EP1893550A1 - Metal-coated graphite film - Google Patents

Metal-coated graphite film

Info

Publication number
EP1893550A1
EP1893550A1 EP06753638A EP06753638A EP1893550A1 EP 1893550 A1 EP1893550 A1 EP 1893550A1 EP 06753638 A EP06753638 A EP 06753638A EP 06753638 A EP06753638 A EP 06753638A EP 1893550 A1 EP1893550 A1 EP 1893550A1
Authority
EP
European Patent Office
Prior art keywords
metal
graphite foil
coated
graphite
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06753638A
Other languages
German (de)
French (fr)
Inventor
Oswin ÖTTINGER
Martin Christ
Ludger Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SGL Carbon SE
Original Assignee
SGL Carbon SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGL Carbon SE filed Critical SGL Carbon SE
Priority to EP06753638A priority Critical patent/EP1893550A1/en
Publication of EP1893550A1 publication Critical patent/EP1893550A1/en
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • C01B32/22—Intercalation
    • C01B32/225—Expansion; Exfoliation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/522—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/536—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite based on expanded graphite or complexed graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/4529—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/515—Other specific metals
    • C04B41/5155—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0206—Metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0213—Gas-impermeable carbon-containing materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0204—Non-porous and characterised by the material
    • H01M8/0223—Composites
    • H01M8/0228—Composites in the form of layered or coated products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0267—Collectors; Separators, e.g. bipolar separators; Interconnectors having heating or cooling means, e.g. heaters or coolant flow channels
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00853—Uses not provided for elsewhere in C04B2111/00 in electrochemical cells or batteries, e.g. fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • the present invention relates to graphite foils having a metal coating of at most 100 nm thickness and their preparation and use.
  • Graphite foil is produced by compacting and compressing graphite expandate.
  • Graphite expandate is formed when graphite intercalation compounds or graphite salts, e.g. Graphite hydrogen sulfate or graphite nitrate, are shocked heated.
  • the volume of the graphite particles increases by a factor of 200 to 400, and the bulk density drops to 2 to 20 g / l.
  • the resulting graphite expandate consists of worm or accordion-shaped, bulky aggregates. If these particles are compacted under pressure, they interlock and interlock with each other. Due to this effect, self-supporting flat structures, e.g. Foils or plates.
  • Graphite foil is characterized by high electrical and thermal conductivity in the plane, i. perpendicular to the pressing direction, and easy adaptation to adjacent surfaces.
  • graphite foil on at least one surface completely or partially with a coating of metal.
  • This coating can perform various functions such as mechanical reinforcement, increase the thermal and electrical conductivity and corrosion protection.
  • a metallic surface is needed in particular if the graphite foil components are to be connected by solder joints or welded joints to other, in particular metallic, components or to other expanded graphite components.
  • the patent US 5 100 737 discloses flexible laminations of at least one layer of graphite foil with a metal layer, for example of copper or nickel, on at least one of its surfaces.
  • the thickness of the graphite foil is 0.1 to 10 mm, that of the metal layer 1 to 200 ⁇ m, preferably between 3 and 50 ⁇ m.
  • the laminates are used in electrical shields, seals or heat sinks.
  • additional bond layers are provided on the graphite and / or metal layers to interconnect a plurality of such layer composites.
  • the bonding layer can be formed as a thin metal layer (thickness 1 to 5 ⁇ m) or as an adhesive layer.
  • the production of the metal layers is preferably carried out by chemical (ie, currentless means of a reducing agent) or electrodeposition.
  • metal-coated graphite sheets are also known. Stacking arrangements of such metal-coated graphite sheets are used as abrasive bodies in contact brushes of electrical machines.
  • the application of the layer can be carried out by the known thin-film methods, such as electroplating, electroless electroless plating, plasma or ion plating, sputtering or vapor deposition.
  • the vapor deposition technique is preferred, since here a particularly good adhesion of the metal to the graphite foil is achieved.
  • the thickness of the applied layers is between 0.1 and 500 .mu.m, preferably between 1 and 50 .mu.m.
  • the present invention relates to graphite foil having an at least one-sided, metal coating, wherein the metal layer has a thickness of at most 100 nm.
  • the invention also relates to flat, strip-like o.a. Semi-finished graphite foil, wherein at least one of the flat sides and at least one of the edges of the semifinished product has a metallic coating with a thickness of at most 100 nm.
  • the coated graphite films according to the invention have several advantageous properties.
  • the thin metal coating provides excellent protection of the surface of the graphite foil and possibly also the edges of a graphite foil semifinished product against breaking, peeling or flaking off of graphite particles.
  • Another object of the invention is to provide a method for producing metal coatings on graphite foil whose thickness does not exceed 100 nm.
  • the invention further relates to combinations of such coated graphite films and their
  • FIG. 1 shows by way of example a component in which semi-finished products of graphite foil coated according to the invention are brazed together.
  • FIG. 2 shows a heat sink whose fins consist of graphite foils coated in accordance with the invention in the fastening area.
  • the metal or metals coated on the graphite foil are selected according to the intended application. May be mentioned by way of example
  • Coatings of aluminum or copper which allow the production of solder joints to other components made of metal or metal-coated materials, as well as coatings of nickel, silver, gold or platinum metals.
  • the coating can be several
  • extended surfaces for example webs
  • graphite foil If extended surfaces, for example webs, are to be coated from graphite foil, then, for example, by means of continuous vapor deposition with the desired metal.
  • a plastic film e.g. a film of PET
  • the graphite foil is now vapor-coated on one side with metal.
  • the plastic film is mechanically removed again after vapor deposition from the uncoated surface of the graphite foil.
  • the invention is not bound to this process, suitable for the production of the coated graphite foil according to the invention are also other methods from the group of "PVD” (physical vapor deposition) methods such as sputtering and ion beam methods Manufacturing processes consist in the galvanic or electroless deposition of the metal layer.
  • PVD physical vapor deposition
  • This approach has the advantage that in addition to the flat sides, the edges of the film pieces can be coated.
  • the edges of the film pieces can be coated.
  • the positioning or orientation of the evaporation source must be varied accordingly.
  • certain areas of the surface of the graphite foil may be masked so that they remain uncoated.
  • certain structures patterns
  • Graphite sheets initially coated on one side with metal may be formed on both sides by laminating two single-side coated films with the coated surfaces facing outwardly, respectively. on both outer sides, metal-coated laminates of graphite sheets are produced.
  • vapor deposition systems which make lower demands on the tensile strength of the film to be coated, so that no lamination is necessary, a two-sided coating in one pass is possible.
  • the graphite foils to be coated have a density of at most 1.9 g / cm 3 , preferably from 0.3 to 1.9 g / cm 3 and particularly preferably from 0.3 to 1.3 g / cm 3 .
  • the graphite foil may be impregnated with a resin or the like prior to the application of the metal layer to fill and close the pores in the foil. This prevents the metal to be deposited on the film from getting inside the film.
