • probes 236 include conductive pogo pins, bumps, studs, stamped springs, needles, buckling beams, etc.
  • Pin holder 218 provides through holes 222 for a plurality of electrically conductive pins 220. The pins 220 pass through holes 222 and make electrical connections with pads 602 on probe insert 238.
  • Pins 220 may be spring loaded to provide spring forces against the pads 602 and thereby maintain electrical connections with the pads 602.
  • pins 220 may be pogo pins configured with a spring bias away from the pin holder 218 and toward the probe insert 238.
  • Pin holder 218 may comprise any suitable material, including without limitation metal, ceramic, printed circuit board material, etc.
  • holes 222 can include an electrically insulating material.
  • Spacer 252 can include an opening 216 into which pins 220 extend. Spacer 252 may comprise any suitable material, including without limitation metal, ceramic, printed circuit board material, etc.
  • bolts 232 extend through holes 402 and 502 in the pin holder 218 and spacer 252, respectively, and out of the top of the probe head assembly 209.
  • the portions of bolts 232 that extend out of the top of the probe head assembly 209 pass through holes 298 in the adjustment plate and thread into corresponding nuts 290, thus attaching the pin holder 218 and spacer 252 to the adjustment plate 206.
  • bolts 470 pass through holes 302 in the insert holder 230 and thread into the pin holder 218, thus attaching the insert holder 230 to the pin holder 218 and thus also to the spacer 252 and adjustment plate 206.
  • counter-sink holes 460 in pin holder 218 accommodate the heads of bolts 232, allowing insert holder 230 to be attached flush against the pin holder 218.
  • the insert 238 of probe card assembly 200 can be removed from probe card assembly 200 by simply removing bolts 470, the removal of which detaches the insert holder 230 from the pin holder 218 and thus from the probe card assembly 200.
  • the probe insert 238 may be removed from the insert holder 230 and replaced with a new insert 238*.
  • the insert holder 230 can be reattached to the probe card assembly 200 by passing bolts 470 through holes 302 in the insert holder 230 and threading bolts 470 into the pin holder 218.
  • a new insert holder 230' with a new insert 238' may be attached to pin holder 218 using bolts 470.
  • insert holder 230 and probe insert 238 need not be separate and distinct structural entities.
  • insert holder 230 may be solid and thus lack opening 234.
  • Terminals 602 may be disposed on one side of insert holder 230 and probes 236 disposed on the other side with electrical connections between terminals 602 and probes 236 through insert holder 230. In such a case, probe sets can be changed by changing insert holders 230 rather than changing probe inserts.
  • Figures 7 and 8A-8D illustrate an exemplary attachment tool 902 that facilitates attaching and detaching insert holder 230 to and from the probe card assembly 200 according to some embodiments of the invention.
  • Figure 7 shows an exploded, perspective view of the attachment tool 902 with an optional cover 904, and
  • Figure 8A shows a top view
  • Figure 8B shows a bottom view
  • Figures 8C and 8D show side, cross-sectional views of the attachment tool 902 (without the cover 904).
  • the attachment tool 902 can comprise a substrate 906 that has a well 908.
  • the well 908 can be sized to receive an insert holder, like insert holder 230.
  • set screws 916 thread into threaded holes 914 in the substrate 906 and into threaded holes 480 in the insert holder 230.
  • Advancing set screws 916 through hole 914 and into hole 480 holds the insert holder 230 securely in well 908.
  • Loosening set screws 916 such that the screws 916 retract from holes 480, releases the insert holder 230, allowing the insert holder 230 to be removed from well 908.
  • the well 908 can include extension 1004 that provides space 1006 for the probes 236 attached to the insert 238. Holes 912 in the substrate 906 align with holes 302 in the insert holder 230 and provide openings for a screw driver (not shown) or other tool for accessing screws 470, which as discussed above, attach the insert holder 230 to the pin holder 218. Removable cover 904 may be screwed (not shown), bolted (not shown), clamped (not shown), or otherwise removably attached to the substrate 906.
  • Figures 9A, 9B, and 9C illustrate an exemplary process for changing insert 238 on probe card assembly 200, which is shown in simplified block format.
  • adjustment plate 206, stiffener 204, wiring substrate 202, and probe head assembly 209 although depicted in block format, can be as discussed above and can be assembled as discussed above.
