EP1796076B1 - Method for manufacturing an ultrasonic sensor and corresponding ultrasonic sensor - Google Patents

Method for manufacturing an ultrasonic sensor and corresponding ultrasonic sensor Download PDF

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Publication number
EP1796076B1
EP1796076B1 EP20060019834 EP06019834A EP1796076B1 EP 1796076 B1 EP1796076 B1 EP 1796076B1 EP 20060019834 EP20060019834 EP 20060019834 EP 06019834 A EP06019834 A EP 06019834A EP 1796076 B1 EP1796076 B1 EP 1796076B1
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European Patent Office
Prior art keywords
layer
nickel layer
thickness
nickel
ultrasonic sensor
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EP20060019834
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German (de)
French (fr)
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EP1796076A1 (en
Inventor
Hans-Wilhem Wehling
Uwe Kupfernagel
Dietmar Grüdl
Thomas Jung
Heinrich Dr. Gotzig
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Valeo Schalter und Sensoren GmbH
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Valeo Schalter und Sensoren GmbH
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    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means

Definitions

  • the invention relates to a method for producing an ultrasonic sensor with a membrane for generating ultrasonic signals, wherein the membrane has a membrane bottom, on which a surface coating is applied, which comprises a chromium layer.
  • Known ultrasonic sensors have a membrane, which is usually cup-shaped and has a diaphragm bottom, which is set in vibration via a piezoelectric transducer, so that the membrane base can emit and receive ultrasonic signals.
  • the surface coating serves on the one hand to protect the membrane base and on the other hand has the purpose of the Optionally inconspicuous to integrate the ultrasonic sensor in an installation environment on the motor vehicle.
  • An ultrasonic sensor should have the highest possible efficiency in order to achieve good ranges. Furthermore, a good durability of the chromium layer is desired, which is visually pleasing even after prolonged use in a partially aggressive environment.
  • the present invention has the object to provide a method for producing an ultrasonic sensor, with which an ultrasonic sensor can be created, which has a high efficiency and consistently high optical requirements.
  • the natural frequency of the membrane base is that frequency which, when excited by the piezoelectric transducer, leads to the highest amplitude of the composite in order to generate correspondingly strong ultrasonic signals.
  • the piezoelectric transducer In order to be able to set a natural frequency predetermined for example by the piezoelectric transducer, it is sufficient to slightly change the thickness of the membrane base and / or at least one layer of the surface coating or to produce the same in such a way that the predetermined natural frequency is established.
  • the thickness of the nickel layer is adjusted. It has been found that with a comparatively thin surface coating, the thickness of the nickel layer can influence the self-adjusting frequency of the composite composed of membrane bottom, nickel layer and chromium layer by up to 10%. Since the nickel layer is comparatively ductile and soft compared to the chromium layer, this is particularly well suited for setting the natural frequency.
  • the natural frequency of the composite can be adjusted by removing material from the membrane bottom provided with the surface coating on the side facing away from the surface coating.
  • the removal of comparatively little material has a high influence on the natural frequency of the composite of membrane bottom, nickel layer and chromium layer.
  • the nickel layer is multi-layered. This makes it possible to further improve the surface quality of the ultrasonic sensor.
  • a first layer of the nickel layer can be applied galvanically to the membrane bottom using a sulfamate electrolyte.
  • the advantage here is that it is possible to work with comparatively high current densities, so that a comparatively thick first layer of the nickel layer can be applied in a relatively short time.
  • a second layer of the nickel layer is applied galvanically using a bright nickel electrolyte.
  • a bright nickel electrolyte With such a second layer smaller unevenness of the first layer of the nickel layer can be compensated, so that the surface is leveled as a whole.