  • Particularly advantageous is impregnation of the film prior to the galvanic or electroless deposition of metal from an electrolyte bath, because the impregnation reduces the penetration of the liquid electrolyte into the pores and thus reduces the expense for the subsequent drying of the coated film.
  • the metal-coated graphite sheets of the present invention may be used, for example, to transfer, dissipate and distribute heat, e.g. be used in electronic devices.
  • the use of graphite foil for thermal management in electronic devices is known, for example, from US Pat. No. 6,482,520. This document discloses a thermal management device comprising a heat source in contact on one of its outer surfaces with a heat-dissipating graphite foil, a so-called thermal interface.
  • the surface of the graphite foil facing away from the heat source is in contact with a heat sink.
  • the metal coatings proposed according to the invention combine the advantage of protecting the surface against the exfoliation of graphite particles with the advantage of thermal conductivity.
  • the thermal conductivity is anisotropic with preferential heat conduction in the film plane, whereas in metals it is isotropic.
  • the metal layer which conducts heat to a high degree due to its isotropy the same can be effected.
  • Coated graphite films according to the invention are used, for example, for the production of heat exchangers, heat spreaders, heat sinks or bipolar cooling plates for fuel cell stacks.
  • the inventive combination of lateral conduction of electric current or heat in the graphite foil and isotropic conduction of electric current or heat in the Metal layer be exploited.
  • the required semi-finished products for example square or rectangular pieces of foil or film strips, are cut or punched out of the graphite foil coated according to the invention.
  • the desired semifinished products could be cut or punched out of an uncoated film web and then coated.
  • This approach has the advantage that in addition to the flat sides, the edges of the semi-finished products can be provided with the metal coating, so that the semi-finished products are protected in the area of the edges against the breaking, peeling or flaking of graphite particles.
  • Laminates of metal-coated graphite foils can also be used as semi-finished products for the construction of three-dimensional structures.
  • a thin adhesive layer can be applied to the metal coating.
  • this should be as thin as possible in order not to impair the heat transfer to the metal layer. Good results were achieved with 10 ⁇ m thick adhesive layers.
  • non-metal-coated side of the graphite foil is also provided for attachment to another component, this can be done in the same way with a thin layer of adhesive.
  • metal coated graphite sheets may be prefabricated with an adhesive layer on the metal layer and / or on the non-metal coated surface which is covered with a peelable plastic film and peeled off just prior to use.
  • a sheet of graphite foil having a thickness of 0.4 mm and a density of 1.2 g / cm 3 was laminated on one side with a PET film of thickness 12 ⁇ m in order to increase the tensile strength of the graphite foil.
  • the length of the film was about 50 m, the width about 1 m.
  • This film composite of graphite and PET film was vapor-deposited on one side on the non-PET film-covered surface of the graphite foil with aluminum in a continuous high-vacuum coating system. The running speed of the film in the coating system was about 5 m / s.
  • To determine the thickness of the aluminum layer a 30 ⁇ 70 mm 2 sample of the coated film composite was punched. The PET film was mechanically removed from the sample.
  • Atomic emission spectroscopy was used to determine the aluminum content of the remaining graphite-aluminum layer composite (260 ⁇ g). From the area of the sample and the mass of the aluminum layer, the area-related mass of the aluminum layer was determined (0.12 g / m 2 ). Based on the density of aluminum (2.7 g / cm 3 ), the thickness of the vapor-deposited aluminum layer was calculated to be approximately 45 nm.
  • the soldered foil strips adhered very well to the graphite foil.
  • the PET foil laminated with aluminum during the vacuum coating of the graphite foil burned off without residue during the kiln travel. Due to the relatively slow heating bubble formation was prevented by outgassing of the film.
  • soldered plates increases by about 0.4 mm (solder layer) at the superimposed points.
  • An aluminum layer can no longer be determined optically at these locations.
  • the heat sink according to Figure 2 containsdefmnen 4 graphite foil, which protrude from a base plate 5 and dissipate heat therefrom.
  • a base plate 5 On the surface of the base plate 5, which usually consists of metal, recesses for receiving thedefmnen 4 are provided.
  • the cooling fins 4 are soldered in the recesses of the base plate.
  • the cooling fins 4 made of graphite foil are provided with a metal coating according to the invention, at least in the region of their surface which projects into the recess (the fastening region).
  • a base plate made of graphite may be used, in which the wall surfaces of the recesses are coated with metal, so that graphite foil fins, which in the Attachment area are provided with a metal coating according to the invention can be fixed by means of soldering in the recesses of the base plate.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Composite Materials (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

The present invention relates to graphite films with a metal coating at most 100 nm thick and to production thereof, for example by continuous vapour deposition on graphite film, and to use thereof. In spite of the only small thickness of the metal layer, the graphite films can be connected to one another or to other components of metal or metal-coated materials by soldering. Furthermore, the thin metal coating protects the surface of the graphite film against particles breaking out or peeling or flaking off.

Description

Metallbeschichte GraphitfolieMetal coated graphite foil
Die vorliegende Erfindung betrifft Graphitfolien mit einer höchstens 100 nm dicken Metall- beschichtung sowie deren Herstellung und Verwendung.The present invention relates to graphite foils having a metal coating of at most 100 nm thickness and their preparation and use.
Graphitfolie wird durch Verdichten und Zusammenpressen von Graphitexpandat hergestellt. Graphitexpandat entsteht, wenn Graphiteinlagerungsverbindungen bzw. Graphitsalze, z.B. Graphithydrogensulfat oder Graphitnitrat, schockartig erhitzt werden. Dabei vergrößert sich das Volumen der Graphitpartikel um den Faktor 200 bis 400, und die Schüttdichte sinkt auf 2 bis 20 g/l. Das so erhaltene Graphitexpandat besteht aus wurm- oder ziehharmonikaförmigen, sperrigen Aggregaten. Werden diese Partikel unter Druck verdichtet, so verhaken und verzahnen sie sich untereinander. Aufgrund dieses Effekts lassen sich ohne Binderzusatz selbsttragende flächige Gebilde, z.B. Folien oder Platten, herstellen. Graphitfolie zeichnet sich aus durch hohe elektrische und thermische Leitfähigkeit in der Ebene, d.h. senkrecht zur Pressrichtung, und leichte Anpassung an benachbarte Oberflächen.Graphite foil is produced by compacting and compressing graphite expandate. Graphite expandate is formed when graphite intercalation compounds or graphite salts, e.g. Graphite hydrogen sulfate or graphite nitrate, are shocked heated. The volume of the graphite particles increases by a factor of 200 to 400, and the bulk density drops to 2 to 20 g / l. The resulting graphite expandate consists of worm or accordion-shaped, bulky aggregates. If these particles are compacted under pressure, they interlock and interlock with each other. Due to this effect, self-supporting flat structures, e.g. Foils or plates. Graphite foil is characterized by high electrical and thermal conductivity in the plane, i. perpendicular to the pressing direction, and easy adaptation to adjacent surfaces.
