EP1743046A2 - Dispositif de vaporisation et procede pour la vaporisation de materiau de revetement - Google Patents

Dispositif de vaporisation et procede pour la vaporisation de materiau de revetement

Info

Publication number
EP1743046A2
EP1743046A2 EP05735463A EP05735463A EP1743046A2 EP 1743046 A2 EP1743046 A2 EP 1743046A2 EP 05735463 A EP05735463 A EP 05735463A EP 05735463 A EP05735463 A EP 05735463A EP 1743046 A2 EP1743046 A2 EP 1743046A2
Authority
EP
European Patent Office
Prior art keywords
evaporation
evaporator
chamber
crucible
coating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05735463A
Other languages
German (de)
English (en)
Inventor
Lutz Gottsmann
Ulf Seyfert
Bernd-Dieter Wenzel
Reinhard JÄGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Von Ardenne Anlagentechnik GmbH
Original Assignee
Von Ardenne Anlagentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik GmbH filed Critical Von Ardenne Anlagentechnik GmbH
Publication of EP1743046A2 publication Critical patent/EP1743046A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the invention relates to an evaporation device for evaporating coating material, which is contained as part of a coating device in a vacuum chamber, the coating material for evaporation being arranged in a fillable crucible.
  • the invention further relates to a method for evaporating coating material, this being used for a thermal vacuum coating method for coating a substrate in a vacuum chamber.
  • EP 0 735 157 discloses a method for evaporating magnesium (Mg).
  • Mg evaporating magnesium
  • a Mg source is provided in a vessel with a narrow opening and with a reflector plate arranged outside the opening.
  • the vessel is heated to a temperature of 670 ° C to 770 ° C, whereby the Mg source is melted and the Mg is thereby evaporated.
  • clusters and splashes on the reflector plate are destroyed at 500 ° C. or higher, and the Mg vapor is passed through a channel heated to at least 500 ° C. from the outlet of the vessel to a substrate sheet positioned at the channel exit.
  • the evaporation devices are usually integrated in the evaporation device and work according to the one-chamber principle.
  • an evaporation device is connected directly to the evaporation camera in a vacuum chamber.
  • the entire vacuum chamber is ventilated and opened.
  • the vacuum chamber is closed, evacuated and heated and the coating material is evaporated.
  • the object is achieved in that the evaporation device has an evaporation chamber which is connected via a vacuum valve to an evacuable loading chamber, an evaporator being arranged in the evaporation chamber, which receives the crucible which can be filled with coating material and which faces the steam outlet side, that is to say that of the coating system Side, is connected to the vaporization chamber via a first vapor control valve.
  • the vacuum conditions of the evaporation chamber are expanded to the loading chamber evacuated and optionally provided with new coating material by opening the vacuum valve.
  • the evaporator remains and does not exit the evaporation chamber.
  • the evaporator forms in the evaporation chamber according to claim 1, the crucible with the coating material surrounding partial volume of the evaporation chamber.
  • This advantage is reinforced by a preferred embodiment in which the evaporator is provided with a second steam shut-off valve on the loading side, that is to say on its side facing the loading chamber. This solution ensures that the evaporator is operated in the closed state and is thus spatially vapor-tightly separated from the evaporation chamber, so that no evaporated coating material can get into the evaporation chamber.
  • the arrangement of an evaporator according to the invention allows a substantial reduction in the deposits of coating material on the outer wall of the evaporation chamber.
  • the cooling of the evaporation device associated with the new equipment inevitably leads to material deposits, but this takes place predominantly on the wall of the evaporator, where they are evaporated again during the subsequent heating of the evaporator, with the alternative, on the feed side, of the evaporator being included a second vapor control valve enables an even better closure.
  • the second steam shut-off valve for filling with new coating material is only opened after the evaporator has cooled, so that condensate only forms in the evaporator, and is closed again before heating, so that no evaporated material escapes into the surrounding evaporation chamber.
  • the evaporator is tubular.
  • the length of the tubular evaporator is large compared to the diameter.
