EP1721129A2 - Capteur, en particulier capteur de champ magnetique, a compensation de signal parasite et procede de compensation du signal parasite d'un capteur - Google Patents

Capteur, en particulier capteur de champ magnetique, a compensation de signal parasite et procede de compensation du signal parasite d'un capteur

Info

Publication number
EP1721129A2
EP1721129A2 EP05700845A EP05700845A EP1721129A2 EP 1721129 A2 EP1721129 A2 EP 1721129A2 EP 05700845 A EP05700845 A EP 05700845A EP 05700845 A EP05700845 A EP 05700845A EP 1721129 A2 EP1721129 A2 EP 1721129A2
Authority
EP
European Patent Office
Prior art keywords
signal
sensor
analog
output
interference signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05700845A
Other languages
German (de)
English (en)
Inventor
Siegfried Rossmann
Colin Steele
Marcel Urban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram AG
Original Assignee
Austriamicrosystems AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Austriamicrosystems AG filed Critical Austriamicrosystems AG
Publication of EP1721129A2 publication Critical patent/EP1721129A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices

Definitions

  • the invention relates to a sensor, in particular a magnetic field sensor, with a sensor element that emits a sensor signal containing an interference signal, with an evaluation device that is connected to the sensor element and contains a subtractor that subtracts a compensation signal from the sensor signal.
  • the invention further relates to a method for interference signal compensation of a sensor.
  • both a sensor and its evaluation circuit with which the sensor signal is evaluated, have interference signals which are superimposed on the useful signal that is actually to be generated, the measurement signal.
  • this includes a superimposed DC signal, the offset, and its temperature dependence.
  • a Hall element emits a voltage signal in the magnetic field as a Hall signal when a current flows through it perpendicular to the magnetic field.
  • the Hall signal ie the Hall voltage
  • the Hall constant which indicates the sensitivity of the Hall element, depends on the material.
  • the useful signal of the Hall voltage from the Hall constant of the component, the vertical component of the magnetic flux density and the Hall current are overlaid by the offset, which is composed of the offsets of the Hall element and the subsequent evaluation device.
  • EP 0525235 B1 discloses a method and a magnetic field sensor with self-compensation through thermal and technological coupling of the Hall element and its supply devices. For this purpose, the corresponding elements are implemented together in an integrated circuit. An offset voltage is superimposed on the Hall voltage by means of a hysteresis circuit.
  • Another magnetic field sensor is known from DE 4431703 AI. There, a magnetic field sensor is proposed that allows greater accuracy, taking into account an offset of the Hall element.
  • EP 0916074 B1 specifies a magnetic rotation sensor in which a magnet mounted on an axis is arranged above a Hall element.
  • the Hall element itself consists of a number of individual sensor elements which are arranged in a specific geometric arrangement with respect to one another. Each arrangement with a subsequent preamplifier for the corresponding signal is called a channel.
  • the evaluation device downstream of the Hall element determines the angle of rotation of the axis from the Hall signals of the channels.
  • Each channel has an offset signal of the sensor arrangement and an offset of the preamplifier, to which the offset of the evaluation device is added. This falsifies the actual useful signal and determines an incorrect output value.
  • the invention is based on the object of specifying a sensor and a method which result in better interference signal behavior of the sensor.
  • the senor described at the beginning contains a filter device with which the interference signal, in particular the offset, is filtered out of the sensor signal and fed back to a subtractor in the output circuit of the sensor element.
  • Interference signal means that the interference signal is recovered and filtered out as far as possible as part of the (visual) technical implementation of the evaluation device and ideally completely in the feedback branch.
  • the invention makes it possible not only to reduce the interference signal component of the output signal to zero or to a minimum, but also to keep the operating point of the output amplifier of the sensor element in an optimal linear range.
  • the output signal of the sensor largely corresponds to the desired measurement signal.
  • the senor contains a chopper device, which alternately inverts the signal present at its input, and if a high-pass device connected downstream of the chopper filters out the interference signal.
  • the chopper is arranged in the sensor element or in the signal path as directly as possible behind the actual sensitive element, for example the Hall cell, and in front of the subtractor, both interference signal components of the sensor element and the evaluation device can be compensated for.
  • the chopper is arranged in the signal path behind the subtractor of the evaluation device, interference signal components of the evaluation device are compensated for. It will continue to be beneficial if the chopper device, which alternately inverts the signal present at its input, and if a high-pass device connected downstream of the chopper filters out the interference signal.
