EP1899608B1 - Rotary vacuum pump - Google Patents

Rotary vacuum pump Download PDF

Info

Publication number
EP1899608B1
EP1899608B1 EP06763998A EP06763998A EP1899608B1 EP 1899608 B1 EP1899608 B1 EP 1899608B1 EP 06763998 A EP06763998 A EP 06763998A EP 06763998 A EP06763998 A EP 06763998A EP 1899608 B1 EP1899608 B1 EP 1899608B1
Authority
EP
European Patent Office
Prior art keywords
oil
channel
chamber
vacuum pump
discharge channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06763998A
Other languages
German (de)
French (fr)
Other versions
EP1899608A1 (en
Inventor
Eric Figoni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36942562&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1899608(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1899608A1 publication Critical patent/EP1899608A1/en
Application granted granted Critical
Publication of EP1899608B1 publication Critical patent/EP1899608B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Definitions

  • the invention relates to a vacuum rotary vane pump according to the preamble of claim 1.
  • a vacuum rotary vane pump is known from the US-A-3,053,439 ,
  • Vacuum rotary vane pumps have a pump chamber arranged in a housing. Within the housing, a rotor is arranged eccentrically. Two or more sliders are usually connected to the rotor in slide slots. As a result of the centrifugal force, the slides are pressed against an inner wall of the pump chamber during a rotation of the rotor. To generate a vacuum, a suction opening of the vacuum rotary vane pump is connected to the space to be vacuumed. Due to the eccentricity of the rotor and the changing size of the chambers formed between the sliders, the medium is conveyed through an ejection channel.
  • the discharge channel usually extends from the pumping chamber into an oil chamber.
  • the object of the invention is to provide a vacuum rotary vane pump in which a full run of the pump chamber is avoided by structurally simple measures.
  • the suction chamber is connected to an oil chamber via an ejection channel, wherein a valve device is arranged between the oil chamber and the ejection channel.
  • the valve device serves to prevent a backflow of medium, ie usually a mixture of oil and air, from the oil chamber into the pump chamber.
  • a compensation channel is also provided, which connects the discharge channel with a region in which substantially atmospheric pressure prevails.
  • the compensation channel is connected to an air space of the oil chamber, wherein it is in the air space of the oil chamber is around the area of the oil chamber, which is located above the oil bath and in which essentially enriched with oil air is present.
  • the medium is expelled from the pump chamber into the discharge channel during operation, whereby the medium, which is usually a mixture of air and oil, passes through the valve device into the oil chamber. A part of the oil present in the medium is pressed into the compensation channel and thus seals it off. It is thereby ensured that no fresh air is sucked in during operation via the compensation channel, or air with ambient pressure reaches the discharge channel. If a failure of the vacuum rotary vane pump or a deliberate stop the vacuum rotary vane pump, air is sucked through the compensation channel due to the pressure prevailing in the suction chamber lower pressure.
  • the period of time to equalize the pressure in the pump chamber is very small.
  • Controlled and defined emulsification of the oil is also achieved by providing the equalization channel.
  • the compensation channel is at least partially filled with oil, while the medium is conveyed from a region of the pumping space between two adjacent slides into the discharge channel. If the trailing slide now subsequently passes through the opening of the ejection channel connected to the suction chamber, the oil reservoir stored in the compensation channel is conveyed into this space. In this case, a small amount of air is sucked out of the compensation channel, which leads to the emulsion of the oil.
  • the inventive provision of at least one compensation channel thus also leads to a reduction in noise in speed limits of the vacuum rotary vane pump.
  • Due to the small cross-sectional area of the at least one compensation channel ensures that only a small amount of air enters the pump.
  • the compensation channel or the compensation channels is formed as a groove in the housing, wherein the groove is partially covered.
  • the grooves are provided in a flange surface of the housing facing in the direction of the oil chamber, wherein the grooves are preferably arranged within the oil chamber when attached to the flange oil chamber. It is particularly preferred in this case to cover the grooves by a valve tongue of the valve device, so that the single groove or the grooves are covered by a small inlet opening which is connected to the air space of the oil chamber.
  • valve tongue which may also cover the grooves, the opening and closing of the ejection channel.
  • the valve tongue is formed of an elastic, spring-back material. A particularly good sealing of the valve tongue can be achieved if the area of the valve tongue which seals off the discharge channel is located in an oil bath, so that an additional contact pressure is built up. Due to the increased tightness, a further and more efficient evacuation can be carried out.
  • a vacuum rotary vane pump has a housing 10. Within the housing 10, a rotor 14 is arranged in a pump chamber 12. The rotor 14 has in the illustrated embodiment, three slide slots 16, in each of which a slide 18 is arranged. The slides 18 are pressed by the rotation of the rotor 14 due to the centrifugal force against an inner wall 20 of the pump chamber.
  • a suction opening 22 which is connected to the space to be evacuated, medium is sucked from the space to be evacuated into a first area 24 of the pumping chamber 12.
  • the region 24 of the suction chamber 12 is bounded by two adjacent slides 18.
  • An area 28 of the suction space 12 located in front of the area 24 in the direction of rotation 26 is reduced by the rotation of the rotor 14, so that the medium located therein is compressed. From the region 28, the medium is conveyed through an ejection channel 30 from the suction chamber 12 in the direction of an oil chamber 32.
  • the oil chamber 32 is attached to a flange 34 of the housing 10 of the vacuum rotary vane pump.
  • the oil chamber 32 has an oil space or an oil bath 34, in which the oil supplied via the discharge channel 30, in particular together with the air taken from the space to be evacuated, collects.
  • valve means is a resilient valve tongue secured to the flange 34 of the housing 10 by, for example, a screw or nut 40. It is particularly preferred to arrange the valve tongue in an oil bath 42 in the region of the outlet opening 36. For this purpose, a separate oil space is formed in the oil chamber 32 by an intermediate wall 44, wherein when the oil space is filled, the oil flows in the direction of an arrow 46.
  • an oil bath 42 is on a rear side of the valve tongue, d. H. in the direction of the oil bath 42 facing side of the valve tongue, pressure exerted. As a result, the tightness of the valve device 38 is increased.
  • a plurality of compensation channels 50 are provided in a flange 48, which faces in the direction of the oil chamber 32.
  • the compensation channels 50 are formed by grooves provided in the flange surface 48, which are covered by the valve tongue 38 arranged in this region. in this connection are not the complete grooves covered by the valve tongue, so that an inlet opening 52 is formed, which is in communication with an air space 54 of the oil chamber 32.
  • a plurality of compensation channels 50 are provided, which are preferably formed fan-shaped starting from the inlet opening 52.
  • an oil-enriched medium is thus conveyed from the region 28 in the direction of an arrow 56 into the discharge channel 30. Due to the pressure, the valve tongue is pushed back, so that the medium in the direction of an arrow 58 in the oil bath 42 and in the oil chamber 32 passes. A portion of the oil is in this case pressed into the compensation channels 50 and thus causes a seal.
  • the oil reservoir present in the channels 50 is drawn into the discharge channel 30 together with a small amount of air drawn through the opening 52 from the air space 54 of the oil chamber 32.
  • the entrainment of air emulsifies the oil and thus reduces noise.
  • valve device 38 Due to the flow of oil or oil circulation in the area of the valve device 38, in particular the valve tongue, it is ensured that no deposits form here. In particular, contamination of the valve device 38 is avoided. This is a deadlock of Valve device 38 avoided. Furthermore, a good seal is ensured and an influence of the valve tightness on the pump performance is avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

