FR2865219B1 - Procede de depot d'un revetement d'oxyde metallique sur un substrat - Google Patents

Procede de depot d'un revetement d'oxyde metallique sur un substrat

Info

Publication number
FR2865219B1
FR2865219B1 FR0450105A FR0450105A FR2865219B1 FR 2865219 B1 FR2865219 B1 FR 2865219B1 FR 0450105 A FR0450105 A FR 0450105A FR 0450105 A FR0450105 A FR 0450105A FR 2865219 B1 FR2865219 B1 FR 2865219B1
Authority
FR
France
Prior art keywords
depositing
substrate
metal oxide
oxide coating
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450105A
Other languages
English (en)
Other versions
FR2865219A1 (fr
Inventor
Helene Katz
Pierre Alphonse
Matthieu Courthy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
PSA Automobiles SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Peugeot Citroen Automobiles SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Peugeot Citroen Automobiles SA filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0450105A priority Critical patent/FR2865219B1/fr
Priority to PCT/FR2005/050028 priority patent/WO2005075702A2/fr
Priority to EP05717673A priority patent/EP1713954A2/fr
Publication of FR2865219A1 publication Critical patent/FR2865219A1/fr
Application granted granted Critical
Publication of FR2865219B1 publication Critical patent/FR2865219B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208Oxides, e.g. ceramics
    • C23C18/1216Metal oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225Deposition of multilayers of inorganic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1262Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
    • C23C18/127Preformed particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Nanotechnology (AREA)
  • Catalysts (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Chemically Coating (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
FR0450105A 2004-01-20 2004-01-20 Procede de depot d'un revetement d'oxyde metallique sur un substrat Expired - Fee Related FR2865219B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0450105A FR2865219B1 (fr) 2004-01-20 2004-01-20 Procede de depot d'un revetement d'oxyde metallique sur un substrat
PCT/FR2005/050028 WO2005075702A2 (fr) 2004-01-20 2005-01-18 Procede de depot d’un revetement d’oxyde metallique sur un substrat
EP05717673A EP1713954A2 (fr) 2004-01-20 2005-01-18 Procede de depot d'un revetement d'oxyde metallique sur un substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450105A FR2865219B1 (fr) 2004-01-20 2004-01-20 Procede de depot d'un revetement d'oxyde metallique sur un substrat

Publications (2)

Publication Number Publication Date
FR2865219A1 FR2865219A1 (fr) 2005-07-22
FR2865219B1 true FR2865219B1 (fr) 2006-03-31

Family

ID=34708040

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450105A Expired - Fee Related FR2865219B1 (fr) 2004-01-20 2004-01-20 Procede de depot d'un revetement d'oxyde metallique sur un substrat

Country Status (3)

Country Link
EP (1) EP1713954A2 (fr)
FR (1) FR2865219B1 (fr)
WO (1) WO2005075702A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2425976A (en) * 2005-05-11 2006-11-15 Univ Sheffield Hallam Sol-gel derived coating
CN103403885A (zh) * 2011-03-08 2013-11-20 默克专利股份有限公司 基于氧化铝的金属化屏障

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3941719A (en) * 1972-08-17 1976-03-02 Owens-Illinois, Inc. Transparent activated nonparticulate alumina and method of preparing same
US4271210A (en) * 1979-10-25 1981-06-02 Westinghouse Electric Corp. Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate
US4610832A (en) * 1984-09-26 1986-09-09 Swiss Aluminium Ltd. Process for preparing a ceramic foam
US5585136A (en) * 1995-03-22 1996-12-17 Queen's University At Kingston Method for producing thick ceramic films by a sol gel coating process
US6284682B1 (en) * 1999-08-26 2001-09-04 The University Of British Columbia Process for making chemically bonded sol-gel ceramics
EP1340541A1 (fr) * 2002-02-28 2003-09-03 Corning Incorporated Catalyseur structuré avec une couche épaisse et son procédé de fabrication
US20040258611A1 (en) * 2003-06-23 2004-12-23 Mark Barrow Colloidal composite sol gel formulation with an expanded gel network for making thick inorganic coatings

Also Published As

Publication number Publication date
FR2865219A1 (fr) 2005-07-22
WO2005075702A3 (fr) 2006-04-06
EP1713954A2 (fr) 2006-10-25
WO2005075702A2 (fr) 2005-08-18

Similar Documents

Publication Publication Date Title
AU2003300263A1 (en) A method for depositing a metal layer on a semiconductor interconnect structure
EP1930966A3 (fr) Couche barrière, article composite la comprenant, dispositif électroactif et procédé
FR2890984B1 (fr) Procede d'electrodeposition destine au revetement d'une surface d'un substrat par un metal.
EP1626039A3 (fr) Procédé de revêtement des structures de forme complexe
FI19992234A (fi) Menetelmä siirtymämetallinitridiohutkalvojen kerrostamiseksi
FR2905707B1 (fr) Procede pour deposer sur un substrat une couche mince d'alliage metallique et alliage metallique sous forme de couche mince.
EP1930471A3 (fr) Couche barrière, article composite la comprenant, dispositif électroactif et procédé
FR2890983B1 (fr) Composition d'electrodeposition destinee au revetement d'une surface d'un substrat par un metal.
EP1735847A4 (fr) Depot de film a texture biaxiale pour rubans revetus de supraconducteurs
WO2005120722A3 (fr) Procedes de revetement anticorrosion
SG131872A1 (en) Layer arrangement for the formation of a coating on a surface of a substrate,coating method,and substrate with a layer arrangement
DE60144232D1 (de) Plattierungsbad und Verfahren zur Abscheidung einer Metallschicht auf einem Substrat
FR2838752B1 (fr) Procede de formation d'un revetement ceramique sur un substrat par depot physique en phase vapeur sous faisceau d'electrons
PL1694879T3 (pl) Sposób powlekania powierzchni metalicznej ultracienką powłoką
IL155934A0 (en) A process for preparing a chromium coating on a metal substrate
PL377259A1 (pl) Sposób osadzania DLC na podłożu
GB0222331D0 (en) A method for depositing multilayer coatings with controlled thickness
FR2865420B1 (fr) Procede de nettoyage d'un substrat
FR2877018B1 (fr) Procede d'oxydation micro arc pour la fabrication d'un revetement sur un substrat metallique, et son utilisation
SG106070A1 (en) Method for elelctroless deposition of a metal layer on selected portions of a substrate
FR2830856B1 (fr) Precurseur de revetement et procede pour revetir un substrat d'une couche refractaire
FR2867199B1 (fr) Procede pour l'obtention d'un substrat mettalique comportant un revetement protecteur
FR2780054B1 (fr) Procede de depot d'une couche a base d'oxyde metallique sur un substrat verrier, substrat verrier ainsi revetu
EP1661169A4 (fr) Procede de depot d'un film mince sur une plaquette
AU2003263069A1 (en) A method for depositing a film on a substrate

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 12

ST Notification of lapse

Effective date: 20160930