  • screws 470 attach the insert holder 230 to the pin holder 218 (which can be attached to the spacer 252 (not shown in Figure 9A) and the adjustment plate 206 by bolts 232 and nuts 290 (not shown in Figure 9A) as discussed above.
  • an insert 238 can be disposed in insert holder 230 as generally discussed above.
  • insert holder 230 may be removed from pin holder 218 by moving 1102 attachment tool 902 (which is also shown in simplified block format in Figure 9B but can include the features described above with respect to Figures 7 and 8A-8D) such that the insert holder 230 can be disposed in the well 908 of the attachment tool 902.
  • Set screws 916 can then be tightened as discussed above to secure the insert holder 230 in the well 908.
  • a tool such as a screw driver (not shown) can then be inserted through holes 912 in attachment tool 902 to engage screws 470, which can then be loosened and removed, which detaches the insert holder 230 from pin holder 218.
  • the attachment tool 902 now with insert holder 230 in its well 908, can be moved 1104 away from the probe card assembly 200. Cover 904 may then be placed on the attachment tool 902 to protect the probe insert 238, and the probe insert 238 may thus be safely stored or transported to a repair facility.
  • a replacement insert holder 230' that holds a replacement insert 238' may be attached to the probe card assembly 200 in similar fashion. That is, another attachment tool 902' in whose well 908' is secured the replacement insert holder 230', can be moved 1102' into engagement with the pin holder 218 and holes 302 (not shown in Figure 9C) in the insert holder 230' can be aligned with corresponding threaded holes (not shown) in the pin holder 218.
  • a tool such as a screw driver (not shown) can then be inserted through holes 912' in attachment tool 902' to drive screws 470 through holes 302 in the new insert holder 230' and thread screws 470 into the pin holder 218 (as shown in Figure 6C), attaching the new insert holder 230' to the pin holder 218.
  • set screws 916 can be loosened, releasing the insert holder 230', and the attachment tool 902' can be moved 1104' away from the insert holder 230', which can now be attached to the pin holder 218.
  • Figure 10 illustrates a semiconductor die 1050, which can be an exemplary DUT to be tested using probe card assembly 200.
  • a DUT include, without limitation, a packaged die, a test structure or other feature on a semiconductor wafer, etc.
  • die 1050 can include eight input and/or output terminals 1052 for receiving input signals, power, and ground into the die 1050, and for outputting signals from the die 1050.
  • terminals 1052 can be arranged on the die 1050 in two rows with four terminals 1052 in each row.
  • Figure 11 illustrates in simplified schematic format, a configuration of probe card assembly 200 for testing die 1050
  • Figures 12A and 12B illustrate a probe insert 1138 for testing die 1050.
  • four channel connectors 208 of probe card assembly 200 can be connected to eight tester channels 1150, which as discussed above, can be for providing test data, power, and ground from the tester (not shown) to die 1050 and providing response data generated by the die 1050 in response to the test data to the tester (not shown).
  • connections to the tester channels 1050 can be provided through the connectors 208 to traces 210, and wires 398 electrically connect traces 210 to conductive pins 220.
  • Probe insert 1138 can be designed to be placed in insert holder 230 and, while insert holder 230 is bolted 470 to pin holder 218, pads 1162 are pressed against and make electrical connections with pins 220 as discussed above with respect to Figure 2.
  • Figure 12A shows a top view of insert 1138, and pads 1162 may be generally similar to pads 602 of Figure 5.
  • the pads 1162 can be electrically connected to probes 1136, which as shown in Figure 12B (which shows a bottom view of insert 1138) can be arranged in a layout that corresponds to the terminals 1052 of die 1050. That is, probes 1136 can be positioned and configured to correspond to and contact terminals 1052 of die 1050.
  • probe card assembly 200 can be configured to provide an electrical interface between tester channels 1150 and the terminals 1052 of die 1050. That is, connectors 208, traces 210, wires 398, pins 220, pads 1162, and probes 1136 provide electrical paths between tester channels 1150 and die 1050 pads 1052.
  • wires 398 associate corresponding traces 210 and pins 220 so that a tester channel 1150 to which a particular signal is assigned can be connected to the terminal 1052 of die 1050 that corresponds to that signal.