The invention relates to a rotary vacuum pump that has a suction chamber (12) in a housing (10). A rotor (14) is eccentrically mounted in the suction chamber (12). Sliding vanes (18) are connected to the rotor (14). A discharge channel (30) is also connected to the suction chamber (12) and to an oil chamber (32). A valve arrangement (38) is disposed between the discharge channel (30) and the oil chamber (32), in order to prevent the medium from flowing back from the oil chamber (32) into the suction chamber (12). According to the invention, at least one compensating channel (50) is provided and is connected to the discharge channel (30) and to the oil chamber (32).

Description

Die Erfindung betrifft eine Vakuum-Drehschieberpumpe nach dem Oberbegriff des Anspruchs 1. Eine solche Pumpe ist bekannt aus des US-A-3 053 439 .The invention relates to a vacuum rotary vane pump according to the preamble of claim 1. Such a pump is known from the US-A-3,053,439 ,

Vakuum-Drehschieberpumpen weisen einen in einem Gehäuse angeordneten Schöpfraum auf. Innerhalb des Gehäuses ist ein Rotor exzentrisch angeordnet. Mit dem Rotor sind üblicherweise in Schieberschlitzen zwei oder mehr Schieber verbunden. Durch die Fliehkraft werden die Schieber während einer Drehung des Rotors gegen eine Innenwand des Schöpfraums gedrückt. Zur Erzeugung eines Vakuums ist eine Ansaugöffnung der Vakuum-Drehschieberpumpe mit dem zu vakuumierenden Raum verbunden. Auf Grund der Exzentrizität des Rotors und der sich verändernden Größe der zwischen den Schiebern ausgebildeten Kammern wird das Medium durch einen Ausstoßkanal gefördert. Zur Schmierung und um eine gute Abdichtung der Schieber an der Innenwand des Schöpfraums zu gewährleisten, ist stets eine gewisse Menge an Öl zur Ausbildung eines Ölfilms im Schöpfraum vorhanden. Da das ausgestoßene Medium somit mit Öl vermischt ist, verläuft der Ausstoßkanal üblicherweise vom Schöpfraum in eine Ölkammer.Vacuum rotary vane pumps have a pump chamber arranged in a housing. Within the housing, a rotor is arranged eccentrically. Two or more sliders are usually connected to the rotor in slide slots. As a result of the centrifugal force, the slides are pressed against an inner wall of the pump chamber during a rotation of the rotor. To generate a vacuum, a suction opening of the vacuum rotary vane pump is connected to the space to be vacuumed. Due to the eccentricity of the rotor and the changing size of the chambers formed between the sliders, the medium is conveyed through an ejection channel. For lubrication and to ensure a good seal of the slide on the inner wall of the pump chamber, there is always a certain amount of oil to form an oil film in the pump chamber available. Since the ejected medium is thus mixed with oil, the discharge channel usually extends from the pumping chamber into an oil chamber.

Aus U.S. 3,053,439 ist eine Drehschieberpumpe bekannt, bei der ein Ausstoßkanal mit dem Schöpfraum und einer Ölkammer verbunden ist. Zwischen der Ölkammer und dem Ausstoßkanal ist eine Ventileinrichtung angeordnet, um ein Zurückströmen von Medium aus der Ölkammer in den Schöpfraum zu vermeiden. Mit dem Ausstoßkanal ist ein Ausgleichskanal verbunden, an den im wesentlichen Atmosphärendruck anliegt.Out US 3,053,439 is a rotary vane pump is known in which an ejection channel is connected to the suction chamber and an oil chamber. Between the oil chamber and the discharge channel, a valve device is arranged to prevent a backflow of medium from the oil chamber into the pump chamber. With the discharge channel, a compensation channel is connected, is applied to the substantially atmospheric pressure.

