EP1860688A4 - Abrasif pour dispositif de circuit integre a semi-conducteurs, procede pour polir ledit dispositif et procede de fabrication dudit dispositif - Google Patents

Abrasif pour dispositif de circuit integre a semi-conducteurs, procede pour polir ledit dispositif et procede de fabrication dudit dispositif

Info

Publication number
EP1860688A4
EP1860688A4 EP06714784A EP06714784A EP1860688A4 EP 1860688 A4 EP1860688 A4 EP 1860688A4 EP 06714784 A EP06714784 A EP 06714784A EP 06714784 A EP06714784 A EP 06714784A EP 1860688 A4 EP1860688 A4 EP 1860688A4
Authority
EP
European Patent Office
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
abrasive
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06714784A
Other languages
German (de)
English (en)
Other versions
EP1860688A1 (fr
Inventor
Iori Yoshida
Yoshinori Kon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Seimi Chemical Ltd
AGC Inc
Original Assignee
Asahi Glass Co Ltd
AGC Seimi Chemical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd, AGC Seimi Chemical Ltd filed Critical Asahi Glass Co Ltd
Publication of EP1860688A1 publication Critical patent/EP1860688A1/fr
Publication of EP1860688A4 publication Critical patent/EP1860688A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/0056—Control means for lapping machines or devices taking regard of the pH-value of lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP06714784A 2005-03-16 2006-02-27 Abrasif pour dispositif de circuit integre a semi-conducteurs, procede pour polir ledit dispositif et procede de fabrication dudit dispositif Withdrawn EP1860688A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005074373 2005-03-16
PCT/JP2006/303647 WO2006098141A1 (fr) 2005-03-16 2006-02-27 Abrasif pour dispositif de circuit integre a semi-conducteurs, procede pour polir ledit dispositif et procede de fabrication dudit dispositif

Publications (2)

Publication Number Publication Date
EP1860688A1 EP1860688A1 (fr) 2007-11-28
EP1860688A4 true EP1860688A4 (fr) 2010-08-18

Family

ID=36991494

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06714784A Withdrawn EP1860688A4 (fr) 2005-03-16 2006-02-27 Abrasif pour dispositif de circuit integre a semi-conducteurs, procede pour polir ledit dispositif et procede de fabrication dudit dispositif

Country Status (7)

Country Link
US (1) US8030213B2 (fr)
EP (1) EP1860688A4 (fr)
JP (1) JPWO2006098141A1 (fr)
KR (1) KR20070112453A (fr)
CN (1) CN100578740C (fr)
TW (1) TW200643157A (fr)
WO (1) WO2006098141A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004010487A1 (fr) * 2002-07-22 2004-01-29 Seimi Chemical Co., Ltd. Abrasif pour semi-conducteur, procede de production de celui-ci et procede de polissage
JP2006278522A (ja) * 2005-03-28 2006-10-12 Seimi Chem Co Ltd 半導体集積回路装置用研磨剤、研磨方法および半導体集積回路装置の製造方法
US7585340B2 (en) * 2006-04-27 2009-09-08 Cabot Microelectronics Corporation Polishing composition containing polyether amine
JP4957284B2 (ja) * 2006-04-28 2012-06-20 旭硝子株式会社 磁気ディスク用ガラス基板の製造方法および磁気ディスク
CN101512733A (zh) * 2006-09-11 2009-08-19 旭硝子株式会社 用于半导体集成电路装置的抛光剂、抛光方法以及半导体集成电路装置的制造方法
WO2008032681A1 (fr) * 2006-09-13 2008-03-20 Asahi Glass Co., Ltd. Agent de polissage pour dispositif à semi-conducteur en circuit intégré, procédé de polissage, et procédé de fabrication du dispositif à semi-conducteur en circuit intégré
CN101656209B (zh) * 2008-08-18 2012-03-07 中芯国际集成电路制造(上海)有限公司 化学机械研磨的方法
CN102210012B (zh) * 2008-11-07 2014-12-17 旭硝子株式会社 研磨剂、研磨方法和半导体集成电路装置的制造方法
WO2012098933A1 (fr) * 2011-01-20 2012-07-26 旭硝子株式会社 Agent de polissage, procédé de polissage et procédé de fabrication d'un dispositif de circuit intégré de semi-conducteur
US20140054266A1 (en) * 2012-08-24 2014-02-27 Wiechang Jin Compositions and methods for selective polishing of platinum and ruthenium materials
US9281210B2 (en) * 2013-10-10 2016-03-08 Cabot Microelectronics Corporation Wet-process ceria compositions for polishing substrates, and methods related thereto
JP6423279B2 (ja) * 2015-02-10 2018-11-14 株式会社フジミインコーポレーテッド 研磨用組成物
US9803107B2 (en) * 2015-02-12 2017-10-31 Asahi Glass Company, Limited Polishing agent, polishing method and method for manufacturing semiconductor integrated circuit device
JP2016154208A (ja) * 2015-02-12 2016-08-25 旭硝子株式会社 研磨剤、研磨方法および半導体集積回路装置の製造方法
US11655394B2 (en) * 2017-08-09 2023-05-23 Resonac Corporation Polishing solution and polishing method
CN113004799A (zh) * 2019-12-19 2021-06-22 安集微电子科技（上海）股份有限公司 一种化学机械抛光液