Für bestimmte Anwendungen ist es nötig, Graphitfolie an mindestens einer Oberfläche voll- flächig oder teilweise mit einer Beschichtung aus Metall zu versehen. Diese Beschichtung kann verschiedene Funktionen erfüllen wie mechanische Verstärkung, Steigerung der thermi- sehen und elektrischen Leitfähigkeit und Korrosionsschutz. Außerdem wird eine metallische Oberfläche insbesondere dann benötigt, wenn die Bauteile aus Graphitfolie durch Lötstellen oder Schweißverbindungen mit anderen, insbesondere metallischen Bauteilen oder mit anderen Bauteilen aus expandiertem Graphit verbunden werden sollen.For certain applications, it is necessary to provide graphite foil on at least one surface completely or partially with a coating of metal. This coating can perform various functions such as mechanical reinforcement, increase the thermal and electrical conductivity and corrosion protection. In addition, a metallic surface is needed in particular if the graphite foil components are to be connected by solder joints or welded joints to other, in particular metallic, components or to other expanded graphite components.
Das Patent US 5 100 737 offenbart flexible Schichtverbunde aus mindestens einer Lage Graphitfolie mit einer Metallschicht, beispielsweise aus Kupfer oder Nickel, auf mindestens einer ihrer Oberflächen. Die Dicke der Graphitfolie beträgt 0,1 bis 10 mm, die der Metallschicht 1 bis 200 μm, bevorzugt zwischen 3 und 50 μm. Die Schichtverbunde werden angewendet in elektrischen Abschirmungen, Dichtungen oder als Kühlkörper (heat sink). Gegebenenfalls sind auf den Graphit- oder/und Metallschichten zusätzliche Bindungsschichten vorgesehen, um mehrere derartige Schichtverbunde miteinander zu verbinden. Die Bindungsschicht kann als eine dünne Metallschicht (Dicke 1 bis 5 μm) oder als Adhäsiv- schicht ausgebildet sein. Die Herstellung der Metallschichten erfolgt vorzugsweise durch chemische (d.h. stromlos mittels eines Reduktionsmittels) oder galvanische Abscheidung. Zwar werden andere Verfahren zur Metallbeschichtung, wie Besprühen mit dem geschmolzenen Metall, Thermisches Spritzen, Vakuumabscheidungstechniken oder CVD nicht grundsätzlich ausgeschlossen, jedoch sind diese Methoden wegen ihrer mangelnden Eignung für den kontinuierlichen Betrieb weniger bevorzugt. Außerdem werden die Schwierigkeiten, mit diesen Techniken dünne Schichten zu erzielen, hervorgehoben.The patent US 5 100 737 discloses flexible laminations of at least one layer of graphite foil with a metal layer, for example of copper or nickel, on at least one of its surfaces. The thickness of the graphite foil is 0.1 to 10 mm, that of the metal layer 1 to 200 μm, preferably between 3 and 50 μm. The laminates are used in electrical shields, seals or heat sinks. Optionally, additional bond layers are provided on the graphite and / or metal layers to interconnect a plurality of such layer composites. The bonding layer can be formed as a thin metal layer (thickness 1 to 5 μm) or as an adhesive layer. The production of the metal layers is preferably carried out by chemical (ie, currentless means of a reducing agent) or electrodeposition. While other methods of metal plating such as molten metal spraying, thermal spraying, vacuum deposition techniques or CVD are not generally excluded, these methods are less preferred because of their lack of suitability for continuous operation. In addition, the difficulties in achieving thin films with these techniques are highlighted.
Aus dem Patent DE 28 17 371 C2 sind ebenfalls metallbeschichtete Graphitfolien bekannt. Stapelanordnungen solcher metallbeschichteter Graphitfolien werden als Schleifkörper in Kontaktbürsten elektrischer Maschinen eingesetzt. Das Aufbringen der Schicht kann nach den bekannten Dünnschichtverfahren erfolgen wie Elektroplattieren, chemisches stromloses Plattieren, Plasma- oder Ionenplattieren, Sputtern oder Aufdampfen. Die Aufdampftechnik ist bevorzugt, da hier eine besonders gute Haftung des Metalls an der Graphitfolie erreicht wird. In jedem Fall ist bei der Beschichtung eine Erwärmung der Graphitfolie auf mehr als 100 °C zu vermeiden, weil die Graphitfolie sonst zu stark ausgast und dadurch die Haftung des Metalls vermindert wird. Die Dicke der aufgebrachten Schichten liegt zwischen 0,1 und 500 μm, bevorzugt zwischen 1 und 50 μm.From the patent DE 28 17 371 C2 metal-coated graphite sheets are also known. Stacking arrangements of such metal-coated graphite sheets are used as abrasive bodies in contact brushes of electrical machines. The application of the layer can be carried out by the known thin-film methods, such as electroplating, electroless electroless plating, plasma or ion plating, sputtering or vapor deposition. The vapor deposition technique is preferred, since here a particularly good adhesion of the metal to the graphite foil is achieved. In any case, in the coating to prevent heating of the graphite foil to more than 100 ° C, because otherwise the graphite foil outgassed too much and thereby the adhesion of the metal is reduced. The thickness of the applied layers is between 0.1 and 500 .mu.m, preferably between 1 and 50 .mu.m.
Die vorliegende Erfindung betrifft Graphitfolie mit einer zumindest einseitigen, Metallbeschichtung, wobei die Metallschicht eine Dicke von höchstens 100 nm aufweist. Insbesondere betrifft die Erfindung auch flächige, streifenförmige o.a. Halbzeug aus Graphitfolie, wobei mindestens eine der Flachseiten und mindestens einer der Kanten des Halbzeugs eine metallische Beschichtung mit einer Dicke von höchstens 100 nm aufweist. Die erfindungsgemäßen beschichteten Graphitfolien weisen mehrere vorteilhafte Eigenschaften auf. So wurde überraschenderweise festgestellt, dass sich trotz der nur geringen Dicke der Metallschicht die erfindungsgemäßen Graphitfolien ohne Schwierigkeiten durch Löten mit anderen Bauteilen aus Metall oder metallbeschichtetem Graphit verbinden lassen. Außerdem bewirkt die dünne Metallbeschichtung einen hervorragenden Schutz der Oberfläche der Graphitfolie und ggf. auch der Kanten eines Halbzeugs aus Graphitfolie gegen das Herausbrechen, Abblättern oder Abplatzen von Graphitpartikeln.The present invention relates to graphite foil having an at least one-sided, metal coating, wherein the metal layer has a thickness of at most 100 nm. In particular, the invention also relates to flat, strip-like o.a. Semi-finished graphite foil, wherein at least one of the flat sides and at least one of the edges of the semifinished product has a metallic coating with a thickness of at most 100 nm. The coated graphite films according to the invention have several advantageous properties. Thus, it was surprisingly found that, despite the only small thickness of the metal layer, the graphite foils according to the invention can be joined without difficulty by soldering to other components made of metal or metal-coated graphite. In addition, the thin metal coating provides excellent protection of the surface of the graphite foil and possibly also the edges of a graphite foil semifinished product against breaking, peeling or flaking off of graphite particles.