Wird die Vakuum-Drehschieberpumpe beispielsweise durch einen Ausfall plötzlich angehalten, hat dies zur Folge, dass der Schöpfraum über die Schmiermittelzufuhr mit Öl voll läuft. Dies führt zu einem erhöhten Drehmoment sowie zu einer erhöhten Geräuschentwicklung beim nächsten Starten der Pumpe. Ferner können auf Grund des erhöhten Drehmoments die Schieber beschädigt werden. Des weiteren besteht das Risiko, das Öl in den zu vakuumierenden Raum eintritt und dort zu Beschädigungen führt. Es ist daher erforderlich, dass der Schöpfraum der Vakuum-Drehschieberpumpe nach dem Anhalten auf Atmosphärendruck gebracht wird, um ein Einströmen des Schmiermittels zu vermeiden. Hierzu ist es bekannt, eine mit einer Schließvorrichtung versehene Bohrung vorzusehen, die mit dem Schöpfraum verbunden ist. Dies ist relativ aufwändig, da eine gesondert anzusteuernde Schließvorrichtung, die hohen Dichtigkeitsanforderungen genügen muss, vorgesehen werden muss. Ferner ist beispielsweise bei einem Stromausfall ein Ansteuern der Schließvorrichtung nicht mehr sichergestellt.If the vacuum rotary vane pump is stopped suddenly, for example due to a failure, this means that the suction chamber runs full of oil via the lubricant supply. This leads to increased torque and increased noise at the next start of the pump. Further, due to the increased torque, the sliders may be damaged. Furthermore, there is the risk that oil enters the room to be vacuumed and leads to damage there. It is therefore necessary that the pump chamber of the vacuum rotary valve pump is brought to atmospheric pressure after stopping in order to prevent the lubricant from flowing. For this purpose, it is known to provide a bore provided with a closing device, which is connected to the pump chamber. This is relatively complicated, since a separately to be controlled locking device, which must meet high tightness requirements, must be provided. Furthermore, for example, in the event of a power failure, activation of the closing device is no longer ensured.

Aufgabe der Erfindung ist es, eine Vakuum-Drehschieberpumpe zu schaffen, bei der durch konstruktiv einfache Maßnahmen ein Volllaufen des Schöpfraums vermieden ist.The object of the invention is to provide a vacuum rotary vane pump in which a full run of the pump chamber is avoided by structurally simple measures.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Bei der erfindungsgemäßen Vakuum-Drehschieberpumpe ist der Schöpfraum mit einer Ölkammer über einen Ausstoßkanal verbunden, wobei zwischen der Ölkammer und dem Ausstoßkanal eine Ventileinrichtung angeordnet ist. Die Ventileinrichtung dient dazu, ein Zurückströmen von Medium, d. h. üblicherweise einem Gemisch aus Öl und Luft, aus der Ölkammer in den Schöpfraum zu verhindern. Erfindungsgemäß ist ferner ein Ausgleichskanal vorgesehen, der den Ausstoßkanal mit einem Bereich verbindet, in dem im Wesentlichen Atmosphärendruck herrscht. Vorzugsweise ist der Ausgleichskanal mit einem Luftraum der Ölkammer verbunden, wobei es sich bei dem Luftraum der Ölkammer um den Bereich der Ölkammer handelt, der oberhalb des Ölbades liegt und in dem im Wesentlichen ggf. mit Öl angereicherte Luft vorhanden ist.In the vacuum rotary vane pump according to the invention, the suction chamber is connected to an oil chamber via an ejection channel, wherein a valve device is arranged between the oil chamber and the ejection channel. The valve device serves to prevent a backflow of medium, ie usually a mixture of oil and air, from the oil chamber into the pump chamber. According to the invention, a compensation channel is also provided, which connects the discharge channel with a region in which substantially atmospheric pressure prevails. Preferably, the compensation channel is connected to an air space of the oil chamber, wherein it is in the air space of the oil chamber is around the area of the oil chamber, which is located above the oil bath and in which essentially enriched with oil air is present.

Durch das Vorsehen eines derartigen Ausgleichkanals in Verbindung mit einer zwischen der Ölkammer und dem Ausstoßkanal angeordneten Ventileinrichtung erfolgt im Betrieb ein Herausdrücken des Mediums aus dem Schöpfraum in den Ausstoßkanal, wobei das Medium, bei dem es sich üblicherweise um ein Gemisch aus Luft und Öl handelt, durch die Ventileinrichtung in die Ölkammer gelangt. Ein Teil des in dem Medium vorhandenen Öls wird in den Ausgleichskanal gedrückt und dichtet diesen somit ab. Es ist hierdurch sichergestellt, dass während des Betriebs über den Ausgleichskanal keine frische Luft angesaugt wird, bzw. Luft mit Umgebungsdruck in den Ausstoßkanal gelangt. Erfolgt ein Ausfall der Vakuum-Drehschieberpumpe oder auch ein bewusstes Anhalten der Vakuum-Drehschieberpumpe, so wird durch den Ausgleichskanal auf Grund des in dem Schöpfraum herrschenden geringeren Drucks Luft angesaugt. Dies führt zu einem schnellen Druckausgleich in dem Schöpfraum, so dass der Schöpfraum schnell auf Atmosphärendruck gebracht wird. Dies hat zur Folge, dass der Schöpfraum nicht über die Schmiermittelversorgung mit Öl voll läuft. Hierdurch sind die Nachteile eines erhöhten Drehmoments beim nächsten Start und ein hierdurch ggf. hervorgerufenes Beschädigen der Schieber vermieden. Auch ein Öl- oder Schmiermitteleintritt in den zu vakuumierenden Raum ist hierdurch vermieden.By providing such a compensation channel in conjunction with a valve device arranged between the oil chamber and the discharge channel, the medium is expelled from the pump chamber into the discharge channel during operation, whereby the medium, which is usually a mixture of air and oil, passes through the valve device into the oil chamber. A part of the oil present in the medium is pressed into the compensation channel and thus seals it off. It is thereby ensured that no fresh air is sucked in during operation via the compensation channel, or air with ambient pressure reaches the discharge channel. If a failure of the vacuum rotary vane pump or a deliberate stop the vacuum rotary vane pump, air is sucked through the compensation channel due to the pressure prevailing in the suction chamber lower pressure. This leads to a rapid pressure equalization in the pump chamber, so that the pump chamber is quickly brought to atmospheric pressure. This has the consequence that the pump chamber does not run over the lubricant supply with oil. As a result, the disadvantages of increased torque at the next start and thereby possibly caused damaging the slide are avoided. An oil or lubricant entry into the room to be vacuumed is thereby avoided.

