EP1649258A1 - Capteur de pression differentielle a membrane de surcharge en forme de disque annulaire - Google Patents

Capteur de pression differentielle a membrane de surcharge en forme de disque annulaire

Info

Publication number
EP1649258A1
EP1649258A1 EP04741099A EP04741099A EP1649258A1 EP 1649258 A1 EP1649258 A1 EP 1649258A1 EP 04741099 A EP04741099 A EP 04741099A EP 04741099 A EP04741099 A EP 04741099A EP 1649258 A1 EP1649258 A1 EP 1649258A1
Authority
EP
European Patent Office
Prior art keywords
overload
membrane
chamber
line
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04741099A
Other languages
German (de)
English (en)
Inventor
Dietfried Burczyk
Wolfgang Dannhauer
Ralf Nürnberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP1649258A1 publication Critical patent/EP1649258A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Definitions

  • the invention relates to a differential pressure transducer with a sensor element, with a first and a second pressure measuring chamber adjacent to the sensor element, a first first pressure receiving chamber closed by a first separating membrane, a second second receiving pressure chamber closed by a second separating membrane, a first overload chamber connected to a first Line is connected to the first pressure receiving chamber and which is connected by a second line to the first pressure measuring chamber, a second overload chamber which is connected by a third line to the second pressure receiving chamber and which is connected by a fourth line to the second pressure measuring chamber, one of which first and the second pressure receiving chamber, the first and the second overload chamber, the first and the second pressure measuring chamber, and the first, the second, the third and the fourth line filling liquid, and an overload membrane through which the first te and the second overload chamber are separated.
  • Differential pressure transducers can usually be connected via process connections, so that a first pressure acts on the first separating membrane and a second pressure acts on the second separating membrane.
  • the pressures are transferred to the pressure measurement chambers via the liquid and are applied to the sensor element.
  • the sensor element e.g. a piezoresistive differential pressure measuring cell, emits an output signal which is proportional to the difference between the first and the second pressure.
  • the output signal is available for further processing, evaluation and / or display.
  • Differential pressure transducers are used to measure the process variable differential pressure in a variety of applications.
  • a level in a container can also be determined with a differential pressure sensor based on a hydrostatic pressure difference.
  • the pressure difference between two different locations of different cross-sections in a channel can be determined a flow.
  • EP-A 1 172 640 describes a differential pressure sensor with - a sensor element
  • a first pressure receiving chamber closed off by a first separating membrane a second second pressure receiving chamber closed off by a second separating membrane
  • a first overload chamber which is connected to the first pressure receiving chamber by a first line and which is connected to the first pressure measuring chamber by a second line
  • a second overload chamber which is connected to the second pressure receiving chamber by a third line, and which is connected by a fourth line to the second pressure measuring chamber, one filling the first and the second pressure receiving chamber, the first and the second overload chamber, the first and the second pressure measuring chamber, and the first, the second, the third and the fourth line , and - an overload membrane
  • the sensor element is enclosed in a solid block in a plane that is located between the overload membrane and the second separating membrane.
  • a distance between the overload membrane and the first separation membrane is less than a distance between the overload membrane and the second separation membrane.
  • the first line which leads from the first pressure receiving chamber to the first pressure measuring chamber, is shorter than the third line from the second pressure receiving chamber to the second pressure measuring chamber.
  • the second line leads from the first overload chamber through the middle of the overload membrane to the first pressure measuring chamber. The second line thus forms a deflection channel that leads from one side of the overload membrane to the other.
  • Separating membrane to the second pressure measuring chamber are designed differently or asymmetrically lead to pressure surges on the sensor element.
  • Pressure surges on the sensor element can only be absorbed by a precise coordination of all components in the two pressure transmission paths, e.g. hydraulic resistors, hydraulic capacities and hydraulic inductors. This usually means a very high level of design effort.
  • the invention consists in a differential pressure sensor
  • an overload membrane which has a closed outer edge and a closed inner edge and is firmly clamped along their outer and inner edges
  • the sensor element is arranged in a plane defined by the overload membrane within the inner edge of the overload membrane.
  • a section of the overload membrane enclosed by the first and the second overload chamber is in the form of an annular disk.
  • each overload chamber is delimited by the overload membrane and an essentially concave wall opposite it.
  • the overload membrane is arranged centrally between the first and the second separation membrane.
  • the first line and the third line have the same shape and run symmetrically to the level of the overload membrane.
  • the first line and the third line are currently running.
  • the second line and the fourth line are currently running.
  • An advantage of such a differential pressure transducer is that it has a high degree of symmetry due to the arrangement of the sensor element in the plane of the overload membrane.
  • the pressure transmission from the first pressure receiving chamber to the first pressure measuring chamber is almost identical to the pressure transmission from the second pressure receiving chamber to the second
  • Another advantage of a differential pressure transducer according to the invention is that a smaller design can be achieved by the arrangement of the sensor element in the plane of the overload membrane. This saves material, reduces the space requirement of the differential pressure sensor and reduces the required length of the lines within the differential pressure sensor. As a result, the volume of liquid required for pressure transmission is lower. Measurement errors caused by thermal expansion of the liquid are correspondingly lower.
  • Fig. 1 shows a longitudinal section through a differential pressure transducer according to the invention.