Eine weitere Aufgabe der Erfindung besteht darin, ein Verfahren bereitzustellen, um auf Graphitfolie Metallbeschichtungen herzustellen, deren Dicke 100 nm nicht überschreitet. Die Erfindung betrifft ferner Kombinationen solcher beschichteten Graphitfolien sowie derenAnother object of the invention is to provide a method for producing metal coatings on graphite foil whose thickness does not exceed 100 nm. The invention further relates to combinations of such coated graphite films and their
Anwendung.Application.
Weitere Details und Vorzüge der Erfindung gehen aus der folgenden detailliertenFurther details and advantages of the invention will become apparent from the following detailed
Beschreibung und den Ausführungsbeispielen und Figuren hervor.Description and the embodiments and figures.
Figur 1 zeigt beispielhaft ein Bauteil, in welchem Halbzeuge aus erfindungsgemäß beschichteter Graphitfolie miteinander verlötet sind.FIG. 1 shows by way of example a component in which semi-finished products of graphite foil coated according to the invention are brazed together.
Figur 2 zeigt einen Kühlkörper, dessen Finnen aus im Befestigungsbereich erfindungsgemäß beschichteten Graphitfolien bestehen.FIG. 2 shows a heat sink whose fins consist of graphite foils coated in accordance with the invention in the fastening area.
Das Metall oder die Metalle, mit denen die Graphitfolie beschichtet wird, werden entsprechend der beabsichtigten Anwendung ausgewählt. Beispielhaft genannt seienThe metal or metals coated on the graphite foil are selected according to the intended application. May be mentioned by way of example
Beschichtungen aus Aluminium oder Kupfer, welche die Herstellung von Lötverbindungen zu anderen Bauteilen aus Metall oder metallbeschichteten Werkstoffen ermöglichen, sowie Beschichtungen aus Nickel, Silber, Gold oder Platinmetallen. Die Beschichtung kann mehrereCoatings of aluminum or copper, which allow the production of solder joints to other components made of metal or metal-coated materials, as well as coatings of nickel, silver, gold or platinum metals. The coating can be several
Metalle enthalten.Contain metals.
Sollen ausgedehnte Flächen, beispielsweise Bahnen, aus Graphitfolie beschichtet werden, dann erfolgt beispielsweise mittels kontinuierlicher Bedampfung mit dem gewünschten Metall. Abhängig von der verwendeten Anlage kann es dabei vorteilhaft sein, die Graphitfolie durch einseitiges Kaschieren mit einer Kunststofffolie, z.B. einer Folie aus PET, zu verstärken, um die Reißfestigkeit zu erhöhen. Auf der unkaschierten Oberfläche wird die Graphitfolie nun einseitig mit Metall bedampft. Die Kunststofffolie wird nach erfolgter Bedampfung mechanisch wieder von der unbeschichteten Oberfläche der Graphitfolie entfernt.If extended surfaces, for example webs, are to be coated from graphite foil, then, for example, by means of continuous vapor deposition with the desired metal. Depending on the equipment used, it may be advantageous to coat the graphite foil by laminating it with a plastic film, e.g. a film of PET, to increase the tear strength. On the non-laminated surface, the graphite foil is now vapor-coated on one side with metal. The plastic film is mechanically removed again after vapor deposition from the uncoated surface of the graphite foil.
Jedoch ist die Erfindung nicht an dieses Verfahren gebunden, zur Herstellung der erfϊndungsgemäßen beschichteten Graphitfolie geeignet sind auch andere Verfahren aus der Gruppe der „PVD"- Verfahren (physical vapour deposition) wie beispielsweise Beschichtung durch Zerstäuben (Sputtern) und durch Ionenstrahlverfahren. Alternativen zu diesen Herstellungsverfahren bestehen in der galvanischen oder stromlosen Abscheidung der Metallschicht.However, the invention is not bound to this process, suitable for the production of the coated graphite foil according to the invention are also other methods from the group of "PVD" (physical vapor deposition) methods such as sputtering and ion beam methods Manufacturing processes consist in the galvanic or electroless deposition of the metal layer.
Anstelle einer kontinuierlichen Bahn aus Graphitfolie können auch einzelne Halbzeuge aus Graphitfolie, die bereits die für die beabsichtigte Anwendung benötigte Größe und Form aufweisen, beispielsweise quadratische oder rechteckige Folienstücke oder Folienstreifen, mit einer Metallschicht eine Dicke von höchstens 100 nm versehen werden. Unter Halbzeug werden hier allgemein Gebilde aus Graphitfolie mit im Gegensatz zu kontinuierlichen Folienbahnen begrenzter flächiger Ausdehnung verstanden, wobei die Form dieser Fläche beliebig ist und sich im wesentlichen nach der beabsichtigen Anwendung richtet.Instead of a continuous sheet of graphite foil and individual graphite foil semi-finished products, which already have the size and shape required for the intended application have, for example, square or rectangular pieces of foil or film strips, provided with a metal layer has a thickness of at most 100 nm. Semi-finished products are generally understood to mean structures made of graphite foil with limited areal extent, in contrast to continuous foil webs, the shape of this area being arbitrary and being directed essentially according to the intended use.
Diese Vorgehensweise hat den Vorteil, dass neben den Flachseiten auch die Kanten der Folienstücke beschichtet werden können. Beim Hantieren, Verarbeiten, Einbauen usw. sind nämlich insbesondere die Kanten der flächigen, streifenförmigen o.a. Halbzeuge mechanischen Belastungen durch Stoß o.a. ausgesetzt. Daher ist es ein besonders erwünscht, neben den Flachseiten auch die Kanten durch eine geeignete Beschichtung gegen das Herausbrechen, Abblättern oder Abplatzen von Graphitpartikeln zu schützen. Dies wird durch die Beschichtung gemäß der vorliegenden Erfindung ermöglicht.This approach has the advantage that in addition to the flat sides, the edges of the film pieces can be coated. When handling, processing, installation, etc. namely namely the edges of the flat, strip-like o.a. Semi-finished mechanical loads due to impact o.a. exposed. Therefore, it is particularly desirable to protect the edges in addition to the flat sides by a suitable coating against the breaking, peeling or flaking of graphite particles. This is made possible by the coating according to the present invention.
Beim Bedampfungsverfahren muss ggf., um Abschattungseffekte an den Kanten der Folienstücke zu vermeiden, die Positionierung bzw. Ausrichtung der Bedampfungsquelle entsprechend variiert werden.When steaming, if necessary, to avoid shading effects at the edges of the film pieces, the positioning or orientation of the evaporation source must be varied accordingly.