  • Corresponding electrolytes are for example in " Ullmann's Encyclopedia of Industrial Chemistry ", Volume 12, Issue 1976, page 182 f , described. With these electrolytes very smooth and comparatively hard surface layers can be created, which also offer good corrosion protection.
  • Such a surface layer is well suited as a carrier layer for a chromium layer applied thereto. This chromium layer can be formed very thin on such a carrier layer.
  • the nickel layer has a thickness of 40 .mu.m to 100 .mu.m. Thicknesses within this interval offer a good compromise between quick and easy material application, durability and the ability to influence the natural frequency of the composite of the membrane bottom, nickel layer and chromium layer.
  • the thickness of the first layer of the nickel layer is between 50% and 90% of the thickness of the nickel layer.
  • the thickness of the second layer of the nickel layer may be between 10% and 50% of the nickel layer.
  • the thickness of the first layer of the nickel layer is 70% and the thickness of the second layer of the nickel layer is 30%.
  • the chrome layer can be applied by electroplating.
  • the thickness of the chromium layer may be less than 10 ⁇ m, preferably less than 3 ⁇ m, more preferably approximately 1 ⁇ m.
  • the invention also relates to an ultrasonic sensor manufactured according to one of the described methods.
  • a membrane is designated overall by the reference numeral 2. This is formed substantially cup-shaped and has a circular disc-shaped membrane bottom 4, to which an annular jacket 6 connects laterally.
  • the jacket 6 bounded on its inside a cylindrical cavity 8, which is also bounded by the bottom 10 of the membrane bottom 4.
  • a piezoelectric transducer In the cavity 8, a piezoelectric transducer can be arranged, which is in contact with the underside 10 of the membrane base 4. The piezoelectric transducer can thus set the diaphragm bottom 4 in vibration with appropriate electrical control.
  • the membrane base 4 has on the side facing away from the underside 10 on a visible side 12, which is visible when installed in an ultrasonic sensor and mounting this ultrasonic sensor to a vehicle.
  • a visible side 12 On the visible side 12, an outer lateral surface 13 connects.
  • the visible side 12 and the lateral surface 13 are provided with a surface coating, whose structure in the following with further reference to FIG. 2 is described.
  • a first layer 14 of a nickel layer is applied to the membrane base 4 or to the lateral surface 13, preferably by electroplating and using a sulfamate electrolyte.
  • a second layer 16 of the nickel layer is applied, preferably galvanically and using a bright nickel electrolyte.
  • the layers 14 and 16 together form a nickel layer 18.
  • a chromium layer 20 is applied on the layer 18.
  • the thickness 22 of the chromium layer 20 is comparatively small and amounts to a few ⁇ m, preferably 1 to 2 ⁇ m.
  • the thickness 24 of the nickel layer 18 may be between 40 and 100 microns, in particular 50 microns.
  • the thickness 26 of the membrane base 4 is a few 100 microns.
  • the thickness 28 of the first layer 14 of the nickel layer 18 is between 50% and 90% of the thickness of the nickel layer 18, preferably 70%.
  • the thickness 30 of the second layer 16 of the nickel layer 18 is preferably 10% to 50%, in particular 30%, of the thickness 24 of the nickel layer 18.
  • the natural frequency of the composite membrane bottom 4, nickel layer 18 and chromium layer 20 can be adjusted.
  • FIG. 3 shows an ultrasonic sensor 32 with a membrane 2, the with reference to Figures 1 and 2 has described structure.
  • the ultrasonic sensor 32 has a lateral plug connection 34, a head part 36 which comprises a housing 38 in which the membrane 2 is mounted.
  • the housing 38 surrounds the jacket 6 in the lateral direction; the visible side 12 of the membrane 2 remains uncovered, so that ultrasonic signals can be sent out.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Description

Die Erfindung betrifft ein Verfahren zur Herstellung eines Ultraschallsensors mit einer Membran zur Erzeugung von Ultraschallsignalen, wobei die Membran einen Membranboden aufweist, auf den eine Oberflächenbeschichtung aufgetragen wird, die eine Chromschicht umfasst.The invention relates to a method for producing an ultrasonic sensor with a membrane for generating ultrasonic signals, wherein the membrane has a membrane bottom, on which a surface coating is applied, which comprises a chromium layer.

