EP1819455A2 - Procede pour produire un transducteur d'ultrasons - Google Patents

Procede pour produire un transducteur d'ultrasons

Info

Publication number
EP1819455A2
EP1819455A2 EP05815597A EP05815597A EP1819455A2 EP 1819455 A2 EP1819455 A2 EP 1819455A2 EP 05815597 A EP05815597 A EP 05815597A EP 05815597 A EP05815597 A EP 05815597A EP 1819455 A2 EP1819455 A2 EP 1819455A2
Authority
EP
European Patent Office
Prior art keywords
coating
ultrasonic transducer
component
depressions
electron beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05815597A
Other languages
German (de)
English (en)
Inventor
Andreas Berger
Patrick Oudoire
Achim Wiest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser Flowtec AG
Original Assignee
Endress and Hauser Flowtec AG
Flowtec AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser Flowtec AG, Flowtec AG filed Critical Endress and Hauser Flowtec AG
Publication of EP1819455A2 publication Critical patent/EP1819455A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/3568—Modifying rugosity
    • B23K26/3584—Increasing rugosity, e.g. roughening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming

Definitions

  • the invention relates to a method for producing an ultrasonic transducer. Furthermore, the invention relates to a method for processing a surface.
  • the surface may be, for example, a metal, a ceramic or a plastic.
  • Surfaces can be processed by sand blasting or by laser radiation or electron beams. Thus, it is possible to clean the surface or even to impart some roughness to it, followed by a coating, e.g. To apply a paint better and to improve the adhesion of the coating. The roughness serves to ensure that e.g. the paint in the liquid state flows into the structures and then mechanically harder to separate from it in the cured state. This also applies to an adhesive to bond surfaces of components together.
  • flow meters are manufactured and sold. These flowmeters contain ultrasonic sensors, which consist of several components, which in turn are joined together via various adhesive layers. In order to obtain a solid and durable adhesive layer, the surfaces involved must be pretreated accordingly. For measurements with ultrasound, the surfaces must be machined very precisely and must be tightly tolerated. An important factor in this case is the nature of the surface in the sound beam, since the "quality" and the radiation characteristic of the sensors depend on these avengers.
  • the object of the invention is to provide a method for processing surfaces, so that show reproducible and narrowly tolerated results. This particular with regard to the production of ultrasonic transducers, which should have a constant radiation characteristic.
  • the invention solves the problem relating to the method for producing an ultrasonic transducer in a first variant by a method, wherein on at least one surface of the ultrasonic transducer by means of laser radiation and / or electron beams, a selectable structure is applied, and wherein the machined surface with at least one Coating is provided.
  • the invention solves the problem regarding the method for producing an ultrasonic transducer in a second variant by a method, wherein on at least one surface of the ultrasonic transducer by means of an etching process and / or using a wafer saw a selectable structure is applied, and wherein the processed Surface is provided with at least one coating.
  • Wafer saws are known, for example, from the semiconductor industry and serve to produce regular and fine structures. An etching process can be accomplished, for example, using photolithography.
  • the surface may be a piezoceramic or a metal to which a piezoceramic is to be applied to sound conversion.
  • the targeted application of a structure or a pattern a uniform surface structure is achieved, so that the coating can be applied with a uniform property.
  • the structuring of the surface is substantially the same for all ultrasonic transducers, so that the transducers do not differ from each other and are correspondingly interchangeable.
  • depressions or sequences of depressions are preferably provided. The coating material then penetrates into these depressions and is mechanically retained by the appropriate configuration of the depressions.
  • it is a structure with elevations, which are applied to the surface.
  • a structure of such a structure can be realized, for example, by fusing a powder at defined locations by means of focused laser radiation and / or focused electron beams.
  • the surface of the ultrasonic transducer may also be the surface of a component of the ultrasonic transducer, e.g. to act a drilled or structured plate of a multi-part ultrasonic transducer. The surface is thus also a surface of a part within the ultrasonic transducer.
  • Adhesion of the coating and / or the component is supported on the surface.
  • the structure is to be selected.
  • the coating is an adhesive for bonding two surfaces, it may be useful to create shallower depressions so that more adhesive is available between the surfaces or to achieve the thinnest possible adhesive layer.
  • the structure or the depressions of the structure results in the coating virtually digging into the surface, for example by broadening the depths downwards, ie away from the surface.
  • An embodiment provides that the coating is applied to the surface at reduced pressure, and / or that the coating is cured at a higher pressure than during application.