Die Zeitspanne zum Ausgleich des Drucks in dem Schöpfraum ist sehr gering.The period of time to equalize the pressure in the pump chamber is very small.

Ein weiteres Problem von Vakuum-Drehschieberpumpen besteht darin, dass bei Rotationsgeschwindigkeiten des Rotors im Grenzbereich eine erhöhte Geräuschentwicklung festzustellen ist. Zur Reduzierung der Geräuschentwicklung weist das Gehäuse im Kompressionsbereich eine kleine Öffnung auf, durch die Luft einströmen kann. Hierdurch entsteht eine Öl-Emulsion, durch die die Geräuschentwicklung verringert werden kann. Da die Luftzufuhr sehr ungenau ist und somit auch der Grad der Emulsion des Öls ungenau ist, kann die Geräuschentwicklung nur geringfügig reduziert werden.Another problem of vacuum rotary vane pumps is that at rotational speeds of the rotor in the boundary region increased noise is noted. To reduce noise, the housing has a small opening in the compression area, through which air can flow. This results in an oil emulsion, by which the noise can be reduced. Since the air supply is very inaccurate and thus the degree of emulsion of the oil is inaccurate, the noise can be reduced only slightly.

Ein kontrolliertes und definiertes Emulgieren des Öls wird durch das Vorsehen des Ausgleichskanals ebenfalls erreicht. Wie beschrieben, wird der Ausgleichskanal zumindest teilweise mit Öl gefüllt, während des Medium aus einem Bereich des Schöpfraums zwischen zwei benachbarten Schiebern in den Ausstoßkanal gefördert wird. Passiert der nachlaufende Schieber nun hieran anschließend die mit dem Schöpfraum verbundene Öffnung des Ausstoßkanals, wird der in dem Ausgleichskanal gespeicherte Ölvorrat in diesen Raum gefördert. Hierbei wird eine geringe Menge Luft aus dem Ausgleichskanal mitgesogen, die zur Emulsion des Öls führt. Insbesondere durch die Anzahl und die Formgestaltung der Ausgleichskanäle kann in Abhängigkeit des verwendeten Schmiermittels ein gutes Emulgieren des Schmiermittels gewährleistet werden. Das erfindungsgemäße Vorsehen mindestens eines Ausgleichskanals führt somit auch zu einer Geräuschreduzierung in Drehzahl-Grenzbereichen der Vakuum-Drehschieberpumpe.Controlled and defined emulsification of the oil is also achieved by providing the equalization channel. As described, the compensation channel is at least partially filled with oil, while the medium is conveyed from a region of the pumping space between two adjacent slides into the discharge channel. If the trailing slide now subsequently passes through the opening of the ejection channel connected to the suction chamber, the oil reservoir stored in the compensation channel is conveyed into this space. In this case, a small amount of air is sucked out of the compensation channel, which leads to the emulsion of the oil. In particular, by the number and shape design of the compensation channels, a good emulsification of the lubricant can be ensured depending on the lubricant used. The inventive provision of at least one compensation channel thus also leads to a reduction in noise in speed limits of the vacuum rotary vane pump.

Auf Grund der geringen Querschnittfläche des mindestens einen Ausgleichkanals ist gewährleistet, dass nur eine geringe Menge Luft in die Pumpe gelangt. Insbesondere kann durch die Anzahl und durch die Querschnittsfläche sowie die Formgestaltung des mindestens einen Ausgleichskanals die in dem bzw. den Ausgleichskanälen zwischengespeicherte Ölmenge sowie die angesaugte Luftmenge bestimmt werden.Due to the small cross-sectional area of the at least one compensation channel ensures that only a small amount of air enters the pump. In particular, can be determined by the number and by the cross-sectional area and the shape of the at least one compensation channel, the cached in the compensation channels or the amount of oil and the intake air quantity.

Erfindungsgemäß ist der Ausgleichskanal oder die Ausgleichskanäle als Nut in dem Gehäuse ausgebildet, wobei die Nut teilweise abgedeckt ist. Dies hat den Vorteil, dass der Ausgleichskanal auf einfache Weise herstellbar ist. Insbesondere sind die Nuten in einer Flanschfläche des Gehäuses vorgesehen, die in Richtung der Ölkammer weist, wobei die Nuten vorzugsweise bei an dem Flansch befestigter Ölkammer innerhalb der Ölkammer angeordnet sind. Besonders bevorzugt ist es hierbei, die Nuten durch eine Ventilzunge der Ventileinrichtung abzudecken, so dass die einzelne Nut bzw. die Nuten durch eine kleine Einlassöffnung, die mit dem Luftraum der Ölkammer verbunden ist, abgedeckt sind.According to the compensation channel or the compensation channels is formed as a groove in the housing, wherein the groove is partially covered. This has the advantage that the compensation channel can be produced in a simple manner. In particular, the grooves are provided in a flange surface of the housing facing in the direction of the oil chamber, wherein the grooves are preferably arranged within the oil chamber when attached to the flange oil chamber. It is particularly preferred in this case to cover the grooves by a valve tongue of the valve device, so that the single groove or the grooves are covered by a small inlet opening which is connected to the air space of the oil chamber.

