EP1713954A2 - Verfahren zur abscheidung einer metalloxidbeschichtung auf einem substrat - Google Patents

Verfahren zur abscheidung einer metalloxidbeschichtung auf einem substrat

Info

Publication number
EP1713954A2
EP1713954A2 EP05717673A EP05717673A EP1713954A2 EP 1713954 A2 EP1713954 A2 EP 1713954A2 EP 05717673 A EP05717673 A EP 05717673A EP 05717673 A EP05717673 A EP 05717673A EP 1713954 A2 EP1713954 A2 EP 1713954A2
Authority
EP
European Patent Office
Prior art keywords
colloidal solution
metal oxide
substrate
soil
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05717673A
Other languages
English (en)
French (fr)
Inventor
Hélène Katz
Pierre Alphonse
Matthieu Courty
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Toulouse III Paul Sabatier
PSA Automobiles SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Peugeot Citroen Automobiles SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Peugeot Citroen Automobiles SA filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP1713954A2 publication Critical patent/EP1713954A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208Oxides, e.g. ceramics
    • C23C18/1216Metal oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225Deposition of multilayers of inorganic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1262Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
    • C23C18/127Preformed particles

Definitions

  • the present invention relates to a method of depositing a metal oxide coating on a substrate.
  • the invention finds a particularly advantageous, but not limiting, application in the field of catalysis, and more especially the field of reactions in liquid or gas phase catalyzed by solids.
  • the invention also applies to other very diverse fields, in particular when it is necessary to modify certain functional properties of materials, such as hardness, thermal protection, protection against chemical agents, electrical insulation, adhesion between thin insulating layers or not, etc.
  • the functional properties of the materials used as catalysts on solids for reactions in liquid or gas phase are obtained by depositing on the substrate material a coating consisting of an intermediate layer of very porous ceramic intended to fix the catalysts and to maximize the contact surface between the liquid or gaseous reactants and the catalyst.
  • the intermediate layers therefore play an essential role since they must both ensure good adhesion with the substrate, a metallic support for example, have a high specific surface, be chemically neutral and have good compatibility with the chosen catalyst.
  • the vast majority of the intermediate layers used in catalysis consist essentially of ceramics, and in particular metal oxides such as alumina, on which very small particles of a metal or another oxide can be deposited, having a catalytic action.
  • the choice of alumina as the oxide most often used in catalysis is mainly due to the fact that, prepared from suitable precursors, it retains a high specific surface at high temperature (approximately 100 m 2 / g at 1000 ° c), and that it has very interesting acid-base surface properties for certain reactions.
  • the technical problem to be solved by the object of the present invention is to propose a method of depositing on a substrate a coating comprising at least one layer of metal oxide, said layer of metal oxide being produced by deposition on said substrate of a colloidal solution (sol) of a metal hydroxide then formation of said metal oxide by pyrolysis of a gel obtained from said colloidal solution, a process which would overcome the limits to the deposition of oxide layers metallic, in particular, on metallic substrates, due to the low viscosity of the colloidal solution obtained.
  • the solution to the technical problem posed consists, according to the present invention, in that the colloidal solution is deposited on the substrate in the thixotropic state.
  • the applicant has been able to establish that, near the sol-gel transition, the colloidal metal oxide solution becomes thixotropic.
  • the transition to the thixotropic state can be achieved either by concentration of the soil, or by addition of organic or inorganic compounds, acetate or formate for example, or the combination of the two.
  • the thickness of the deposited layer depends on both the concentration and the viscosity, it is possible to modify the thickness over a wide range by playing on these two parameters.
  • the fact of using a thixotropic sol has two advantages, on the one hand, of making it possible to form homogeneous adherent layers on metallic substrates, and, on the other hand, of increasing the thickness of the deposited layer.
  • thixotropy is a property presented by certain substances, such as gels, to become liquid when they are mechanically agitated and to return to their initial viscous state at rest. This reduction in viscosity under agitation is due to the temporary destruction of the internal structure of the substance under the action of shear forces and its subsequent restructuring when the force ceases to be applied.
  • metallic substrates as has been explained above, the method according to the invention is not limited to this single type of substrate but also extends to ceramic or glass substrates. The process which is the subject of the invention has been presented above with reference to the deposition of layers of porous alumina.