Aus der WO 03/045586 A ist ein Ultraschallwandler bekannt geworden, der eine Nickelbeschichtung aufweist. Aus der nicht vorveröffentlichten WO A 2006/000494 A sind Ultraschallsensoren bekannt, die neben einer Chrombeschichtung eine Nickelschicht aufweisen.From the WO 03/045586 A For example, an ultrasonic transducer is known which has a nickel coating. From the not pre-published WO A 2006/000494 A ultrasonic sensors are known which have a nickel layer in addition to a chromium coating.

Bekannte Ultraschallsensoren weisen eine Membran auf, die üblicherweise topfförmig ausgebildet ist und einen Membranboden aufweist, der über einen Piezo-Wandler in Schwingung versetzt wird, so dass der Membränboden Ultraschallsignale aussenden und empfangen kann. Die Oberflächenbeschichtung dient einerseits zum Schutz des Membranbodens und hat andererseits den Zweck, den Ultraschallsensor optisch möglichst unauffällig in eine Einbauumgebung am Kraftfahrzeug integrieren zu können.Known ultrasonic sensors have a membrane, which is usually cup-shaped and has a diaphragm bottom, which is set in vibration via a piezoelectric transducer, so that the membrane base can emit and receive ultrasonic signals. The surface coating serves on the one hand to protect the membrane base and on the other hand has the purpose of the Optionally inconspicuous to integrate the ultrasonic sensor in an installation environment on the motor vehicle.

Ein Ultraschallsensor sollte einen möglichst hohen Wirkungsgrad haben, um gute Reichweiten erzielen zu können. Ferner ist eine gute Haltbarkeit der Chromschicht erwünscht, die auch nach langem Gebrauch in teilweise aggressiver Umgebung optisch gefällig ist.An ultrasonic sensor should have the highest possible efficiency in order to achieve good ranges. Furthermore, a good durability of the chromium layer is desired, which is visually pleasing even after prolonged use in a partially aggressive environment.

Hiervon ausgehend liegt der vorliegenden Erfindung die Aufgabe zugrunde, ein Verfahren zur Herstellung eines Ultraschallsensors vorzuschlagen, mit dem ein Ultraschallsensor geschaffen werden kann, der einen hohen Wirkungsgrad aufweist und der dauerhaft hohen optischen Ansprüchen genügt.Proceeding from this, the present invention has the object to provide a method for producing an ultrasonic sensor, with which an ultrasonic sensor can be created, which has a high efficiency and consistently high optical requirements.

Diese Aufgabe wird erfindungsgemäß mit einem Verfahren gemäß dem Anspruch 1 gelöst.This object is achieved by a method according to claim 1.

Es hat sich herausgestellt, dass mit einer zwischen dem Membranboden und der Chromschicht angeordneten Nickelschicht ein Verbund geschaffen werden kann, dessen Chromschicht sehr dauerhaltbar ist. Dies liegt daran, dass die harte und spröde Chromschicht auf die weichere und duktile Nickelschicht aufgetragen wird.It has been found that with a nickel layer arranged between the membrane bottom and the chromium layer, a composite can be created whose chromium layer is very durable. This is because the hard and brittle chrome layer is applied to the softer and ductile nickel layer.

Im Rahmen der Erfindung konnte festgestellt werden, dass vergleichsweise geringe Änderungen der Dicken des Membranbodens und/oder von wenigstens einer Schicht der Oberflächenbeschichtung große Einflüsse auf die Eigenfrequenz des Verbundes aus Membranboden, Nickelschicht und Chromschicht haben. Die Eigenfrequenz des Membranbodens ist diejenige Frequenz, die bei einer Anregung durch den Piezo-Wandler zur höchsten Amplitude des Verbundes führt, um entsprechend starke Ultraschallsignale zu erzeugen.In the context of the invention it has been found that comparatively small changes in the thicknesses of the membrane bottom and / or of at least one layer of the surface coating have great influence on the Natural frequency of the composite membrane base, nickel layer and chrome layer have. The natural frequency of the membrane base is that frequency which, when excited by the piezoelectric transducer, leads to the highest amplitude of the composite in order to generate correspondingly strong ultrasonic signals.