  • the differential pressure transducer consists of a pressure recording unit in which a sensor element 1 is located and an adjacent housing, not shown in FIG. 1, e.g. to accommodate evaluation electronics.
  • the sensor element 1 is, for example, a silicon chip of the membrane type and a first and a second pressure measuring chamber 2, 3 adjoin the sensor element 1.
  • a pressure prevailing in the first pressure measuring chamber 2 is on one side the membrane, a pressure prevailing in the second pressure measuring chamber 3 is present on the opposite side of the membrane.
  • the resulting deflection of the membrane is a measure of the differential pressure acting on it.
  • Piezoresistive integrated in the membrane for example, combined as a bridge circuit serve as electromechanical transducers
  • Elements that generate an output signal proportional to the differential pressure for generating measured values are Elements that generate an output signal proportional to the differential pressure for generating measured values.
  • the output signal is available via line 11 for further processing and / or display.
  • the differential pressure recording unit has a first pressure receiving chamber 22 closed off by a first separating membrane 21 and a second pressure receiving chamber 32 closed off by a second separating membrane 31.
  • the differential pressure recording unit is e.g. clamped between two flanges, not shown in FIG. 1, each having a process connection through which a measuring medium can be fed to the respective separating membrane 21, 31.
  • the differential pressure recording unit has two solid blocks 4, 5 which are connected to one another and on which an overload membrane 6 is clamped.
  • the overload membrane 6 is in the middle between the first and the second
  • a distance between the overload membrane 6 and the first separating membrane 21 is preferably identical to a distance between the overload membrane 6 and the second separating membrane 31.
  • the respectively adjacent block 4, 5 has a recess.
  • the recesses have the same base area as the overload membrane 6 and the wall thereof is essentially concave.
  • the overload membrane 6 has a closed outer edge and a closed inner edge and is firmly clamped along their outer and inner edges.
  • a section of the overload membrane 6 enclosed by the first and the second overload chamber 23, 33 is in the form of an annular disk. An inner and an outer area adjacent to the enclosed section is clamped between the block 4 and the block 5.
  • Differential pressure transducers with an overload membrane 6 clamped on their closed outer and closed inner edges have, compared to conventional differential pressure transducers with overload membranes, which only have an outer edge and in which only the outer edge is firmly clamped in the same way in the event of an overload due to the deflection of the overload membrane 6 on one side available volume has a much lower hysteresis volume. This is described in detail in EP-A 1 172 640 mentioned at the outset.
  • the sensor element 1 is arranged in a plane defined by the overload membrane 6 within the inner edge of the overload membrane 6.
  • a second line 25 forms a connection between the first overload chamber 23 and the first pressure measuring chamber 2.
  • a fourth line 35 forms a connection between the second overload chamber 33 and the second pressure measuring chamber 3.
  • the first and second overload chambers 23, 33 are separated from one another by the overload membrane 6.
  • the first line 24 and the third line 34 are preferably of identical shape and run symmetrically to the level of the overload membrane 6.
  • Line 24 and the third line 34 preferably run straight and thus form the shortest possible connection between the first pressure receiving chamber 22 and the first overload chamber 23 and between the second pressure receiving chamber 32 and the second overload chamber 33. Due to the high symmetry of the arrangement of the overload membrane 6 and Arrangement of the sensor element 1 in the plane of the overload membrane 6 requires only very short lines 24, 34.
  • the second line 25 and the fourth line 35 likewise preferably run straight. They thus form the shortest possible connection between the first overload chamber 23 and the first pressure measuring chamber 2 and between the overload chamber 33 and the second pressure measuring chamber 3. Since the sensor element 1 is located in the plane of the overload membrane 6 within the inner edge thereof, there are also a great deal here short cable lengths.
  • the first and the second pressure receiving chamber 22, 32, the first and the second overload chamber 23, 33, the first and the second pressure measuring chamber 2, 3, and the first, the second, the third and the fourth line 24, 25, 34, 35 are filled with a liquid.
  • a liquid is preferably an incompressible liquid with a low coefficient of thermal expansion, e.g. a silicone oil.
  • the dimensions of the differential pressure sensor can be very small. This goes hand in hand with very short lengths of the first, second, third and fourth line 24, 34, 25, 35 and a correspondingly small amount of liquid required for pressure transmission. Since the liquid always has a finite coefficient of thermal expansion and a temperature-related change in volume changes the properties of the differential pressure sensor, a reduction in the
  • Another advantage is that all lines 24, 34, 25, 35 have a straight course. Esp. no diversion channels are required which cause a change in the direction of pressure transmission. As a result, the pressure transmission to the first and to the second pressure measuring chamber is almost identical. Static and dynamic measurement errors caused by different pressure transmission paths are largely excluded.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un capteur de pression différentielle compact de configuration symétrique et simple sur le plan structurel. Ce capteur comprend un élément sensible (1), deux chambres de mesure de pression (2, 3) adjacentes à cet élément sensible (1), deux chambres de réception de pression (22, 32) fermées par des membranes de séparation (21, 31) et deux chambres de surcharge (23, 33) séparées l'une de l'autre par une membrane de surcharge (6). Ladite membrane de surcharge (6) présente un bord extérieur fermé et un bord intérieur fermé et elle est tendue de manière fixe le long de son bord extérieur et de son bord intérieur. L'élément sensible (1) est disposé à l'intérieur du bord intérieur de la membrane de surcharge (6), par projection sur un plan défini par ladite membrane de surcharge (6).
EP04741099A 2003-07-29 2004-07-16 Capteur de pression differentielle a membrane de surcharge en forme de disque annulaire Withdrawn EP1649258A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003134853 DE10334853A1 (de) 2003-07-29 2003-07-29 Differenzdruckaufnehmer
PCT/EP2004/007973 WO2005017481A1 (fr) 2003-07-29 2004-07-16 Capteur de pression differentielle a membrane de surcharge en forme de disque annulaire