Vorzugsweise erfolgt mit Hilfe der Ventilzunge, die ggf. auch die Nuten abdeckt, das Öffnen und Verschließen des Ausstoßkanals. Hierzu ist die Ventilzunge aus einem elastischen, rückfedernden Material ausgebildet. Eine besonders gute Abdichtung der Ventilzunge kann erreicht werden, wenn sich der Bereich der Ventilzunge, der den Ausstoßkanal abdichtet, in einem Ölbad befindet, so dass ein zusätzlicher Anpressdruck aufgebaut wird. Auf Grund der erhöhten Dichtigkeit kann ein weiteres und effizienteres Evakuieren durchgeführt werden.Preferably, with the help of the valve tongue, which may also cover the grooves, the opening and closing of the ejection channel. For this purpose, the valve tongue is formed of an elastic, spring-back material. A particularly good sealing of the valve tongue can be achieved if the area of the valve tongue which seals off the discharge channel is located in an oil bath, so that an additional contact pressure is built up. Due to the increased tightness, a further and more efficient evacuation can be carried out.

Nachfolgend wird die Erfindung an Hand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Es zeigen:Show it:

Fig. 1Fig. 1
eine schematische Schnittansicht einer Vakuum- Drehschieberpumpe unda schematic sectional view of a vacuum rotary vane pump and
Fig. 2Fig. 2
eine schematische Schnittansicht entlang der Linie II-II in Fig. 1.a schematic sectional view taken along the line II-II in Fig. 1 ,

Eine Vakuum-Drehschieberpumpe weist ein Gehäuse 10 auf. Innerhalb des Gehäuses 10 ist in einem Schöpfraum 12 ein Rotor 14 angeordnet. Der Rotor 14 weist im dargestellten Ausführungsbeispiel drei Schieberschlitze 16 auf, in denen jeweils ein Schieber 18 angeordnet ist. Die Schieber 18 werden durch die Rotation des Rotors 14 auf Grund der Fliehkraft gegen eine Innenwand 20 des Schöpfraums gedrückt.A vacuum rotary vane pump has a housing 10. Within the housing 10, a rotor 14 is arranged in a pump chamber 12. The rotor 14 has in the illustrated embodiment, three slide slots 16, in each of which a slide 18 is arranged. The slides 18 are pressed by the rotation of the rotor 14 due to the centrifugal force against an inner wall 20 of the pump chamber.

Über eine Ansaugöffnung 22, die mit dem zu evakuierenden Raum verbunden ist, wird aus dem zu evakuierenden Raum Medium in einen ersten Bereich 24 des Schöpfraums 12 gesogen. Der Bereich 24 des Schöpfraums 12 ist durch zwei benachbarte Schieber 18 begrenzt. Ein in Drehrichtung 26 vor dem Bereich 24 befindlicher Bereich 28 des Schöpfraums 12 wird durch die Drehung des Rotors 14 verkleinert, so dass das darin befindliche Medium komprimiert wird. Aus dem Bereich 28 wird das Medium durch einen Ausstoßkanal 30 aus dem Schöpfraum 12 in Richtung einer Ölkammer 32 gefördert.Via a suction opening 22, which is connected to the space to be evacuated, medium is sucked from the space to be evacuated into a first area 24 of the pumping chamber 12. The region 24 of the suction chamber 12 is bounded by two adjacent slides 18. An area 28 of the suction space 12 located in front of the area 24 in the direction of rotation 26 is reduced by the rotation of the rotor 14, so that the medium located therein is compressed. From the region 28, the medium is conveyed through an ejection channel 30 from the suction chamber 12 in the direction of an oil chamber 32.

Die Ölkammer 32 ist an einem Flansch 34 des Gehäuses 10 der Vakuum-Drehschieberpumpe befestigt. Die Ölkammer 32 weist einen Ölraum bzw. ein Ölbad 34 auf, in dem sich das über den Ausstoßkanal 30 insbesondere zusammen mit der aus dem zu evakuierenden Raum entnommenen Luft zugeführte Öl sammelt.The oil chamber 32 is attached to a flange 34 of the housing 10 of the vacuum rotary vane pump. The oil chamber 32 has an oil space or an oil bath 34, in which the oil supplied via the discharge channel 30, in particular together with the air taken from the space to be evacuated, collects.

Eine Auslassöffnung 36 des Ausstoßkanals 30 ist mit einer Ventileinrichtung 38 versehen. In dem dargestellten besonders bevorzugten Ausführungsbeispiel handelt es sich bei der Ventileinrichtung um eine elastische Ventilzunge, die beispielsweise mit Hilfe einer Schraube oder Mutter 40 an dem Flansch 34 des Gehäuses 10 befestigt ist. Besonders bevorzugt ist es, im Bereich der Auslassöffnung 36 die Ventilzunge in einem Ölbad 42 anzuordnen. Hierzu ist in der Ölkammer 32 durch eine Zwischenwand 44 ein gesonderter Ölraum gebildet, wobei bei gefülltem Ölraum das Öl in Richtung eines Pfeils 46 fließt. Durch das Vorsehen eines Ölbads 42 wird auf eine Rückseite der Ventilzunge, d. h. die in Richtung des Ölbads 42 weisende Seite der Ventilzunge, Druck ausgeübt. Hierdurch wird die Dichtigkeit der Ventileinrichtung 38 erhöht.An outlet opening 36 of the ejection channel 30 is provided with a valve device 38. In the illustrated particularly preferred embodiment, the valve means is a resilient valve tongue secured to the flange 34 of the housing 10 by, for example, a screw or nut 40. It is particularly preferred to arrange the valve tongue in an oil bath 42 in the region of the outlet opening 36. For this purpose, a separate oil space is formed in the oil chamber 32 by an intermediate wall 44, wherein when the oil space is filled, the oil flows in the direction of an arrow 46. By providing an oil bath 42 is on a rear side of the valve tongue, d. H. in the direction of the oil bath 42 facing side of the valve tongue, pressure exerted. As a result, the tightness of the valve device 38 is increased.