Um eine beispielsweise durch den Piezo-Wandler vorgegebene Eigenfrequenz einstellen zu können, genügt es, die Dicke des Membranbodens und/oder wenigstens einer Schicht der Oberflächenbeschichtung geringfügig zu ändern oder gleich so herzustellen, dass sich die vorgegebene Eigenfrequenz einstellt.In order to be able to set a natural frequency predetermined for example by the piezoelectric transducer, it is sufficient to slightly change the thickness of the membrane base and / or at least one layer of the surface coating or to produce the same in such a way that the predetermined natural frequency is established.

Nach einer Ausführungsform der Erfindung wird die Dicke der Nickelschicht angepasst. Es hat sich herausgestellt, dass bei einer vergleichsweise dünnen Oberflächenbeschichtung die Dicke der Nickelschicht die sich einstellende Eigenfrequenz des Verbundes aus Membranboden, Nickelschicht und Chromschicht um bis zu 10 % beeinflussen kann. Da die Nickelschicht im Vergleich zur Chromschicht vergleichsweise duktil und weich ist, eignet sich diese besonders gut zur Einstellung der Eigenfrequenz.According to one embodiment of the invention, the thickness of the nickel layer is adjusted. It has been found that with a comparatively thin surface coating, the thickness of the nickel layer can influence the self-adjusting frequency of the composite composed of membrane bottom, nickel layer and chromium layer by up to 10%. Since the nickel layer is comparatively ductile and soft compared to the chromium layer, this is particularly well suited for setting the natural frequency.

Alternativ oder zusätzlich kann die Eigenfrequenz des Verbundes eingestellt werden, indem von dem mit der Oberflächenbeschichtung versehenen Membranboden auf der der Oberflächenbeschichtung abgewandten Seite Material abgetragen wird. Bereits der Abtrag von vergleichsweise wenig Material hat einen hohen Einfluss auf die Eigenfrequenz des Verbundes aus Membranboden, Nickelschicht und Chromschicht. Somit ist es möglich, die einzelnen Schichten der Oberflächenbeschichtung mit groben Toleranzen behaftet aufzutragen, die sich einstellende Eigenfrequenz zu messen und danach durch Abtrag von Material aus dem Membranboden die Eigenfrequenz zu beeinflussen. Durch den Abtrag des Materials wird die Eigenfrequenz reduziert.Alternatively or additionally, the natural frequency of the composite can be adjusted by removing material from the membrane bottom provided with the surface coating on the side facing away from the surface coating. Already the removal of comparatively little material has a high influence on the natural frequency of the composite of membrane bottom, nickel layer and chromium layer. Thus, it is possible to apply the individual layers of the surface coating tainted with gross tolerances, to measure the self-adjusting natural frequency and then by removing material from the Membrane bottom to influence the natural frequency. The removal of the material reduces the natural frequency.

Nach einer Weiterbildung der Erfindung ist die Nickelschicht mehrlagig. Dies ermöglicht es, die Oberflächenqualität des Ultraschallsensors weiter zu verbessern. So kann beispielsweise auf den Membranboden eine erste Lage der Nickelschicht galvanisch unter Verwendung eine Sulfamat-Elektrolyts aufgetragen werden. Der Vorteil hierbei ist, dass mit vergleichsweise hohen Stromdichten gearbeitet werden kann, so dass in relativ kurzer Zeit eine vergleichsweise dicke erste Lage der Nickelschicht aufgetragen werden kann.According to a development of the invention, the nickel layer is multi-layered. This makes it possible to further improve the surface quality of the ultrasonic sensor. For example, a first layer of the nickel layer can be applied galvanically to the membrane bottom using a sulfamate electrolyte. The advantage here is that it is possible to work with comparatively high current densities, so that a comparatively thick first layer of the nickel layer can be applied in a relatively short time.