Falls gewünscht, können bestimmte Bereiche der Oberfläche der Graphitfolie maskiert werden, so dass sie unbeschichtet bleiben. So können durch die Beschichtung ausgewählter Bereiche auf der Oberfläche der Graphitfolie bestimmte Strukturen (Muster) gebildet werden.If desired, certain areas of the surface of the graphite foil may be masked so that they remain uncoated. Thus, by coating selected areas on the surface of the graphite foil certain structures (patterns) can be formed.
Aus zunächst einseitig mit Metall beschichteten Graphitfolien können durch Laminieren von zwei einseitig beschichteten Folien, wobei die beschichteten Oberflächen jeweils nach außen gewandt sind, beidseitig, d.h. an beiden Außenseiten, mit Metall beschichtete Laminate aus Graphitfolien hergestellt werden. Alternativ ist bei der Verwendung von Bedampfungsanlagen, die niedrigere Anforderungen an die Zugfestigkeit der zu beschichtenden Folie stellen, so dass keine Kaschierung nötig ist, auch eine beidseitige Beschichtung in einem Durchlauf möglich.Graphite sheets initially coated on one side with metal may be formed on both sides by laminating two single-side coated films with the coated surfaces facing outwardly, respectively. on both outer sides, metal-coated laminates of graphite sheets are produced. Alternatively, with the use of vapor deposition systems, which make lower demands on the tensile strength of the film to be coated, so that no lamination is necessary, a two-sided coating in one pass is possible.
Die zu beschichtenden Graphitfolien haben eine Dichte von maximal 1,9 g/cm3, bevorzugt von 0,3 bis 1,9 g/cm3 und besonders bevorzugt von 0,3 bis 1,3 g/cm3.The graphite foils to be coated have a density of at most 1.9 g / cm 3 , preferably from 0.3 to 1.9 g / cm 3 and particularly preferably from 0.3 to 1.3 g / cm 3 .
Falls erforderlich, kann die Graphitfolie vor dem Aufbringen der Metallschicht mit einem Harz o.a. imprägniert werden , um die Poren in der Folie zu füllen und zu schließen. Dadurch wird verhindert, dass das auf der Folie abzuscheidende Metall ins Innere der Folie gelangt. Besonders vorteilhaft ist eine Imprägnierung der Folie vor der galvanischen oder stromlosen Abscheidung von Metall aus einem Elektrolytbad, weil durch die Imprägnierung das Eindringen des flüssigen Elektrolyts in die Poren vermindert und so der Aufwand für die anschließende Trocknung der beschichteten Folie reduziert wird.If necessary, the graphite foil may be impregnated with a resin or the like prior to the application of the metal layer to fill and close the pores in the foil. This prevents the metal to be deposited on the film from getting inside the film. Particularly advantageous is impregnation of the film prior to the galvanic or electroless deposition of metal from an electrolyte bath, because the impregnation reduces the penetration of the liquid electrolyte into the pores and thus reduces the expense for the subsequent drying of the coated film.
Die erfindungsgemäßen metallbeschichteten Graphitfolien können beispielsweise zur Übertragung, Ableitung und Verteilung von Wärme, z.B. in elektronischen Geräten benutzt werden. Die Verwendung von Graphitfolie zum Wärmemanagement in elektronischen Geräten ist beispielsweise aus der Patentschrift US 6 482 520 bekannt. Dieses Dokument offenbart eine Wärmemanagement- Vorrichtung umfassend eine Wärmequelle, die an einer ihrer äußeren Oberflächen mit einer der Wärmeableitung dienenden Graphitfolie, einem sogenannten Thermal Interface, in Kontakt steht. Optional steht die von der Wärmequelle abgewandte Oberfläche der Graphitfolie mit einem Kühlkörper in Kontakt. In einer in der Patent- anmeldung US 2002/0163076 beschriebenen Weiterentwicklung dieses Thermal Interface wird vorgeschlagen, zur Vermeidung des Abblätterns von Graphitfolie die von der Wärmequelle abgewandte Oberfläche und ggf. auch die Kanten der Folie mit einer Schutz- beschichtung zu versehen. Es wurden Beschichtungen aus verschiedenen Kunststoffen vorgeschlagen. Diese Beschichtungen sind jedoch thermisch kaum leitfähig, so dass die eigentliche Funktion des Thermal Interface, Wärme abzuleiten, dadurch beeinträchtigt wird.The metal-coated graphite sheets of the present invention may be used, for example, to transfer, dissipate and distribute heat, e.g. be used in electronic devices. The use of graphite foil for thermal management in electronic devices is known, for example, from US Pat. No. 6,482,520. This document discloses a thermal management device comprising a heat source in contact on one of its outer surfaces with a heat-dissipating graphite foil, a so-called thermal interface. Optionally, the surface of the graphite foil facing away from the heat source is in contact with a heat sink. In a further development of this thermal interface described in the patent application US 2002/0163076, it is proposed to provide the surface facing away from the heat source and possibly also the edges of the film with a protective coating in order to avoid the flaking of graphite foil. Coatings of various plastics have been proposed. However, these coatings are thermally hardly conductive, so that the actual function of the thermal interface to dissipate heat, thereby impaired.
Im Gegensatz dazu verbinden die erfindungsgemäß vorgeschlagenen Metallbeschichtungen den Vorteil des Schutzes der Oberfläche gegen das Abblättern von Graphitpartikeln mit dem Vorteil thermischer Leitfähigkeit. In Graphitfolie ist die Wärmeleitfähigkeit anisotrop ausgebildet mit Bevorzugung der Wärme- leitung in der Folienebene, in Metallen hingegen isotrop. Innerhalb der Graphitfolie kann also wegen der bevorzugt lateralen Wärmeausbreitung eine weite flächige Verteilung der Wärme erfolgen, während durch die Metallschicht, die aufgrund ihrer Isotropie auch quer zur Folienebene in hohem Maße Wärme leitet, die Einleitung von Wärme in die Graphitfolie oder die Ableitung von Wärme aus derselben bewirkt werden kann.In contrast, the metal coatings proposed according to the invention combine the advantage of protecting the surface against the exfoliation of graphite particles with the advantage of thermal conductivity. In graphite foil, the thermal conductivity is anisotropic with preferential heat conduction in the film plane, whereas in metals it is isotropic. Within the graphite foil, because of the preferably lateral heat propagation, a wide areal distribution of the heat can take place, while the introduction of heat into the graphite foil or the dissipation of heat can be achieved by the metal layer, which conducts heat to a high degree due to its isotropy the same can be effected.