  • the inside diameter of the evaporator is also adapted to the outside dimensions of a crucible that can be inserted therein, i.e. that the evaporator tightly surrounds the crucible. This means that the evaporator is as small as possible and can therefore be heated efficiently
  • the second Vapor barrier valve of the evaporator is designed as a closing plate. This closing plate closes the evaporator at the opening through which the crucible can be moved, preferably in the position when the evaporator has just completely received the crucible.
  • the aim of this solution is for the evaporator to have exactly two, spatially separate openings, one opening being arranged on the steam outlet side and a second opening on the opposite side, as the loading side and thus on the cold side.
  • the first vapor barrier valve is arranged on the steam outlet opening
  • the second vapor shutoff valve is arranged on the feed side openings, the function of which is performed by a closure plate for more economical loading.
  • the loading chamber is arranged either in the direction parallel to the longitudinal axis or in the transverse axis of both chambers on the loading side of the evaporation chamber. In this way, the crucible can be moved in a straight line with the shortest travel path.
  • a heating device is arranged around the evaporator. A uniform supply of heat into the interior of the evaporator is thus provided.
  • the heating device is arranged as close as possible to the crucible or the coating material, so that heat radiation losses are minimized.
  • the heating device can preferably be operated electrically, for example because of the good controllability.
  • the evaporator is equipped with an evaporator and / or a crucible transport device, and in addition either the evaporator with the crucible by means of the evaporator transport device or the crucible itself by means of a crucible transport device in the direction of arrangement of the loading chamber is bidirectionally movable and is variably positioned with respect to the rest position assumed in the evaporation and the loading chamber or the crucible in the evaporator.
  • the crucible or the evaporator with the crucible can be moved and positioned exactly between the evaporation chamber and the loading chamber.
  • the removal of the entire evaporator from the evaporation chamber regardless of the presence of a crucible transport device, is favorable, for example for maintenance purposes or for completely replacing the evaporator.
  • a further embodiment is characterized in that the crucible can be moved bidirectionally by means of the crucible transport device transversely to the direction of arrangement of the loading chamber and can be variably positioned with respect to the rest position assumed in the evaporator or loading chamber, thereby, for example, correcting or changing the position of one or more Crucibles can be made in the respective chamber.
  • a further advantage results from an embodiment in which the closure plate is arranged on the crucible or the crucible transport device and the opening of the evaporator on the loading side can be closed by the closure plate, since in this way the evaporator is closed in a vapor-tight manner on the loading chamber side when the crucible is positioned.
  • the evaporator or crucible transport device has sliding rollers and / or sliding rails for movable positon. onieren of the evaporator and / or crucible in the loading chamber or that the evaporator and / or the loading chamber has castors and / or slide rails for positioning the crucible transport device.
  • slide rollers and / or slide rails By means of these slide rollers and / or slide rails, a linear movement of the respective transport device takes place within the transport area of the crucible, which extends from the loading chamber into the evaporator.
  • Each of these transport devices designed in this way ensures essentially jerk-free and accurate transport of the crucible.
  • a supplementary embodiment of the additional embodiment is carried out in that a moving unit is arranged on the crucible transport device.
  • the travel unit is designed in such a way that the valve arranged between the loading chamber and the evaporator is not impaired in its vacuum-tight closing function.
  • the traversing device is lubricated with vacuum lubricants so that degassing of the lubricants in vacuum operation is avoided.
  • the travel unit can be thermally loaded in accordance with the evaporation temperatures.
  • the evaporation chamber has a cooling device.
  • the outside of the evaporation chamber is provided with the cooling device.
  • the cooling device is arranged around the evaporation chamber. For cooling, cooling water or another cooling liquid flows through the cooling device. The heat in the vacuum chamber can thus be dissipated quickly and the cooling process for the purpose of loading with a new coating substrate can be accelerated and controlled in a defined manner.