Um die optischen Eigenschaften des Ultraschallsensors weiter zu verbessern, wird vorgeschlagen, dass eine zweite Lage der Nickelschicht galvanisch unter Verwendung eines Glanznickel-Elektrolyts aufgetragen wird. Mit einer solchen zweiten Lage können kleinere Unebenheiten der ersten Lage der Nickelschicht ausgeglichen werden, so dass die Oberfläche insgesamt eingeebnet ist. Entsprechende Elektrolyte sind beispielsweise in " Ullmanns Enzyklopädie der technischen Chemie", Band 12, Ausgabe 1976, Seite 182 f . beschrieben. Mit diesen Elektrolyten können sehr glatte und vergleichsweise harte Oberflächenschichten geschaffen werden, die auch guten Korrosionsschutz bieten. Eine solche Oberflächenschicht ist als Trägerlage für eine hierauf aufsetzende Chromschicht gut geeignet. Diese Chromschicht kann auf einer solchen Trägerlage sehr dünn ausgebildet sein. Dies hat den Vorteil, dass das spröde Chrommaterial bei einem Schwingen des Membranbodens und den damit verbundenen Verformungen weniger mechanischen Belastungen ausgesetzt wird als bei Verwendung einer vergleichsweise dicken Chromschicht. Bei einer solchen dicken Chromschicht entstehen bei Verformung des Membranbodens höhere Eigenspannungen, die eine Rissbildung innerhalb der Chromschicht bewirken können.In order to further improve the optical properties of the ultrasonic sensor, it is proposed that a second layer of the nickel layer is applied galvanically using a bright nickel electrolyte. With such a second layer smaller unevenness of the first layer of the nickel layer can be compensated, so that the surface is leveled as a whole. Corresponding electrolytes are for example in " Ullmann's Encyclopedia of Industrial Chemistry ", Volume 12, Issue 1976, page 182 f , described. With these electrolytes very smooth and comparatively hard surface layers can be created, which also offer good corrosion protection. Such a surface layer is well suited as a carrier layer for a chromium layer applied thereto. This chromium layer can be formed very thin on such a carrier layer. This has the advantage that the brittle chromium material is subjected to less mechanical stress when the diaphragm bottom is vibrated and the deformations associated therewith than when using a comparatively thick chromium layer. With such a thick chromium layer, higher deformation occurs on the membrane bottom Residual stresses that can cause cracking within the chromium layer.

Nach einer Ausführungsform der Erfindung weist die Nickelschicht eine Dicke von 40 µm bis 100 µm auf. Dicken innerhalb dieses Intervalls bieten einen guten Kompromiss aus schnellem und einfachem Materialauftrag, Dauerhaltbarkeit und der Möglichkeit, die Eigenfrequenz des Verbundes aus Membranboden, Nickelschicht und Chromschicht zu beeinflussen.According to one embodiment of the invention, the nickel layer has a thickness of 40 .mu.m to 100 .mu.m. Thicknesses within this interval offer a good compromise between quick and easy material application, durability and the ability to influence the natural frequency of the composite of the membrane bottom, nickel layer and chromium layer.

Nach einer Weiterbildung der Erfindung beträgt die Dicke der ersten Lage der Nickelschicht zwischen 50 % und 90 % der Dicke der Nickelschicht. In entsprechender Weise kann die Dicke der zweiten Lage der Nickelschicht zwischen 10 % und 50 % der Nickelschicht betragen. In einer bevorzugten Ausführungsform beträgt die Dicke der ersten Lage der Nickelschicht 70 % und die Dicke der zweiten Lage der Nickelschicht 30 %.According to a development of the invention, the thickness of the first layer of the nickel layer is between 50% and 90% of the thickness of the nickel layer. Similarly, the thickness of the second layer of the nickel layer may be between 10% and 50% of the nickel layer. In a preferred embodiment, the thickness of the first layer of the nickel layer is 70% and the thickness of the second layer of the nickel layer is 30%.

Die Chromschicht kann galvanisch aufgetragen werden. Die Dicke der Chromschicht kann dabei weniger als 10 µm, vorzugsweise weniger als 3 µm, weiter vorzugsweise in etwa 1 µm betragen.The chrome layer can be applied by electroplating. The thickness of the chromium layer may be less than 10 μm, preferably less than 3 μm, more preferably approximately 1 μm.

Die Erfindung betrifft auch einen Ultraschallsensor, der nach einem der beschriebenen Verfahren hergestellt ist.The invention also relates to an ultrasonic sensor manufactured according to one of the described methods.