Aufgrund der Möglichkeit, Löt- und Schweißverbindungen herzustellen, lassen sich aus passend geformten flächigen Halbzeugen aus den erfindungsgemäßen beschichteten Graphitfolien, ggf. in Verbindung mit Bauteilen aus anderen metallbeschichteten Werkstoffen oder aus Metall, dreidimensionalen Strukturen aufbauen. Auf diese Weise können die erfindungsgemäßen beschichteten Graphitfolien beispielsweise zur Herstellung von Wärmetauschern, Wärmeverteilern (heat spreader), Kühlkörpern oder bipolaren Kühlplatten für Brennstoffzellenstacks verwendet werden. In diesen und weiteren denkbaren Anwendungen kann neben dem Vorteil der Erfindung, die Herstellung von Löt- und Schweißverbindungen zu ermöglichen, auch die erfindungsgemäße Kombination aus lateraler Leitung von elektrischem Strom bzw. Wärme in der Graphitfolie und isotroper Leitung von elektrischem Strom bzw. Wärme in der Metallschicht, ausgenutzt werden. Die benötigten Halbzeuge, beispielsweise quadratische oder rechteckige Folienstücke oder Folienstreifen, werden aus der erfindungsgemäß beschichteten Graphitfolie ausgeschnitten oder ausgestanzt. Alternativ könnten auch aus einer unbeschichteten Folienbahn die gewünschten Halbzeuge ausgeschnitten oder ausgestanzt und diese dann beschichtet werden. Diese Vorgehensweise hat den Vorteil, dass neben den Flachseiten auch die Kanten der Halbzeuge mit der Metallbeschichtung versehen werden können, so dass die Halbzeuge auch im Bereich der Kanten gegen das Herausbrechen, Abblättern oder Abplatzen von Graphitpartikeln geschützt sind.Due to the possibility of producing soldered and welded connections, three-dimensional structures can be built up from suitably shaped flat semi-finished products of the coated graphite foils according to the invention, if appropriate in conjunction with components made of other metal-coated materials or of metal. In this way, the Coated graphite films according to the invention are used, for example, for the production of heat exchangers, heat spreaders, heat sinks or bipolar cooling plates for fuel cell stacks. In these and other conceivable applications, in addition to the advantage of the invention to allow the production of solder and welded joints, also the inventive combination of lateral conduction of electric current or heat in the graphite foil and isotropic conduction of electric current or heat in the Metal layer, be exploited. The required semi-finished products, for example square or rectangular pieces of foil or film strips, are cut or punched out of the graphite foil coated according to the invention. Alternatively, the desired semifinished products could be cut or punched out of an uncoated film web and then coated. This approach has the advantage that in addition to the flat sides, the edges of the semi-finished products can be provided with the metal coating, so that the semi-finished products are protected in the area of the edges against the breaking, peeling or flaking of graphite particles.
Auch Laminate aus metallbschichteten Graphitfolien können als Halbzeuge für den Aufbau dreidimensionaler Strukturen eingesetzt werden.Laminates of metal-coated graphite foils can also be used as semi-finished products for the construction of three-dimensional structures.
Für Anwendungsfälle, bei denen ein Befestigen der metallbeschichteten Graphitfolie mittels Löten oder Schweißen nicht möglich oder nicht geeignet ist, kann auf die Metallbeschichtung eine dünne Klebstoffschicht aufgetragen werden. Diese sollte jedoch so dünn wie möglich sein, um den Wärmeübergang zur Metallschicht nicht zu beeinträchtigen. Gute Ergebnisse wurden mit 10 μm dicken Klebstoffschichten erzielt.For applications in which fixing the metal-coated graphite foil by means of soldering or welding is not possible or suitable, a thin adhesive layer can be applied to the metal coating. However, this should be as thin as possible in order not to impair the heat transfer to the metal layer. Good results were achieved with 10 μm thick adhesive layers.
Ist die nicht mit Metall beschichteten Seite der Graphitfolie ebenfalls zur Befestigung an einem anderen Bauteil vorgesehen, kann dies auf die gleiche Weise mit einer dünnen Klebstoffschicht geschehen.If the non-metal-coated side of the graphite foil is also provided for attachment to another component, this can be done in the same way with a thin layer of adhesive.
Der Auftrag des Klebstoffs kann unmittelbar vor der Anwendung erfolgen. Alternativ können metallbeschichtete Graphitfolien mit einer Klebstoffschicht auf der Metallschicht oder/und auf der nicht mit Metall beschichteten Oberfläche vorgefertigt werden, die mit einer abziehbaren Kunststoffolie bedeckt und erst unmittelbar vor dem Gebrauch abgezogen wird. Ausführungsbeispiel 1:The application of the adhesive can be done immediately before use. Alternatively, metal coated graphite sheets may be prefabricated with an adhesive layer on the metal layer and / or on the non-metal coated surface which is covered with a peelable plastic film and peeled off just prior to use. Embodiment 1
Verfahren zum Beschichten von Graphitfolie mit einer dünnen MetallschichtProcess for coating graphite foil with a thin metal layer
Eine Bahn Graphitfolie mit der Dicke 0,4 mm und der Dichte 1 ,2 g/cm3 wurde einseitig mit PET-Folie der Dicke 12 μm kaschiert, um die Zugfestigkeit der Graphitfolie zu steigern. Die Länge der Folie betrug ca. 50 m, die Breite ca. 1 m. Dieser Folienverbund aus Graphit- und PET-Folie wurde in einer kontinuierlich arbeitenden Hochvakuum-Beschichtungsanlage einseitig auf der nicht von PET-Folie bedeckten Oberfläche der Graphitfolie mit Aluminium bedampft. Die Laufgeschwindigkeit der Folie in der Beschichtungsanlage betrug ca. 5 m/s. Zur Bestimmung der Dicke der Aluminiumschicht wurde eine 30 x 70 mm2 große Probe aus dem beschichteten Folienverbund gestanzt. Die PET-Folie wurde mechanisch von der Probe entfernt. Mittels Atomemissionsspektroskopie (ICP-AES) wurde der Aluminiumgehalt des verbleibenden Graphit-Aluminium Schichtverbunds bestimmt (260 μg). Aus der Fläche der Probe und der Masse der Aluminiumschicht wurde die flächenbezogene Masse der Aluminiumschicht ermittelt (0,12 g/m2). Anhand der Dichte von Aluminium (2,7 g/cm3) wurde daraus die Dicke der aufgedampften Aluminiumschicht zu ca. 45 nm berechnet.A sheet of graphite foil having a thickness of 0.4 mm and a density of 1.2 g / cm 3 was laminated on one side with a PET film of thickness 12 μm in order to increase the tensile strength of the graphite foil. The length of the film was about 50 m, the width about 1 m. This film composite of graphite and PET film was vapor-deposited on one side on the non-PET film-covered surface of the graphite foil with aluminum in a continuous high-vacuum coating system. The running speed of the film in the coating system was about 5 m / s. To determine the thickness of the aluminum layer, a 30 × 70 mm 2 sample of the coated film composite was punched. The PET film was mechanically removed from the sample. Atomic emission spectroscopy (ICP-AES) was used to determine the aluminum content of the remaining graphite-aluminum layer composite (260 μg). From the area of the sample and the mass of the aluminum layer, the area-related mass of the aluminum layer was determined (0.12 g / m 2 ). Based on the density of aluminum (2.7 g / cm 3 ), the thickness of the vapor-deposited aluminum layer was calculated to be approximately 45 nm.