  • the evacuated loading chamber can in this way of a reserved valve, air is metered in so that there is pressure equalization on both sides of the closure which seals the opening. After the compensation, quick loading through the vacuum-tight sealable opening can take place without time-consuming dismantling and assembly work on the loading chamber.
  • the evaporation device according to the invention is only suitable for feeding in a continuous coating process, since, as described at the beginning, the evaporation device does not have to be ventilated for loading and only the interior of the evaporator, which is optionally closed with the second vapor shutoff valve, is connected to the vaporization device.
  • the extent to which each vaporizer is fed by its own loading chamber essentially depends on the space available and the transport system used for the crucible or vaporizer.
  • This solution aims at achieving the evaporation rate required for the respective coating material and at the same time avoiding the formation of condensate in the interior of the evaporation chamber, that the coating material is heated in the separate evaporator and the actual loading with new coating material, which the Opening the system requires, in another separate volume, that the loading chamber takes place, which is vacuum-tight from the evaporation chamber is separable.
  • the loading is possible without exposing the part of the evaporation device in which the coating material is evaporated and which cannot be separated from the evaporation device in a vacuum-tight manner because of the vaporous coating material.
  • the feed spatially separated from the evaporation shortens the actual loading process and has a positive effect on the restoration and compliance with uniform process conditions due to the minimal intervention in the evaporation device . It is also particularly useful if the coating material is heated uniformly on all sides by heating the coating material in an evaporator, as a separate space, on all sides in accordance with one embodiment of the method.
  • a variant of the process-related solution to the inventive problem is specified in that the evaporation process taking place in the evaporator with its associated charging via the charging chamber is divided into evaporation processes of the same type in further evaporators with associated charging in further charging chambers.
  • Coating material and a particularly uniform introduction of steam into the steaming device is guaranteed, since interruptions or fluctuations must be compensated for by the other evaporators. It proves to be advantageous if the divided evaporation processes are carried out sequentially and / or simultaneously and / or overlapping in time.
  • the evaporation chamber is advantageously cooled for charging the crucible with the coating material.
  • the cooling of the evaporation chamber which is required before the environmental conditions extend to the loading chamber, takes place in this embodiment after the heating device has been switched off by heat exchange with the actively cooled inner wall of the evaporation chamber, for example by circulating liquid cooling. This significantly accelerates cooling and can be controlled in a targeted manner using the cooling process and / or the coolant.
  • Special designs are advantageously realized in that a gas is introduced into the evaporation chamber and / or in the evaporator to charge the crucible with the coating material and / or in that a gas is metered into the loading chamber to open it. If a gas is injected into the loading chamber to open it, the pressure equalization between the loading chamber and the surroundings is also accelerated and made controllable. The metering takes place depending on the temperature of the gas expanding during the injection and cooling as a result of the expansion. For example, air can be used as the injected gas.
  • control of the vacuum and the temperature and the opening and closing of the valves and the crucible transport device and the respective gas introduction is carried out by a control device, as is provided in a further embodiment of the process.
  • the external conditions for operation at the evaporation rate required for the respective coating material can thus be set in a targeted manner. Measured values recorded by sensors converge in the control device.
  • the respective devices are automated or manual by means of the control device. conditions preselected and implemented.
  • FIG. 1 shows a horizontal cross section through an evaporation device 1 according to the invention in the evaporation state