  • the channel 1150 that delivers power must be connected to a probe 236 that is positioned to contact the power terminal 1052 of die 1050.
  • the channel 1150 that delivers a particular control signal (e.g., a write enable signal) must be connected to a probe 236 that contacts the terminal 1052 of die 1050 that is designed to receive that control signal (e.g., the write enable terminal 1052 of die 1050).
  • a particular control signal e.g., a write enable signal
  • Figure 13 illustrates another die 1060 that is to be tested and thus represents a second DUT with a second pattern of terminals to be contacted.
  • die 1060 can include six input and/or output terminals 1062 arranged in a single row.
  • Figure 14B shows a bottom view of a probe insert 1064 having six probes 1066 arranged in a single row to correspond to and contact pads 1062 of die 1060.
  • the top side of insert 1064 which is shown in Figure 14A, can be configured the same as insert 1138.
  • insert 1064 can include eight pads 1168 arranged so that, while insert 1064 is in insert holder 230 and insert holder 230 can be attached by bolts 470 to pin holder 218, pads 1168 are pressed against and make electrical connections with pins 220. Because insert 1064 can include only six probes 1066, only six of the eight pads 1168 are connected to probes 1066 and the other two pads 1168 are not used.
  • the probe card assembly 200 configured as discussed above with respect to Figures 11, 12A, and 12B to contact die 1050 may be easily reconfigured to contact die 1060 by simply replacing insert 1138 with insert 1064 as discussed above with respect to 9A-9C.
  • wiring 398 may also be reconfigured. For example, as shown in Figure 15, because die 1060 has only six terminals 1062, only six of the eight tester channels 1150 are needed to test die 1060. Wires 398 may thus be reconfigured to connect only six tester channels 1150 to only six pins 220 that correspond to the six pads 1162 on insert 1064 that are connected to the six probes 1066 of insert 1064. As discussed above, the wires 398 connect tester channels 1050 with probes 236 to match channel 1050 signals with terminal 1062 signals.
  • the probe card assembly 200 can be used to test both die 1050 and die 1060 despite that fact that the configuration, layout, position, and signal assignments of the terminals 1052 of die 1050 are different than for the terminals 1062 of die 1060. Indeed, the wiring substrate 202, stiffener 204, adjustment plate 206, cover 282, and all of the probe head assembly except the probe insert 238 may be used to test both dies 1050, 1060. Only the probe insert 238 and the wires 398 need be changed. Of course, the ability to reuse most of the probe card assembly 200 in testing dies of different configurations may provide cost and time savings as compared to redesigning and manufacturing a completely new probe card assembly for each new die configuration to be tested.
  • Figures 10-14B are exemplary only. Many variations are possible. For example, the number and layout of terminals on a die and the number and layout of tester channels is exemplary only and provided for purposes of example and ease of discussion. Moreover, the depictions in Figures 10-14B may not be to scale.
  • probe insert 238 may be changed in probe card assembly 200 also facilitates repair of the probe card assembly 200. Failure of one or more probes 236 can be a problem that gives rise to the need to repair a probe card assembly. If a probe 236 ⁇ of probe card assembly 200 fails (e.g., breaks), the probe insert 238 may be removed and replaced with a new probe insert 238. The removed probe insert 238 with the broken probe 236 may then be taken to a repair facility where the probe is fixed or replaced. In the mean time, however, the probe card assembly 200 — now with the new probe insert 238 — may continue to be used to test DUTs. There is no need to transport the entire probe card assembly 200 to the repair facility and thus take the probe card assembly 200 out of use during the time required to repair the probe 236.
  • Figures 16 A, 16B, 17A, 17B, and 18-20 illustrate other exemplary probe card assemblies having probe inserts that can be removed and replaced according to some embodiments of the invention.
  • Figures 16A and 16B illustrate another exemplary probe card assembly 1200 according to some embodiments of the invention.
  • Figure 16A illustrates a top view with a cutout 1290 in cover 1250. Cutout 1290 reveals pads 1254.
  • Figure 16B illustrates a side- cross-sectional view of probe card assembly 1200.