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004022804A (ja) * 2002-06-17 2004-01-22 Disco Abrasive Syst Ltd 研磨装置
US20040132305A1 (en) * 2002-10-31 2004-07-08 Jsr Corporation Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1112561A (ja) 1997-04-28 1999-01-19 Seimi Chem Co Ltd 半導体用研磨剤および半導体用研磨剤の製造方法
US6099604A (en) * 1997-08-21 2000-08-08 Micron Technology, Inc. Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto
WO2000039843A1 (fr) * 1998-12-25 2000-07-06 Hitachi Chemical Company, Ltd. Abrasif cmp, additif liquide pour abrasif cmp et procede de polissage de substrat
JP2001035818A (ja) 1999-07-16 2001-02-09 Seimi Chem Co Ltd 半導体用研磨剤
JP2001185514A (ja) * 1999-12-27 2001-07-06 Hitachi Chem Co Ltd Ｃｍｐ研磨剤及び基板の研磨方法
JP4195212B2 (ja) * 2000-10-23 2008-12-10 花王株式会社 研磨液組成物
KR100416587B1 (ko) * 2000-12-22 2004-02-05 삼성전자주식회사 씨엠피 연마액
JP2003347247A (ja) * 2002-05-28 2003-12-05 Hitachi Chem Co Ltd 半導体絶縁膜用ｃｍｐ研磨剤及び基板の研磨方法
TWI256971B (en) * 2002-08-09 2006-06-21 Hitachi Chemical Co Ltd CMP abrasive and method for polishing substrate
JP2004266155A (ja) * 2003-03-03 2004-09-24 Jsr Corp 化学機械研磨用水系分散体およびこれを用いた化学機械研磨方法ならびに半導体装置の製造方法
JP4267348B2 (ja) * 2003-03-05 2009-05-27 花王株式会社 研磨基板の製造方法
JP2007535118A (ja) * 2003-07-09 2007-11-29 ダイネア ケミカルズ オイ 化学的機械的な平坦化に用いるための非高分子有機粒子
JP2005038924A (ja) * 2003-07-16 2005-02-10 Sanyo Chem Ind Ltd Ｃｍｐプロセス用研磨液
JP2005048125A (ja) * 2003-07-31 2005-02-24 Hitachi Chem Co Ltd Ｃｍｐ研磨剤、研磨方法及び半導体装置の製造方法
US20050159085A1 (en) * 2003-10-30 2005-07-21 Scott Brandon S. Method of chemically mechanically polishing substrates
JP2006278522A (ja) * 2005-03-28 2006-10-12 Seimi Chem Co Ltd 半導体集積回路装置用研磨剤、研磨方法および半導体集積回路装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004022804A (ja) * 2002-06-17 2004-01-22 Disco Abrasive Syst Ltd 研磨装置
US20040132305A1 (en) * 2002-10-31 2004-07-08 Jsr Corporation Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2006098141A1 *

Also Published As

Publication number Publication date
JPWO2006098141A1 (ja) 2008-08-21
CN101142659A (zh) 2008-03-12
WO2006098141A1 (fr) 2006-09-21
US8030213B2 (en) 2011-10-04
EP1860688A1 (fr) 2007-11-28
TW200643157A (en) 2006-12-16
US20080070412A1 (en) 2008-03-20
CN100578740C (zh) 2010-01-06
KR20070112453A (ko) 2007-11-26

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20070823

AK Designated contracting states

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20100721

RIN1 Information on inventor provided before grant (corrected)

Inventor name: YOSHIDA, IORI

Inventor name: KON, YOSHINORI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ASAHI GLASS COMPANY, LIMITED

Owner name: AGC SEIMI CHEMICAL CO., LTD.

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20120901