  • FIG. 2 shows a horizontal cross section through an evaporation device 1 according to the invention in the loaded state.
  • FIGS. 1 and 2 show an evaporation device 1 according to the invention with an evaporation chamber 2, an evaporator 3 arranged in this evaporation chamber 2, a first vapor shut-off valve 4 arranged on the steam outlet side, and a crucible which can be filled with the coating material 5 6 and a crucible transport device 7 as well as a loading chamber 8 and a vacuum valve 9 connected between the loading chamber 8 and the evaporation chamber 2.
  • the respective elongated cuboid-shaped loading chamber 8 and the evaporation chamber 2 can be evacuated, the loading chamber 8 having an opening (not shown) that can be closed in a vacuum-tight manner for loading the crucible 6 into the loading chamber 8 (FIG. 2). Furthermore, the evaporation chamber 2 is surrounded on the outside by a cooling device 10, through which water as the cooling liquid flows.
  • the evaporator 3 is designed as a tubular, elongated channel which has a flange at both ends. Therefore, the evaporator 3 has two opposing openings, the first steam shut-off valve 4 being connected to the steam outlet-side opening facing the steaming chamber and the second opposite opening for introducing the crucible 6 is used.
  • a suitable heating device 11 is attached around the evaporator body 3.
  • the crucible 6 filled with the coating material 5, for example solid magnesium, rests on a crucible transport device 7. This has a projection on the steam outlet side, on which the crucible 6 rests.
  • the moving unit 12, which is designed as a carriage, is arranged on the loading chamber side.
  • a closure plate 13 is attached between the crucible support and the moving unit 12, and its diameter corresponds to the opening of the evaporator 3 on the loading chamber side.
  • a central rail 14 is arranged over the length, on which the projection of the crucible transport device 7 is supported by bearing rollers arranged on the underside thereof.
  • a central rail 14 of this type is also attached in the loading chamber 8 and continues the travel path of the projection.
  • the function of the vacuum valve 9 arranged between the loading chamber 8 and the evaporation chamber 2 is unaffected by the rail continuation.
  • the moving unit 12 is mounted on two rails 15 arranged in the loading chamber 8 with several rollers. Movements are carried out via a spindle drive with a spindle 16 running longitudinally through the loading chamber.
  • FIG. 1 shows, the opening of the evaporator 3 on the loading chamber side is closed by the closure plate 13 when the crucible 6 is inserted into the evaporator 3.
  • the closure is vapor-tight, so that essentially no evaporated coating material 5 can penetrate from the evaporator body 3 into the evaporation chamber 2 and the loading chamber 8.
  • Figure 1 shows the evaporation device 1 according to the invention
  • the heating device 11 arranged around the evaporator 3 is now activated and the coating material 5, for example solid magnesium, is heated to approximately 600 ° C.
  • the solid magnesium evaporates to gaseous magnesium.
  • the first vapor barrier valve 4 is opened and the gaseous coating material 5 emerges and is removed for coating.
  • a process pressure of approximately 10 ⁇ 1 mbar is established in the evaporator 3.
  • the evaporator 3 is heated up under the process conditions in such a way that the desired evaporation rate is achieved in the crucible 6 filled with the coating material 5 and at the same time condensate formation on the inside of the evaporator 3.
  • the vacuum and the temperature and the opening and closing of the first vapor shut-off valve 4 are controlled by a computer-assisted control device.
  • the evaporator 3 is cooled in such a way that a minimum evaporation rate is achieved which, after the first vapor shut-off valve 4 has been closed, enables the evaporator 3 to open to the environment in the evaporation chamber 2, without gaseous coating material 5 to the environment outside the evaporator 3 arrives.
  • the cooling first takes place by deactivating the heating device 11 and by cooling the evaporation chamber 2 by means of the circumferential water cooling of the cooling device 10.
  • the heat compensation takes place essentially via thermal radiation, is transported via the matter in the evaporation chamber 2 and is derived from the cooling water.
  • the crucible 6 is then brought into the loading position by the crucible transport device 7 (FIG. 2) and the vacuum valve 9 is closed.
  • air is introduced into the loading chamber in a light dose to equalize the pressure and the loading opening is opened when the pressure equalization is reached.