  • probe card assembly 1200 can include a wiring substrate 1202 with channel connectors 1208 and an insert 1238 with probes 1236, all of which may be generally similar to like named elements of probe card assembly 200.
  • electrically conductive traces 1210 which pass through passages 1270 in cover 1250 as shown in Figure 16B, provide electrical connections for data signals, control signals, and other input and/or output (e.g., power and ground) from the channel connectors 1208 to electrically conductive pads 1254 disposed on an upper surface of the wiring substrate 1202. Electrically conductive vias 1260 electrically connect pads 1254 with pads 1256 disposed on a lower surface of the wiring substrate 1202.
  • Insert 1238 can be disposed on ledges 1266 of an insert holder 1230.
  • Bolt 1264 passes through holes (not shown) in insert holder 1230, wiring substrate 1202, and cover 1250 to engage nuts 1252. While the insert holder 1230 is bolted to the wiring substrate 1202 by bolts 1264 and nuts 1252 as shown in Figure 16B, electrically conductive pads 1258 on the insert 1238 are held against, and thus engage, pads 1256 and thereby form electrical connections with the pads 1256 on the lower surface of the wiring substrate 1202.
  • the pads 1258 on the insert 1238 can be electrically connected to the probes 1236 by electrically conductive vias 1262 as shown in Figure 16B.
  • Insert 1238 can be replaced by loosening bolts 1264 and detaching the insert holder 1230 from the wiring substrate 1202. Once the insert holder 1230 is detached from the wiring substrate 1202, the insert 1238 may be removed from the insert holder 1230 and replaced with a new insert 1238'. The insert holder 1230 may then be reattached to the wiring substrate 1202 with bolts 1264, connecting the new insert 1238' to the pads 1256 on the lower surface of the wiring substrate 1202 and thus also to channel connectors 1208.
  • Figures 17A and 17B show yet another exemplary probe card assembly 1300, which can be generally similar to probe card assembly 1200, and in fact, like numbered elements in probe card assembly 1200 and probe card assembly 1300 are the same.
  • electrically conductive vias 1360 electrically connect the channel connectors 1208 with electrically conductive traces 1310 disposed along the lower surface of the wiring substrate 1202.
  • Traces 1310 pass through passages 1370 in the insert holder 1230 and connect to the conductive pads 1256 on the lower surface of the wiring board 1202.
  • Figure 18 illustrates a side cross-sectional view of yet another exemplary probe card assembly 1400, which can be generally similar to probe card assemblies 1200 and 1300 (like numbered elements are the same) except that channel connectors 1208 are electrically connected to pads 1256 on the lower surface of the wiring substrate 1202 by conductive paths 1410 that comprise electrically conductive vias and traces embedded within wiring substrate 1202.
  • Figure 19 illustrates an additional exemplary probe card assembly 1500, which can include channel connectors 1208 and probes 1236 that are the same as like number elements in probe card assemblies 1200, 1300, and 1400.
  • wiring substrate 1502 of probe card assembly 1500 can include an opening 1514 into which fits insert 1538.
  • insert 1538 fits into opening 1514 in the wiring substrate 1502 such that probes 1536 extend out of the opening 1514.
  • Electrically conductive pads 1558 disposed on shoulders 1520 of the insert 1538 rest on, and thereby make electrical connections with, electrically conductive pads 1556 on the wiring substrate 1502.
  • electrical paths 1510 comprising conductive vias and traces disposed within wiring substrate 1502 electrically connect channel connectors 1208 to pads 1556
  • electrical paths 1512 comprising conductive vias and traces disposed within the insert 1538 electrically connect pads 1558 with probes 1236.
  • Brackets 1504 which can be bolted to the wiring substrate 1502 by bolts 1264 and nuts 1252, hold the insert 1538 in place against the wiring substrate 1502.
  • Insert 1538 can be replaced by loosening bolts 1264 and removing insert 1238. A new insert 1538' may then be disposed within opening 1514 in the wiring substrate 1502, after which bolts 1264 can be tightened to hold the new insert 1538' in place.
  • Figure 20 illustrates still another exemplary probe card assembly 1600, which can be generally similar to probe card assembly 1500 (like numbered elements are the same). In probe card assembly 1600, however, electrically conductive vias 1604 electrically connect probes 1236 with electrically conductive pads 1604 on insert 1638, and electrically conductive wires 1602 electrically connect pads 1604 with channel connectors 1208.