  • the sol-gel process makes it possible to prepare very diverse metal oxides, it is easy to extend this process to coatings of metallic or ceramic substrates with porous oxides, other than alumina, commonly used in catalysis such as silica, zirconia, titanium oxide or cerine, and more generally any metal oxide which can be deposited to modify the surface characteristics of metallic, ceramic or glass substrates.
  • the porosity of the layers depends on the conditions of the heat treatment (pyrolysis) carried out at the end of the deposition. But it can also be modified in a wider range by adding surfactants to the soil which will act on the organization of the particles and create a new type of porosity.
  • Another method of modifying porosity is to incorporate into the soil compounds, such as polymer particles, which decompose at low temperatures without leaving harmful residues to the properties of the coating. During the heat treatment, the decomposition of these additives creates a porosity close to that of the diameter of their particles.
  • the process of the invention is not limited to porous oxides only. Indeed, by modifying the mode of synthesis of the soil it It is possible to obtain materials with moderate or not porous materials at moderate temperatures, for example ⁇ -alumina from 500 ° C. This allows to consider applying to industrial parts a coating of a functional material intended to give the substrate properties that it did not have.
  • the thickness of the layers obtained by the sol-gel process is generally limited because there is a considerable reduction in volume during the passage from the sol to the oxide. This reduction commonly reaches a factor of 100, that is to say that a layer of soil of 100 ⁇ m will give an oxide layer of 1 ⁇ m. If the conditions of the heat treatment are not optimized, this shrinkage causes significant cracking of the layer.
  • a means in adding to the process a step of adding to the colloidal solution of oxide particles, which are preferably prepared during a previous step, for example from 'a soil of the same nature. It is also possible to use particles of different composition, which leads to the production of composite deposits.
  • the sol-gel process makes it possible to obtain deposits consisting of several successive layers, possibly of variable thickness, in order to obtain thicker coatings without cracking. Generally, a moderate heat treatment is applied between each layer. The thicknesses of the layers thus produced can reach a few hundred microns (100 to 500 ⁇ m), this by adding to the thixotropic solution particles of adequate size of metal oxide.
  • This multilayer technique can also be used to prepare a coating with a gradient in chemical composition or structure.
  • layers with a porosity gradient can be produced.
  • a first layer, directly in contact with the substrate, will be a dense layer and will protect the substrate from attack gaseous reagents.
  • the following layers will be more and more porous in order to optimize the catalytic activity.
  • Example 1 concerns the synthesis of a soil by the Yoldas process. 360 cm 3 of water (20 moles) heated to 85 ° C. are poured quickly onto 50 g of aluminum tri-sec-butoxide (about 0.2 mole) with vigorous stirring. The mixture is kept at 85 ° C. with stirring for 15 min, then 7 cm 3 of a 9.2% nitric acid solution in water (0.014 mole HNO 3 ) are added. Maintained at 85 ° C and with stirring for 24 h to obtain a clear sol.
  • This soil is used to make dip-coating deposits on glass or stainless steel substrates. After drying at 20 ° C and then heat treatment in an oven at 500 ° C in air, the layers are examined under a microscope. The deposits prepared on steel are not homogeneous, areas of the substrate are not covered and the adhesion is poor. On the other hand, the deposits on glass are homogeneous, their thickness being between 0.1 and 0.2 ⁇ m.
  • Example 2 relates to a modification of the Yoldas process according to the process according to the invention.
  • the soil of Example 1 is gradually evaporated at 85 ° C.
  • the initial volume of the soil was 420 cm 3 for an aluminum concentration of 0.5 mol / l.
  • the soil became thixotropic; the aluminum concentration is now 1.5 mole / l.
  • the thixotropic sol containing 1.5 mole / l of aluminum is used to make deposits on glass and stainless steel substrates under the same conditions as in Example 1.
  • the layers are now homogeneous and adherent. Their thickness is of the order of 2 ⁇ m.
  • Example 3 relates to the preparation of a thixotropic sol with a low aluminum concentration.
  • Example 1 The soil of Example 1 is gradually evaporated at 85 ° C.
  • the initial volume of the soil was 420 cm 3 for an aluminum concentration of 0.5 mol / l.
  • an identical volume of ethanol is added.
  • the soil becomes thixotropic. Since the final volume is identical to the initial volume, the aluminum concentration is always 0.5 mol / l.
  • This thixotropic soil is used to make deposits on glass and stainless steel substrates under the same conditions as in Example 1.
  • the layers obtained are homogeneous and adherent. Their thickness is of the order of 1 ⁇ m.
  • Example 4 relates to the synthesis of a platinum-alumina catalyst deposited on steel (1% Pt / alumina)
  • a solution of 0.28 g of hexachloroplatinic acid H 2 PtCI 6 in 10 is added to the soil of Example 1 cm 3 of water. After stirring, a transparent light yellow color is obtained.