In einer Flanschfläche 48, die in Richtung des Ölraums 32 weist, sind vorzugsweise mehrere Ausgleichskanäle 50 vorgesehen. Die Ausgleichskanäle 50 sind durch in der Flanschfläche 48 vorgesehene Nuten gebildet, die durch die in diesem Bereich angeordnete Ventilzunge 38 abgedeckt werden. Hierbei werden nicht die vollständigen Nuten durch die Ventilzunge abgedeckt, so dass eine Einlassöffnung 52 ausgebildet ist, die mit einem Luftraum 54 der Ölkammer 32 in Verbindung steht. Vorzugsweise sind, wie aus Fig. 2 ersichtlich, mehrere Ausgleichskanäle 50 vorgesehen, die vorzugsweise fächerförmig ausgehend von der Einlassöffnung 52 ausgebildet sind.In a flange 48, which faces in the direction of the oil chamber 32, preferably a plurality of compensation channels 50 are provided. The compensation channels 50 are formed by grooves provided in the flange surface 48, which are covered by the valve tongue 38 arranged in this region. in this connection are not the complete grooves covered by the valve tongue, so that an inlet opening 52 is formed, which is in communication with an air space 54 of the oil chamber 32. Preferably, as is Fig. 2 can be seen, a plurality of compensation channels 50 are provided, which are preferably formed fan-shaped starting from the inlet opening 52.

Durch Rotation des Rotors 14 wird somit ein mit Öl angereichertes Medium aus dem Bereich 28 in Richtung eines Pfeils 56 in den Ausstoßkanal 30 gefördert. Auf Grund des Drucks wird die Ventilzunge zurückgedrückt, so dass das Medium in Richtung eines Pfeils 58 in das Ölbad 42 bzw. in die Ölkammer 32 gelangt. Ein Teil des Öls wird hierbei in die Ausgleichskanäle 50 gedrückt und bewirkt somit ein Abdichten.By rotation of the rotor 14, an oil-enriched medium is thus conveyed from the region 28 in the direction of an arrow 56 into the discharge channel 30. Due to the pressure, the valve tongue is pushed back, so that the medium in the direction of an arrow 58 in the oil bath 42 and in the oil chamber 32 passes. A portion of the oil is in this case pressed into the compensation channels 50 and thus causes a seal.

Sobald der Bereich 28 im Wesentlichen entleert ist, wird der in den Kanälen 50 vorhandene Ölvorrat zusammen mit einer geringen Menge an Luft, die durch die Öffnung 52 aus dem Luftraum 54 der Ölkammer 32 angesaugt wird, in den Ausstoßkanal 30 gesogen. Durch das Mitziehen von Luft erfolgt ein Emulgieren des Öls und somit eine Geräuschreduktion.Once the region 28 is substantially deflated, the oil reservoir present in the channels 50 is drawn into the discharge channel 30 together with a small amount of air drawn through the opening 52 from the air space 54 of the oil chamber 32. The entrainment of air emulsifies the oil and thus reduces noise.

Beim Anhalten der Pumpe, beispielsweise durch einen Ausfall, wird über die Öffnung 52 und die Ausgleichskanäle 50 aus dem Luftraum 54 Luft in den Schöpfraum 12 gesaugt, so dass ein Druckausgleich erfolgt und der Schöpfraum 12 im Wesentlichen auf Atmosphärendruck gebracht wird. Hierdurch ist sichergestellt, dass kein oder allenfalls nur geringe Mengen an Schmiermittel in den Schöpfraum gelangt. Ein Vollaufen des Schöpfraums 12 durch Schmiermittel ist hierdurch vermieden.When stopping the pump, for example, by a failure, air is sucked into the suction chamber 12 via the opening 52 and the compensation channels 50 from the air space 54, so that a pressure equalization takes place and the pumping chamber 12 is brought to substantially atmospheric pressure. This ensures that no or at most only small amounts of lubricant passes into the pump chamber. A full run of the pump chamber 12 by lubricant is thereby avoided.

Aufgrund der Ölströmung bzw. Ölzirkulation im Bereich der Ventileinrichtung 38, insbesondere der Ventilzunge, ist sichergestellt, dass sich hier keine Ablagerungen bilden. Insbesondere ist eine Verschmutzung der Ventileinrichtung 38 vermieden. Hierdurch ist ein Verklemmung der Ventileinrichtung 38 vermieden. Ferner ist eine gute Abdichtung gewährleistet und ein Einfluss der Ventildichtigkeit auf die Pumpenleistung vermieden.Due to the flow of oil or oil circulation in the area of the valve device 38, in particular the valve tongue, it is ensured that no deposits form here. In particular, contamination of the valve device 38 is avoided. This is a deadlock of Valve device 38 avoided. Furthermore, a good seal is ensured and an influence of the valve tightness on the pump performance is avoided.

Claims (6)

  1. A rotary vacuum pump, comprising
    a housing (10) including a suction chamber (12),
    a rotor (14) eccentrically mounted in the suction chamber (12),
    sliding vanes (18) connected to the rotor (14) for displacement therein,
    an oil chamber,
    a discharge channel (30) connected to the suction chamber (12) and to the oil chamber (32),
    a valve means (38) arranged between the oil chamber (32) and the discharge channel (30) to prevent a backflow of medium from the oil chamber (32) into the suction chamber (12), and
    at least one compensating channel (50) connected to the discharge channel (30) and substantially subjected to atmospheric pressure,
    characterized in that
    the compensating channel is formed as a partially covered groove particularly in a flange (34) of the housing (10).
  2. The rotary vacuum pump according to claim 1, characterized in that the compensating channel (50) is connected to an air zone (54) of the oil chamber (32).
  3. The rotary vacuum pump according to claim 1 or 2, characterized in that the compensating channel (50) in the region of the valve means (38) is connected to the discharge channel (30).
  4. The rotary vacuum pump according to any one of claims 1 - 3, characterized in that the valve means comprises an elastically deformable valve tongue (38) which preferably additionally covers said groove for forming the compensating channel (50).
  5. The rotary vacuum pump according to any one of claims 1 - 4, characterized by a plurality of compensating channels (50) preferably connected to each other at a channel inlet opening (52) connecting to the atmosphere.
  6. The rotary vacuum pump according to any one of claims 1 - 5, characterized in that, in the region of the discharge channel (30), the valve means (38) closing the discharge channel (30) is arranged in an oil bath (42).
EP06763998A 2005-07-07 2006-06-30 Rotary vacuum pump Active EP1899608B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005031718A DE102005031718A1 (en) 2005-07-07 2005-07-07 Rotary vacuum pump
PCT/EP2006/063748 WO2007006666A1 (en) 2005-07-07 2006-06-30 Rotary vacuum pump