  • the electrical connection between pads 1256 and 1258 may be formed by including resilient electrical connectors (e.g., pogo pins, conductive elastomers, conductive fuzz buttons, conductive springs, wires each bonded at one end to a pad and having a compliant deformity that the other end, compliant bellows contacts, etc.) (not shown) between pads 1256 and 1258.
  • resilient electrical connectors e.g., pogo pins, conductive elastomers, conductive fuzz buttons, conductive springs, wires each bonded at one end to a pad and having a compliant deformity that the other end, compliant bellows contacts, etc.
  • the electrical connection between pad pairs 1558 and 1556 may be made using resilient electrical connectors (e.g., pogo pins, conductive elastomers, conductive fuzz buttons, conductive springs, etc.) (not shown).
  • Figure 21 illustrates a shielded trace 1700 that may be used in place of any of the electrically conductive traces and/or vias shown in any of exemplary probe card assemblies 200, 1200, 1300, 1400, 1500, or 1600 disclosed herein.
  • trace 1700 can include an electrically conductive signal trace 1706 for carrying a data or control signal.
  • Electrically conductive planes 1702 which may be connected to ground, a guard potential, or a voltage source (not shown), electrically shield the signal trace 1706.
  • Insulating material 1704 electrically insulates the signal trace 1706 from the planes 1702.
  • multiple signal traces 1706 may be disposed between plates 1702.
  • grounded or guard potential traces 2202, 2204 may be disposed within insulating material 1704 on either side of signal trace 1706 to further shield signal trace 1706 as shown in Figure 22 (which illustrates shielded trace 1700').
  • Figures 23 and 24 illustrate other exemplary shielded traces 2300, 2400 that may be used in place of any of the electrically conductive traces and/or vias shown in any of exemplary probe card assemblies 200, 1200, 1300, 1400, 1500, or 1600 disclosed herein.
  • a signal trace 2306 (which may be like signal trace 1706) can be embedded within insulating material 2308, which in turn, can be surrounded by conductive plate 2302 and conductive box structure 2310, shielding signal trace 2306.
  • Conductive box 2310, insulating material 2308, and signal trace 2306 may be embedded in a substrate 2304, which may comprise a printed circuit board.
  • Figure 24 shows a variation of trace 2300 of Figure 23.
  • signal trace 2306 which can be surrounded by insulating material 2308, can be shielded by a conductive box structure 2404 and a conductive covering structure 2402.
  • FIG 25 illustrates a shielded wire 1800 that may be used in place of any of the electrically conductive wires shown in any of exemplary probe card assemblies 200, 1200, 1300, 1400, 1500, or 1600 disclosed herein.
  • shielded wire 1800 can include an electrically conductive signal line 1806 for carrying a data or control signal.
  • An electrical conductor 1802 which may be connected to ground or a guard potential, surrounds the signal line 1806 and thus electrically shields the signal line 1806.
  • Insulating material 1804 electrically insulates the signal line 1806 from conductor 1802.
  • a protective jacket 1808 protects the wire 1800.
  • Shielded wire 1800 may be, for example, a coaxial cable.
  • shielded traces 1700, 1700', 2300, 2400 and/or shielded wires 1800 can be increased.
  • the use of shielded traces 1700, 1700', 2300, 2400 and/or wires 1800 increases the maximum frequency at which the tests can be run.
  • the use of shielded traces 1700, 1700', 2300, 2400 and/or shielded and/or guard potential wires 1800 also increases sensitivity to certain parametric tests, such as the detection of leakage current in the DUT.
  • the use of shield traces 1700, 1700', 2300, 2400 and/or wires 1800 can allow for the detection of very small leakage currents.
  • the specific configurations of the embodiments shown herein may be modified by, for example, modifying elements of the embodiments, adding additional elements, or deleting elements.
  • the probe card assembly 200 of Figure 2 may be configured without stiffener 204.
  • Still further modifications include configuring probe card assembly 200 to allow multiple probe inserts (e.g., each like probe insert 238) to be attached to the probe card assembly and providing mechanisms that allow the position, orientation, and /or location of each such probe insert to be adjusted independently of the other probe inserts.
  • a probe insert e.g., like probe insert 238) can be configured to contact more than one DUT or less than an entire DUT.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