Abstract

L'invention concerne un dispositif de vaporisation qui sert à vaporiser un matériau de revêtement et qui est contenu dans une chambre à vide en tant que partie d'un dispositif de revêtement, le matériau de revêtement à vaporiser étant placé dans un creuset remplissable. L'invention vise à fournir un dispositif de vaporisation ou un procédé pour la vaporisation de matériau de revêtement pour le revêtement thermique continu sous vide, grâce auxquels les temps d'arrêt sont réduits et les intervalles de nettoyage et de maintenance sont allongés. A cet effet, le dispositif de vaporisation selon l'invention comprend une chambre de vaporisation qui est reliée au moyen d'une soupape à vide à une chambre de chargement pouvant être mise sous vide. Dans la chambre de vaporisation se trouve un évaporateur qui contient le creuset pouvant être rempli de matériau de revêtement et qui est relié, du côté de la sortie de vapeur, c'est-à-dire du côté orienté vers la chambre à vide, à la chambre de vaporisation par l'intermédiaire d'une première soupape d'arrêt de vapeur.
EP05735463A 2004-04-27 2005-04-16 Dispositif de vaporisation et procede pour la vaporisation de materiau de revetement Withdrawn EP1743046A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004020843 2004-04-27
DE102004041846A DE102004041846B4 (de) 2004-04-27 2004-08-27 Verdampfungseinrichtung und Verfahren zum Verdampfen von Beschichtungsmaterial
PCT/DE2005/000703 WO2005106066A2 (fr) 2004-04-27 2005-04-16 Dispositif de vaporisation et procede pour la vaporisation de materiau de revetement

Publications (1)

Publication Number Publication Date
EP1743046A2 true EP1743046A2 (fr) 2007-01-17

Family

ID=34967080

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05735463A Withdrawn EP1743046A2 (fr) 2004-04-27 2005-04-16 Dispositif de vaporisation et procede pour la vaporisation de materiau de revetement

Country Status (8)

Country Link
US (1) US20080193636A1 (fr)
EP (1) EP1743046A2 (fr)
JP (1) JP2007534844A (fr)
KR (1) KR100892474B1 (fr)
CN (1) CN1946872B (fr)
CA (1) CA2564269A1 (fr)
DE (1) DE102004041846B4 (fr)
WO (1) WO2005106066A2 (fr)

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DE102007012370A1 (de) * 2007-03-14 2008-09-18 Createc Fischer & Co. Gmbh Bedampfungseinrichtung und Bedampfungsverfahren zur Molekularstrahlbedampfung und Molekularstrahlepitaxie
KR101682348B1 (ko) * 2008-05-30 2016-12-12 어플라이드 머티어리얼스, 인코포레이티드 기판 코팅용 장치
JP2010111916A (ja) * 2008-11-06 2010-05-20 Ulvac Japan Ltd 真空蒸着装置、蒸着源、成膜室、蒸着容器交換方法
DE102010030126B4 (de) * 2010-02-15 2016-09-22 Von Ardenne Gmbh Verdampfereinrichtung und Beschichtungsanlage
KR101353605B1 (ko) 2011-12-05 2014-01-27 재단법인 포항산업과학연구원 자기이방성 희토류 영구자석 소결장치
EP2802424A4 (fr) * 2012-01-10 2015-12-23 Hzo Inc Alimentations en précurseurs, systèmes de traitement de matériaux au moyen desquels les alimentations en précurseurs sont configurées de manière à être utilisées et procédés associés
FR3020381B1 (fr) * 2014-04-24 2017-09-29 Riber Cellule d'evaporation
CN106902707B (zh) * 2017-04-07 2022-10-21 东莞市升微机电设备科技有限公司 一种voc、甲醛加速蒸发及加料室
CN107858666A (zh) * 2017-12-13 2018-03-30 北京创昱科技有限公司 一种真空镀膜用集成腔室
CN112538603A (zh) * 2019-09-23 2021-03-23 宝山钢铁股份有限公司 一种可连续填料的真空镀膜装置及其连续填料方法
JP7346329B2 (ja) 2020-02-28 2023-09-19 株式会社アルバック 材料供給装置
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Also Published As

Publication number Publication date
JP2007534844A (ja) 2007-11-29
KR100892474B1 (ko) 2009-04-10
DE102004041846B4 (de) 2007-08-02
CA2564269A1 (fr) 2005-11-10
DE102004041846A1 (de) 2005-11-24
CN1946872A (zh) 2007-04-11
WO2005106066A3 (fr) 2006-05-26
US20080193636A1 (en) 2008-08-14
KR20070011544A (ko) 2007-01-24
CN1946872B (zh) 2012-07-18
WO2005106066A2 (fr) 2005-11-10

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