  • High-pass device controls a counter, the counter value of which corresponds to the value of the interference signal, and the counter is followed by a digital-to-analog converter, which converts the counter value into an analog signal.
  • the counter is to be regarded as an integrator.
  • the measurement signal can be digitally processed, for example in a computer, when the evaluation unit includes an analog-to-digital converter which digitizes the output of the subtracter.
  • the evaluation unit includes an analog-to-digital converter which digitizes the output of the subtracter.
  • the analog-digital converter is a first-order or higher-order sigma-delta modulator.
  • the digitized signal can thus be processed further as a simple sequence of pulses or bits.
  • a demodulator is connected downstream of the analog-digital converter.
  • the signal portion which is inverted during chopping is thus reversed or inverted again, and the original signal or, preferably, the signal derived therefrom, which can subsequently be filtered, is obtained.
  • the current signal of the sensor element can be converted into a voltage signal that is suitable for digital signal processing.
  • the interference signal is filtered out of the sensor signal and subtracted from the sensor signal at the output of the sensor element.
  • the invention is based on
  • FIG. 1 shows a schematic structure of a sensor with an interference signal compensation
  • Figure 2 is a detailed schematic representation of a sensor with digital signal processing and interference signal compensation.
  • the sensor S contains a sensor element 1 which detects the measurement variable to be recorded.
  • the sensor signal SS is available at the output of the sensor element and is applied to an input of a subtractor 2 of the evaluation device 6.
  • the output signal of the subtractor reaches a filter device 3, which contains a chopper device 4.
  • the chopper alternately generates an inverted and a non-inverted partial signal from the input signal.
  • the chopper frequency is accordingly chosen higher than the highest signal frequency.
  • the chopper does not have to be an element of the evaluation device. If the chopper in that If the sensor element or in the signal path is arranged as directly as possible after the element sensitive to the measured variable, for example the Hall cell, or in front of the output amplifier of the sensor element, both interference signal components of the sensor element and the evaluation device can be compensated.
  • the output signal AS of the sensor S is available at the output of the filter device.
  • the output signal is fed to a high pass or a selective band pass 5, which is also contained in the filter device 3 and is connected to the subtraction input of the subtractor.
  • the high-pass device 5 filters out the interference components from the output signal, so that at the output of the feedback branch, i.e. the other output of the filter device is provided with the fault signal STS and is fed back to the second input of the subtractor 2.
  • the subtractor subtracts the interference signal from the sensor signal.
  • the interference components of the chopped signal e.g. of the offset, which are typically present in the low-frequency range and in particular also as a direct signal, are shifted to a high frequency range.
  • the more interference signal components can thus be shifted to high frequencies. These signal components can then be extracted with the high pass 5.
  • the interference signal component of the sensor is regulated to a minimum.
  • the output of the filter device therefore has the actual measurement signal AS essentially free of interference signals.
  • the feedback described enables the output operating point of an output amplifier contained in sensor element 1 to be kept in its optimal linear range.
  • the dynamic range of the evaluation device is also better utilized.
  • the dynamic interference signal compensation described with reference to FIG. 1 enables the setting of a working point of the sensor that is largely independent of temperature and process fluctuations. This makes it possible to meet high demands on the linearity of the entire sensor without the sensor having to be adjusted manually.
  • FIG. 2 shows a magnetic field sensor in which the sensor element 10 contains a Hall arrangement 11.
  • the Hall arrangement 11 is fed by a Hall current of a Hall current source 12 known per se.
  • the output signal of the Hall arrangement 11 is converted with the aid of an output amplifier 13 into the sensor signal SS, which is provided at the output of the sensor element 10.
  • the elements of the Hall arrangement 11 are arranged and operated such that two Hall signals shifted by 90 ° relative to one another can be generated with one channel of the Hall arrangement. In this way, the Hall arrangement 11 enables the use of the current spinning technique described at the beginning.
  • To two clocked switching elements 14 and 15 are provided at the input and the output of the sensor arrangement 11, respectively.
  • the Hall signals of the Hall arrangement provided at the output of the clocked changeover switch 15 are Hall voltages, which in the exemplary embodiment with the aid of the
  • Transconductance amplifier designed output amplifier 13 are converted into current signals. Each of the current signals forms the sensor signal SS.
  • the invention can also be correspondingly applied to multi-channel sensors.
  • the sensor signal SS is subject to interference, in particular due to an offset. This results, for example, because the supply current supplied by the current source 12 has a different size depending on the area of use and can also be temperature-dependent.