Ausfuhrungsbeispiel 2:Exemplary embodiment 2:
Herstellung von Lötverbindungen zwischen erfindungsgemäß mit Aluminium beschichten GraphitfolienProduction of solder joints between graphite foils coated with aluminum according to the invention
Auf eine entsprechend Ausführungsbeispiel 1 einseitig mit einer dünnen Aluminium- beschichtung 2 versehene Graphitfolie 1 wurden Streifen 3 aus weiterer einseitig mit Aluminium 2' beschichteter Graphitfolie gelötet (siehe Figur 1) Dazu wurde zunächst kommerziell erhältliches Hartlötpulver, das unter der Bezeichnung „Amasan" (Hersteller: Fa. Armack GmbH - Löttechnik) vertrieben wird und zum Löten von Aluminium und Leichtmetall ALU22 geeignet ist, mit Wasser angeteigt. Diese Masse wurde mit einem Pinsel auf die mit Aluminium beschichtete Seite der zu verlötenden Folienstreifen aufgebracht und mit Aluminiumpulver der Partikelgröße < 100 μm (Hersteller: Fa. Schlenk Metallpulver GmbH & Co. KG) bestreut. Anschließend wurden die zu verlötenden Folienstreifen auf die mit Aluminium beschichtete Seite der nach dem in Ausführungsbeispiel 1 beschriebenen Verfahren beschichteten Graphitfolie gelegt und zwischen zwei Platten, die zur Fixierung dienten, in einen kalten Ofen eingebaut. Der Ofen wurde in ca. 2 h auf 650 0C auf- geheizt. Diese Temperatur wurde für 20 min gehalten, anschließend kühlten die Proben im Ofen aus.On a corresponding embodiment 1 on one side with a thin aluminum coating 2 provided graphite foil 1 strips 3 from further on one side with aluminum 2 'coated graphite foil were soldered (see Figure 1) this was first commercially available brazing powder, sold under the name "Amasan" (manufacturer : Armack GmbH - Löttechnik) and is suitable for soldering aluminum and light alloy ALU22, with water.This mass was applied with a brush on the aluminum-coated side of the film strips to be soldered and with aluminum powder of particle size <100 microns (Manufacturer: Schlenk Metallpulver GmbH & Co. KG) The film strips to be soldered were then placed on the aluminum-coated side of the graphite foil coated according to the method described in working example 1 and placed between two plates, which were used for fixing cold oven installed The oven was heated to 650 ° C. in about 2 hours. heated. This temperature was held for 20 minutes, then the samples cooled in the oven.
Die aufgelöteten Folienstreifen hafteten sehr gut auf der Graphitfolie. Die zur Verstärkung während der Vakuumbeschichtung der Graphitfolie mit Aluminium auflaminierte PET-Folie brannte während der Ofenfahrt rückstandsfrei ab. Durch die relativ langsame Aufheizung wurde Blasenbildung durch Ausgasen der Folie unterbunden.The soldered foil strips adhered very well to the graphite foil. The PET foil laminated with aluminum during the vacuum coating of the graphite foil burned off without residue during the kiln travel. Due to the relatively slow heating bubble formation was prevented by outgassing of the film.
Die Dicke der gelöteten Platten erhöht sich um ca. 0,4 mm (Lötschicht) an den übereinander- liegenden Stellen. Eine Aluminiumschicht kann optisch an diesen Stellen nicht mehr festgestellt werden. Aus der so hergestellte Struktur entsprechend Figur 1 kann durch Auflöten einer weiteren erfindungsgemäßen beschichteten Graphitfolie auf die auf der ersten Graphitfolie 1 aufgelöteten Streifen 3 eine Kanalstruktur gebildet werden, die u.a. in Wärmetauschern einsetzbar ist.The thickness of the soldered plates increases by about 0.4 mm (solder layer) at the superimposed points. An aluminum layer can no longer be determined optically at these locations. From the structure produced in accordance with FIG. 1, by soldering a further coated graphite foil according to the invention onto the strips 3 soldered on the first graphite foil 1, a channel structure can be formed, which i.a. can be used in heat exchangers.
Vergleichsbeispiel zu Ausführungsbeispiel 2Comparative example of embodiment 2
In einem Vergleichsversuch wurden nach dem in vorstehend beschriebenen Verfahren Streifen von nicht beschichteter Graphitfolie auf nicht beschichtete Graphitfolie gelötet. Die Haftung zwischen den verlöteten Teilen war bei diesem Versuch deutlich geringer als bei den Lötverbindungen zwischen mit Aluminium beschichteten Graphitfolien. Einige der Streifen lösten sich komplett, andere zumindest teilweise von der Unterlage ab.In a comparative experiment, strips of uncoated graphite foil were soldered onto uncoated graphite foil according to the method described above. The adhesion between the soldered parts was significantly lower in this experiment than in the solder joints between aluminum coated graphite films. Some of the strips were completely detached, others at least partially from the surface.
Ausführungsbeispiel 3Embodiment 3
Kühlkörper mit eingelöteten Finnen aus GraphitfolieHeat sink with soldered fins made of graphite foil
Der Kühlkörper gemäß Figur 2 enthält Kühlfmnen 4 aus Graphitfolie, die aus einer Grundplatte 5 herausragen und von dieser Wärme abführen. An der Oberfläche der Grundplatte 5, welche üblicherweise aus Metall besteht, sind Ausnehmungen zur Aufnahme der Kühlfmnen 4 vorgesehen. Die Kühlfinnen 4 sind in den Ausnehmungen der Grundplatte eingelötet. Dafür sind die Kühlfinnen 4 aus Graphitfolie zumindest in dem Bereich ihrer Oberfläche, der in die Ausnehmung hineinragt (der Befestigungsbereich), mit einer erfindungsgemäßen Metallbeschichtung versehen.The heat sink according to Figure 2 contains Kühlfmnen 4 graphite foil, which protrude from a base plate 5 and dissipate heat therefrom. On the surface of the base plate 5, which usually consists of metal, recesses for receiving the Kühlfmnen 4 are provided. The cooling fins 4 are soldered in the recesses of the base plate. For this purpose, the cooling fins 4 made of graphite foil are provided with a metal coating according to the invention, at least in the region of their surface which projects into the recess (the fastening region).
Alternativ kann eine Grundplatte aus Graphit verwendet werden, in welcher die Wandflächen der Ausnehmungen mit Metall beschichtet sind, so dass Finnen aus Graphitfolie, die im Befestigungsbereich mit einer erfindungsgemäßen Metallbeschichtung versehen sind, mittels Löten in den Ausnehmungen der Grundplatte befestigt werden können. Alternatively, a base plate made of graphite may be used, in which the wall surfaces of the recesses are coated with metal, so that graphite foil fins, which in the Attachment area are provided with a metal coating according to the invention can be fixed by means of soldering in the recesses of the base plate.