  • a negative pressure and curing a higher pressure preferably even an overpressure.
  • work is carried out with vacuum / negative pressure and during curing with overpressure.
  • the workpiece may need to be prepared with a vacuum if the dimensions of the recesses are smaller. If the pressure has been lowered accordingly, i. under atmospheric pressure, the coating can be started. During curing, the pressure is increased again and thus the cavities are filled with the coating material and the trapped air is compressed. Compression reduces the negative impact of the air / gas on the adhesion of the coating to the surface.
  • An embodiment provides that at least one component is applied to the coating, and that the structure is selected such that an acoustic adaptation of the applied component and / or the reflection and / or the transmission of ultrasound targeted by this machined surface is changed.
  • ultrasound sensors consist of several components, which are usually connected to one another by means of adhesion.
  • the surface are matched to each other or that physical effects are already achieved by the surface contact. This includes on the one hand an acoustic matching between the components or, for example, the reflection of ultrasound at this transition. Accordingly, the structure must then be chosen to achieve these effects.
  • An embodiment provides that on the surface of a component, which comes into contact with the coating and / or with the surface of the ultrasonic transducer, at least one second selectable structure is applied, and that the second structure is chosen such that the mechanical connection between the surface of the component and the coating and / or the surface of the ultrasonic transducer is selectively influenced.
  • a component On the surface of the ultrasonic transducer so a component is applied.
  • a second structure which may also be identical to the first structure on the surface of the ultrasound transducer, is then applied to the surface of this component. For example, both structures are pyramidal or conical. If the ultrasonic transducer and the component are made of different materials, these structures have the advantage that the transition from one material to another takes place continuously and without sharp transitions.
  • the one structure is a deep longitudinal groove and, in the correspondingly opposite structure, finer transverse grooves having a smaller depth, which intersect the tips of the longitudinal grooves.
  • the coating which is, for example, adhesive, can dig well mechanically.
  • An embodiment includes that the structure is chosen such that the reflection and / or the transmission of ultrasound is selectively changed by this machined surface.
  • This embodiment does not assume any component, ie it includes, for example, that in the coating, e.g. is a paint.
  • the structure is that a uniform height of the coating is achieved.
  • the pattern should be chosen so as to achieve a minimum height of the coating with little coating material.
  • the pattern / structure should therefore be chosen so that no elevations result.
  • the depressions have negative tendrils. The recesses open so inward and thus the coating material is retained by the surface quasi.
  • the invention solves the problem with a method for processing of a
  • the invention thus consists in that the surface is specifically processed in such a way that a pattern or a structuring results.
  • the structure or by a structure underlying the pattern thus the entire machined surface is designed uniformly and it is also different surfaces, the have been processed by the same method.
  • This method is thus a general configuration applied above in the manufacture of the ultrasonic transducer. It is therefore also possible to apply and implement all embodiments and special features of the method described below in the production method described above.
  • the structure is a depression created by the removal of the material, or increases due to the application of material, or a combination of both.
  • An embodiment of the method provides that the structure by means of laser radiation and / or electron beams whose beam axis is outside the perpendicular to the surface, is applied to the surface. Since the laser radiation or the electron beams are thus applied at an angle which is not perpendicular to the surface, flanks can be produced in the structure. Thus, like the entire method described here for applying a structure to a surface, this method is also applicable to the above-described method for producing an ultrasonic transducer.
  • An embodiment of the method includes that the structure by means of laser radiation and / or by means of electron beams whose beam axis rotates about an axis of rotation, is applied to the surface.
  • An embodiment of the method provides that at least one coating is applied to the surface after the application of the structure.
  • the surface is thus not only cleaned, but it is prepared for a subsequent process.
  • the coating is a paint or an adhesive.
  • the structure is chosen appropriately.
  • the structure is based on a periodic pattern. Due to the periodicity, the uniformity of the machined surface is realized. In the simplest case, the pattern may be a depression that is the same distance apart is repeated.
  • the structure furthermore advantageously has a sequence of depressions. Recesses have the advantage for subsequent coating that the coating material flows in and thereby the mechanical connection is enhanced.