  • the clocked switch 15 serves, as it were, in a double function on the one hand as an element for the current spinning technology and on the other hand as a chopper, which alternately inverts the Hall signal present at the output of the Hall arrangement 11, which is supplied with the interference signal, at a frequency and not inverted.
  • the frequency chosen is so high that the interference signal can be separated from the useful signal with a high-pass or band-pass filter.
  • the output signal of the Hall arrangement is therefore both inverted and non-inverted.
  • the output amplifier of the sensor element is connected to the evaluation device 20.
  • this contains a subtractor 21, which receives the output signal of the amplifier 13 at an input.
  • the feedback signal At the other input of the subtractor is the feedback signal, which corresponds to the interference signal and which is subtracted from the sensor signal.
  • a load circuit 22 is connected downstream of the subtractor. The load circuit has the task of specifying the operating point of the evaluation device and converting the current output signal of the output amplifier 13 or of the subtractor 21 into a voltage.
  • An analog / digital converter (ADC) 23 is connected downstream of the load circuit 22.
  • the ADC 23 is provided as a sigma-delta modulator.
  • the sigma-delta modulator converts the input signal into a digital output signal and generates a high-frequency bit stream.
  • the digitized output signal of the ADC is processed digitally.
  • another clocked component 24, which performs demodulation is connected downstream of the ADC.
  • the demodulator 24 can be an EXOR, for example.
  • the useful signal or measurement signal is again present in digital form, in each case reduced or increased by the interference signal.
  • With a high pass filter or a band pass filter can then towards high frequencies shifted low frequency noise 'or DC signal is filtered out or reversed filtered out with a low assfilter the useful signal.
  • the clocked switch 15 which generates an inverting and a non-inverting signal from the output signal of the sensor, is arranged in the sensor element.
  • the chopper 15 can also be connected downstream of the sensor element, for example, as shown in FIG. 1, it can also be provided in the evaluation device and e.g. upstream of the ADC. In this case, only interference signal components of the evaluation device can be filtered.
  • the demodulator 24 is followed by a bandpass or highpass 25 with which the interference signal shifted into the high frequency range is filtered out.
  • the output signal of the high-pass filter is rectified synchronously and used to send an upward / To control down counter 26 with integrator function, which counts a clock present at another input. It is basically sufficient for this that the most significant bit of the output signal of the high-pass filter, ie the sign bit, is used as the input signal of the counter. This indicates to the counter 26 whether it should count up or down.
  • the counter value of the counter 26 is in turn fed to a digital-to-analog converter, which determines an analog output value in a manner known per se. In the exemplary embodiment, this is a current signal which is fed to the negative input of the subtractor 21.
  • This output signal of the DAC thus corresponds within the (circuit) technically realized accuracy to the analog interference signal which is subtracted in this feedback loop from the interference signal output signal of the ' sensor element 10.
  • the execution of the evaluation device with high pass device, counter and DAC stabilizes the control loop.
  • the demodulator 24 is followed by a digital filter 28 which contains a decimation filter.
  • the digital filter enables the high-frequency bit stream of the demodulator 24 to be filtered, for example decimation, with which the bit stream is converted into a more usable digital signal.
  • the decimation filter 28 is followed by a sampling arrangement 29 which stores its sample value for a predetermined time and passes it on to the high-pass device 25.
  • the scanner 29 can only each pass on the third sample to the high-pass device. The settling behavior of the decimation filter or the digital filter can thus be taken into account.
  • the output signal of the scanning device 29 is at the same time the output signal AS of the sensor arrangement, which can be processed further with downstream elements, for example a digital signal processor, not shown.
  • the clocked elements of the arrangement i.e. the clocked switches 14 and 15, the demodulator 24, the scanner 29 and the counter 26 are preferably clocked by the same clock frequency CLK in order to synchronize the elements.
  • the internal clock or counting frequency of the counter can be higher. This serves to better stabilize the control loop.
  • the closed control loop which feeds the interference signal, for example the offset, back to the input of the evaluation device 20, it is possible to control the interference signal to a minimum.
  • the output operating point of the output amplifier of the sensor element can work in an optimal linear range.
  • This dynamic interference signal compensation thus results in a stable setting of the operating point of the sensor with respect to interference signals, which compensates both the temperature-dependent variables and the process-dependent variables during sensor production. In this way, high demands on the linearity of the sensor can be implemented, so that manual adjustment of the sensor is not necessary.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)