Weitere Vorteile, Merkmale und Einzelheiten der Erfindung ergeben sich aus der nachfolgenden Beschreibung, in der unter Bezugnahme auf die Zeichnung ein besonders bevorzugtes Ausführungsbeispiel im Einzelnen beschrieben ist. Dabei können die in der Zeichnung gezeigten sowie in den Ansprüchen sowie in der Beschreibung erwähnten Merkmale jeweils einzeln für sich oder in beliebiger Kombination erfindungswesentlich sein. In der Zeichnung zeigen:

Figur 1
eine geschnittene Seitenansicht einer Membran eines Ultraschallsensors;
Figur 2
eine vergrößerte Ansicht des Schichtaufbaus des Membranbodens der in Figur 1 dargestellten Membran; und
Figur 3
eine perspektivische Ansicht eines Ultraschallsensors mit einer Membran gemäß Figuren 1 und 2.
Further advantages, features and details of the invention will become apparent from the following description in which, with reference to the drawing, a particularly preferred embodiment is described in detail. In this case, the features shown in the drawing and mentioned in the claims and in the description each individually by itself or in any combination essential to the invention. In the drawing show:
FIG. 1
a sectional side view of a membrane of an ultrasonic sensor;
FIG. 2
an enlarged view of the layer structure of the membrane bottom of in FIG. 1 represented membrane; and
FIG. 3
a perspective view of an ultrasonic sensor with a membrane according to Figures 1 and 2 ,

In Figur 1 ist eine Membran insgesamt mit dem Bezugszeichen 2 bezeichnet. Diese ist im Wesentlichen topfförmig ausgebildet und weist einen kreisscheibenförmigen Membranboden 4 auf, an den sich seitlich ein ringförmiger Mantel 6 anschließt. Der Mantel 6 begrenzt auf seiner Innenseite einen zylindrischen Hohlraum 8, der auch von der Unterseite 10 des Membranbodens 4 begrenzt ist.In FIG. 1 a membrane is designated overall by the reference numeral 2. This is formed substantially cup-shaped and has a circular disc-shaped membrane bottom 4, to which an annular jacket 6 connects laterally. The jacket 6 bounded on its inside a cylindrical cavity 8, which is also bounded by the bottom 10 of the membrane bottom 4.

In dem Hohlraum 8 kann ein Piezo-Wandler angeordnet werden, der in Anlage mit der Unterseite 10 des Membranbodens 4 steht. Der Piezo-Wandler kann somit bei entsprechender elektrischer Ansteuerung den Membranboden 4 in Schwingung versetzen.In the cavity 8, a piezoelectric transducer can be arranged, which is in contact with the underside 10 of the membrane base 4. The piezoelectric transducer can thus set the diaphragm bottom 4 in vibration with appropriate electrical control.