Publications (2)

Publication Number Publication Date
EP1899608A1 EP1899608A1 (en) 2008-03-19
EP1899608B1 true EP1899608B1 (en) 2011-10-19

Family

ID=36942562

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06763998A Active EP1899608B1 (en) 2005-07-07 2006-06-30 Rotary vacuum pump

Country Status (7)

Country Link
US (2) US8469684B2 (en)
EP (1) EP1899608B1 (en)
JP (1) JP4996601B2 (en)
KR (1) KR101291228B1 (en)
CN (1) CN101203677B (en)
DE (1) DE102005031718A1 (en)
WO (1) WO2007006666A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012002881U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump
DE202012002882U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump
DE202012002883U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8461699B2 (en) 2008-12-26 2013-06-11 Hitachi Chemical Company, Ltd. Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device
IT1393277B1 (en) * 2009-03-17 2012-04-12 Vhit Spa ROTARY VACUUM PUMP WITH A DISMANTLING DEVICE FROM THE DRIVE MOTOR
DE102010051610B4 (en) 2009-11-24 2023-10-26 Hanon Systems Efp Deutschland Gmbh vacuum pump
JP2012167590A (en) * 2011-02-14 2012-09-06 Nabtesco Automotive Corp Process for manufacturing casing, and vacuum pump
CN103061820B (en) * 2012-12-27 2013-12-04 潍坊天瑞重工凿岩机械有限公司 Pneumatic sliding-vane-type drilling machine having built-in oil feeder
DE102013200410B4 (en) * 2013-01-14 2017-12-07 Schwäbische Hüttenwerke Automotive GmbH Gas pump with pressure relief to reduce the starting torque
GB2533621B (en) 2014-12-23 2019-04-17 Edwards Ltd Rotary screw vacuum pumps
CN105526171A (en) * 2016-02-05 2016-04-27 无锡明治泵业有限公司 Structure of vehicle vacuum pump for reducing quantity of oil accumulated in pump cavity
CN105526174A (en) * 2016-02-05 2016-04-27 无锡明治泵业有限公司 Mechanism for reducing quantity of oil accumulated in pump cavity of vacuum pump
IT201700115881A1 (en) * 2017-10-13 2019-04-13 D V P Vacuum Tech S P A PUMP FOR LUBRICATED VACUUM
CN112963349A (en) * 2021-01-22 2021-06-15 淄博真空泵厂有限公司 Novel water ring vacuum unit
JP7052101B1 (en) * 2021-01-27 2022-04-11 株式会社アルバック Vacuum pump and vacuum pump decompression method
WO2024078678A1 (en) 2022-10-10 2024-04-18 Busch Produktions Gmbh Improved sliding vane rotary pump

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3053439A (en) * 1957-07-24 1962-09-11 Leybolds Nachfolger E Rotary vacuum pump
US3040973A (en) * 1958-12-02 1962-06-26 Prec Scient Company Vacuum pump
DE1123076B (en) 1959-04-18 1962-02-01 Leybolds Nachfolger E Rotating mechanical vacuum pump
US3326456A (en) * 1965-09-13 1967-06-20 Prec Scient Company Check valve for a vacuum pump
US3301474A (en) 1965-09-24 1967-01-31 Bendix Balzers Vacuum Inc Oil sealed mechanical rotary vacuum pump
GB1140452A (en) * 1966-03-16 1969-01-22 Edwards High Vacuum Int Ltd Improvements relating to liquid sealed mechanical vacuum pumps
JPS4910005B1 (en) * 1969-01-20 1974-03-07
JPS4911645B1 (en) * 1969-09-22 1974-03-19
US3782868A (en) * 1971-11-26 1974-01-01 Componetrol Rotary vane pump
NL173343C (en) 1972-03-29 1984-01-02 Philips Nv Apparatus for reading a disc-shaped record carrier with image and / or audio signals encoded in optical form.
JPS5343209Y2 (en) 1973-10-26 1978-10-18
DE2401177A1 (en) 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Noise suppression type rotary piston vacuum pump - has connecting outlet chamber above oil level with compression chamber
FR2383335A1 (en) 1977-03-08 1978-10-06 Leybold Heraeus Sogev MECHANICAL PUMP WITH OIL SEAL
JPS5343209U (en) * 1977-09-01 1978-04-13
JPS5676186U (en) 1979-11-17 1981-06-22
JPS57172482A (en) 1981-04-17 1982-10-23 Hitachi Ltd Image position detecting system
DE3616515A1 (en) * 1986-05-16 1987-11-19 Mugioiu Dipl Ing Ioan Slide vane rotary vacuum pump
DE4016014C2 (en) * 1989-06-01 1998-02-19 Barmag Barmer Maschf Vane vacuum pump
DE3933047A1 (en) * 1989-10-04 1991-04-11 Barmag Barmer Maschf Pressurised liq. flow dispensing mechanism
DE19961317C1 (en) * 1999-12-18 2001-06-28 Bayerische Motoren Werke Ag Vacuum pump, in particular vane vacuum pump
DE10194275B4 (en) * 2000-10-11 2015-09-03 Magna Powertrain Hückeswagen GmbH Vacuum pump for a servo drive in a motor vehicle
JP2002349458A (en) 2001-05-22 2002-12-04 Matsushita Electric Ind Co Ltd Hermetically closed type scroll compressor
GB2380523A (en) * 2001-06-27 2003-04-09 Luk Automobiltech Gmbh & Co Kg Vacuum generator
JP4294589B2 (en) 2002-09-11 2009-07-15 エスペック株式会社 Electroless plating solution, electroless plating method and electroless plating object using the same
EP1890040B1 (en) 2002-11-13 2012-06-27 ixetic Hückeswagen GmbH Vacuum pump
CN2688932Y (en) * 2004-01-18 2005-03-30 吴允叔 Rotary anti-oil-returning vacuum/compression two-purpose pumps