Abstract

L'invention concerne un capteur, en particulier un capteur Hall. Ce capteur comprend un élément (1 ; 10) de capteur, fournissant un signal (SS) de capteur contenant un signal parasite (STS), ainsi qu'un dispositif d'évaluation (6 ; 20), relié à l'élément de capteur et contenant un soustracteur (2 ; 21) qui soustrait le signal parasite du signal de capteur, lequel capteur intègre également un dispositif filtrant qui élimine par filtrage le signal parasite du signal de capteur. Ce capteur et le procédé revendiqué permettent une compensation du signal parasite.
EP05700845A 2004-03-03 2005-01-12 Capteur, en particulier capteur de champ magnetique, a compensation de signal parasite et procede de compensation du signal parasite d'un capteur Withdrawn EP1721129A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004010362A DE102004010362B4 (de) 2004-03-03 2004-03-03 Sensor, insbesondere Magnetfeldsensor, mit Störsignal-Kompensation und Verfahren zur Störsignal-Kompensation eines Sensors
PCT/EP2005/000219 WO2005085762A2 (fr) 2004-03-03 2005-01-12 Capteur, en particulier capteur de champ magnetique, a compensation de signal parasite et procede de compensation du signal parasite d'un capteur

Publications (1)

Publication Number Publication Date
EP1721129A2 true EP1721129A2 (fr) 2006-11-15

Family

ID=34877300

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05700845A Withdrawn EP1721129A2 (fr) 2004-03-03 2005-01-12 Capteur, en particulier capteur de champ magnetique, a compensation de signal parasite et procede de compensation du signal parasite d'un capteur

Country Status (5)

Country Link
US (1) US7701207B2 (fr)
EP (1) EP1721129A2 (fr)
JP (1) JP2007525680A (fr)
DE (1) DE102004010362B4 (fr)
WO (1) WO2005085762A2 (fr)

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US9817083B2 (en) * 2012-07-05 2017-11-14 Allegro Microsystems, Llc Magnetic field sensors and associated methods for removing undesirable spectral components
DE102013214794B3 (de) * 2013-07-29 2014-11-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensorsystem und verfahren zur kalibrierung eines sensorsystems
JP6523122B2 (ja) * 2015-09-30 2019-05-29 旭化成エレクトロニクス株式会社 磁性体検出装置
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DE102017101497B4 (de) * 2017-01-26 2020-08-27 Infineon Technologies Ag Mikro-Elektro-Mechanisches-System (MEMS) -Schaltkreis und Verfahren zum Rekonstruieren einer Störgröße
US10444299B2 (en) 2017-09-11 2019-10-15 Allegro Microsystems, Llc Magnetic field sensor's front end and associated mixed signal method for removing chopper's related ripple
US10481219B2 (en) 2017-09-11 2019-11-19 Allegro Microsystems, Llc Magnetic field sensor with feedback loop for test signal processing
EP3467443B1 (fr) * 2017-10-05 2021-08-18 ams AG Capteur de position et procédé de détection et de diagnostic de position
EP3528388B1 (fr) 2018-02-19 2023-07-26 Melexis Technologies SA Circuit de compensation de décalage pour une boucle de poursuite
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JP7534731B2 (ja) 2020-03-24 2024-08-15 甲神電機株式会社 ホール素子センサおよびその動作方法

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Also Published As

Publication number Publication date
US7701207B2 (en) 2010-04-20
US20070114988A1 (en) 2007-05-24
DE102004010362A1 (de) 2005-09-22
WO2005085762A2 (fr) 2005-09-15
JP2007525680A (ja) 2007-09-06
DE102004010362B4 (de) 2010-11-25
WO2005085762A3 (fr) 2005-10-13

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