Der Membranboden 4 weist auf der der Unterseite 10 abgewandten Seite eine Sichtseite 12 auf, die bei Einbau in einen Ultraschallsensor und Montage dieses Ultraschallsensors an einem Fahrzeug sichtbar ist. An die Sichtseite 12 schließt sich eine äußere Mantelfläche 13 an. Die Sichtseite 12 und die Mantelfläche 13 sind mit einer Oberflächenbeschichtung versehen, deren Aufbau im Folgenden mit weiterem Bezug auf Figur 2 beschrieben ist. Auf den Membranboden 4 bzw. auf die Mantelfläche 13 wird im Anschluss an eine chemische Reinigung der Membran 2 eine erste Lage 14 einer Nickelschicht aufgetragen, vorzugsweise galvanisch und unter Verwendung eines Sulfamat-Elektrolyts. Auf diese erste Lage 14 wird eine zweite Lage 16 der Nickelschicht aufgetragen, vorzugsweise galvanisch und unter Verwendung eines Glanznickel-Elektrolyts. Die Lagen 14 und 16 bilden gemeinsam eine Nickelschicht 18. Auf die Schicht 18 wird eine Chromschicht 20 aufgetragen. Die Dicke 22 der Chromschicht 20 ist vergleichsweise gering und beträgt wenige µm, vorzugsweise 1 bis 2 µm. Die Dicke 24 der Nickelschicht 18 kann zwischen 40 und 100 µm betragen, insbesondere 50 µm. Die Dicke 26 des Membranbodens 4 beträgt einige 100 µm. Die Dicke 28 der ersten Lage 14 der Nickelschicht 18 beträgt zwischen 50 % und 90 % der Dicke der Nickelschicht 18, vorzugsweise 70 %. Entsprechend beträgt die Dicke 30 der zweiten Lage 16 der Nickelschicht 18 vorzugsweise 10 % bis 50 %, insbesondere 30 % der Dicke 24 der Nickelschicht 18.The membrane base 4 has on the side facing away from the underside 10 on a visible side 12, which is visible when installed in an ultrasonic sensor and mounting this ultrasonic sensor to a vehicle. On the visible side 12, an outer lateral surface 13 connects. The visible side 12 and the lateral surface 13 are provided with a surface coating, whose structure in the following with further reference to FIG. 2 is described. Following the chemical cleaning of the membrane 2, a first layer 14 of a nickel layer is applied to the membrane base 4 or to the lateral surface 13, preferably by electroplating and using a sulfamate electrolyte. On this first layer 14, a second layer 16 of the nickel layer is applied, preferably galvanically and using a bright nickel electrolyte. The layers 14 and 16 together form a nickel layer 18. On the layer 18, a chromium layer 20 is applied. The thickness 22 of the chromium layer 20 is comparatively small and amounts to a few μm, preferably 1 to 2 μm. The thickness 24 of the nickel layer 18 may be between 40 and 100 microns, in particular 50 microns. The thickness 26 of the membrane base 4 is a few 100 microns. The thickness 28 of the first layer 14 of the nickel layer 18 is between 50% and 90% of the thickness of the nickel layer 18, preferably 70%. Accordingly, the thickness 30 of the second layer 16 of the nickel layer 18 is preferably 10% to 50%, in particular 30%, of the thickness 24 of the nickel layer 18.

Durch die Wahl der Dicke 24 der Nickelschicht 18 und/oder durch den Abtrag von Material an der Unterseite 10 des Membranbodens 4 kann die Eigenfrequenz des Verbundes aus Membranboden 4, Nickelschicht 18 und Chromschicht 20 eingestellt werden.By choosing the thickness 24 of the nickel layer 18 and / or by the removal of material on the underside 10 of the membrane base 4, the natural frequency of the composite membrane bottom 4, nickel layer 18 and chromium layer 20 can be adjusted.

Figur 3 zeigt einen Ultraschallsensor 32 mit einer Membran 2, die den mit Bezug auf Figuren 1 und 2 beschriebenen Aufbau aufweist. Der Ultraschallsensor 32 weist einen seitlichen Steckanschluss 34 auf, ein Kopfteil 36, das ein Gehäuse 38 umfasst, in dem die Membran 2 gelagert ist. Dabei umgibt das Gehäuse 38 den Mantel 6 in seitlicher Richtung; die Sichtseite 12 der Membran 2 bleibt unverdeckt, so dass Ultraschallsignale ausgesendet werden können. FIG. 3 shows an ultrasonic sensor 32 with a membrane 2, the with reference to Figures 1 and 2 has described structure. The ultrasonic sensor 32 has a lateral plug connection 34, a head part 36 which comprises a housing 38 in which the membrane 2 is mounted. In this case, the housing 38 surrounds the jacket 6 in the lateral direction; the visible side 12 of the membrane 2 remains uncovered, so that ultrasonic signals can be sent out.