Claims

Patentansprüche claims
1. Graphitfolie mit einer metallischen Beschichtung auf mindestens einer Oberfläche, dadurch gekennzeichnet, dass die Dicke der Beschichtung höchstens 100 nm beträgt.1. graphite foil having a metallic coating on at least one surface, characterized in that the thickness of the coating is at most 100 nm.
2. Metallbeschichtete Graphitfolie nach Anspruch 1, dadurch gekennzeichnet, dass die Beschichtung mindestens eins der Metalle Aluminium, Kupfer Nickel, Silber, Gold oder Platinmetalle enthält.2. Metal-coated graphite foil according to claim 1, characterized in that the coating contains at least one of the metals aluminum, copper, nickel, silver, gold or platinum metals.
3. Metallbeschichtete Graphitfolie nach Anspruch 1, dadurch gekennzeichnet, dass die Graphitfolie mit einem Harz imprägniert ist.3. Metal-coated graphite foil according to claim 1, characterized in that the graphite foil is impregnated with a resin.
4. Metallbeschichtete Graphitfolie nach Anspruch 1 bis 3, dadurch gekennzeichnet, dass nur ausgewählte Bereiche der Oberfläche der Graphitfolie mit Metall beschichtet sind.4. Metal coated graphite foil according to claim 1 to 3, characterized in that only selected areas of the surface of the graphite foil are coated with metal.
5. Metallbeschichtete Graphitfolie nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass sich auf der Metallschicht oder/und auf der nicht mit Metall beschichteten Oberfläche eine Klebstoffschicht mit einer Dicke bis zu 10 μm befindet, die durch eine abziehbare Folie bedeckt ist.5. A metal-coated graphite foil according to any one of claims 1 to 4, characterized in that on the metal layer and / or on the non-metal-coated surface, an adhesive layer having a thickness of up to 10 microns, which is covered by a peelable film.
6. Laminat aus zwei einseitig metallbeschichteten Graphitfolien gemäß Anspruch 1, wobei die Graphitfolien so angeordnet sind, dass ihre metallbeschichteten Oberflächen nach außen weisen, so dass beide Außenseiten des Laminats eine Metallbschichtung aufweisen.6. The laminate of two single-sided metal-coated graphite foils according to claim 1, wherein the graphite foils are arranged so that their metal-coated surfaces face outward, so that both outer sides of the laminate have a metal coating.
7. Flächiges oder streifenförmiges Halbzeug aus Graphitfolie, dadurch gekennzeichnet, dass mindestens eine der Flachseiten und mindestens eine der Kanten des Halbzeugs eine metallische Beschichtung mit einer Dicke von höchstens 100 nm aufweisen.7. A sheet-like or strip-shaped semifinished product of graphite foil, characterized in that at least one of the flat sides and at least one of the edges of the semifinished product have a metallic coating with a thickness of at most 100 nm.
8. Verwendung von metallbeschichteter Graphitfolie nach einem der Ansprüche 1 bis 5 Laminaten aus metallbeschichteter Graphitfolie nach Anspruch 6 bzw. Halbzeugen nach8. Use of metal-coated graphite foil according to one of claims 1 to 5 laminates of metal-coated graphite foil according to claim 6 or semi-finished products according to
Anspruch 7 zur Übertragung, Ableitung oder Verteilung von Wärme, insbesondere in elektronischen Geräten. Claim 7 for transmission, dissipation or distribution of heat, in particular in electronic devices.
9. Verwendung von metallbeschichteter Graphitfolie nach einem der Ansprüche 1 bis 4, Laminaten aus metallbeschichteter Graphitfolie nach Anspruch 6 bzw. Halbzeugen nach Anspruch 7 zur Herstellung von Wärmetauschern, Kühlkörpern, Wärmeverteilern oder bipolaren Kühlplatten für Brennstoffzellenstacks.9. Use of metal-coated graphite foil according to one of claims 1 to 4, laminates of metal-coated graphite foil according to claim 6 or semifinished product according to claim 7 for the production of heat exchangers, heat sinks, heat spreaders or bipolar cooling plates for fuel cell stacks.
10. Verfahren zum Verbinden von Halbzeugen oder Bauteilen aus metallbeschichteter Graphitfolie nach einem der Ansprüche 1 bis 4, Laminaten nach Anspruch 6 bzw. Halbzeugen nach Anspruch 7 miteinander oder mit Halbzeugen oder Bauteilen aus anderen metallbeschichteten Werkstoffen oder aus Metall, dadurch gekennzeichnet, dass die Bauteile miteinander verlötet oder verschweißt werden.10. A method for joining of semi-finished products or components made of metal-coated graphite foil according to one of claims 1 to 4, laminates according to claim 6 or semifinished products according to claim 7 with each other or with semi-finished products or components of other metal-coated materials or of metal, characterized in that the components soldered or welded together.
1 1. Kühlkörper umfassend Kühlfinnen aus Graphitfolie und eine Grundplatte aus Metall mit Ausnehmungen oder eine Grundplatte aus Graphit mit Ausnehmungen, deren Wände metallbeschichtet sind, wobei die Finnen in den Ausnehmungen eingelötet sind, dadurch gekennzeichnet dass die Kühlfinnen aus Graphitfolie zumindest im in die Ausnehmungen hinein ragenden Oberflächenbereich mit einer Metallschicht gemäß Anspruch 1 beschichtet sind.1. Heatsink comprising cooling fins made of graphite foil and a base plate made of metal with recesses or a base plate made of graphite with recesses whose walls are metal coated, wherein the fins are soldered in the recesses, characterized in that the cooling fins of graphite foil at least in the recesses into it protruding surface area are coated with a metal layer according to claim 1.
12. Verfahren zur Herstellung einer einseitigen metallischen Beschichtung auf Graphitfolie, umfassend die Schritte12. A method for producing a one-sided metallic coating on graphite foil, comprising the steps
• einseitiges Kaschieren einer Bahn aus Graphitfolie mit einer Kunststofffolie• one-sided lamination of a web of graphite foil with a plastic film
• kontinuierliches Bedampfen mit dem gewünschten Metall in der gewünschten SchichtdickeContinuous vapor deposition with the desired metal in the desired layer thickness
• mechanisches Entfernen der Kaschierung• mechanical removal of the lamination
13. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass die Graphitfolie mit einer Folie aus PET kaschiert wird.13. The method according to claim 12, characterized in that the graphite foil is laminated with a film of PET.
14. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass die Graphitfolie mit einem Harz imprägniert ist.14. The method according to claim 12, characterized in that the graphite foil is impregnated with a resin.
15. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass ausgewählte Oberflächenbereiche, die unbeschichtet bleiben sollen, mit einer Maskierung abgedeckt werden. 15. The method according to claim 12, characterized in that selected surface areas, which are to remain uncoated, are masked.
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