L'invention concerne un ensemble carte à sondes qui peut comprendre un support d'insert configuré pour maintenir un insert de sonde, pouvant comprendre des sondes disposées selon une configuration particulière destinées à sonder un dispositif à l'essai. L'ensemble carte à sondes permet de fournir une interface électrique à un testeur qui contrôle l'essai du dispositif à l'essai et, aussi longtemps qu'il est attaché à l'ensemble carte à sondes, le support d'insert maintient l'insert de sonde de telle manière que l'insert de sonde est électriquement relié aux tracés électriques, à l'intérieur de l'ensemble carte à sondes, qui font partie de l'interface avec le dispositif d'essai. On peut remplacer l'insert de sonde de l'ensemble carte à sondes en détachant le support d'insert, en remplaçant l'insert de sonde par un nouvel insert de sonde, et en rattachant le support de sonde à l'ensemble carte à sondes. L'insert de sonde et le support de sonde peuvent être formés solidaires et comprendre une structure unique que l'on peut détacher d'un ensemble carte à sondes et remplacer par un insert et support de sonde différent.
EP06774597.6A 2005-07-08 2006-07-07 Ensemble carte a sondes comprenant un insert de sonde interchangeable Withdrawn EP1904861A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US59548005P 2005-07-08 2005-07-08
US36027005A 2005-12-21 2005-12-21
PCT/US2006/026723 WO2007008790A2 (fr) 2005-07-08 2006-07-07 Ensemble carte a sondes comprenant un insert de sonde interchangeable

