EP1828440A4 - Pulsmetallabscheidungsverfahren und -vorrichtung - Google Patents
Pulsmetallabscheidungsverfahren und -vorrichtungInfo
- Publication number
- EP1828440A4 EP1828440A4 EP05819032A EP05819032A EP1828440A4 EP 1828440 A4 EP1828440 A4 EP 1828440A4 EP 05819032 A EP05819032 A EP 05819032A EP 05819032 A EP05819032 A EP 05819032A EP 1828440 A4 EP1828440 A4 EP 1828440A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- pulse
- plating method
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
- C25D5/611—Smooth layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0403047A SE0403047D0 (sv) | 2004-12-14 | 2004-12-14 | Pulse-plating method and apparatus |
PCT/SE2005/001928 WO2006065220A1 (en) | 2004-12-14 | 2005-12-14 | Pulse-plating method and apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1828440A1 EP1828440A1 (de) | 2007-09-05 |
EP1828440A4 true EP1828440A4 (de) | 2011-08-03 |
EP1828440B1 EP1828440B1 (de) | 2012-09-19 |
Family
ID=33563210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05819032A Active EP1828440B1 (de) | 2004-12-14 | 2005-12-14 | Pulsmetallabscheidungsverfahren und -vorrichtung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1828440B1 (de) |
SE (1) | SE0403047D0 (de) |
WO (1) | WO2006065220A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT506583B9 (de) * | 2008-10-23 | 2009-12-15 | Happy Plating Gmbh | Elektrochemisches beschichtungsverfahren |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999018266A1 (en) * | 1997-10-06 | 1999-04-15 | Learonal, Inc. | Programmed pulse electroplating process |
EP0868545B1 (de) * | 1995-12-21 | 1999-10-27 | ATOTECH Deutschland GmbH | Verfahren und schaltungsanordnung zur erzeugung von strompulsen zur elektrolytischen metallabscheidung |
WO2002033150A2 (en) * | 2000-10-18 | 2002-04-25 | Tecnu, Inc. | Electrochemical processing power device |
US20020104755A1 (en) * | 2001-02-05 | 2002-08-08 | Toru Arai | Electroplating current supply system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1396436A (en) * | 1973-01-08 | 1975-06-04 | Akad Wissenschaften Ddr | Process for the electrolytic production of hard-magnetic layers |
US4666567A (en) * | 1981-07-31 | 1987-05-19 | The Boeing Company | Automated alternating polarity pulse electrolytic processing of electrically conductive substances |
NL8105150A (nl) * | 1981-11-13 | 1983-06-01 | Veco Beheer Bv | Werkwijze voor het vervaardigen van zeefmateriaal, verkregen zeefmateriaal, alsmede inrichting voor het uitvoeren van de werkwijze. |
US4608138A (en) * | 1984-02-16 | 1986-08-26 | Mitsubishi Denki Kabushiki Kaisha | Electrolytic method and apparatus |
GB8801827D0 (en) * | 1988-01-27 | 1988-02-24 | Jct Controls Ltd | Improvements in electrochemical processes |
JP2001267726A (ja) * | 2000-03-22 | 2001-09-28 | Toyota Autom Loom Works Ltd | 配線基板の電解メッキ方法及び配線基板の電解メッキ装置 |
US20040011654A1 (en) * | 2001-10-16 | 2004-01-22 | Kenji Nakamura | Method of copper plating small diameter hole |
-
2004
- 2004-12-14 SE SE0403047A patent/SE0403047D0/sv unknown
-
2005
- 2005-12-14 EP EP05819032A patent/EP1828440B1/de active Active
- 2005-12-14 WO PCT/SE2005/001928 patent/WO2006065220A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0868545B1 (de) * | 1995-12-21 | 1999-10-27 | ATOTECH Deutschland GmbH | Verfahren und schaltungsanordnung zur erzeugung von strompulsen zur elektrolytischen metallabscheidung |
WO1999018266A1 (en) * | 1997-10-06 | 1999-04-15 | Learonal, Inc. | Programmed pulse electroplating process |
WO2002033150A2 (en) * | 2000-10-18 | 2002-04-25 | Tecnu, Inc. | Electrochemical processing power device |
US20020104755A1 (en) * | 2001-02-05 | 2002-08-08 | Toru Arai | Electroplating current supply system |
Non-Patent Citations (1)
Title |
---|
See also references of WO2006065220A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP1828440B1 (de) | 2012-09-19 |
WO2006065220A1 (en) | 2006-06-22 |
SE0403047D0 (sv) | 2004-12-14 |
EP1828440A1 (de) | 2007-09-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB0417328D0 (en) | Apparatus and method | |
GB0425008D0 (en) | Method and apparatus | |
GB2412393B (en) | Apparatus and method | |
GB0406336D0 (en) | Apparatus and method | |
GB0507538D0 (en) | Apparatus and method | |
GB0501688D0 (en) | Method and apparatus | |
GB0506186D0 (en) | Apparatus and method | |
GB0504159D0 (en) | Apparatus and method | |
GB0502965D0 (en) | Apparatus and method | |
GB0419915D0 (en) | Apparatus and method | |
GB0409691D0 (en) | Apparatus and method | |
TWI368184B (en) | Drawing apparatus and drawing method | |
AP2007003949A0 (en) | Apparatus and method | |
GB0501979D0 (en) | Apparatus and method | |
EP1804703A4 (de) | Kryochirurgisches gerät und verfahren | |
GB0512154D0 (en) | Method and apparatus | |
GB0416471D0 (en) | Apparatus and method | |
GB0513613D0 (en) | Apparatus and method | |
GB0508695D0 (en) | Apparatus and method | |
GB0502318D0 (en) | Apparatus and method | |
GB2414492B (en) | Apparatus and method | |
GB0509526D0 (en) | Method and apparatus | |
GB0504469D0 (en) | Method and apparatus | |
GB0411721D0 (en) | Method and apparatus | |
GB0509450D0 (en) | Method and apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20070601 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA HR MK YU |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20110704 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: C25D 5/18 20060101AFI20110628BHEP |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA HR MK YU |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 576088 Country of ref document: AT Kind code of ref document: T Effective date: 20121015 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602005036226 Country of ref document: DE Effective date: 20121115 |
|
REG | Reference to a national code |
Ref country code: SE Ref legal event code: TRGR |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: T3 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MK05 Ref document number: 576088 Country of ref document: AT Kind code of ref document: T Effective date: 20120919 |
|
REG | Reference to a national code |
Ref country code: LT Ref legal event code: MG4D Effective date: 20120919 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20121220 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20121230 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130119 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: BE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20130121 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121231 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20121219 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
26N | No opposition filed |
Effective date: 20130620 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602005036226 Country of ref document: DE Effective date: 20130620 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121231 Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121214 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121231 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20131217 Year of fee payment: 9 Ref country code: DE Payment date: 20131219 Year of fee payment: 9 Ref country code: SE Payment date: 20131217 Year of fee payment: 9 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20131217 Year of fee payment: 9 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20120919 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121214 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20131227 Year of fee payment: 9 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20051214 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 602005036226 Country of ref document: DE |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: V1 Effective date: 20150701 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: V1 Effective date: 20150701 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141215 |
|
REG | Reference to a national code |
Ref country code: SE Ref legal event code: EUG |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20141214 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20150831 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150701 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141214 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150701 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20141231 |