  • This soil is gradually evaporated at 85 ° C. It becomes thixotropic for an aluminum concentration of 1.4 mole / l. It is used to make deposits on stainless steel substrates under the same conditions as in Example 1.
  • the layers obtained are homogeneous and adherent. Their thickness is of the order of 2-3 ⁇ m.
  • Example 5 relates to the synthesis of a platinum-alumina catalyst deposited on steel (1% Pt / alumina).
  • a solution of 0.28 g of hexachloroplatinic acid H 2 PtCl 6 in 10 cm 3 of water is added to the soil of Example 1. After stirring, a transparent light yellow color is obtained. 10 cm 3 of acetic acid are then added and the mixture is stirred. After 24 hours of rest, the soil became thixotropic. The aluminum concentration is approximately 0.5 mol / l.
  • This soil is used to make deposits on glass and stainless steel substrates under the same conditions as in Example 1.
  • the layers obtained are homogeneous and adherent. Their thickness is of the order of 2 ⁇ m.
  • Example 6 concerns the synthesis of cerine-alumina layers deposited on steel (10% Ce / alumina).
  • a solution of 0.12 g of cerium nitrate dissolved in 5 cm 3 of water is added to 165 cm 3 of soil prepared according to example 1. After stirring, a transparent soil is obtained. After evaporation of 115 cm 3 of solvent, the soil became thixotropic, the aluminum concentration now being 1.65 mole / l.
  • This soil is used to make deposits on glass and stainless steel substrates under the same conditions as in Example 1.
  • the layers obtained are homogeneous and adherent. Their thickness on glass substrates is of the order of 2 ⁇ m.
  • Example 7 relates to the synthesis of a rhodium-alumina catalyst deposited on steel (1.0% Rh / alumina) 0.275 g of rhodium chloride RhCI 3 are dissolved in 360 cm 3 of water. The solution is heated to 85 ° C. and then poured quickly onto 50 g of aluminum tri-butoxide with vigorous stirring. The mixture is kept at 85 ° C. with stirring for 15 in, then 7 cm 3 of a 9.2% nitric acid solution in water (0.014 mole HNO 3 ) are added. Maintained at 85 ° C. and with stirring for 24 h to obtain a clear yellow-colored sol. This soil is gradually evaporated at 85 ° C. After reducing its volume by a third, the soil became thixotropic. This soil is used to make dip-coating deposits on stainless steel substrates. After drying at 20 ° C, then heat treatment in an oven at 500 ° C in air, the layer is homogeneous and adherent. Its thickness is around 0.5 ⁇ m.
  • Example 8 concerns the synthesis of a rhodium-alumina catalyst deposited on steel (0.1% Rh / alumina)
  • This example illustrates the possibility of producing catalyst deposits by mixing a sol containing only alumina to a soil containing a metal salt.
  • This method makes it possible to prepare catalysts containing variable amounts of metal from two soils mixed in proportions variables. It is well suited for the synthesis of catalysts containing small amounts of precious metal ( ⁇ 0.5%).
  • the mixture is stirred and gradually evaporated at 85 ° C. After evaporation of about a third of the solvent, the soil became thixotropic. This soil is used to make dip-coating deposits on stainless steel substrates. After drying at 20 ° C, then heat treatment in an oven at 500 ° C in air, the layer is homogeneous and adherent. Its thickness is of the order of 0.5 ⁇ m.
  • Example 9 concerns the synthesis of a rhodium-alumina catalyst deposited on steel (polymer addition).
  • This example illustrates the advantage of adding additives to the soil which modify the rheology of the soil and the porosity of the ceramic. These agents, by attaching to the surface of the colloidal particles, will modify their interactions and therefore act on the rheology of the soil, but they also create a new type of porosity during the formation of the gel.
  • a polyvinyl alcohol known under the trade name of Rhodoviol.
  • Example 10 relates to the synthesis of a rhodium-alumina catalyst deposited on steel (charged soil).
  • This example shows the preparation of thicker layers of catalysts by adding particles to a soil.
  • the particles and the soil are of the same nature.
  • 200 cm 3 of soil prepared according to Example 7 (1% Rh / alumina) are dried in the open air and then calcined in an oven at 700 ° C in air for 2 h.
  • a gamma alumina powder is obtained, the specific surface of which is 250 m 2 / g.
  • This powder is returned to a small amount of water at 60 ° C overnight. It is then mixed with 10 cm 3 of initial soil. The mixture is dispersed under ultrasound.
  • a thick paste is obtained with which knife deposits are made (tape-casting) on stainless steel substrates. After drying at 20 ° C, then heat treatment in an oven at 500 ° C in air, the layer is homogeneous and adherent. Its thickness is around 30 ⁇ m.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Nanotechnology (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Chemically Coating (AREA)
EP05717673A 2004-01-20 2005-01-18 Verfahren zur abscheidung einer metalloxidbeschichtung auf einem substrat Withdrawn EP1713954A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0450105A FR2865219B1 (fr) 2004-01-20 2004-01-20 Procede de depot d'un revetement d'oxyde metallique sur un substrat
PCT/FR2005/050028 WO2005075702A2 (fr) 2004-01-20 2005-01-18 Procede de depot d’un revetement d’oxyde metallique sur un substrat