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012002881U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump
DE202012002882U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump
DE202012002883U1 (en) * 2012-03-22 2013-06-25 Oerlikon Leybold Vacuum Gmbh Rotary vacuum pump

Also Published As

Publication number Publication date
US20090297376A1 (en) 2009-12-03
US20130251578A1 (en) 2013-09-26
EP1899608A1 (en) 2008-03-19
JP2008545096A (en) 2008-12-11
US8469684B2 (en) 2013-06-25
WO2007006666A1 (en) 2007-01-18
KR20080024149A (en) 2008-03-17
CN101203677A (en) 2008-06-18
US9017051B2 (en) 2015-04-28
CN101203677B (en) 2011-04-06
KR101291228B1 (en) 2013-07-31
JP4996601B2 (en) 2012-08-08
DE102005031718A1 (en) 2007-01-18

Similar Documents

Publication Publication Date Title
EP1899608B1 (en) Rotary vacuum pump
DE2223156C2 (en) Vane compressors
DE4212169C2 (en) Dynamic locking system for the lubricating oil in the bearings of a centrifugal compressor
EP1890040B1 (en) Vacuum pump
DE1503507C3 (en) Vane compressors
EP2836722B1 (en) Vacuum-type rotary slide pump
EP0084085B1 (en) Vacuum pump with a suction branch valve, and method for its operation
DE4030295C2 (en) Pump unit with control valve
DE1915574A1 (en) Rotary piston pump
WO2009018906A1 (en) Vacuum pump
DE3906823A1 (en) Vane vacuum pump
DE4008522C2 (en)
DE202012002883U1 (en) Rotary vacuum pump
DE2029280A1 (en) Vacuum pump
DE3027898A1 (en) FLYING WHEEL FLUID MOTOR
DE202005022024U1 (en) Rotary vacuum pump
DE3303906A1 (en) DISPLACEMENT MACHINE FOR FLUIDE
EP1026401B1 (en) Hydrostatic pump
DE3801306A1 (en) Vane-cell compressor
DE4438696A1 (en) Vane pump
DE3922417C2 (en)
DE10130953C2 (en) Vane or roller cell pump
EP3650703B1 (en) Vacuum pump and method for lubrication of same
DE4123938A1 (en) Liquid ring vacuum pump - has pressure medium fed directly to slide ring seal chamber and vane chamber
DE202012002881U1 (en) Rotary vacuum pump

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20080103

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE ES FR IT

DAX Request for extension of the european patent (deleted)
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1110928

Country of ref document: HK

RBV Designated contracting states (corrected)

Designated state(s): DE ES FR IT

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

DAX Request for extension of the european patent (deleted)
GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

RIN1 Information on inventor provided before grant (corrected)

Inventor name: FIGONI, ERIC

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE ES FR IT

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502006010433

Country of ref document: DE

Effective date: 20111215

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

26 Opposition filed

Opponent name: AGILENT TECHNOLOGIES DEUTSCHLAND GMBH

Effective date: 20120503

PLAX Notice of opposition and request to file observation + time limit sent

Free format text: ORIGINAL CODE: EPIDOSNOBS2

REG Reference to a national code

Ref country code: DE

Ref legal event code: R026

Ref document number: 502006010433

Country of ref document: DE

Effective date: 20120503

PLBB Reply of patent proprietor to notice(s) of opposition received

Free format text: ORIGINAL CODE: EPIDOSNOBS3

PLAY Examination report in opposition despatched + time limit

Free format text: ORIGINAL CODE: EPIDOSNORE2

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120130

PLBC Reply to examination report in opposition received

Free format text: ORIGINAL CODE: EPIDOSNORE3

RDAF Communication despatched that patent is revoked

Free format text: ORIGINAL CODE: EPIDOSNREV1

APBM Appeal reference recorded

Free format text: ORIGINAL CODE: EPIDOSNREFNO

APBP Date of receipt of notice of appeal recorded

Free format text: ORIGINAL CODE: EPIDOSNNOA2O

APAH Appeal reference modified

Free format text: ORIGINAL CODE: EPIDOSCREFNO

APBQ Date of receipt of statement of grounds of appeal recorded

Free format text: ORIGINAL CODE: EPIDOSNNOA3O

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 11

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 502006010433

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE

Ref country code: DE

Ref legal event code: R082

Ref document number: 502006010433

Country of ref document: DE

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: LEYBOLD GMBH

REG Reference to a national code

Ref country code: FR

Ref legal event code: CD

Owner name: LEYBOLD GMBH, DE

Effective date: 20170313

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 12

PLBP Opposition withdrawn

Free format text: ORIGINAL CODE: 0009264

APBU Appeal procedure closed

Free format text: ORIGINAL CODE: EPIDOSNNOA9O

REG Reference to a national code

Ref country code: DE

Ref legal event code: R100

Ref document number: 502006010433

Country of ref document: DE

PLCK Communication despatched that opposition was rejected

Free format text: ORIGINAL CODE: EPIDOSNREJ1

PLBN Opposition rejected

Free format text: ORIGINAL CODE: 0009273

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: OPPOSITION REJECTED

27O Opposition rejected

Effective date: 20180507

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 13

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230421

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240617

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20240621

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240628

Year of fee payment: 19