  • the pattern is chosen such that the adhesion of the coating and / or the connection is supported with a component.
  • the adhesive force of the coating should therefore be increased.
  • depressions it may be possible for depressions to have a different depth, because, if appropriate, sufficient surface area for the drying - e.g. by heating - or the application of a drying agent must be present.
  • the structure is to be selected.
  • the coating is an adhesive for bonding two surfaces, it may be useful to create shallower depressions so that more adhesive is available between the surfaces or to achieve the thinnest possible adhesive layer. This purpose is served by particularly negative tendrils in the depressions. The depressions thus open away from the surface. This allows a clawing of the coating in the surface.
  • a control unit which controls a laser or the electron beams or other devices associated with the above method.
  • the control unit is accordingly designed such that a pattern can be entered in it or that several selectable patterns are stored in it.
  • FIGS. 2, 2a a schematic representation of a conventional one
  • FIGS. 3, 4 and 5 are schematic representations of three different structures which result from the method according to the invention.
  • Fig. 6, 6a, 6b schematic representation of the application of the structure with a rotating laser, as well as the resulting structures (section in Fig. 6a and plan view in Fig. 6b), and
  • FIGS. 7a, 7b and 7c schematic representation of a structure resulting from the use of a wafer saw.
  • Fig. 1 shows a step of manufacturing an ultrasonic transducer 2.
  • Surface 1 e.g. a metal surface of steel or stainless steel surface; or especially for the ultrasonic transducer 2 a piezoceramic - the ultrasonic transducer 2 is processed with a laser 21, which is controlled by the control unit 20.
  • the processing takes place via electron beams, via an etching process or using a wafer saw.
  • the control unit 20 for example, a structure to be applied or a pattern underlying the structure is deposited, which is to be applied by the laser 21 on the surface 1.
  • the detail A is shown and described in detail in the following figures.
  • the density of the structure for example, the recesses / cavities on the surface and also the size of the individual patterns are to be selected depending on the frequency or wavelength of the ultrasonic sensor.
  • FIG. 3 shows an embodiment of the structure as it can be applied to the surface 1 according to the invention.
  • the surface 1 has a change of depressions or cavities 10 and elevations.
  • the pattern of the structure as a change of depression 10 and elevation or as a region without depression is essentially periodic. Through the recesses 10, the coating material can penetrate evenly and the mechanical strength is increased by the coating virtually engages in the surface 1.
  • the surface 1 is further designed so uniform that a uniform height or at least a minimum height of the coating can be guaranteed without an excess of coating material would be necessary.
  • the detail A which is shown in Fig. 4, shows a simpler embodiment of the pattern or the microstructure, which is applied with the laser.
  • the laser beams 22 are shown schematically here.
  • the coating can be used in the depressions 10 penetrate and quasi cling, so that a higher mechanical load capacity is given.
  • the focus 23 of the laser beams 22 lies within the machined surface, so that the cavities 10 receive a negative and a positive slope.
  • the negative slope provides very good mechanical anchoring of adhesives as coating 5.
  • the positive slope in conjunction with an adjusted aperture angle, provides the acoustic impedance match between a glued-on component 30 and the machined surface 1.
  • a coating e.g. a varnish so that the reflection on this surface 1 can be selectively reduced.
  • continuous transition is meant the atomic density of 100% adhesive to 100% material of the surface in the direction perpendicular to the surface.
  • FIGS. 7a, 7b and 7c show a further embodiment of the surface 1 of an ultrasonic transducer produced according to the invention.
  • Fig. 7a shows the side view of the surface 1
  • Fig. 7b shows the enlarged detail, which is indicated in Fig. 7a by the circle. Shown is a cone-like structure which has been applied to the surface by means of a wafer saw. Instead of the cones and pyramidal depressions 10 are possible. Alternatively, laser radiation or etching is possible for the generation of the structure.
  • the surface 1 is the surface 1 of a layer of a multilayer ultrasound sensor and you consider the reflection at the transition between two Media, ie take place between two layers, so results in a layer sequence piezoceramic - titanium - Plexiglas the strongest reflection between Plexiglas and titanium. This is precisely where the proposed method intervenes and the geometric structure is "blurred” from a "hard” transition to a continuous border area, thus enabling decoupling without direct reflection.
  • the wavelength of the ultrasound to the size of the individual elements (cones or pyramids) of the structure has to be considered. Therefore, the structure shown here is very advantageous.
  • Fig. 7c shows a plan view of the surface 1. It can be seen the uniform structure that results from the inventive method.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