Publications (1)

Publication Number Publication Date
EP1713954A2 true EP1713954A2 (de) 2006-10-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP05717673A Withdrawn EP1713954A2 (de) 2004-01-20 2005-01-18 Verfahren zur abscheidung einer metalloxidbeschichtung auf einem substrat

Country Status (3)

Country Link
EP (1) EP1713954A2 (de)
FR (1) FR2865219B1 (de)
WO (1) WO2005075702A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2425976A (en) * 2005-05-11 2006-11-15 Univ Sheffield Hallam Sol-gel derived coating
US20130341769A1 (en) * 2011-03-08 2013-12-26 Merck Patent Gmbh Aluminium oxide-based metallisation barrier

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3941719A (en) * 1972-08-17 1976-03-02 Owens-Illinois, Inc. Transparent activated nonparticulate alumina and method of preparing same
US4271210A (en) * 1979-10-25 1981-06-02 Westinghouse Electric Corp. Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate
US4610832A (en) * 1984-09-26 1986-09-09 Swiss Aluminium Ltd. Process for preparing a ceramic foam
US5585136A (en) * 1995-03-22 1996-12-17 Queen's University At Kingston Method for producing thick ceramic films by a sol gel coating process
US6284682B1 (en) * 1999-08-26 2001-09-04 The University Of British Columbia Process for making chemically bonded sol-gel ceramics
EP1340541A1 (de) * 2002-02-28 2003-09-03 Corning Incorporated Strukturierter Katalysator mit einem dicken "Washcoat"-Überzug und dessen Herstellungsverfahren
US20040258611A1 (en) * 2003-06-23 2004-12-23 Mark Barrow Colloidal composite sol gel formulation with an expanded gel network for making thick inorganic coatings

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005075702A3 *

Also Published As

Publication number Publication date
FR2865219A1 (fr) 2005-07-22
WO2005075702A2 (fr) 2005-08-18
FR2865219B1 (fr) 2006-03-31
WO2005075702A3 (fr) 2006-04-06

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