Claims (9)

  1. A method for producing an ultrasonic sensor (32), having a diaphragm (2) for the generation of ultrasonic signals, wherein the diaphragm (2) has a diaphragm base (4), to which a surface coating is applied, which consists of a chromium layer (20), wherein a nickel layer (18) is arranged between the diaphragm base (4) and the chromium layer (20), characterized in that the thickness (26) of the diaphragm base (4) and/or the thickness (22, 24) of at least one layer (18, 20) of the surface coating is influenced in such a way that a predefined natural frequency of the composition consisting of the diaphragm base (4), nickel layer (18) and chromium layer (20) is adjusted, wherein for this purpose the thickness (24) of the nickel layer (18) is matched, and/or material is removed from the diaphragm base (2) provided with the surface coating on the side (10) facing away from the surface coating.
  2. The method in accordance with claim 1, characterized in that the nickel layer (18) consists of several layers.
  3. The method in accordance with claim 2, characterized in that a first layer (14) of the nickel layer (18) is galvanically applied to the diaphragm base (2) by employing a sulfamate electrolyte.
  4. The method in accordance with claim 3, characterized in that a second layer (16) of the nickel layer (18) is galvanically applied to the first layer (14) of the nickel layer by employing a bright nickel electrolyte.
  5. The method in accordance with at least one of the preceding claims, characterized in that the nickel layer (18) has a thickness (24) of 40 µm to 100 µm.
  6. The method in accordance with at least one of the preceding claims, characterized in that the thickness (28) of the first layer (14) of the nickel layer (18) lies between 50 and 90% of the thickness (24) of the nickel layer (18).
  7. The method in accordance with at least one of claim 2 to 6, characterized in that the thickness (30) of the second layer (16) of the nickel layer (18) lies between 10 and 50% of the thickness (24) of the nickel layer (18).
  8. The method in accordance with at least one of the preceding claims, characterized in that the chromium layer (20) is galvanically applied.
  9. An ultrasonic sensor (32), having a diaphragm (2) for the generation of ultrasonic signals, wherein the diaphragm (2) has a diaphragm base (4), to which a surface coating is applied, which consists of a chromium layer (20), wherein a multi-layered nickel layer (18) is arranged between the diaphragm base (4) and the chromium layer (20), characterized in that a predefined natural frequency of the composition consisting of the diaphragm base (4), nickel layer (18) and chromium layer (20) in accordance with the method of at least one of the preceding claims is set, wherein the thickness (28) of the first layer (14) of the nickel layer (18) applied to the diaphragm base lies between 50 and 90% of the thickness (24) of the nickel layer (18).
EP20060019834 2005-12-10 2006-09-22 Method for manufacturing an ultrasonic sensor and corresponding ultrasonic sensor Expired - Fee Related EP1796076B1 (en)

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DE200510059146 DE102005059146A1 (en) 2005-12-10 2005-12-10 Method for producing an ultrasonic sensor

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EP1796076B1 true EP1796076B1 (en) 2008-07-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009034418A1 (en) 2009-07-23 2011-01-27 Valeo Schalter Und Sensoren Gmbh Membrane and method for producing a membrane for an ultrasonic transducer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479377A (en) * 1994-12-19 1995-12-26 Lum; Paul Membrane-supported electronics for a hydrophone
DE10023065B4 (en) * 2000-02-12 2006-03-02 Volkswagen Ag Ultrasonic sensor for a motor vehicle
DK200101780A (en) * 2001-11-30 2002-11-27 Danfoss As An ultrasonic transducer
DE10235844B4 (en) * 2002-08-05 2004-07-15 Maschinenfabrik Kurt Neubauer Gmbh & Co Acoustic, electrical converter and cooking device with it
DE10316535B3 (en) * 2003-04-10 2005-01-05 Rehau Ag + Co. Installation unit for automobile radar sensors has adapter receiving radar sensor housing with separate spaces for radar transmission and radar reception components
DE102004031310B4 (en) * 2004-06-29 2017-02-09 Robert Bosch Gmbh Diaphragm pot for an ultrasonic transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009034418A1 (en) 2009-07-23 2011-01-27 Valeo Schalter Und Sensoren Gmbh Membrane and method for producing a membrane for an ultrasonic transducer
WO2011009513A1 (en) 2009-07-23 2011-01-27 Valeo Schalter Und Sensoren Gmbh Diaphragm and method for producing a diaphragm for an ultrasonic transducer

Also Published As

Publication number Publication date
EP1796076A1 (en) 2007-06-13
ES2308635T3 (en) 2008-12-01
DE102005059146A1 (en) 2007-06-14
DE502006001023D1 (en) 2008-08-14

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