L'invention concerne un procédé pour produire un transducteur d'ultrasons (2). L'invention est caractérisée en ce qu'une structure pouvant être sélectionnée est disposée sur au moins une surface (1) du transducteur d'ultrasons (2) au moyen de rayons laser, et que la surface (1) traitée est recouverte d'un revêtement (5). L'invention concerne, de plus, un procédé permettant de traiter ladite surface (1).
EP05815597A 2004-12-09 2005-11-25 Procede pour produire un transducteur d'ultrasons Withdrawn EP1819455A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004059524A DE102004059524A1 (de) 2004-12-09 2004-12-09 Verfahren zur Herstellung eines Ultraschallwandlers
PCT/EP2005/056226 WO2006061329A2 (fr) 2004-12-09 2005-11-25 Procede pour produire un transducteur d'ultrasons

Publications (1)

Publication Number Publication Date
EP1819455A2 true EP1819455A2 (fr) 2007-08-22

Family

ID=36500189

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05815597A Withdrawn EP1819455A2 (fr) 2004-12-09 2005-11-25 Procede pour produire un transducteur d'ultrasons

Country Status (3)

Country Link
EP (1) EP1819455A2 (fr)
DE (1) DE102004059524A1 (fr)
WO (1) WO2006061329A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007042663A1 (de) * 2007-09-10 2009-03-12 Krohne Ag Ultraschallsonde
DE102012102690A1 (de) 2012-03-28 2013-10-02 Eads Deutschland Gmbh Beschichtungsverfahren, Oberflächenschichtstruktur sowie Verwendungen
DE102015102762A1 (de) * 2015-02-26 2016-09-01 Sick Ag Ultraschallwandler und Verfahren zur Herstellung eines Ultraschallwandlers
DE102016115199B4 (de) 2016-08-16 2023-08-31 Endress+Hauser Flowtec Ag Ultraschallsensor zur Bestimmung oder Überwachung einer Prozessgröße eines Mediums in der Automatisierungstechnik
DE102017103001A1 (de) * 2017-02-15 2018-08-16 Endress+Hauser SE+Co. KG Verbesserte Klebeverbindung durch Mikrostrukturierung einer Oberfläche
US11806749B2 (en) * 2021-10-28 2023-11-07 Baker Hughes, A Ge Company, Llc Ultrasonic transducer for flow measurement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU544464B2 (en) * 1982-12-27 1985-05-30 Tokyo Shibaura Denki Kabushiki Kaisha Ultrasonic transducer
JPH0739808A (ja) * 1993-07-30 1995-02-10 Taisei Corp 塗装下地処理方法と被塗装材及び塗装体
DE19538696C2 (de) * 1995-10-17 1997-09-25 Endress Hauser Gmbh Co Anordnung zur Überwachung eines vorbestimmten Füllstands einer Flüssigkeit in einem Behälter
US6503204B1 (en) * 2000-03-31 2003-01-07 Acuson Corporation Two-dimensional ultrasonic transducer array having transducer elements in a non-rectangular or hexagonal grid for medical diagnostic ultrasonic imaging and ultrasound imaging system using same
JP3849976B2 (ja) * 2001-01-25 2006-11-22 松下電器産業株式会社 複合圧電体と超音波診断装置用超音波探触子と超音波診断装置および複合圧電体の製造方法
JP4483275B2 (ja) * 2003-02-05 2010-06-16 株式会社デンソー 積層型圧電素子及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006061329A2 *

Also Published As

Publication number Publication date
WO2006061329A2 (fr) 2006-06-15
WO2006061329A3 (fr) 2006-11-16
DE102004059524A1 (de) 2006-06-14

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