Publications (2)

Publication Number Publication Date
EP1904861A2 true EP1904861A2 (fr) 2008-04-02
EP1904861A4 EP1904861A4 (fr) 2013-05-29

Family

ID=39126467

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06774597.6A Withdrawn EP1904861A4 (fr) 2005-07-08 2006-07-07 Ensemble carte a sondes comprenant un insert de sonde interchangeable

Country Status (3)

Country Link
EP (1) EP1904861A4 (fr)
JP (1) JP2009500633A (fr)
KR (1) KR101304031B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010125605A1 (fr) * 2009-04-28 2010-11-04 株式会社アドバンテスト Unité de tableau de connexions et appareil de test
KR101897008B1 (ko) * 2012-03-08 2018-09-12 주식회사 코리아 인스트루먼트 프로브 카드
JP6220596B2 (ja) 2013-08-01 2017-10-25 東京エレクトロン株式会社 プローバ
TW201606314A (zh) * 2014-08-14 2016-02-16 漢民科技股份有限公司 台北巿大安區敦化南路2 段38 號14 樓 探針卡結構及其組裝與更換方法
KR102393600B1 (ko) * 2020-09-11 2022-05-03 스테코 주식회사 프로브 카드

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5656943A (en) * 1995-10-30 1997-08-12 Motorola, Inc. Apparatus for forming a test stack for semiconductor wafer probing and method for using the same
US20020118029A1 (en) * 1999-05-14 2002-08-29 Rikihito Yamasaka Probe card and contactor
US20030099097A1 (en) * 2001-11-27 2003-05-29 Sammy Mok Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs
US20040108848A1 (en) * 2002-03-21 2004-06-10 Jacobsen Chris R. Adapter method and apparatus for interfacing a tester with a device under test
US20050012513A1 (en) * 2003-07-17 2005-01-20 Shih-Jye Cheng Probe card assembly

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3163221B2 (ja) * 1993-08-25 2001-05-08 東京エレクトロン株式会社 プローブ装置
US6292003B1 (en) * 1998-07-01 2001-09-18 Xilinx, Inc. Apparatus and method for testing chip scale package integrated circuits
US6535003B2 (en) * 1999-01-29 2003-03-18 Advantest, Corp. Contact structure having silicon finger contactor
WO2001009623A1 (fr) * 1999-07-28 2001-02-08 Nanonexus, Inc. Structures constructionnelles et procedes de fabrication d'assemblages de cartes a sondes pour plaquettes de circuits integres
US6847218B1 (en) * 2002-05-13 2005-01-25 Cypress Semiconductor Corporation Probe card with an adapter layer for testing integrated circuits

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5656943A (en) * 1995-10-30 1997-08-12 Motorola, Inc. Apparatus for forming a test stack for semiconductor wafer probing and method for using the same
US20020118029A1 (en) * 1999-05-14 2002-08-29 Rikihito Yamasaka Probe card and contactor
US20030099097A1 (en) * 2001-11-27 2003-05-29 Sammy Mok Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs
US20040108848A1 (en) * 2002-03-21 2004-06-10 Jacobsen Chris R. Adapter method and apparatus for interfacing a tester with a device under test
US20050012513A1 (en) * 2003-07-17 2005-01-20 Shih-Jye Cheng Probe card assembly

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2007008790A2 *

Also Published As

Publication number Publication date
KR101304031B1 (ko) 2013-09-04
JP2009500633A (ja) 2009-01-08
KR20080041643A (ko) 2008-05-13
EP1904861A4 (fr) 2013-05-29

Similar Documents

Publication Publication Date Title
US7498825B2 (en) Probe card assembly with an interchangeable probe insert
US8203351B2 (en) Probing apparatus with guarded signal traces
US7649366B2 (en) Method and apparatus for switching tester resources
US7843202B2 (en) Apparatus for testing devices
TWI388835B (zh) 測試系統以及被測試元件單元
US6873167B2 (en) Connection box, system, and method for evaluating a DUT board
US6252415B1 (en) Pin block structure for mounting contact pins
US8154315B2 (en) Self-referencing voltage regulator
US4996478A (en) Apparatus for connecting an IC device to a test system
TWI499782B (zh) 用於高速功能性測試的獨立多晶片單元探測卡
KR20140019376A (ko) 무선 프로브 카드 검증 시스템 및 방법
EP1904861A2 (fr) Ensemble carte a sondes comprenant un insert de sonde interchangeable
US20100039133A1 (en) Probe head controlling mechanism for probe card assemblies
KR20140131481A (ko) 포고 핀의 연결에 기계적 고정을 제공하는 테스트 소켓
US7009381B2 (en) Adapter method and apparatus for interfacing a tester with a device under test

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20080204

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR IT

DAX Request for extension of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): DE FR IT

RIN1 Information on inventor provided before grant (corrected)

Inventor name: KAWAMATA, NOBUHIRO

Inventor name: SAEKI, TAKAO

Inventor name: ELDRIDGE, BENJAMIN, N.

Inventor name: REYNOLDS, CARL, V.

A4 Supplementary search report drawn up and despatched

Effective date: 20130426

RIC1 Information provided on ipc code assigned before grant

Ipc: G01R 1/073 20060101ALI20130422BHEP

Ipc: G01R 31/02 20060101AFI20130422BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20131126