Publications (1)

Publication Number Publication Date
EP1649258A1 true EP1649258A1 (fr) 2006-04-26

Family

ID=34177243

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04741099A Withdrawn EP1649258A1 (fr) 2003-07-29 2004-07-16 Capteur de pression differentielle a membrane de surcharge en forme de disque annulaire

Country Status (3)

Country Link
EP (1) EP1649258A1 (fr)
DE (1) DE10334853A1 (fr)
WO (1) WO2005017481A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006057829A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
RU2718000C2 (ru) 2015-03-13 2020-03-27 Геа Фуд Сольюшнс Бакел Б.В. Способ очистки и хранения формовочного барабана
DE102018121446A1 (de) * 2018-09-03 2020-03-05 Endress+Hauser SE+Co. KG Differenzdruck-Messaufnehmer
DE102020116172A1 (de) 2020-06-18 2021-12-23 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2065893A (en) * 1979-12-19 1981-07-01 Hitachi Ltd Differential pressure transducer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2360276A1 (de) * 1973-12-04 1975-06-12 Eckardt Ag J Differenzdruckumformer
DE2712846A1 (de) * 1976-03-24 1977-11-24 Ict Instr Inc Messumformer zum messen von druckunterschieden
US4713969A (en) * 1983-09-30 1987-12-22 Kabushiki Kaisha Toshiba Differential pressure transmission apparatus
EP1172640A1 (fr) * 2000-07-13 2002-01-16 Endress + Hauser GmbH + Co. Capteur de pression différentielle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2065893A (en) * 1979-12-19 1981-07-01 Hitachi Ltd Differential pressure transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005017481A1 *

Also Published As

Publication number Publication date
WO2005017481A1 (fr) 2005-02-24
DE10334853A1 (de) 2005-03-24

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